CN117153816A - 使用保护盖层蚀刻含铂薄膜 - Google Patents

使用保护盖层蚀刻含铂薄膜 Download PDF

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Publication number
CN117153816A
CN117153816A CN202311109377.6A CN202311109377A CN117153816A CN 117153816 A CN117153816 A CN 117153816A CN 202311109377 A CN202311109377 A CN 202311109377A CN 117153816 A CN117153816 A CN 117153816A
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Prior art keywords
platinum
containing layer
layer
section
microelectronic device
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CN202311109377.6A
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Chinese (zh)
Inventor
S·梅耶
H·林克
M·米特斯塔德
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Texas Instruments Inc
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Texas Instruments Inc
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Publication of CN117153816A publication Critical patent/CN117153816A/zh
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    • C01G55/00—Compounds of ruthenium, rhodium, palladium, osmium, iridium, or platinum
    • C01G55/004—Oxides; Hydroxides
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