CN109023288B

CN109023288B - OLED evaporation equipment with high-efficient evaporation equipment

Info

Publication number: CN109023288B
Application number: CN201811204513.9A
Authority: CN
Inventors: 曹云娟
Original assignee: Huancaixing Technology Ningbo Co ltd
Current assignee: Huancaixing Technology (Ningbo) Co.,Ltd.
Priority date: 2017-12-08
Filing date: 2017-12-08
Publication date: 2020-10-13
Anticipated expiration: 2037-12-08
Also published as: CN107805784B; CN109112487A; CN109207928A; CN109023288A; CN109023246B; CN109023245B; CN109023246A; CN109182975A; CN107805784A; CN109023245A

Abstract

The invention relates to OLED evaporation equipment with a high-efficiency evaporation working device, which comprises an evaporation working device and an OLED substrate feeding device which are respectively arranged in front and at the back along the horizontal direction, wherein the evaporation working device is provided with a base capable of moving back and forth, and a limiting sealing ring, an assembling ring and a separating ring are sequentially arranged on the base in a straight line shape along the horizontal direction. The invention utilizes the centrifugal principle and the advantages of the hollow shaft motor structure, changes the original design of basic tiled arrangement into annular cylindrical arrangement, enables more OLED substrates to be accommodated in a single vacuum chamber, and simultaneously generates the effect similar to the centrifugation through the rotation of the OLED substrates, obviously improves the force of vapor deposition material molecules in the vacuum chamber impacting the substrates, improves the uniformity of film coating while increasing the production efficiency, has good tightness of the whole structure, and reduces the leakage of pollution.

Description

OLED evaporation equipment with high-efficient evaporation equipment

Technical Field

The invention relates to the technical field of OLED manufacturing, in particular to OLED evaporation equipment with an efficient evaporation working device.

Background

In the known technical field, the front plate segment process is the most important link in the whole OLED process, and the specific flow is as follows: after the TFT substrate is cleaned and dried in different modes, the TFT substrate is sent into a nitrogen environment to be cooled, and the substrate is inverted to enable the film surface to face downwards. The processed substrate was sent into a vacuum chamber to perform vapor deposition of each functional layer and light-emitting layer. And after evaporation, carrying out functional and appearance detection and polaroid attachment on the AMOLED, and finally entering a module section process.

In the evaporation link of the OLED, special evaporation equipment is needed, namely evaporation, evaporated materials are evaporated into atoms or molecules by heating methods such as current heating, electron beam bombardment heating or laser heating in vacuum, and the atoms or the molecules move freely with a larger free path and collide the surface of a substrate to be condensed, so that a thin film is formed. Although the principle of the evaporation process is not complex, a plurality of problems need to be solved in actual mass production, the main technology of the existing core equipment evaporation machine is mastered in a few companies in Japan, the capacity is extremely limited, and the following problems are mainly existed:

firstly, the problem of replacement of an evaporation source: after evaporation material consumes almost, need take out from the vacuum chamber and add or change, how to reduce the frequency of changing, effectively guarantee to handle with the pneumatics of vacuum chamber around changing, to improving production efficiency, it is very critical to reduce the maintenance rate of shutting down, the problem of pollution still produces easily simultaneously, current equipment generally becomes the vacuum chamber design directly to open, the design of closed formula, it is comparatively frequent to change the coating by vaporization source, and the evacuation of vacuum chamber is handled and is consumeed for long time, it is difficult to accurate quantization to the control of temperature technology, need in production continuous intermittent type nature debug repeatedly.

Secondly, the number of OLED panels processed in a vacuum chamber at a time is as follows: the general thinking of current evaporation equipment all adopts the design of arranging the base plate level and placing, so the top of base plate is generally arranged in to the evaporation source, this kind of arrangement mode is though comparatively mature, but the stability of technological parameter control need be considered to this kind of mode, can not be the large tracts of land with numerous base plates as for same vacuum chamber in, so single processing is small in quantity, occupation space is big, high to the requirement of evacuation equipment, and along with the increase of processing substrate size, evaporation heating device's structure is arranged more complicatedly, technological parameter's stability is more difficult to control.

Thirdly, stability of evaporation process parameters: traditional coating by vaporization equipment generally removes the absorption base plate through the free motion of coating by vaporization material molecule, and the parameter that can control in the coating by vaporization link only basically is to arranging of temperature and heating source, so technological stability is not high always to lead to the relatively poor problem of yields, the solution mode of actual volume production can only be the parameter of continuous debugging best, improves the even degree of coating film.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: overcome above-mentioned problem, provide an OLED coating by vaporization equipment with high-efficient coating by vaporization equipment, can make the structure of coating by vaporization equipment arrange compactness, machining efficiency height, be convenient for control technological parameter, promote the yields of volume production and the even degree of coating film simultaneously.

The technical scheme adopted by the invention for solving the technical problems is as follows: an OLED evaporation equipment with a high-efficiency evaporation working device comprises an evaporation working device and an OLED substrate feeding device which are respectively arranged in the front and at the back along the horizontal direction,

the evaporation working device is provided with a base capable of moving back and forth, a limiting sealing ring, an assembling ring and a separating ring are sequentially arranged on the base in a straight line shape along the horizontal direction, a plurality of isosceles trapezoid spacing blocks are rotatably arranged on the front end surface of the base by taking the central axis of the separating ring as the center, the smaller end of each isosceles trapezoid spacing block faces the direction of the central axis, an evaporation source mounting slide rail is arranged between every two adjacent isosceles trapezoid spacing blocks, one end of each evaporation source mounting slide rail is embedded between every two adjacent isosceles trapezoid spacing blocks, the other end of each evaporation source mounting slide rail penetrates through the assembling ring and is fixedly connected with the limiting sealing ring, a mounting cavity is formed between every two adjacent evaporation source mounting slide rails, an electromagnetic heating device is arranged in each mounting cavity, slide grooves extending along the axial direction are arranged on the evaporation source mounting slide rails, and an evaporation source device is arranged in each slide groove, and the center of the limiting sealing ring is provided with a sealing end cover driven by an oil cylinder, and the evaporation source devices are connected with the inner side surface of the sealing end cover.

Further, as a specific implementation manner, the OLED substrate feeding device in the present invention has a hollow motor outer base fixedly connected to the separation ring, a hollow rotating cup is disposed at the center of the hollow motor outer base, the front end of the hollow rotating cup is rotatably connected to the inner ring of the separation ring, a rotating end cover is disposed at the center of the hollow rotating cup, and an OLED substrate fixing device is disposed at the front end of the rotating end cover.

Furthermore, in order to facilitate the processing and installation of actual parts, the assembling ring is composed of a first assembling ring, a second assembling ring and a third assembling ring which are arranged side by side, and the side walls of the first assembling ring, the second assembling ring and the third assembling ring are respectively provided with a vacuum-pumping pipe joint.

Further, as a specific heating device, the electromagnetic heating device provided by the invention is provided with an electromagnetic heating rod, the end part of the electromagnetic heating rod is provided with a limiting connecting flange head, and the limiting connecting flange head is arranged on the end surface of the limiting sealing ring.

Furthermore, in order to meet the requirements of different parameters and adjust the gap of the evaporation material during film coating, a T-shaped sliding head is arranged between the separating ring and the evaporation source mounting slide rail and connected, and the T-shaped sliding head can reciprocate along the radial direction.

Further, in order to meet the requirement of full-automatic production, the OLED substrate fixing device provided by the invention is provided with a support rod driven by a telescopic oil cylinder, stabilizing slide rails are respectively arranged on two sides of the support rod, driving mechanisms of the support rod and the stabilizing slide rails are respectively arranged on the outer side of a rotating end cover, a sliding sleeve is arranged between the two stabilizing slide rails, a limiting flange is arranged at the end part of the support rod, a cylindrical support is arranged on the limiting flange, a plurality of sealing limiting strips extending along the axial direction are arranged on the outer edge of the cylindrical support by taking the central axis of the cylindrical support as the center, a support panel used for mounting an OLED substrate is arranged between every two adjacent sealing limiting strips, the middle part of the support panel is connected with the cylindrical support through a rotating shaft pin, and a fastening adjusting piece is arranged between every two adjacent support panels, a push-pull rod is hinged between the fastening adjusting piece and the sliding sleeve, a buffering support cylinder is arranged in the middle of the push-pull rod, the cylinder body part of the buffering support cylinder is in an obliquely upward state with the axial direction and is hinged with the push-pull rod, and the extending end part of the buffering support cylinder abuts against the inner side surface of the sealing end cover.

Further, as a specific structural form and a sealing structure for isolating a vacuum environment, the cross section of the sealing limit strip is in an isosceles trapezoid shape, a median plane extending along the radial direction of the sealing limit strip penetrates through the central axis of the cylindrical support, the smaller side of the end part of the sealing limit strip is arranged towards the central axis of the cylindrical support, and a clamping groove matched with the cross section of the sealing limit strip is formed in the end surface of the fastening adjusting piece.

Furthermore, in order to adjust appropriate parameters in the initial link, a shielding cylinder is arranged between the evaporation source device and the supporting panel, and the shielding cylinder can penetrate through the sealing end cover.

Further, in order to improve the pressure maintaining efficiency and temperature loss of vacuum, the sealing end cover and the rotating end cover are of double-layer structures, and hollow heat insulation layers are arranged inside the sealing end cover and the rotating end cover.

The invention has the beneficial effects that: the invention has simple structure, skillfully utilizes the centrifugal principle and the advantages of the hollow shaft motor structure, changes the original design of basic flat arrangement into annular cylindrical arrangement, so that more OLED substrates can be accommodated in a single vacuum chamber, and simultaneously generates the effect similar to the centrifugal effect through the rotation of the OLED substrates, so that the force of the evaporation material molecules in the vacuum chamber impacting the substrates is obviously improved, the production efficiency is improved, and the uniformity of the coating film can be improved The power supply access position, the evaporation source replacement position and the substrate taking-out can show the structural superiority and reduce the leakage of pollution.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the invention with the end closure removed;

FIG. 3 is a schematic illustration of an explosive structure of the present invention;

FIG. 4 is a first schematic diagram of a partial explosion configuration of the present invention;

FIG. 5 is a second schematic illustration of a partial explosion configuration of the present invention;

FIG. 6 is a schematic structural diagram of an OLED substrate feeding device according to the present invention;

FIG. 7 is a cross-sectional view of an OLED substrate fixture of the present invention;

FIG. 8 is an enlarged partial schematic view at A of FIG. 7;

Detailed Description

The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.

The preferred embodiment of the OLED evaporation equipment with high efficiency evaporation working device of the present invention as shown in fig. 1 to 8 comprises an evaporation working device 1 and an OLED substrate feeding device 2 respectively arranged in front and back in the horizontal direction,

the evaporation working device 1 is provided with a base 11 capable of moving back and forth, a limiting sealing ring 12, an assembling ring and a separating ring 16 are sequentially arranged on the base 11 in a straight line shape along the horizontal direction, in view of convenience in manufacturing and processing and simultaneously matching requirements of different sizes, the assembling ring is formed by arranging a first assembling ring 13, a second assembling ring 14 and a third assembling ring 15 side by side, vacuum pumping pipe joints 17 are arranged on the side walls of the first assembling ring 13, the second assembling ring 14 and the third assembling ring 15, the assembling ring can also be arranged at the optimal position determined by test, a plurality of isosceles trapezoid spacing blocks 18 are rotatably arranged on the front end surface of the separating ring 16 by taking the central axis as the center, the smaller end of each isosceles trapezoid spacing block 18 faces the central axis direction, an evaporation source mounting slide rail 19 is arranged between two adjacent isosceles trapezoid spacing blocks 18, one end of each evaporation source mounting slide rail 19 is embedded between two adjacent isosceles trapezoid spacing blocks 18, the radial maximum position can be smoothly clamped and limited by two trapezoidal structures, the other end penetrates through the assembly ring and is fixedly connected with the limiting sealing ring 12, an installation cavity is formed between two adjacent evaporation source installation slide rails 19, an electromagnetic heating device 111 is arranged in each installation cavity, the electromagnetic heating device 111 is provided with an electromagnetic heating rod 1111, a limiting connecting flange head 1112 is arranged at the end part of the electromagnetic heating rod 1111, the limiting connecting flange head 1112 is installed on the end surface of the limiting sealing ring 12, the cavity position formed by ingenious application interval arrangement is used for placing the heating device, obviously, the heating device is not limited to the electromagnetic heating device, other heating excitation structures can be adopted, a power supply can be uniformly wired from the end surface of the limiting sealing ring 12, a circuit structure is prevented from directly entering a vacuum cavity, and slide grooves extending along the axial direction are arranged on the evaporation source installation slide rails 19, an evaporation source device 112 is arranged in the chute, a sealing end cover 113 driven by an oil cylinder is arranged at the center of the limiting sealing ring 12, the evaporation source devices 112 are all connected with the inner side surface of the sealing end cover 113, when the replacement is needed, the sealing end cover 113 is directly driven to move outwards, the evaporation source device 112 is taken out along the axial direction,

in order to meet the manufacturing standard of the same device and improve the universality of the device, a T-shaped slide head connection can be arranged between the separating ring 16 and the evaporation source mounting slide rail 19, and the T-shaped slide head can reciprocate along the radial direction to correct the size of the radial gap so as to meet the requirements of different processes,

the OLED substrate feeding device 2 is provided with a hollow motor outer seat 21 fixedly connected with a separating ring 16, a hollow rotating cup 22 is arranged at the center of the hollow motor outer seat 21, the front end of the hollow rotating cup 22 is rotatably connected with an inner ring of the separating ring 16, a rotating end cover 23 is arranged at the center of the hollow rotating cup 22, an OLED substrate fixing device 24 is arranged at the front end of the rotating end cover 23, the structural characteristics that the outer ring of the hollow motor is fixed, the inner ring rotates and is vacant are ingeniously utilized, the inner cavity of the hollow rotating cup 22 is designed to meet the space requirement of the front-back movement of the OLED substrate feeding device 2, the integral structure is more compact and reliable,

the OLED substrate fixing device 24 has a support rod 241 driven by a telescopic cylinder, two sides of the support rod 241 are respectively provided with a stabilizing slide rail 242, driving mechanisms of the support rod 241 and the stabilizing slide rail 242 are both arranged outside the rotating end cover 23, a sliding sleeve 243 is arranged between the two stabilizing slide rails 242, the end of the support rod 241 is provided with a limiting flange 244, a cylindrical bracket 245 is mounted on the limiting flange 244, a plurality of sealing limiting strips 246 extending along the axial direction are arranged on the outer edge of the cylindrical bracket 245 by taking the central axis of the cylindrical bracket 245 as the center, a support panel 247 for mounting the OLED substrate is arranged between two adjacent sealing limiting strips 246, the middle part of the support panel 247 is connected with the cylindrical bracket 245 through a rotating shaft pin, a fastening adjusting piece 248 is arranged between the two adjacent support panels 247, and a push-pull rod 249 is hinged between the fastening adjusting piece 248 and the sliding sleeve 243, a buffer supporting cylinder 250 is arranged in the middle of the push-pull rod 249, the cylinder body part of the buffer supporting cylinder 250 is in an obliquely upward state with the axial direction and is hinged with the push-pull rod 249, and the extending end part of the buffer supporting cylinder 250 abuts against the inner side surface of the sealing end cover 113.

The cross section of the sealing limit strip 246 is in an isosceles trapezoid shape, and the median plane of the sealing limit strip 246 extending along the radial direction penetrates through the central axis of the cylindrical support 245, so that the gap between the sealing limit strip 246 and the support panel 247 is tightly combined during evaporation, the vacuum chamber is not affected, the smaller side of the end part of the sealing limit strip 246 is arranged towards the central axis of the cylindrical support 245, the end surface of the fastening adjusting member 248 is provided with a clamping groove adapted to the cross section of the sealing limit strip 246 for limiting the radial pushing distance of the push-pull rod 249,

in order to adjust appropriate parameters in the initial step and avoid the generation of initial waste products, a shielding cylinder is arranged between the evaporation source device 112 and the supporting panel 247 and can penetrate through the sealing end cover 113, so that the shielding cylinder plays a role in shielding when parameters are debugged in the initial step and is moved out when the optimal process environment is achieved, and the smooth realization of the whole process is not influenced. Because the two ends of the whole structure are provided with the moving mechanisms, in order to improve the pressure maintaining efficiency and the temperature loss of vacuum, the sealing end cover 113 and the rotating end cover 23 are both of a double-layer structure, and hollow heat insulation layers are arranged in the sealing end cover 113 and the rotating end cover.

In the above embodiment, the main form is that the evaporation source is stationary, when the evaporation material molecules form a relatively stable annular colloid environment in the vacuum chamber, along with the rotation of the enclosed supporting panel 247, a part of the evaporation material molecules covers the OLED substrate, and another part of the evaporation material molecules will present a state similar to flicking and throwing out, and the evaporation material molecules can form a stable annular colloid environment at a controllable rotation speed, so as to improve the uniformity of the coating, and at the same time, the colloid environment of the evaporation material can form a stable tendency of rotating around the central axis, further improve the uniformity of the coating, and in the above environment which is continuously and repeatedly performed, the evaporation material molecules will also bear the impact force of the OLED substrate in the radial direction, thereby improving the effect of the coating, and obviously, the evaporation source device 112 of the evaporation working device 1 in the above embodiment can also be used, the provision of a reverse steering of the support panel 247, in combination with the principle of a hollow shaft motor, further accelerates the cyclic implementation of the above process.

The specific working process of this embodiment is as follows: in the working process, as shown in fig. 1, the whole device is kept in a closed state, the vacuumizing pipe joint 17 is vacuumized, when the pressure requirement is met, the electromagnetic heating device 111 is started, the heating is more uniform due to the arrangement of two-two intervals, the conversion efficiency is higher, after evaporation material molecules of the evaporation source device 112 overflow, the whole cylindrical support 245 rotates along with the rotation of the support rod 241, stepless speed regulation can be realized due to the characteristic of a hollow shaft motor, an optimal curve for controlling rotation parameters can be obtained through a previous test, the closed state of the sealing limit strip 246 and the fastening adjusting piece 248 is ensured by the stretching state of the push-pull rod 249, along with the completion of the evaporation process, the support rod 241 retreats backwards to drive the whole cylindrical support 245 to retreat, and after the inner cavity of the hollow rotating cup 22 is completely retreated, the sliding sleeve 243 horizontally moves, the push-pull rod 249 can be controlled to lift upwards, the fastening adjusting piece 248 is clamped into the sealing limit strip 246, the supporting panel 247 rotates and tilts upwards, the corresponding mechanical arm is matched at the moment, the coated OLED substrate is taken out, the OLED substrate to be processed is fed in, after the OLED substrate to be processed is basically fed in, the process is inverted, the buffering supporting cylinder 250 plays a role in supporting, buffering and connecting in the action of the push-pull rod 249, and the rigidity of the whole cylindrical support 245 is improved.

When the coating by vaporization material among the source device 112 of coating by vaporization completely, end cover 113 shifts out to the front side, bring out coating by vaporization source device 112 through the slide rail, realize adding or directly changing through robotic arm, whole device compact structure is reliable, can once only process polylith OLED base plate, the homoenergetic is realized through the automation at the head and the tail both ends homoenergetic of technology design, be favorable to whole OLED production line automation process design, also be convenient for control contaminated material overflow and technological parameter's control, the characteristics of overall structure have also fully utilized, can show the problem of solving the aforesaid needs.

In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims

1. The utility model provides an OLED evaporation equipment with high-efficient evaporation equipment, its characterized in that: comprises an evaporation working device (1) and an OLED substrate feeding device (2) which are respectively arranged in front and at back along the horizontal direction,

the evaporation working device (1) is provided with a base (11) capable of moving back and forth, a limiting sealing ring (12), an assembling ring and a separating ring (16) are sequentially arranged on the base (11) in a straight line shape along the horizontal direction, a plurality of isosceles trapezoid spacing blocks (18) are rotatably arranged on the front end surface of the separating ring (16) by taking the central axis of the separating ring as the center, the smaller end of each isosceles trapezoid spacing block (18) faces the direction of the central axis, evaporation source mounting sliding rails (19) are arranged between every two adjacent isosceles trapezoid spacing blocks (18), one end of each evaporation source mounting sliding rail (19) is embedded between every two adjacent isosceles trapezoid spacing blocks (18), the other end of each evaporation source mounting sliding rail penetrates through the assembling ring and is fixedly connected with the limiting sealing ring (12), a mounting cavity is formed between every two adjacent evaporation source mounting sliding rails (19), and an electromagnetic heating device (111) is arranged in each mounting cavity, sliding grooves extending along the axial direction are arranged on the evaporation source mounting sliding rails (19), an evaporation source device (112) is mounted in the sliding grooves, a sealing end cover (113) driven by an oil cylinder is arranged at the center of the limiting sealing ring (12), the evaporation source devices (112) are connected with the inner side surface of the sealing end cover (113),

the assembling ring is formed by arranging a first assembling ring (13), a second assembling ring (14) and a third assembling ring (15) in parallel, the side walls of the first assembling ring (13), the second assembling ring (14) and the third assembling ring (15) are all provided with vacuum tube joints (17),

the electromagnetic heating device (111) is provided with an electromagnetic heating rod (1111), the end part of the electromagnetic heating rod (1111) is provided with a limiting connecting flange head (1112), the limiting connecting flange head (1112) is arranged on the end surface of the limiting sealing ring (12),

a T-shaped sliding head is arranged between the separating ring (16) and the evaporation source mounting slide rail (19) for connection, and the T-shaped sliding head can reciprocate along the radial direction,

the OLED substrate feeding device (2) is provided with a hollow motor outer seat (21) fixedly connected with a separating ring (16), a hollow rotating cup (22) is arranged at the center of the hollow motor outer seat (21), the front end of the hollow rotating cup (22) is rotatably connected with an inner ring of the separating ring (16), a rotating end cover (23) is arranged at the center of the hollow rotating cup (22), an OLED substrate fixing device (24) is arranged at the front end of the rotating end cover (23),

the OLED substrate fixing device (24) is provided with a supporting rod (241) driven by a telescopic oil cylinder, two sides of the supporting rod (241) are respectively provided with a stabilizing slide rail (242), driving mechanisms of the supporting rod (241) and the stabilizing slide rail (242) are arranged on the outer side of a rotary end cover (23), a sliding sleeve (243) is arranged between the two stabilizing slide rails (242), the end part of the supporting rod (241) is provided with a limiting flange (244), a cylindrical support (245) is arranged on the limiting flange (244), a plurality of sealing limiting strips (246) extending along the axial direction are arranged on the outer edge of the cylindrical support (245) by taking the central axis of the cylindrical support (245) as the center, a supporting panel (247) used for installing an OLED substrate is arranged between the two adjacent sealing limiting strips (246), and the middle part of the supporting panel (247) is connected with the cylindrical support (245) through a rotating shaft pin, a fastening adjusting piece (248) is arranged between two adjacent supporting panels (247), a push-pull rod (249) is hinged between the fastening adjusting piece (248) and the sliding sleeve (243), a buffering supporting cylinder (250) is arranged in the middle of the push-pull rod (249), the cylinder body part of the buffering supporting cylinder (250) is in an inclined upward state with the axial direction and is hinged with the push-pull rod (249), the extending end part of the buffering supporting cylinder (250) is propped against the inner side surface of the sealing end cover (113),

the sealing end cover (113) is of a double-layer structure, and hollow heat insulation layers are arranged inside the sealing end cover.