CN117120397A - 氮化硅粉末及其制造方法、以及氮化硅烧结体及其制造方法 - Google Patents

氮化硅粉末及其制造方法、以及氮化硅烧结体及其制造方法 Download PDF

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Publication number
CN117120397A
CN117120397A CN202280021892.6A CN202280021892A CN117120397A CN 117120397 A CN117120397 A CN 117120397A CN 202280021892 A CN202280021892 A CN 202280021892A CN 117120397 A CN117120397 A CN 117120397A
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China
Prior art keywords
silicon nitride
powder
mass
nitride powder
less
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Pending
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CN202280021892.6A
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English (en)
Chinese (zh)
Inventor
野上直嗣
田中稔男
竹田豪
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Denka Co Ltd
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Denka Co Ltd
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Application filed by Denka Co Ltd filed Critical Denka Co Ltd
Publication of CN117120397A publication Critical patent/CN117120397A/zh
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/587—Fine ceramics

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
CN202280021892.6A 2021-03-25 2022-03-17 氮化硅粉末及其制造方法、以及氮化硅烧结体及其制造方法 Pending CN117120397A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021051259 2021-03-25
JP2021-051259 2021-03-25
PCT/JP2022/012341 WO2022202621A1 (ja) 2021-03-25 2022-03-17 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体及びその製造方法

Publications (1)

Publication Number Publication Date
CN117120397A true CN117120397A (zh) 2023-11-24

Family

ID=83395829

Family Applications (1)

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CN202280021892.6A Pending CN117120397A (zh) 2021-03-25 2022-03-17 氮化硅粉末及其制造方法、以及氮化硅烧结体及其制造方法

Country Status (3)

Country Link
JP (1) JP7239787B2 (https=)
CN (1) CN117120397A (https=)
WO (1) WO2022202621A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120040190A (zh) * 2025-02-18 2025-05-27 深圳紫荆未来科技有限公司 一种化学性能稳定高强度的氮化硅多孔陶瓷及方法及应用

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025154791A (ja) * 2024-03-29 2025-10-10 デンカ株式会社 窒化ケイ素粉末、及びその製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN86104331A (zh) * 1985-06-24 1987-01-21 川崎制铁株式会社 制造氮化硅粉末的方法
JPS62148309A (ja) * 1985-12-23 1987-07-02 Toyo Soda Mfg Co Ltd 高α型窒化珪素粉末の製造法
JPH05310405A (ja) * 1992-05-11 1993-11-22 Denki Kagaku Kogyo Kk 高純度窒化珪素微粒子の製造方法
JPH0769607A (ja) * 1993-09-06 1995-03-14 Denki Kagaku Kogyo Kk 窒化ケイ素、その製法及び窒化ケイ素粉末
JP2000128511A (ja) * 1998-10-28 2000-05-09 Denki Kagaku Kogyo Kk 窒化ケイ素粉末及びこれを用いたスラリー、充填材
CN105008486A (zh) * 2013-03-08 2015-10-28 宇部兴产株式会社 氮化物荧光体的制造方法和氮化物荧光体用氮化硅粉末以及氮化物荧光体
WO2020241700A1 (ja) * 2019-05-30 2020-12-03 デンカ株式会社 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6340709A (ja) * 1986-08-05 1988-02-22 Showa Denko Kk 易焼結性高純度窒化ケイ素微粉体の製造方法
JPH04243906A (ja) * 1990-09-26 1992-09-01 Lonza Ag α−窒化ケイ素粉末の製造方法
JP3438928B2 (ja) * 1994-01-12 2003-08-18 電気化学工業株式会社 窒化珪素粉末の製造方法
JPH10218613A (ja) * 1997-02-03 1998-08-18 Shin Etsu Chem Co Ltd 窒化ケイ素粉末の高純化方法
JP4325824B2 (ja) * 2000-07-14 2009-09-02 電気化学工業株式会社 高熱伝導性窒化珪素焼結体の製造方法
JP2018111637A (ja) * 2017-01-13 2018-07-19 学校法人早稲田大学 金属シリコン製造用アーク炉
EP4219428A1 (en) * 2017-04-17 2023-08-02 Kabushiki Kaisha Toshiba, Inc. A substrate, a circuit board, and method for manufacturing the substrate
JP2020090428A (ja) * 2018-12-07 2020-06-11 国立研究開発法人産業技術総合研究所 シリコンの製造方法及び製造装置
JP2020090429A (ja) * 2018-12-07 2020-06-11 国立研究開発法人産業技術総合研究所 シリコンの製造方法及び製造装置
CN116239087A (zh) * 2019-03-18 2023-06-09 青岛瓷兴新材料有限公司 一种超纯低放射性类球形β氮化硅粉体、其制造方法及应用

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN86104331A (zh) * 1985-06-24 1987-01-21 川崎制铁株式会社 制造氮化硅粉末的方法
JPS62148309A (ja) * 1985-12-23 1987-07-02 Toyo Soda Mfg Co Ltd 高α型窒化珪素粉末の製造法
JPH05310405A (ja) * 1992-05-11 1993-11-22 Denki Kagaku Kogyo Kk 高純度窒化珪素微粒子の製造方法
JPH0769607A (ja) * 1993-09-06 1995-03-14 Denki Kagaku Kogyo Kk 窒化ケイ素、その製法及び窒化ケイ素粉末
JP2000128511A (ja) * 1998-10-28 2000-05-09 Denki Kagaku Kogyo Kk 窒化ケイ素粉末及びこれを用いたスラリー、充填材
CN105008486A (zh) * 2013-03-08 2015-10-28 宇部兴产株式会社 氮化物荧光体的制造方法和氮化物荧光体用氮化硅粉末以及氮化物荧光体
WO2020241700A1 (ja) * 2019-05-30 2020-12-03 デンカ株式会社 窒化ケイ素粉末及びその製造方法、並びに、窒化ケイ素焼結体の製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
浅山雅弘等: "次世代フアイセラミックス材料", 東芝レビュ一, vol. 49, no. 1, 30 November 1994 (1994-11-30), pages 59 - 64 *
郭瑞松 等: "《工程结构陶瓷》", vol. 1, 31 May 2002, 天津大学出版社, pages: 151 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120040190A (zh) * 2025-02-18 2025-05-27 深圳紫荆未来科技有限公司 一种化学性能稳定高强度的氮化硅多孔陶瓷及方法及应用

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WO2022202621A1 (ja) 2022-09-29
JP7239787B2 (ja) 2023-03-14

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