CN110045410B - 辐射检测装置及其制造方法、辐射检测系统 - Google Patents

辐射检测装置及其制造方法、辐射检测系统 Download PDF

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Publication number
CN110045410B
CN110045410B CN201910219458.9A CN201910219458A CN110045410B CN 110045410 B CN110045410 B CN 110045410B CN 201910219458 A CN201910219458 A CN 201910219458A CN 110045410 B CN110045410 B CN 110045410B
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sensor substrates
sensor
radiation detection
sheet
detection device
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Chinese (zh)
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CN110045410A (zh
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小野伸二
石井孝昌
西部航太
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Canon Inc
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Canon Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/46—Arrangements for interfacing with the operator or the patient
    • A61B6/461—Displaying means of special interest
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48—Diagnostic techniques
    • A61B6/486—Diagnostic techniques involving generating temporal series of image data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20185—Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/29—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to radiation having very short wavelengths, e.g. X-rays, gamma-rays or corpuscular radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Surgery (AREA)
  • Optics & Photonics (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biophysics (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Human Computer Interaction (AREA)
  • Measurement Of Radiation (AREA)
CN201910219458.9A 2013-12-13 2014-10-30 辐射检测装置及其制造方法、辐射检测系统 Active CN110045410B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2013258139A JP6270450B2 (ja) 2013-12-13 2013-12-13 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法
JP2013-258139 2013-12-13
PCT/JP2014/078874 WO2015087636A1 (ja) 2013-12-13 2014-10-30 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法
CN201480068223.XA CN105829916B (zh) 2013-12-13 2014-10-30 辐射检测装置、辐射检测系统、以及用于制造辐射检测装置的方法

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CN201480068223.XA Division CN105829916B (zh) 2013-12-13 2014-10-30 辐射检测装置、辐射检测系统、以及用于制造辐射检测装置的方法

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CN110045410A CN110045410A (zh) 2019-07-23
CN110045410B true CN110045410B (zh) 2023-01-03

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CN201910219458.9A Active CN110045410B (zh) 2013-12-13 2014-10-30 辐射检测装置及其制造方法、辐射检测系统
CN201811096760.1A Active CN109239761B (zh) 2013-12-13 2014-10-30 辐射检测装置、辐射检测系统、以及用于制造辐射检测装置的方法
CN201480068223.XA Active CN105829916B (zh) 2013-12-13 2014-10-30 辐射检测装置、辐射检测系统、以及用于制造辐射检测装置的方法

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CN201480068223.XA Active CN105829916B (zh) 2013-12-13 2014-10-30 辐射检测装置、辐射检测系统、以及用于制造辐射检测装置的方法

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US (2) US20160291172A1 (cg-RX-API-DMAC7.html)
JP (1) JP6270450B2 (cg-RX-API-DMAC7.html)
KR (1) KR101818874B1 (cg-RX-API-DMAC7.html)
CN (3) CN110045410B (cg-RX-API-DMAC7.html)
DE (1) DE112014005663B4 (cg-RX-API-DMAC7.html)
GB (1) GB2536394B (cg-RX-API-DMAC7.html)
WO (1) WO2015087636A1 (cg-RX-API-DMAC7.html)

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JP6877289B2 (ja) * 2017-07-31 2021-05-26 キヤノン株式会社 放射線検出装置、放射線検出システム、及び放射線出装置の製造方法
JP6601825B2 (ja) 2018-04-06 2019-11-06 株式会社ＥｍｂｏｄｙＭｅ 画像処理装置および２次元画像生成用プログラム
JP6659182B2 (ja) 2018-07-23 2020-03-04 キヤノン株式会社 放射線撮像装置、その製造方法及び放射線撮像システム
EP4039193B1 (en) * 2019-09-30 2025-08-13 FUJIFILM Corporation Radiation imaging device and radiation imaging device control method
JP7845191B2 (ja) 2020-12-04 2026-04-14 株式会社レゾナック 半導体装置を製造する方法
TWI904292B (zh) * 2020-12-04 2025-11-11 日商力森諾科股份有限公司 固化性樹脂膜、半導體裝置製造用膜材料、半導體裝置製造用固化性樹脂組成物、及製造半導體裝置之方法
JP7608148B2 (ja) * 2020-12-23 2025-01-06 浜松ホトニクス株式会社 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット

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CN102901979A (zh) * 2011-07-26 2013-01-30 通用电气公司 具有成角度的表面的辐射探测器及其制造方法

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US5381014B1 (en) * 1993-12-29 1997-06-10 Du Pont Large area x-ray imager and method of fabrication
US5844243A (en) * 1997-07-15 1998-12-01 Direct Radiography Co. Method for preparing digital radiography panels
JP2002341042A (ja) * 2001-05-21 2002-11-27 Canon Inc 光電変換装置
JP2004303925A (ja) * 2003-03-31 2004-10-28 Canon Inc 撮像用基板
JP2006052979A (ja) * 2004-08-10 2006-02-23 Canon Inc 放射線検出装置及びシンチレータパネル
JP2007017215A (ja) * 2005-07-06 2007-01-25 Fujifilm Holdings Corp 放射線像変換パネルの製造方法
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CN102608647A (zh) * 2011-01-13 2012-07-25 佳能株式会社 辐射成像设备、辐射成像系统和制造辐射成像设备的方法
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Also Published As

Publication number Publication date
GB2536394B (en) 2020-12-09
JP2015114268A (ja) 2015-06-22
JP6270450B2 (ja) 2018-01-31
CN110045410A (zh) 2019-07-23
US20200183022A1 (en) 2020-06-11
DE112014005663B4 (de) 2025-08-21
US11226419B2 (en) 2022-01-18
GB2536394A (en) 2016-09-14
WO2015087636A1 (ja) 2015-06-18
KR101818874B1 (ko) 2018-01-15
GB201612140D0 (en) 2016-08-24
CN109239761B (zh) 2023-01-10
KR20160094438A (ko) 2016-08-09
CN105829916B (zh) 2019-04-02
CN109239761A (zh) 2019-01-18
CN105829916A (zh) 2016-08-03
US20160291172A1 (en) 2016-10-06
DE112014005663T5 (de) 2016-09-15

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