CN113853692B - 压电陶瓷电子部件 - Google Patents

压电陶瓷电子部件

Info

Publication number
CN113853692B
CN113853692B CN202080035593.9A CN202080035593A CN113853692B CN 113853692 B CN113853692 B CN 113853692B CN 202080035593 A CN202080035593 A CN 202080035593A CN 113853692 B CN113853692 B CN 113853692B
Authority
CN
China
Prior art keywords
piezoelectric ceramic
region
concentration
ceramic layer
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080035593.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN113853692A (zh
Inventor
三轮恭也
住冈浩之
林裕之
小川弘纯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN113853692A publication Critical patent/CN113853692A/zh
Application granted granted Critical
Publication of CN113853692B publication Critical patent/CN113853692B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
CN202080035593.9A 2019-05-14 2020-03-18 压电陶瓷电子部件 Active CN113853692B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019091326 2019-05-14
JP2019-091326 2019-05-14
PCT/JP2020/011940 WO2020230450A1 (ja) 2019-05-14 2020-03-18 圧電セラミック電子部品

Publications (2)

Publication Number Publication Date
CN113853692A CN113853692A (zh) 2021-12-28
CN113853692B true CN113853692B (zh) 2025-08-01

Family

ID=73290188

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080035593.9A Active CN113853692B (zh) 2019-05-14 2020-03-18 压电陶瓷电子部件

Country Status (5)

Country Link
US (1) US12245511B2 (https=)
JP (1) JP7151884B2 (https=)
CN (1) CN113853692B (https=)
DE (1) DE112020001337B4 (https=)
WO (1) WO2020230450A1 (https=)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6439132A (en) 1987-08-04 1989-02-09 Matsushita Electric Industrial Co Ltd Private radio paging receiver
JPH0786613B2 (ja) 1987-10-06 1995-09-20 凸版印刷株式会社 液晶表示素子の配向装置及びその配向方法
JPH0214A (ja) 1988-11-17 1990-01-05 Seiko Epson Corp 液晶表示装置
JPH0215A (ja) 1989-02-28 1990-01-05 Casio Comput Co Ltd 液晶表示装置
JPH0850B2 (ja) 1993-06-02 1996-01-10 鈴与工業株式会社 納豆の醗酵室
JP3498433B2 (ja) 1995-06-22 2004-02-16 東亞合成株式会社 水性樹脂分散体の製造方法
JPWO2008152851A1 (ja) 2007-06-15 2010-08-26 株式会社村田製作所 圧電磁器組成物、及び圧電セラミック電子部品
JP2009242167A (ja) * 2008-03-31 2009-10-22 Tdk Corp 圧電磁器及びそれを用いた圧電素子
JP2011091234A (ja) * 2009-10-23 2011-05-06 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置
JP5543537B2 (ja) 2012-07-24 2014-07-09 太陽誘電株式会社 圧電素子
US9147827B2 (en) * 2012-11-28 2015-09-29 Tdk Corporation Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
JP2015070136A (ja) 2013-09-30 2015-04-13 株式会社村田製作所 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法
JP6483525B2 (ja) * 2015-05-23 2019-03-13 京セラ株式会社 圧電素子、およびそれを用いた圧電部材、液体吐出ヘッド、ならびに記録装置
JP6874351B2 (ja) 2016-12-07 2021-05-19 Tdk株式会社 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置
JP7352140B2 (ja) * 2019-06-26 2023-09-28 株式会社村田製作所 圧電磁器組成物の製造方法及び圧電セラミック電子部品

Also Published As

Publication number Publication date
DE112020001337B4 (de) 2024-06-20
US12245511B2 (en) 2025-03-04
DE112020001337T5 (de) 2021-12-02
US20220052252A1 (en) 2022-02-17
JPWO2020230450A1 (https=) 2020-11-19
JP7151884B2 (ja) 2022-10-12
CN113853692A (zh) 2021-12-28
WO2020230450A1 (ja) 2020-11-19

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