CN110670050B - 化学镀铜活化液及其制备方法 - Google Patents
化学镀铜活化液及其制备方法 Download PDFInfo
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- CN110670050B CN110670050B CN201911018775.0A CN201911018775A CN110670050B CN 110670050 B CN110670050 B CN 110670050B CN 201911018775 A CN201911018775 A CN 201911018775A CN 110670050 B CN110670050 B CN 110670050B
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- copper plating
- electroless copper
- chloride
- palladium
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- 238000007747 plating Methods 0.000 title claims abstract description 108
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 101
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 100
- 239000010949 copper Substances 0.000 title claims abstract description 100
- 230000003213 activating effect Effects 0.000 title claims abstract description 76
- 239000000126 substance Substances 0.000 title claims abstract description 35
- 238000002360 preparation method Methods 0.000 title abstract description 19
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 56
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims abstract description 56
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 claims abstract description 49
- 239000008139 complexing agent Substances 0.000 claims abstract description 38
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 claims abstract description 29
- 239000011780 sodium chloride Substances 0.000 claims abstract description 28
- 229910021626 Tin(II) chloride Inorganic materials 0.000 claims abstract description 27
- 235000011150 stannous chloride Nutrition 0.000 claims abstract description 27
- 239000001119 stannous chloride Substances 0.000 claims abstract description 27
- 239000003963 antioxidant agent Substances 0.000 claims abstract description 21
- 230000003078 antioxidant effect Effects 0.000 claims abstract description 21
- 239000003381 stabilizer Substances 0.000 claims abstract description 21
- 239000000080 wetting agent Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000003756 stirring Methods 0.000 claims abstract description 18
- 239000000872 buffer Substances 0.000 claims abstract description 14
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000006172 buffering agent Substances 0.000 claims abstract description 11
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 claims abstract description 8
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 claims abstract description 8
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 claims abstract description 8
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 claims abstract description 4
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 claims abstract description 4
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 claims abstract description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims abstract description 4
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000004471 Glycine Substances 0.000 claims abstract description 4
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 claims abstract description 4
- QJYQSFRDJBQMCT-UHFFFAOYSA-N cyclohexanamine;ethanesulfonic acid Chemical compound CCS(O)(=O)=O.NC1CCCCC1 QJYQSFRDJBQMCT-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000001630 malic acid Substances 0.000 claims abstract description 4
- 235000011090 malic acid Nutrition 0.000 claims abstract description 4
- 235000019260 propionic acid Nutrition 0.000 claims abstract description 4
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 claims abstract description 4
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 claims abstract description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 128
- 229910052763 palladium Inorganic materials 0.000 claims description 65
- 239000000084 colloidal system Substances 0.000 claims description 52
- 230000004913 activation Effects 0.000 claims description 31
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 22
- 235000006708 antioxidants Nutrition 0.000 claims description 20
- 238000005303 weighing Methods 0.000 claims description 18
- 239000008367 deionised water Substances 0.000 claims description 11
- 229910021641 deionized water Inorganic materials 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 claims description 6
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 claims description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 claims description 3
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 3
- 150000003927 aminopyridines Chemical class 0.000 claims description 3
- 235000010323 ascorbic acid Nutrition 0.000 claims description 3
- 229960005070 ascorbic acid Drugs 0.000 claims description 3
- 239000011668 ascorbic acid Substances 0.000 claims description 3
- 239000004202 carbamide Substances 0.000 claims description 3
- 229930003836 cresol Natural products 0.000 claims description 3
- TVQLLNFANZSCGY-UHFFFAOYSA-N disodium;dioxido(oxo)tin Chemical compound [Na+].[Na+].[O-][Sn]([O-])=O TVQLLNFANZSCGY-UHFFFAOYSA-N 0.000 claims description 3
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 3
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 3
- 229940079864 sodium stannate Drugs 0.000 claims description 3
- SWKVSFPUHCMFJY-UHFFFAOYSA-N 6-methyl-2-oxo-5-pyridin-4-yl-1h-pyridine-3-carboxamide Chemical compound N1C(=O)C(C(N)=O)=CC(C=2C=CN=CC=2)=C1C SWKVSFPUHCMFJY-UHFFFAOYSA-N 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 13
- 239000002245 particle Substances 0.000 description 25
- 230000006641 stabilisation Effects 0.000 description 24
- 238000011105 stabilization Methods 0.000 description 24
- 230000000052 comparative effect Effects 0.000 description 8
- 230000000536 complexating effect Effects 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000032683 aging Effects 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 238000006722 reduction reaction Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 229910001432 tin ion Inorganic materials 0.000 description 3
- 230000005653 Brownian motion process Effects 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005537 brownian motion Methods 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229910001431 copper ion Inorganic materials 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- -1 hydrogen ions Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- WHUCYROEYGJKNI-UHFFFAOYSA-N 2,5-dihydroxybenzenesulfonic acid;potassium Chemical compound [K].OC1=CC=C(O)C(S(O)(=O)=O)=C1 WHUCYROEYGJKNI-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010668 complexation reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003906 humectant Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000013112 stability test Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Abstract
Description
鼓气12小时 | 加热40℃ | 持续搅拌 | |
实施例1 | 稳定 | 稳定 | 稳定 |
实施例2 | 稳定 | 稳定 | 稳定 |
实施例3 | 稳定 | 稳定 | 稳定 |
实施例4 | 稳定 | 稳定 | 稳定 |
实施例5 | 稳定 | 稳定 | 稳定 |
实施例6 | 稳定 | 稳定 | 稳定 |
实施例7 | 稳定 | 稳定 | 稳定 |
实施例8 | 稳定 | 稳定 | 稳定 |
对比例1 | 分解 | 快速分解 | 快速分解 |
对比例2 | 分解 | 快速分解 | 快速分解 |
Claims (11)
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CN201911018775.0A CN110670050B (zh) | 2019-10-24 | 2019-10-24 | 化学镀铜活化液及其制备方法 |
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CN201911018775.0A CN110670050B (zh) | 2019-10-24 | 2019-10-24 | 化学镀铜活化液及其制备方法 |
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CN110670050A CN110670050A (zh) | 2020-01-10 |
CN110670050B true CN110670050B (zh) | 2021-11-12 |
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Families Citing this family (6)
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JP7113866B2 (ja) * | 2020-05-26 | 2022-08-05 | 株式会社荏原製作所 | 金属担持不織布及びその製造方法、触媒、不飽和化合物の水素化方法、並びに炭素-窒素結合の形成方法 |
CN111763930B (zh) * | 2020-07-14 | 2022-04-19 | 赤壁市聚茂新材料科技有限公司 | 一种非钯活化镀铜工艺及其敏化剂、活化剂 |
CN114150299A (zh) * | 2021-04-27 | 2022-03-08 | 天津大学 | 用于超低轮廓铜箔及其覆铜板制备的化学沉积方法 |
CN113289554B (zh) * | 2021-05-20 | 2022-07-05 | 广东利尔化学有限公司 | 一种应用于线路板孔金属化的低钯活化剂智能制备方法 |
CN114959665B (zh) * | 2022-04-25 | 2024-03-01 | 金川集团股份有限公司 | 一种印制线路板化学镀铜用胶体钯活化液的制备方法 |
CN115445659A (zh) * | 2022-09-13 | 2022-12-09 | 广东利尔化学有限公司 | 一种用于化学镀铜的催化剂及其制备方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS60200969A (ja) * | 1984-03-26 | 1985-10-11 | Toshiba Corp | 化学銅めつき液 |
CN101928937B (zh) * | 2009-06-22 | 2012-02-22 | 比亚迪股份有限公司 | 一种胶体钯活化液及其制备方法和一种非金属表面活化方法 |
CN102677026A (zh) * | 2012-05-25 | 2012-09-19 | 长沙理工大学 | 一种胶体钯的制备方法 |
CN102912324B (zh) * | 2012-10-25 | 2014-09-24 | 南京大地冷冻食品有限公司 | 一种高稳定性钯催化剂浓缩液及其制备方法 |
JP6272673B2 (ja) * | 2013-10-30 | 2018-01-31 | ローム・アンド・ハース電子材料株式会社 | 無電解めっき用触媒液 |
JP6145681B2 (ja) * | 2014-02-07 | 2017-06-14 | 石原ケミカル株式会社 | 無電解銅メッキ用の水系銅コロイド触媒液並びに無電解銅メッキ方法 |
JP2016017217A (ja) * | 2014-07-10 | 2016-02-01 | 長野県 | 無電解めっき用前処理液およびその溶液を用いた無電解めっき方法 |
JP6982383B2 (ja) * | 2016-08-10 | 2021-12-17 | 上村工業株式会社 | 還元処理と同時に用いられる無電解めっき用前処理液、およびプリント配線基板の製造方法 |
KR101883249B1 (ko) * | 2017-03-31 | 2018-08-30 | (주)엠케이켐앤텍 | 무전해 니켈 도금용 전처리 활성화액, 이를 사용한 무전해 니켈 도금 방법 및 표면 처리 방법, 및 무전해 니켈 도금을 포함하는 인쇄회로 기판 |
CN109811332B (zh) * | 2019-02-21 | 2021-03-23 | 深圳市天熙科技开发有限公司 | 一种用于非导电基材表面化学镀的活化液及其再生方法 |
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