CN110243729B - 粒子计数器 - Google Patents

粒子计数器 Download PDF

Info

Publication number
CN110243729B
CN110243729B CN201910173746.5A CN201910173746A CN110243729B CN 110243729 B CN110243729 B CN 110243729B CN 201910173746 A CN201910173746 A CN 201910173746A CN 110243729 B CN110243729 B CN 110243729B
Authority
CN
China
Prior art keywords
light
optical path
path length
particles
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910173746.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN110243729A (zh
Inventor
松田朋信
进村正树
齐藤光秋
山川雄生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Publication of CN110243729A publication Critical patent/CN110243729A/zh
Application granted granted Critical
Publication of CN110243729B publication Critical patent/CN110243729B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/075Investigating concentration of particle suspensions by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042Investigating dispersion of solids
    • G01N2015/0053Investigating dispersion of solids in liquids, e.g. trouble
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434Optical arrangements
    • G01N2015/1454Optical arrangements using phase shift or interference, e.g. for improving contrast
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486Counting the particles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1493Particle size

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201910173746.5A 2018-03-09 2019-03-07 粒子计数器 Active CN110243729B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-043571 2018-03-09
JP2018043571A JP7071849B2 (ja) 2018-03-09 2018-03-09 パーティクルカウンタ

Publications (2)

Publication Number Publication Date
CN110243729A CN110243729A (zh) 2019-09-17
CN110243729B true CN110243729B (zh) 2022-07-15

Family

ID=67843816

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910173746.5A Active CN110243729B (zh) 2018-03-09 2019-03-07 粒子计数器

Country Status (5)

Country Link
US (1) US10705010B2 (cg-RX-API-DMAC7.html)
JP (1) JP7071849B2 (cg-RX-API-DMAC7.html)
KR (1) KR102166583B1 (cg-RX-API-DMAC7.html)
CN (1) CN110243729B (cg-RX-API-DMAC7.html)
TW (1) TWI685650B (cg-RX-API-DMAC7.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102104987B1 (ko) 2011-12-01 2020-04-28 파티클 머슈어링 시스템즈, 인크. 입자 크기 및 농도 측정을 위한 검출 스킴
KR102601473B1 (ko) 2017-10-26 2023-11-10 파티클 머슈어링 시스템즈, 인크. 입자 측정을 위한 시스템 및 방법
US10928297B2 (en) 2019-01-09 2021-02-23 University Of Washington Method for determining detection angle of optical particle sizer
WO2020219841A1 (en) 2019-04-25 2020-10-29 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
KR102886900B1 (ko) 2019-11-22 2025-11-14 파티클 머슈어링 시스템즈, 인크. 간섭 입자 검출 및 작은 크기의 입자들 검출을 위한 고급 시스템 및 방법
JP7420551B2 (ja) * 2019-12-27 2024-01-23 リオン株式会社 粒子測定装置
KR20230021732A (ko) 2020-06-09 2023-02-14 파티클 머슈어링 시스템즈, 인크. 입사 광과 조합된 산란 광을 통한 입자 검출
KR102622195B1 (ko) * 2021-12-02 2024-01-05 세메스 주식회사 약액 검사 장치와, 이를 포함하는 기판 처리 장치 및 기판을 처리하는 약액을 검사하는 방법
US12326393B2 (en) * 2022-01-21 2025-06-10 Particle Measuring Systems, Inc. Enhanced dual-pass and multi-pass particle detection
WO2024254011A1 (en) * 2023-06-06 2024-12-12 Entegris, Inc. Optical particle counter and methods
US20240426738A1 (en) * 2023-06-06 2024-12-26 Entegris, Inc. Optical particle counter and methods
US12461010B2 (en) 2023-11-16 2025-11-04 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8600202D0 (en) * 1986-01-06 1986-02-12 Froome K D Apparatus for distance measurement
NO163384C (no) * 1987-12-18 1990-05-16 Norsk Hydro As Fremgangsmaate ved automatisk partikkelanalyse og anordning for dens utfoerelse.
JPH0240535A (ja) * 1988-07-30 1990-02-09 Horiba Ltd 部分測定型微粒子カウンター
US5383024A (en) * 1992-08-12 1995-01-17 Martin Marietta Energy Systems, Inc. Optical wet steam monitor
NL1000711C2 (nl) * 1995-06-30 1996-12-31 Stichting Tech Wetenschapp Beeldvorming en karakterisatie van het focale veld van een lens door ruimtelijke autocorrelatie.
JPH10232204A (ja) * 1996-12-16 1998-09-02 Seitai Hikari Joho Kenkyusho:Kk 屈折率測定装置
US6201608B1 (en) * 1998-03-13 2001-03-13 Optical Biopsy Technologies, Inc. Method and apparatus for measuring optical reflectivity and imaging through a scattering medium
JP2000018918A (ja) * 1998-07-03 2000-01-21 Tokyo Seimitsu Co Ltd レーザ干渉式可動体の移動量検出装置
TW445369B (en) * 2000-04-18 2001-07-11 Cheng Jou Heterodyne interferometer phase measurement system
US6611339B1 (en) * 2000-06-09 2003-08-26 Massachusetts Institute Of Technology Phase dispersive tomography
US6587206B1 (en) * 2000-10-18 2003-07-01 Lucent Technologies Inc. Method for characterizing particles in a liquid medium using interferometry
JP2002333304A (ja) * 2001-05-08 2002-11-22 Canon Inc 光ヘテロダイン干渉計装置
JP2003121338A (ja) * 2001-10-12 2003-04-23 Nikkiso Co Ltd 粒度分布測定方法および装置
JP2003270120A (ja) 2002-03-18 2003-09-25 Rion Co Ltd 粒子検出器
JP3860162B2 (ja) * 2003-10-20 2006-12-20 大塚電子株式会社 位相変調型干渉法を用いた動的光散乱測定装置
US9297737B2 (en) * 2004-03-06 2016-03-29 Michael Trainer Methods and apparatus for determining characteristics of particles
JP4459961B2 (ja) * 2004-08-20 2010-04-28 三菱電機株式会社 レーザ位相差検出装置およびレーザ位相制御装置
WO2006030482A1 (ja) * 2004-09-13 2006-03-23 Mitsubishi Denki Kabushiki Kaisha レーザー光路長差検出装置、レーザー位相制御装置並びにコヒーレント光結合装置
DE102004059526B4 (de) * 2004-12-09 2012-03-08 Sirona Dental Systems Gmbh Vermessungseinrichtung und Verfahren nach dem Grundprinzip der konfokalen Mikroskopie
JP3995684B2 (ja) * 2004-12-21 2007-10-24 リオン株式会社 粒子計数器
JP2007114160A (ja) * 2005-10-24 2007-05-10 Sumitomo Electric Ind Ltd 光コヒーレンストモグラフィー装置
CN101322025B (zh) * 2005-12-07 2011-08-03 株式会社拓普康 光图像测量装置
JP2007271349A (ja) * 2006-03-30 2007-10-18 Fujifilm Corp 光学特性検査装置及び光学特性検査方法
JP2007333409A (ja) * 2006-06-12 2007-12-27 Horiba Ltd 浮遊粒子測定装置
DE102007039434A1 (de) * 2007-08-21 2009-02-26 Prüftechnik Dieter Busch AG Verfahren und Vorrichtung zum Erfassen von Partikeln in einer strömenden Flüssigkeit
JP5306041B2 (ja) * 2008-05-08 2013-10-02 キヤノン株式会社 撮像装置及びその方法
CN102460063B (zh) * 2009-06-19 2014-04-09 齐戈股份有限公司 等路径干涉仪
JP5325679B2 (ja) * 2009-07-03 2013-10-23 富士フイルム株式会社 低コヒーレンス光源を用いた動的光散乱測定装置及び光散乱強度測定方法
JP5366728B2 (ja) * 2009-09-14 2013-12-11 北斗電子工業株式会社 液体中の粒子のサイズの検出方法および装置
JP5946193B2 (ja) * 2011-11-24 2016-07-05 国立大学法人東京農工大学 測定装置及び測定方法
WO2013084444A1 (ja) * 2011-12-05 2013-06-13 リオン株式会社 生物粒子計数器、生物粒子計数方法、透析液監視システム及び浄水監視システム
JP5362895B1 (ja) * 2012-11-06 2013-12-11 リオン株式会社 光散乱式粒子計数器
JP2014153063A (ja) * 2013-02-05 2014-08-25 Pulstec Industrial Co Ltd 動的光散乱測定装置及び動的光散乱測定装置の光路長調整方法
CN103575638B (zh) * 2013-07-26 2016-06-15 中国计量学院 一种光散射式粒子计数器及其粒径分布算法
WO2015084676A1 (en) * 2013-12-04 2015-06-11 Iris International, Inc. Flow cytometer
WO2015099116A1 (ja) * 2013-12-27 2015-07-02 株式会社堀場製作所 粒子計数方法および粒子計数装置
US10345216B2 (en) * 2014-08-20 2019-07-09 Research Triangle Institute Systems, devices, and methods for flow control and sample monitoring control
JP5719473B1 (ja) * 2014-09-25 2015-05-20 リオン株式会社 薬液用パーティクルカウンタ
DE112015006083T5 (de) * 2015-01-30 2017-11-02 Hamamatsu Photonics K.K. Interferenz-beobachtungsvorrichtung und interferenz-beobachtungsverfahren
JP5859154B1 (ja) 2015-03-06 2016-02-10 リオン株式会社 パーティクルカウンタ
JP2017003434A (ja) * 2015-06-10 2017-01-05 キヤノン株式会社 屈折率の計測方法、計測装置、光学素子の製造方法
WO2017057652A1 (en) * 2015-09-30 2017-04-06 Canon Kabushiki Kaisha Optical coherence tomographic apparatus, and optical coherence tomographic system
JP6030740B1 (ja) * 2015-12-03 2016-11-24 リオン株式会社 パーティクルカウンタ
WO2017109928A1 (ja) * 2015-12-25 2017-06-29 ギガフォトン株式会社 レーザ照射装置
JP6654059B2 (ja) * 2016-02-18 2020-02-26 アズビル株式会社 粒子検出システム及び粒子の検出方法
US20180259441A1 (en) * 2017-03-07 2018-09-13 Axsun Technologies, Inc. OCT Sensing of Particulates in Oil
EP3376204A1 (en) * 2017-03-15 2018-09-19 Koninklijke Philips N.V. Laser sensor module for particle detection with offset beam
CN107289866A (zh) * 2017-06-01 2017-10-24 上海理工大学 多角度测量短碳纳米管直径与长度的方法
JP6413006B1 (ja) * 2017-11-28 2018-10-24 リオン株式会社 パーティクルカウンタ
CN112345421B (zh) * 2020-11-13 2024-07-26 浙江大学 一种用于含杂液滴物理参数测量的消光彩虹测量方法及装置

Also Published As

Publication number Publication date
US10705010B2 (en) 2020-07-07
KR20190106724A (ko) 2019-09-18
JP2019158478A (ja) 2019-09-19
TW201939011A (zh) 2019-10-01
JP7071849B2 (ja) 2022-05-19
TWI685650B (zh) 2020-02-21
KR102166583B1 (ko) 2020-10-16
US20190277745A1 (en) 2019-09-12
CN110243729A (zh) 2019-09-17

Similar Documents

Publication Publication Date Title
CN110243729B (zh) 粒子计数器
JP5859154B1 (ja) パーティクルカウンタ
JP6030740B1 (ja) パーティクルカウンタ
CN109900602B (zh) 粒子计数器
JP6356366B1 (ja) 粒子サイズ検出のためのレーザセンサ
US20190195776A1 (en) Common-path interferometric scattering imaging system and a method of using common-path interferometric scattering imaging to detect an object
CN108459040B (zh) 基于金刚石nv色心的磁悬浮加速度计的差分检测方法
JP2018510345A (ja) 自動移動可能な清掃装置
JPH01292235A (ja) 流体検査装置
CN105223163A (zh) 一种基于古依相移π反转检测物体精细结构的装置
CN109211406B (zh) 傅立叶变换红外分光光度计
WO2019059018A1 (ja) フーリエ分光分析装置
US11662292B2 (en) Measurement apparatus and method
JP2019015616A5 (cg-RX-API-DMAC7.html)
JP6381779B2 (ja) テラヘルツ波測定装置
JP3920218B2 (ja) 表面検査装置
CN115144354A (zh) 一种双通道正交式干涉仪动镜控制系统
JPH07243965A (ja) 光散乱媒体の吸光情報検出方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant