SG11201908759VA - Substrate processing apparatus and display method thereof - Google Patents

Substrate processing apparatus and display method thereof

Info

Publication number
SG11201908759VA
SG11201908759VA SG11201908759VA SG11201908759VA SG 11201908759V A SG11201908759V A SG 11201908759VA SG 11201908759V A SG11201908759V A SG 11201908759VA SG 11201908759V A SG11201908759V A SG 11201908759VA
Authority
SG
Singapore
Prior art keywords
scheduled
job
time
acquired
display
Prior art date
Application number
Other languages
English (en)
Inventor
Osamu Morita
Yuji Yamaoka
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Publication of SG11201908759VA publication Critical patent/SG11201908759VA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Facsimiles In General (AREA)
  • User Interface Of Digital Computer (AREA)
SG11201908759V 2017-03-31 2017-03-31 Substrate processing apparatus and display method thereof SG11201908759VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/013633 WO2018179353A1 (ja) 2017-03-31 2017-03-31 基板処理装置およびその表示方法

Publications (1)

Publication Number Publication Date
SG11201908759VA true SG11201908759VA (en) 2019-10-30

Family

ID=63674548

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201908759V SG11201908759VA (en) 2017-03-31 2017-03-31 Substrate processing apparatus and display method thereof

Country Status (4)

Country Link
JP (1) JP6802903B2 (ja)
CN (1) CN110462785B (ja)
SG (1) SG11201908759VA (ja)
WO (1) WO2018179353A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023181454A1 (ja) * 2022-03-25 2023-09-28 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法及びプログラム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3419186B2 (ja) * 1995-04-18 2003-06-23 株式会社デンソー 半導体基板の生産制御装置
JP4248210B2 (ja) * 2002-09-24 2009-04-02 大日本スクリーン製造株式会社 基板処理装置及びそのスケジュール作成方法
JP2012064881A (ja) * 2010-09-17 2012-03-29 Hitachi Kokusai Electric Inc 基板処理システム
JP6121846B2 (ja) * 2013-08-15 2017-04-26 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、基板処理方法、および基板処理システム

Also Published As

Publication number Publication date
CN110462785A (zh) 2019-11-15
JPWO2018179353A1 (ja) 2019-11-07
WO2018179353A1 (ja) 2018-10-04
JP6802903B2 (ja) 2020-12-23
CN110462785B (zh) 2023-08-11

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