CN1220266C - 非易失性半导体存储器及其制造工艺 - Google Patents
非易失性半导体存储器及其制造工艺 Download PDFInfo
- Publication number
- CN1220266C CN1220266C CN02154596.0A CN02154596A CN1220266C CN 1220266 C CN1220266 C CN 1220266C CN 02154596 A CN02154596 A CN 02154596A CN 1220266 C CN1220266 C CN 1220266C
- Authority
- CN
- China
- Prior art keywords
- bit line
- grid electrode
- semiconductor substrate
- sidewall spacers
- semiconductor memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 129
- 238000000034 method Methods 0.000 title description 11
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 238000007667 floating Methods 0.000 claims abstract description 43
- 125000006850 spacer group Chemical group 0.000 claims abstract description 39
- 239000012535 impurity Substances 0.000 claims abstract description 26
- 238000009792 diffusion process Methods 0.000 claims abstract description 17
- 238000005516 engineering process Methods 0.000 claims description 18
- 239000002344 surface layer Substances 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 29
- 229920005591 polysilicon Polymers 0.000 description 29
- 230000015654 memory Effects 0.000 description 28
- 229910052581 Si3N4 Inorganic materials 0.000 description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 17
- 230000007797 corrosion Effects 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 11
- 230000008878 coupling Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 11
- 238000005859 coupling reaction Methods 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000008021 deposition Effects 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000001259 photo etching Methods 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004411 aluminium Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- -1 phosphonium ion Chemical class 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- HAYXDMNJJFVXCI-UHFFFAOYSA-N arsenic(5+) Chemical compound [As+5] HAYXDMNJJFVXCI-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
Landscapes
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
操作 | 位线BLn(漏) | 位线BLn+1(源) | 字线WLm | 字线WLm+1 | 半导体衬底 |
读出 | 1V | 0V | 4V | 0V | 0V |
写入 | 6V | 0V | 12V | 0V | 0V |
擦除 | 8V | 8V | -8V | -8V | 8V |
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001376027 | 2001-12-10 | ||
JP2001-376027 | 2001-12-10 | ||
JP2001376027A JP4087108B2 (ja) | 2001-12-10 | 2001-12-10 | 不揮発性半導体記憶装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1426113A CN1426113A (zh) | 2003-06-25 |
CN1220266C true CN1220266C (zh) | 2005-09-21 |
Family
ID=19184308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN02154596.0A Expired - Lifetime CN1220266C (zh) | 2001-12-10 | 2002-12-10 | 非易失性半导体存储器及其制造工艺 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7002204B2 (zh) |
JP (1) | JP4087108B2 (zh) |
CN (1) | CN1220266C (zh) |
TW (1) | TWI276217B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4027656B2 (ja) * | 2001-12-10 | 2007-12-26 | シャープ株式会社 | 不揮発性半導体記憶装置及びその動作方法 |
JP3998467B2 (ja) * | 2001-12-17 | 2007-10-24 | シャープ株式会社 | 不揮発性半導体メモリ装置及びその動作方法 |
US6809402B1 (en) * | 2002-08-14 | 2004-10-26 | Advanced Micro Devices, Inc. | Reflowable-doped HDP film |
US20050136588A1 (en) * | 2003-12-23 | 2005-06-23 | Chris Speyer | Method of forming isolation regions |
KR100583968B1 (ko) * | 2004-08-03 | 2006-05-26 | 삼성전자주식회사 | 스페이스 트랜치들을 갖는 불 휘발성 메모리 장치들 및 그형성방법들 |
US20060148259A1 (en) * | 2004-11-15 | 2006-07-06 | Hynix Semiconductor Inc. | Method for manufacturing semiconductor device |
US7709307B2 (en) * | 2006-08-24 | 2010-05-04 | Kovio, Inc. | Printed non-volatile memory |
US20080057612A1 (en) * | 2006-09-01 | 2008-03-06 | Doan Hung Q | Method for adding an implant at the shallow trench isolation corner in a semiconductor substrate |
US8012830B2 (en) * | 2007-08-08 | 2011-09-06 | Spansion Llc | ORO and ORPRO with bit line trench to suppress transport program disturb |
WO2009090892A1 (ja) * | 2008-01-18 | 2009-07-23 | Sharp Kabushiki Kaisha | 不揮発性ランダムアクセスメモリ |
US20150097224A1 (en) * | 2013-10-08 | 2015-04-09 | Spansion Llc | Buried trench isolation in integrated circuits |
US9437470B2 (en) | 2013-10-08 | 2016-09-06 | Cypress Semiconductor Corporation | Self-aligned trench isolation in integrated circuits |
CN108878431A (zh) * | 2017-05-11 | 2018-11-23 | 北京兆易创新科技股份有限公司 | 一种nor型浮栅存储器及制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4267632A (en) * | 1979-10-19 | 1981-05-19 | Intel Corporation | Process for fabricating a high density electrically programmable memory array |
JP2647101B2 (ja) | 1987-11-17 | 1997-08-27 | 株式会社東芝 | 不揮発性半導体メモリ装置 |
US5151375A (en) * | 1990-06-13 | 1992-09-29 | Waferscale Integration, Inc. | EPROM virtual ground array |
US5315541A (en) | 1992-07-24 | 1994-05-24 | Sundisk Corporation | Segmented column memory array |
US6570214B1 (en) * | 2002-03-01 | 2003-05-27 | Ching-Yuan Wu | Scalable stack-gate flash memory cell and its contactless memory array |
-
2001
- 2001-12-10 JP JP2001376027A patent/JP4087108B2/ja not_active Expired - Fee Related
-
2002
- 2002-12-10 CN CN02154596.0A patent/CN1220266C/zh not_active Expired - Lifetime
- 2002-12-10 US US10/315,222 patent/US7002204B2/en not_active Expired - Lifetime
- 2002-12-10 TW TW091135736A patent/TWI276217B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1426113A (zh) | 2003-06-25 |
US20030124803A1 (en) | 2003-07-03 |
JP2003179168A (ja) | 2003-06-27 |
TW200301013A (en) | 2003-06-16 |
JP4087108B2 (ja) | 2008-05-21 |
US7002204B2 (en) | 2006-02-21 |
TWI276217B (en) | 2007-03-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1252813C (zh) | 包含非易失性半导体存储器的半导体集成电路装置的制造方法 | |
CN1181554C (zh) | 半导体器件及其制造方法 | |
JP5781733B2 (ja) | 不揮発性メモリセル及びその製造方法 | |
JP5035775B2 (ja) | ソース側消去を伴うフローティングゲートメモリセルの半導体メモリアレイを形成する自己整合法及びこれによって形成されるメモリアレイ | |
CN1220266C (zh) | 非易失性半导体存储器及其制造工艺 | |
CN1967878A (zh) | 单层多晶硅非易失性存储器装置的操作方法 | |
CN1716572A (zh) | 非易失性半导体存储器件的制造方法及半导体存储器件 | |
CN1689160A (zh) | 半导体存储器件及其制造方法 | |
CN1505158A (zh) | 积体内存电路及形成积体内存电路的方法 | |
CN1832200A (zh) | 半导体装置与浮动栅极存储器 | |
CN1505156A (zh) | 非易失性半导体存储器件及其制造方法 | |
CN1901201A (zh) | 具有鳍类型沟道区域的非易失存储装置及其制备方法 | |
CN1794458A (zh) | 非挥发存储器及其制造方法 | |
CN1574298A (zh) | 半导体器件的制造方法和半导体器件 | |
CN1783513A (zh) | 具有电荷俘获层的非易失存储单元结构及其制造方法 | |
CN1776914A (zh) | 多位非易失性存储器件及其操作方法和制造方法 | |
CN1751392A (zh) | 鳍式场效应晶体管存储单元、鳍式场效应晶体管存储单元配置及制造鳍式场效应晶体管存储单元方法 | |
CN101047193A (zh) | 半导体存储器件及其制造方法 | |
CN1945798A (zh) | 制造非易失性存储器件的方法 | |
CN1219324C (zh) | 非易失性半导体存储器及方法 | |
CN100350616C (zh) | 位线结构及其制造方法 | |
CN1095200C (zh) | 非易失存储器的制造方法 | |
CN1870298A (zh) | 一种nrom闪存控制栅及闪存单元的制备方法 | |
CN1799139A (zh) | Nrom半导体存储器件和制造方法 | |
CN1841708A (zh) | 制造快闪存储装置的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: INTELLECTUAL PROPERTY I CO., LTD. Free format text: FORMER OWNER: SHARP KABUSHIKI KAISHA Effective date: 20120116 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120116 Address after: Budapest Patentee after: Intellectual property rights I Corp. Address before: Osaka Japan Patentee before: Sharp Corp. |
|
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG ELECTRONICS CO., LTD. Free format text: FORMER OWNER: INTELLECTUAL PROPERTY I CO. Effective date: 20150702 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150702 Address after: Gyeonggi Do, South Korea Patentee after: SAMSUNG ELECTRONICS Co.,Ltd. Address before: Budapest Patentee before: Intellectual property rights I Corp. |
|
CX01 | Expiry of patent term |
Granted publication date: 20050921 |
|
CX01 | Expiry of patent term |