CN121511409A - 探针装置及其制造方法 - Google Patents

探针装置及其制造方法

Info

Publication number
CN121511409A
CN121511409A CN202480042575.1A CN202480042575A CN121511409A CN 121511409 A CN121511409 A CN 121511409A CN 202480042575 A CN202480042575 A CN 202480042575A CN 121511409 A CN121511409 A CN 121511409A
Authority
CN
China
Prior art keywords
probe
wiring pattern
electrode pad
probe device
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480042575.1A
Other languages
English (en)
Chinese (zh)
Inventor
斋藤雄二
盐尻和也
安生健二
杉本重人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
V Technology Co Ltd
Original Assignee
V Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co Ltd filed Critical V Technology Co Ltd
Publication of CN121511409A publication Critical patent/CN121511409A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Geometry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN202480042575.1A 2023-07-07 2024-05-22 探针装置及其制造方法 Pending CN121511409A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2023-112543 2023-07-07
JP2023112543 2023-07-07
JP2023-183975 2023-10-26
JP2023183975 2023-10-26
PCT/JP2024/018901 WO2025013432A1 (ja) 2023-07-07 2024-05-22 プローブ装置およびその製造方法

Publications (1)

Publication Number Publication Date
CN121511409A true CN121511409A (zh) 2026-02-10

Family

ID=94215327

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480042575.1A Pending CN121511409A (zh) 2023-07-07 2024-05-22 探针装置及其制造方法

Country Status (5)

Country Link
JP (1) JPWO2025013432A1 (https=)
KR (1) KR20260035129A (https=)
CN (1) CN121511409A (https=)
TW (1) TW202507300A (https=)
WO (1) WO2025013432A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2533431Y2 (ja) * 1990-10-03 1997-04-23 株式会社アドバンテスト Ｉｃウエーハ試験用プローブ
JPH05226430A (ja) * 1992-02-10 1993-09-03 Nitto Denko Corp プローブカード構造体およびその製法
US5477160A (en) * 1992-08-12 1995-12-19 Fujitsu Limited Module test card
JPH0763787A (ja) * 1993-06-16 1995-03-10 Nitto Denko Corp プローブ構造
JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
JP3793945B2 (ja) * 2002-05-30 2006-07-05 松下電器産業株式会社 電圧プローブ、これを用いた半導体装置の検査方法、およびモニタ機能付き半導体装置

Also Published As

Publication number Publication date
TW202507300A (zh) 2025-02-16
WO2025013432A1 (ja) 2025-01-16
JPWO2025013432A1 (https=) 2025-01-16
KR20260035129A (ko) 2026-03-12

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