CN1243366C - 从物体微观结构中去除残余物的方法和装置 - Google Patents
从物体微观结构中去除残余物的方法和装置 Download PDFInfo
- Publication number
- CN1243366C CN1243366C CNB028002741A CN02800274A CN1243366C CN 1243366 C CN1243366 C CN 1243366C CN B028002741 A CNB028002741 A CN B028002741A CN 02800274 A CN02800274 A CN 02800274A CN 1243366 C CN1243366 C CN 1243366C
- Authority
- CN
- China
- Prior art keywords
- carbon dioxide
- additive
- container
- cosolvent
- residue
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000000654 additive Substances 0.000 claims abstract description 76
- 230000000996 additive effect Effects 0.000 claims abstract description 67
- 239000006184 cosolvent Substances 0.000 claims abstract description 43
- 239000012530 fluid Substances 0.000 claims abstract description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 165
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 83
- 239000001569 carbon dioxide Substances 0.000 claims description 82
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 64
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 19
- 125000001453 quaternary ammonium group Chemical group 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000002585 base Substances 0.000 claims description 11
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 10
- 125000000217 alkyl group Chemical group 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 claims description 9
- 238000004380 ashing Methods 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 7
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 150000003973 alkyl amines Chemical class 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 6
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical compound C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000003513 alkali Substances 0.000 claims description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 2
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 34
- 238000002474 experimental method Methods 0.000 description 21
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 15
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 14
- 229960001231 choline Drugs 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 12
- 239000012634 fragment Substances 0.000 description 11
- 239000000243 solution Substances 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 9
- MHABMANUFPZXEB-UHFFFAOYSA-N O-demethyl-aloesaponarin I Natural products O=C1C2=CC=CC(O)=C2C(=O)C2=C1C=C(O)C(C(O)=O)=C2C MHABMANUFPZXEB-UHFFFAOYSA-N 0.000 description 9
- 239000000203 mixture Substances 0.000 description 7
- FPGGTKZVZWFYPV-UHFFFAOYSA-M tetrabutylammonium fluoride Chemical compound [F-].CCCC[N+](CCCC)(CCCC)CCCC FPGGTKZVZWFYPV-UHFFFAOYSA-M 0.000 description 7
- GTDKXDWWMOMSFL-UHFFFAOYSA-M tetramethylazanium;fluoride Chemical compound [F-].C[N+](C)(C)C GTDKXDWWMOMSFL-UHFFFAOYSA-M 0.000 description 7
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 6
- 229910021641 deionized water Inorganic materials 0.000 description 5
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 4
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- -1 carbitol Chemical compound 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 4
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 4
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 3
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- HWCKGOZZJDHMNC-UHFFFAOYSA-M tetraethylammonium bromide Chemical compound [Br-].CC[N+](CC)(CC)CC HWCKGOZZJDHMNC-UHFFFAOYSA-M 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- WFKAJVHLWXSISD-UHFFFAOYSA-N isobutyramide Chemical compound CC(C)C(N)=O WFKAJVHLWXSISD-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- CKFGINPQOCXMAZ-UHFFFAOYSA-N methanediol Chemical compound OCO CKFGINPQOCXMAZ-UHFFFAOYSA-N 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- BYEAHWXPCBROCE-UHFFFAOYSA-N 1,1,1,3,3,3-hexafluoropropan-2-ol Chemical compound FC(F)(F)C(O)C(F)(F)F BYEAHWXPCBROCE-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000005695 Ammonium acetate Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 235000019257 ammonium acetate Nutrition 0.000 description 1
- 229940043376 ammonium acetate Drugs 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 229940043237 diethanolamine Drugs 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 235000019256 formaldehyde Nutrition 0.000 description 1
- 230000000887 hydrating effect Effects 0.000 description 1
- 231100001240 inorganic pollutant Toxicity 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- OSBSFAARYOCBHB-UHFFFAOYSA-N tetrapropylammonium Chemical compound CCC[N+](CCC)(CCC)CCC OSBSFAARYOCBHB-UHFFFAOYSA-N 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/10—Salts
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3218—Alkanolamines or alkanolimines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
- Ceramic Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Extraction Or Liquid Replacement (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Micromachines (AREA)
Abstract
Description
添加剂 | 可去除性 |
丙酮 | × |
二甲基甲酰胺 | × |
二甲基亚砜 | × |
N-甲基-2-pyroridon | × |
碳酸异丙烯酯 | × |
甲胺 | ○ |
乙胺 | ○ |
单乙醇胺 | ○ |
四甲基羟铵溶液* | |
胆碱溶液** | |
羟基胺溶液*** | |
氟化铵溶液**** | |
实验序号 | 添加剂 | 助溶剂 | 观测 | ||
重量% | 重量% | ||||
2-1 | TMAH | 1.21 | 乙醇 | 22.1 | ○ |
2-2 | TMAH | 1.50 | 二甲基亚砜 | 30.0 | ○ |
2-3 | TBAH | 0.40 | 乙醇 | 38.1 | ○ |
2-4 | 胆碱 | 0.05 | 乙醇 | 20.0 | ○ |
2-5 | 胆碱 | 1.76 | 乙醇 | 35.3 | ○ |
2-6 | 胆碱 | 0.25 | 乙醇 | 24.0 | ○ |
2-7 | 胆碱 | 0.29 | 异丙醇 | 27.9 | ○ |
2-8 | 胆碱 | 0.39 | DEGME | 38.3 | ○ |
2-9 | 单乙醇胺 | 0.05 | 乙醇 | 25.0 | ○ |
2-10 | 无 | 无 | ○ | ||
2-11 | 无 | 乙醇 | 20.0 | ○ | |
2-12 | 胆碱 | 0.05 | 无 | × |
实验序号 | 添加剂 | 助溶剂 | 比率 | ||
重量% | 重量% | ||||
3-1 | 胆碱 | 0.05 | 乙醇 | 20.0 | ○ |
3-2 | 胆碱 | 1.70 | 乙醇 | 35.3 | |
3-3 | TMAH | 1.21 | 甲醇 | 22.2 | |
3-4 | TMAH | 1.50 | 二甲基亚砜 | 30.0 | |
3-5 | 无 | 无 | × | ||
3-6 | 无 | 乙醇 | 20.0 | × | |
3-7 | 无 | 二甲基亚砜 | 30.0 | × |
添加剂 | 氟化物(添加剂的重量%) | 其它组分(添加剂的重量%) | |
H | TMAF(13.43) | DMAC(62.5) | DIW(24.07) |
I | TMAF(4.48) | DMAC(67.5) | DIW(28.02) |
G | NH4F(5.0) | DMAC(64.2) | DIW(12.4),AcOH(8.0),NH4OAc(10.4) |
J | TBAF(25) | DMAC(43) | 乙醇(32) |
L | TBAF(32) | DMAC(39) | 乙醇(29) |
K | TMAF(5) | DMAC(62.5) | 乙醇(32.5) |
组 | 片 | 添加剂 | 去除剂中的浓度(重量%) | 结果 | |
添加剂 | 乙醇 | ||||
1 | A | H | 0.05 | 5 | 极好 |
2 | A | I | 0.05 | 5 | 极好 |
3 | B | H | 0.05 | 5 | 一般 |
4 | B | H | 0.10 | 5 | 极好 |
5 | B | H | 0.25 | 5 | 一般 |
6 | B | I | 0.05 | 5 | 一般 |
7 | C | H | 0.10 | 5 | 极好 |
8 | A | G | 0.05 | 5 | 一般,但需要水冲洗以去除新出现的残余物 |
9 | A | J | 0.05 | 5 | 极好 |
10 | A | K | 0.05 | 5 | 极好 |
11 | A | L | 0.05 | 5 | 极好 |
12 | B | J | 0.10 | 5 | 极好 |
13 | B | K | 0.10 | 5 | 极好 |
14 | B | L | 0.10 | 5 | 极好 |
添加剂 | 去除剂中的浓度(重量%) | 硅热氧化物的蚀刻率(埃/分) | |
添加剂 | 乙醇 | ||
H | 0.030 | 5.9 | 2.4 |
H | 0.047 | 4.7 | 4.6 |
H | 0.228 | 4.3 | 7.5 |
I | 0.025 | 5.1 | 1.4 |
I | 0.044 | 2.2 | 3.3 |
I | 0.048 | 4.8 | 1.6 |
I | 0.049 | 4.8 | 1.6 |
I | 0.050 | 5.0 | 1.7 |
I | 0.050 | 10.0 | 0.3 |
I | 0.056 | 5.5 | 1.6 |
I | 0.057 | 2.8 | 2.0 |
I | 0.057 | 5.6 | 1.9 |
I | 0.071 | 3.5 | 3.7 |
I | 0.248 | 4.7 | 5.3 |
G | 0.005 | 5.1 | 1.1 |
G | 0.012 | 4.7 | -0.1 |
G | 0.028 | 5.5 | 3.9 |
G | 0.039 | 5.1 | 8.3 |
G | 0.043 | 4.2 | 7.9 |
G | 0.044 | 4.4 | 5.1 |
Claims (18)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP034337/2001 | 2001-02-09 | ||
JP2001034337A JP2002237481A (ja) | 2001-02-09 | 2001-02-09 | 微細構造体の洗浄方法 |
JP034337/01 | 2001-02-09 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2004100447914A Division CN1542910A (zh) | 2001-02-09 | 2002-02-08 | 从物体微观结构中去除残余物的方法和装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1457502A CN1457502A (zh) | 2003-11-19 |
CN1243366C true CN1243366C (zh) | 2006-02-22 |
Family
ID=18897963
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028002741A Expired - Fee Related CN1243366C (zh) | 2001-02-09 | 2002-02-08 | 从物体微观结构中去除残余物的方法和装置 |
CNA2004100447914A Pending CN1542910A (zh) | 2001-02-09 | 2002-02-08 | 从物体微观结构中去除残余物的方法和装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2004100447914A Pending CN1542910A (zh) | 2001-02-09 | 2002-02-08 | 从物体微观结构中去除残余物的方法和装置 |
Country Status (10)
Country | Link |
---|---|
US (3) | US20020164873A1 (zh) |
EP (2) | EP1358670B1 (zh) |
JP (2) | JP2002237481A (zh) |
KR (2) | KR100482496B1 (zh) |
CN (2) | CN1243366C (zh) |
AT (2) | ATE332571T1 (zh) |
DE (2) | DE60212999T2 (zh) |
SG (1) | SG125957A1 (zh) |
TW (1) | TW569328B (zh) |
WO (1) | WO2002080233A2 (zh) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7064070B2 (en) * | 1998-09-28 | 2006-06-20 | Tokyo Electron Limited | Removal of CMP and post-CMP residue from semiconductors using supercritical carbon dioxide process |
CN1216415C (zh) * | 2000-04-25 | 2005-08-24 | 东京毅力科创株式会社 | 沉积金属薄膜的方法和包括超临界干燥/清洁组件的金属沉积组合工具 |
JP3978023B2 (ja) * | 2001-12-03 | 2007-09-19 | 株式会社神戸製鋼所 | 高圧処理方法 |
US7326673B2 (en) * | 2001-12-31 | 2008-02-05 | Advanced Technology Materials, Inc. | Treatment of semiconductor substrates using long-chain organothiols or long-chain acetates |
US7557073B2 (en) * | 2001-12-31 | 2009-07-07 | Advanced Technology Materials, Inc. | Non-fluoride containing supercritical fluid composition for removal of ion-implant photoresist |
US20040016450A1 (en) * | 2002-01-25 | 2004-01-29 | Bertram Ronald Thomas | Method for reducing the formation of contaminants during supercritical carbon dioxide processes |
JP2003224099A (ja) * | 2002-01-30 | 2003-08-08 | Sony Corp | 表面処理方法 |
WO2003070846A2 (en) * | 2002-02-15 | 2003-08-28 | Supercritical Systems Inc. | Drying resist with a solvent bath and supercritical co2 |
JP4246640B2 (ja) * | 2002-03-04 | 2009-04-02 | 東京エレクトロン株式会社 | ウェハ処理において低誘電率材料を不動態化する方法 |
JP4031440B2 (ja) * | 2002-03-22 | 2008-01-09 | 東京エレクトロン株式会社 | 超臨界処理を用いる汚染物の除去 |
US7169540B2 (en) * | 2002-04-12 | 2007-01-30 | Tokyo Electron Limited | Method of treatment of porous dielectric films to reduce damage during cleaning |
US6764552B1 (en) * | 2002-04-18 | 2004-07-20 | Novellus Systems, Inc. | Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials |
JP2003318810A (ja) * | 2002-04-26 | 2003-11-07 | Kobe Steel Ltd | 無線データ収集システム,無線データ中継装置 |
US6669785B2 (en) * | 2002-05-15 | 2003-12-30 | Micell Technologies, Inc. | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide |
US20030217764A1 (en) * | 2002-05-23 | 2003-11-27 | Kaoru Masuda | Process and composition for removing residues from the microstructure of an object |
US6800142B1 (en) * | 2002-05-30 | 2004-10-05 | Novellus Systems, Inc. | Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment |
JP2004128251A (ja) * | 2002-10-03 | 2004-04-22 | Elpida Memory Inc | 塗布機及び塗布方法 |
US7223352B2 (en) * | 2002-10-31 | 2007-05-29 | Advanced Technology Materials, Inc. | Supercritical carbon dioxide/chemical formulation for ashed and unashed aluminum post-etch residue removal |
US7485611B2 (en) * | 2002-10-31 | 2009-02-03 | Advanced Technology Materials, Inc. | Supercritical fluid-based cleaning compositions and methods |
JP2004158534A (ja) * | 2002-11-05 | 2004-06-03 | Kobe Steel Ltd | 微細構造体の洗浄方法 |
US20040112409A1 (en) * | 2002-12-16 | 2004-06-17 | Supercritical Sysems, Inc. | Fluoride in supercritical fluid for photoresist and residue removal |
US20040177867A1 (en) * | 2002-12-16 | 2004-09-16 | Supercritical Systems, Inc. | Tetra-organic ammonium fluoride and HF in supercritical fluid for photoresist and residue removal |
JP4248903B2 (ja) | 2003-03-19 | 2009-04-02 | 大日本スクリーン製造株式会社 | 高圧処理装置および高圧処理方法 |
US20040231707A1 (en) * | 2003-05-20 | 2004-11-25 | Paul Schilling | Decontamination of supercritical wafer processing equipment |
KR100505693B1 (ko) * | 2003-06-26 | 2005-08-03 | 삼성전자주식회사 | 미세 전자 소자 기판으로부터 포토레지스트 또는 유기물을세정하는 방법 |
JP2005033135A (ja) * | 2003-07-11 | 2005-02-03 | Kobe Steel Ltd | 微細構造体の洗浄装置 |
US20050022850A1 (en) * | 2003-07-29 | 2005-02-03 | Supercritical Systems, Inc. | Regulation of flow of processing chemistry only into a processing chamber |
US20050039775A1 (en) * | 2003-08-19 | 2005-02-24 | Whitlock Walter H. | Process and system for cleaning surfaces of semiconductor wafers |
JP4757452B2 (ja) * | 2004-04-02 | 2011-08-24 | 昭和炭酸株式会社 | 気液分離装置 |
US7195676B2 (en) * | 2004-07-13 | 2007-03-27 | Air Products And Chemicals, Inc. | Method for removal of flux and other residue in dense fluid systems |
US20060081273A1 (en) * | 2004-10-20 | 2006-04-20 | Mcdermott Wayne T | Dense fluid compositions and processes using same for article treatment and residue removal |
US7550075B2 (en) * | 2005-03-23 | 2009-06-23 | Tokyo Electron Ltd. | Removal of contaminants from a fluid |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
JP2007142335A (ja) * | 2005-11-22 | 2007-06-07 | Dainippon Screen Mfg Co Ltd | 高圧処理方法 |
JP4179378B2 (ja) * | 2007-01-04 | 2008-11-12 | トヨタ自動車株式会社 | 車両の駆動制御装置、および、車両 |
WO2014113293A1 (en) * | 2013-01-15 | 2014-07-24 | Lawrence Livermore National Security, Llc | Laser-driven hydrothermal processing |
FR3021554A1 (fr) * | 2014-05-28 | 2015-12-04 | Dfd Dense Fluid Degreasing | Procede et dispositif de traitement par fluide supercritique avec injection d'additif |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5339844A (en) * | 1992-08-10 | 1994-08-23 | Hughes Aircraft Company | Low cost equipment for cleaning using liquefiable gases |
US5456759A (en) * | 1992-08-10 | 1995-10-10 | Hughes Aircraft Company | Method using megasonic energy in liquefied gases |
KR0137841B1 (ko) * | 1994-06-07 | 1998-04-27 | 문정환 | 식각잔류물 제거방법 |
JPH08330266A (ja) * | 1995-05-31 | 1996-12-13 | Texas Instr Inc <Ti> | 半導体装置等の表面を浄化し、処理する方法 |
US5868856A (en) * | 1996-07-25 | 1999-02-09 | Texas Instruments Incorporated | Method for removing inorganic contamination by chemical derivitization and extraction |
US5868862A (en) * | 1996-08-01 | 1999-02-09 | Texas Instruments Incorporated | Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media |
US5989353A (en) * | 1996-10-11 | 1999-11-23 | Mallinckrodt Baker, Inc. | Cleaning wafer substrates of metal contamination while maintaining wafer smoothness |
US5908510A (en) * | 1996-10-16 | 1999-06-01 | International Business Machines Corporation | Residue removal by supercritical fluids |
US6118000A (en) * | 1996-11-04 | 2000-09-12 | Hydrochem Industrial Services, Inc. | Methods for preparing quaternary ammonium salts |
US5709756A (en) * | 1996-11-05 | 1998-01-20 | Ashland Inc. | Basic stripping and cleaning composition |
US6306564B1 (en) * | 1997-05-27 | 2001-10-23 | Tokyo Electron Limited | Removal of resist or residue from semiconductors using supercritical carbon dioxide |
US6500605B1 (en) * | 1997-05-27 | 2002-12-31 | Tokyo Electron Limited | Removal of photoresist and residue from substrate using supercritical carbon dioxide process |
US5983082A (en) * | 1997-10-31 | 1999-11-09 | Motorola, Inc. | Phase quadrature signal generator having a variable phase shift network |
US6200943B1 (en) * | 1998-05-28 | 2001-03-13 | Micell Technologies, Inc. | Combination surfactant systems for use in carbon dioxide-based cleaning formulations |
US6242165B1 (en) * | 1998-08-28 | 2001-06-05 | Micron Technology, Inc. | Supercritical compositions for removal of organic material and methods of using same |
SG77710A1 (en) * | 1998-09-09 | 2001-01-16 | Tokuyama Corp | Photoresist ashing residue cleaning agent |
US6277753B1 (en) * | 1998-09-28 | 2001-08-21 | Supercritical Systems Inc. | Removal of CMP residue from semiconductors using supercritical carbon dioxide process |
CA2255413A1 (en) * | 1998-12-11 | 2000-06-11 | Fracmaster Ltd. | Foamed nitrogen in liquid co2 for fracturing |
US6828289B2 (en) * | 1999-01-27 | 2004-12-07 | Air Products And Chemicals, Inc. | Low surface tension, low viscosity, aqueous, acidic compositions containing fluoride and organic, polar solvents for removal of photoresist and organic and inorganic etch residues at room temperature |
CN1246888C (zh) * | 2000-08-14 | 2006-03-22 | 东京毅力科创株式会社 | 用超临界二氧化碳工艺从半导体上去除光致抗蚀剂和光致抗蚀残留物 |
US6425956B1 (en) * | 2001-01-05 | 2002-07-30 | International Business Machines Corporation | Process for removing chemical mechanical polishing residual slurry |
US7326673B2 (en) * | 2001-12-31 | 2008-02-05 | Advanced Technology Materials, Inc. | Treatment of semiconductor substrates using long-chain organothiols or long-chain acetates |
US20030217764A1 (en) * | 2002-05-23 | 2003-11-27 | Kaoru Masuda | Process and composition for removing residues from the microstructure of an object |
-
2001
- 2001-02-09 JP JP2001034337A patent/JP2002237481A/ja active Pending
-
2002
- 2002-02-08 DE DE60212999T patent/DE60212999T2/de not_active Expired - Fee Related
- 2002-02-08 CN CNB028002741A patent/CN1243366C/zh not_active Expired - Fee Related
- 2002-02-08 WO PCT/US2002/003608 patent/WO2002080233A2/en active IP Right Grant
- 2002-02-08 JP JP2002578549A patent/JP3996513B2/ja not_active Expired - Fee Related
- 2002-02-08 US US10/067,773 patent/US20020164873A1/en not_active Abandoned
- 2002-02-08 SG SG200402533A patent/SG125957A1/en unknown
- 2002-02-08 AT AT02736487T patent/ATE332571T1/de not_active IP Right Cessation
- 2002-02-08 EP EP02736487A patent/EP1358670B1/en not_active Expired - Lifetime
- 2002-02-08 EP EP04011792A patent/EP1457550B1/en not_active Expired - Lifetime
- 2002-02-08 DE DE60212937T patent/DE60212937T2/de not_active Expired - Lifetime
- 2002-02-08 TW TW091102499A patent/TW569328B/zh not_active IP Right Cessation
- 2002-02-08 AT AT04011792T patent/ATE332355T1/de not_active IP Right Cessation
- 2002-02-08 CN CNA2004100447914A patent/CN1542910A/zh active Pending
- 2002-02-08 KR KR10-2002-7013494A patent/KR100482496B1/ko not_active IP Right Cessation
- 2002-02-08 US US10/240,848 patent/US20030106573A1/en not_active Abandoned
- 2002-02-08 KR KR10-2004-7006269A patent/KR100490506B1/ko not_active IP Right Cessation
-
2004
- 2004-04-09 US US10/820,695 patent/US20040198627A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1457550B1 (en) | 2006-07-05 |
ATE332355T1 (de) | 2006-07-15 |
WO2002080233A3 (en) | 2002-11-14 |
ATE332571T1 (de) | 2006-07-15 |
KR20040040490A (ko) | 2004-05-12 |
WO2002080233A2 (en) | 2002-10-10 |
EP1457550A2 (en) | 2004-09-15 |
EP1358670A2 (en) | 2003-11-05 |
US20020164873A1 (en) | 2002-11-07 |
CN1542910A (zh) | 2004-11-03 |
DE60212937T2 (de) | 2007-12-06 |
DE60212937D1 (de) | 2006-08-17 |
TW569328B (en) | 2004-01-01 |
JP2002237481A (ja) | 2002-08-23 |
JP3996513B2 (ja) | 2007-10-24 |
KR100490506B1 (ko) | 2005-05-19 |
CN1457502A (zh) | 2003-11-19 |
SG125957A1 (en) | 2006-10-30 |
KR20020093896A (ko) | 2002-12-16 |
US20040198627A1 (en) | 2004-10-07 |
JP2004519863A (ja) | 2004-07-02 |
KR100482496B1 (ko) | 2005-04-14 |
DE60212999T2 (de) | 2006-12-28 |
EP1457550A3 (en) | 2004-11-03 |
DE60212999D1 (de) | 2006-08-17 |
EP1358670B1 (en) | 2006-07-05 |
US20030106573A1 (en) | 2003-06-12 |
EP1358670A4 (en) | 2004-11-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1243366C (zh) | 从物体微观结构中去除残余物的方法和装置 | |
TWI659088B (zh) | 蝕刻組成物 | |
JP4256722B2 (ja) | 微細構造体の洗浄方法 | |
TWI428170B (zh) | 低含水量的光阻剝離液用濃縮液之製造方法 | |
CN1708362A (zh) | 光致抗蚀剂去除用超临界二氧化碳/化学制剂 | |
CN1677248A (zh) | 光致抗蚀剂剥离剂组合物 | |
CN1831654A (zh) | 光致抗蚀剂剥离液组合物以及光致抗蚀剂的剥离方法 | |
CN1924710A (zh) | 用于去除半导体器件的改性光刻胶的光刻胶去除剂组合物 | |
CN100346453C (zh) | 清洗微结构的方法 | |
JP2007003617A (ja) | 剥離液組成物 | |
CN1786834A (zh) | 剥离剂组合物 | |
JPH1184686A (ja) | レジスト剥離剤組成物 | |
CN1203378C (zh) | 光刻胶去除剂混合物 | |
EP3663857A1 (en) | Photoresist stripping solution and method of stripping photoresist | |
CN1271475C (zh) | 抗蚀剂剥离剂组合物 | |
JP4167257B2 (ja) | 残留物除去用組成物 | |
CN1682155A (zh) | 光刻胶剥离剂组合物 | |
JP2005048189A (ja) | 残留物除去用組成物 | |
KR20160150322A (ko) | 레지스트 박리액 조성물 및 이를 이용한 레지스트의 박리방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: KOBE STEEL LTD.; AIR PRODUCTS AND CHEMICAL PRODUC Free format text: FORMER OWNER: KOBE STEEL LTD. Effective date: 20080516 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20080516 Address after: Japan Hyogo Prefecture Co-patentee after: Air Products And Chemical Products Inc. Patentee after: Kobe steel plant Address before: Hyogo Patentee before: Kobe Steel Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060222 Termination date: 20160208 |
|
CF01 | Termination of patent right due to non-payment of annual fee |