DE112020001337B4 - Piezoelektrisches keramisches elektronisches Bauteil - Google Patents
Piezoelektrisches keramisches elektronisches Bauteil Download PDFInfo
- Publication number
- DE112020001337B4 DE112020001337B4 DE112020001337.5T DE112020001337T DE112020001337B4 DE 112020001337 B4 DE112020001337 B4 DE 112020001337B4 DE 112020001337 T DE112020001337 T DE 112020001337T DE 112020001337 B4 DE112020001337 B4 DE 112020001337B4
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric ceramic
- concentration
- region
- electrodes
- ceramic layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000919 ceramic Substances 0.000 title claims abstract description 249
- 150000001875 compounds Chemical class 0.000 claims abstract description 36
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000005204 segregation Methods 0.000 claims description 23
- 239000011572 manganese Substances 0.000 description 134
- 239000010410 layer Substances 0.000 description 119
- 239000000523 sample Substances 0.000 description 42
- 238000009826 distribution Methods 0.000 description 25
- 229910052760 oxygen Inorganic materials 0.000 description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 24
- 238000013507 mapping Methods 0.000 description 24
- 239000001301 oxygen Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 23
- 230000007547 defect Effects 0.000 description 16
- 238000004458 analytical method Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 14
- 239000011734 sodium Substances 0.000 description 14
- 238000010304 firing Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 11
- 238000009413 insulation Methods 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 229910052748 manganese Inorganic materials 0.000 description 9
- 239000010955 niobium Substances 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 229910052744 lithium Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052708 sodium Inorganic materials 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000002035 prolonged effect Effects 0.000 description 4
- 239000013074 reference sample Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 3
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 2
- -1 Mn Li Inorganic materials 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- QHGJSLXSVXVKHZ-UHFFFAOYSA-N dilithium;dioxido(dioxo)manganese Chemical compound [Li+].[Li+].[O-][Mn]([O-])(=O)=O QHGJSLXSVXVKHZ-UHFFFAOYSA-N 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010344 co-firing Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 239000011656 manganese carbonate Substances 0.000 description 1
- 229940093474 manganese carbonate Drugs 0.000 description 1
- 235000006748 manganese carbonate Nutrition 0.000 description 1
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 1
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019091326 | 2019-05-14 | ||
| JP2019-091326 | 2019-05-14 | ||
| PCT/JP2020/011940 WO2020230450A1 (ja) | 2019-05-14 | 2020-03-18 | 圧電セラミック電子部品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE112020001337T5 DE112020001337T5 (de) | 2021-12-02 |
| DE112020001337B4 true DE112020001337B4 (de) | 2024-06-20 |
Family
ID=73290188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112020001337.5T Active DE112020001337B4 (de) | 2019-05-14 | 2020-03-18 | Piezoelektrisches keramisches elektronisches Bauteil |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12245511B2 (https=) |
| JP (1) | JP7151884B2 (https=) |
| CN (1) | CN113853692B (https=) |
| DE (1) | DE112020001337B4 (https=) |
| WO (1) | WO2020230450A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140028156A1 (en) | 2012-07-24 | 2014-01-30 | Taiyo Yuden Co., Ltd. | Piezoelectric element and method of manufacturing the same |
| JP2014139132A (ja) | 2007-06-15 | 2014-07-31 | Murata Mfg Co Ltd | 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法 |
| JP2015070136A (ja) | 2013-09-30 | 2015-04-13 | 株式会社村田製作所 | 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法 |
| US20150194592A1 (en) | 2012-11-28 | 2015-07-09 | Tdk Corporation | Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device |
| JP2018093144A (ja) | 2016-12-07 | 2018-06-14 | Tdk株式会社 | 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6439132A (en) | 1987-08-04 | 1989-02-09 | Matsushita Electric Industrial Co Ltd | Private radio paging receiver |
| JPH0786613B2 (ja) | 1987-10-06 | 1995-09-20 | 凸版印刷株式会社 | 液晶表示素子の配向装置及びその配向方法 |
| JPH0214A (ja) | 1988-11-17 | 1990-01-05 | Seiko Epson Corp | 液晶表示装置 |
| JPH0215A (ja) | 1989-02-28 | 1990-01-05 | Casio Comput Co Ltd | 液晶表示装置 |
| JPH0850B2 (ja) | 1993-06-02 | 1996-01-10 | 鈴与工業株式会社 | 納豆の醗酵室 |
| JP3498433B2 (ja) | 1995-06-22 | 2004-02-16 | 東亞合成株式会社 | 水性樹脂分散体の製造方法 |
| JP2009242167A (ja) * | 2008-03-31 | 2009-10-22 | Tdk Corp | 圧電磁器及びそれを用いた圧電素子 |
| JP2011091234A (ja) * | 2009-10-23 | 2011-05-06 | Seiko Epson Corp | 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置 |
| JP6483525B2 (ja) * | 2015-05-23 | 2019-03-13 | 京セラ株式会社 | 圧電素子、およびそれを用いた圧電部材、液体吐出ヘッド、ならびに記録装置 |
| JP7352140B2 (ja) * | 2019-06-26 | 2023-09-28 | 株式会社村田製作所 | 圧電磁器組成物の製造方法及び圧電セラミック電子部品 |
-
2020
- 2020-03-18 WO PCT/JP2020/011940 patent/WO2020230450A1/ja not_active Ceased
- 2020-03-18 CN CN202080035593.9A patent/CN113853692B/zh active Active
- 2020-03-18 DE DE112020001337.5T patent/DE112020001337B4/de active Active
- 2020-03-18 JP JP2021519288A patent/JP7151884B2/ja active Active
-
2021
- 2021-10-22 US US17/508,567 patent/US12245511B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014139132A (ja) | 2007-06-15 | 2014-07-31 | Murata Mfg Co Ltd | 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法 |
| US20140028156A1 (en) | 2012-07-24 | 2014-01-30 | Taiyo Yuden Co., Ltd. | Piezoelectric element and method of manufacturing the same |
| US20150194592A1 (en) | 2012-11-28 | 2015-07-09 | Tdk Corporation | Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device |
| JP2015070136A (ja) | 2013-09-30 | 2015-04-13 | 株式会社村田製作所 | 圧電セラミック電子部品、及び圧電セラミック電子部品の製造方法 |
| JP2018093144A (ja) | 2016-12-07 | 2018-06-14 | Tdk株式会社 | 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US12245511B2 (en) | 2025-03-04 |
| CN113853692B (zh) | 2025-08-01 |
| DE112020001337T5 (de) | 2021-12-02 |
| US20220052252A1 (en) | 2022-02-17 |
| JPWO2020230450A1 (https=) | 2020-11-19 |
| JP7151884B2 (ja) | 2022-10-12 |
| CN113853692A (zh) | 2021-12-28 |
| WO2020230450A1 (ja) | 2020-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed | ||
| R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: H01L0041187000 Ipc: H10N0030853000 |
|
| R016 | Response to examination communication | ||
| R018 | Grant decision by examination section/examining division | ||
| R020 | Patent grant now final |