CN110462785B - 基板处理装置及其显示方法 - Google Patents

基板处理装置及其显示方法 Download PDF

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Publication number
CN110462785B
CN110462785B CN201780088759.1A CN201780088759A CN110462785B CN 110462785 B CN110462785 B CN 110462785B CN 201780088759 A CN201780088759 A CN 201780088759A CN 110462785 B CN110462785 B CN 110462785B
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CN110462785A (zh
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守田修
山冈雄治
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Kokusai Electric Corp
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Kokusai Electric Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Facsimiles In General (AREA)
  • User Interface Of Digital Computer (AREA)
CN201780088759.1A 2017-03-31 2017-03-31 基板处理装置及其显示方法 Active CN110462785B (zh)

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PCT/JP2017/013633 WO2018179353A1 (ja) 2017-03-31 2017-03-31 基板処理装置およびその表示方法

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CN110462785A CN110462785A (zh) 2019-11-15
CN110462785B true CN110462785B (zh) 2023-08-11

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CN201780088759.1A Active CN110462785B (zh) 2017-03-31 2017-03-31 基板处理装置及其显示方法

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JP (1) JP6802903B2 (ja)
CN (1) CN110462785B (ja)
SG (1) SG11201908759VA (ja)
WO (1) WO2018179353A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023181454A1 (ja) * 2022-03-25 2023-09-28 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法及びプログラム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH097912A (ja) * 1995-04-18 1997-01-10 Nippondenso Co Ltd 半導体基板の生産制御装置
JP2004119451A (ja) * 2002-09-24 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置及びそのスケジュール作成方法
WO2012035965A1 (ja) * 2010-09-17 2012-03-22 株式会社日立国際電気 基板処理システム及び基板処理装置の表示方法
CN105474356A (zh) * 2013-08-15 2016-04-06 株式会社思可林集团 基板处理装置、基板处理方法以及基板处理系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH097912A (ja) * 1995-04-18 1997-01-10 Nippondenso Co Ltd 半導体基板の生産制御装置
JP2004119451A (ja) * 2002-09-24 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置及びそのスケジュール作成方法
WO2012035965A1 (ja) * 2010-09-17 2012-03-22 株式会社日立国際電気 基板処理システム及び基板処理装置の表示方法
CN105474356A (zh) * 2013-08-15 2016-04-06 株式会社思可林集团 基板处理装置、基板处理方法以及基板处理系统

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CN110462785A (zh) 2019-11-15
JPWO2018179353A1 (ja) 2019-11-07
WO2018179353A1 (ja) 2018-10-04
JP6802903B2 (ja) 2020-12-23
SG11201908759VA (en) 2019-10-30

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