CN113049100B - 光检测装置 - Google Patents

光检测装置 Download PDF

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Publication number
CN113049100B
CN113049100B CN202110473132.6A CN202110473132A CN113049100B CN 113049100 B CN113049100 B CN 113049100B CN 202110473132 A CN202110473132 A CN 202110473132A CN 113049100 B CN113049100 B CN 113049100B
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CN
China
Prior art keywords
fabry
interference filter
perot interference
light
adhesive member
Prior art date
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Application number
CN202110473132.6A
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English (en)
Chinese (zh)
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CN113049100A (zh
Inventor
广瀬真树
柴山胜己
笠原隆
川合敏光
八代健彦
峰野充史
铃木滋
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Priority to CN202110473132.6A priority Critical patent/CN113049100B/zh
Publication of CN113049100A publication Critical patent/CN113049100A/zh
Application granted granted Critical
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Gyroscopes (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
CN202110473132.6A 2015-04-28 2016-04-19 光检测装置 Active CN113049100B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110473132.6A CN113049100B (zh) 2015-04-28 2016-04-19 光检测装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2015092360A JP6671860B2 (ja) 2015-04-28 2015-04-28 光検出装置
JP2015-092360 2015-04-28
PCT/JP2016/062414 WO2016175089A1 (ja) 2015-04-28 2016-04-19 光検出装置
CN202110473132.6A CN113049100B (zh) 2015-04-28 2016-04-19 光检测装置
CN201680024252.5A CN107532941B (zh) 2015-04-28 2016-04-19 光检测装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201680024252.5A Division CN107532941B (zh) 2015-04-28 2016-04-19 光检测装置

Publications (2)

Publication Number Publication Date
CN113049100A CN113049100A (zh) 2021-06-29
CN113049100B true CN113049100B (zh) 2023-11-28

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CN202110473132.6A Active CN113049100B (zh) 2015-04-28 2016-04-19 光检测装置
CN201680024252.5A Active CN107532941B (zh) 2015-04-28 2016-04-19 光检测装置

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Country Status (7)

Country Link
US (2) US11118972B2 (enExample)
EP (3) EP4467943A1 (enExample)
JP (1) JP6671860B2 (enExample)
KR (2) KR20240118188A (enExample)
CN (2) CN113049100B (enExample)
TW (4) TWI714577B (enExample)
WO (1) WO2016175089A1 (enExample)

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JP6862216B2 (ja) 2017-02-28 2021-04-21 浜松ホトニクス株式会社 光検出装置
JP7155498B2 (ja) * 2017-03-29 2022-10-19 セイコーエプソン株式会社 光学フィルターデバイス
JP7313115B2 (ja) * 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
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JP6517309B1 (ja) 2017-11-24 2019-05-22 浜松ホトニクス株式会社 異物除去方法、及び光検出装置の製造方法
JP7043885B2 (ja) * 2018-02-26 2022-03-30 セイコーエプソン株式会社 分光装置、温度特性導出装置、分光システム、分光方法、及び温度特性導出方法
EP3776918B1 (en) 2018-04-12 2023-08-23 Raytheon Company Phase change detection in optical signals
TW201947894A (zh) * 2018-04-12 2019-12-16 美商雷神公司 整合式光學共振檢測器
JP7351610B2 (ja) * 2018-10-30 2023-09-27 浜松ホトニクス株式会社 光検出装置
JP7388815B2 (ja) * 2018-10-31 2023-11-29 浜松ホトニクス株式会社 分光ユニット及び分光モジュール
JP2020098258A (ja) * 2018-12-18 2020-06-25 セイコーエプソン株式会社 光学モジュール及び電子機器
JP7181784B2 (ja) 2018-12-18 2022-12-01 浜松ホトニクス株式会社 モニタ装置、光学フィルタシステム、モニタ方法、電流発生装置
JP7051746B2 (ja) * 2019-04-17 2022-04-11 浜松ホトニクス株式会社 光学装置の製造方法
JP7345404B2 (ja) * 2020-01-22 2023-09-15 京セラ株式会社 Ｍｅｍｓ装置
CN111474618A (zh) * 2020-05-20 2020-07-31 腾景科技股份有限公司 一种空气隙标准具结构的宽波段温度调谐滤波器
JP7114766B2 (ja) * 2021-02-19 2022-08-08 浜松ホトニクス株式会社 光検出装置
JP7647403B2 (ja) * 2021-07-12 2025-03-18 セイコーエプソン株式会社 分光デバイス、及び分光カメラ
CN113703119B (zh) * 2021-09-02 2022-06-07 中国科学院长春光学精密机械与物理研究所 一种光学探测器滤光片精密封装机构
JP2024080068A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024080070A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024080082A (ja) * 2022-12-01 2024-06-13 浜松ホトニクス株式会社 フィルタユニット
JP2024107867A (ja) * 2023-01-30 2024-08-09 浜松ホトニクス株式会社 蛍光計測装置

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Publication number Publication date
EP3290880A1 (en) 2018-03-07
TW201643390A (zh) 2016-12-16
US20180113024A1 (en) 2018-04-26
KR20240118188A (ko) 2024-08-02
US11118972B2 (en) 2021-09-14
JP2016211860A (ja) 2016-12-15
KR102708442B1 (ko) 2024-09-24
TWI769594B (zh) 2022-07-01
CN107532941A (zh) 2018-01-02
US11555741B2 (en) 2023-01-17
TW202234030A (zh) 2022-09-01
CN113049100A (zh) 2021-06-29
US20210372854A1 (en) 2021-12-02
EP3290880B1 (en) 2023-04-12
JP6671860B2 (ja) 2020-03-25
EP4467943A1 (en) 2024-11-27
TWI714577B (zh) 2021-01-01
TWI885832B (zh) 2025-06-01
TWI840809B (zh) 2024-05-01
KR20170140170A (ko) 2017-12-20
EP4212836A1 (en) 2023-07-19
WO2016175089A1 (ja) 2016-11-03
EP3290880A4 (en) 2018-12-19
CN107532941B (zh) 2021-05-25
TW202111295A (zh) 2021-03-16
TW202433020A (zh) 2024-08-16

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