CN110709966B - 使用保护盖层蚀刻含铂薄膜 - Google Patents

使用保护盖层蚀刻含铂薄膜 Download PDF

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CN110709966B
CN110709966B CN201880015666.0A CN201880015666A CN110709966B CN 110709966 B CN110709966 B CN 110709966B CN 201880015666 A CN201880015666 A CN 201880015666A CN 110709966 B CN110709966 B CN 110709966B
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platinum
layer
containing layer
oxide
top surface
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CN110709966A (zh
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S·梅耶
H·林克
M·米特斯塔德
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Texas Instruments Inc
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Texas Instruments Inc
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    • C01G55/004—Oxides; Hydroxides
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