SG11201908759VA - Substrate processing apparatus and display method thereof - Google Patents

Substrate processing apparatus and display method thereof

Info

Publication number
SG11201908759VA
SG11201908759VA SG11201908759VA SG11201908759VA SG 11201908759V A SG11201908759V A SG 11201908759VA SG 11201908759V A SG11201908759V A SG 11201908759VA SG 11201908759V A SG11201908759V A SG 11201908759VA
Authority
SG
Singapore
Prior art keywords
scheduled
job
time
acquired
display
Prior art date
Application number
Inventor
Osamu Morita
Yuji Yamaoka
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Publication of SG11201908759VA publication Critical patent/SG11201908759VA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Abstract

An object of the present disclosure is to provide a configuration capable of displaying an execution schedule of a job in chronological order. There is provided a configuration including: a display having an operation screen including a two-dimensional space in which one axis indicates reservation statuses of various jobs executed by the apparatus including a current job being executed by the apparatus, and the other axis indicates a predetermined monitoring period; and a display controller configured to: acquire various information including a start time and a scheduled end time of the current job being executed by the apparatus, or a scheduled start time and a scheduled end time of a job reserved by the apparatus; calculate a scheduled execution time of the current job based on the acquired start time and the acquired scheduled end time of the current job, and/or a scheduled execution time of the reserved job based on the acquired scheduled start time and the acquired scheduled end time of the reserved job; and display a chart as an image indicating the scheduled execution time of the current job and the scheduled execution time of the reserved job on the display. FIGURE 1
SG11201908759V 2017-03-31 2017-03-31 Substrate processing apparatus and display method thereof SG11201908759VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/013633 WO2018179353A1 (en) 2017-03-31 2017-03-31 Substrate processing device and display method for same

Publications (1)

Publication Number Publication Date
SG11201908759VA true SG11201908759VA (en) 2019-10-30

Family

ID=63674548

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201908759V SG11201908759VA (en) 2017-03-31 2017-03-31 Substrate processing apparatus and display method thereof

Country Status (4)

Country Link
JP (1) JP6802903B2 (en)
CN (1) CN110462785B (en)
SG (1) SG11201908759VA (en)
WO (1) WO2018179353A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023181454A1 (en) * 2022-03-25 2023-09-28 株式会社Kokusai Electric Substrate processing device, method for manufacturing semiconductor device, and program

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3419186B2 (en) * 1995-04-18 2003-06-23 株式会社デンソー Production control equipment for semiconductor substrates
JP4248210B2 (en) * 2002-09-24 2009-04-02 大日本スクリーン製造株式会社 Substrate processing apparatus and schedule creation method thereof
JP2012064881A (en) * 2010-09-17 2012-03-29 Hitachi Kokusai Electric Inc Substrate processing system
JP6121846B2 (en) * 2013-08-15 2017-04-26 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing apparatus, substrate processing method, and substrate processing system

Also Published As

Publication number Publication date
CN110462785A (en) 2019-11-15
JPWO2018179353A1 (en) 2019-11-07
WO2018179353A1 (en) 2018-10-04
JP6802903B2 (en) 2020-12-23
CN110462785B (en) 2023-08-11

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