CN213538078U - PVD instrument vacuum coating machine - Google Patents

PVD instrument vacuum coating machine Download PDF

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Publication number
CN213538078U
CN213538078U CN202022498721.3U CN202022498721U CN213538078U CN 213538078 U CN213538078 U CN 213538078U CN 202022498721 U CN202022498721 U CN 202022498721U CN 213538078 U CN213538078 U CN 213538078U
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fixedly connected
vacuum
wall
component
sides
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CN202022498721.3U
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Chinese (zh)
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邵永杰
曾道敏
朱永凯
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Hangzhou Road Jjh Chi Chuang Technology Co ltd
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Hangzhou Road Jjh Chi Chuang Technology Co ltd
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Abstract

The utility model provides a PVD tool vacuum coating machine. The PVD tool vacuum coating machine comprises a bracket; an operating component; the bottom of the operating assembly is fixedly connected to the top of the bracket; the top of the vacuum assembly is fixedly connected to the bottom of the bracket; the bottom of the coating component is fixedly connected to the bottom of the inner wall of the operation component, and the two sides of the fixing component are fixedly connected between the two sides of the inner wall of the operation component. The utility model provides a PVD instrument vacuum coating machine has the use that operating assembly can effectually provide a vacuum environment to can in time see inside coating film situation through the glass observation window, then can be stable fix the instrument that needs the coating film through the use of fixed subassembly, improved the practicality of device, can evenly be with the surface coating film of instrument through the use of coating film subassembly, the subassembly is mutually supported and is used the efficiency that has improved production.

Description

PVD instrument vacuum coating machine
Technical Field
The utility model relates to a coating film field especially relates to a PVD instrument vacuum coating machine.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and the main idea is divided into two types of evaporation and sputtering.
In the production and manufacturing industry, vacuum coating machines are often used for coating the surfaces of parts, most coating machines are used for placing articles in the vacuum coating machines, and the articles are blown down by evaporated gas in the coating process, so that the coating effect of the articles is poor, defective products are more, and the production efficiency is low.
Therefore, there is a need to provide a vacuum coater for PVD tools to solve the above problems.
Disclosure of Invention
The utility model provides a PVD instrument vacuum coating machine has solved the unable fixed more problem that leads to the wastrel of instrument.
In order to solve the technical problem, the utility model provides a PVD tool vacuum coating machine, which comprises a bracket;
an operating component; the bottom of the operating assembly is fixedly connected to the top of the bracket;
the top of the vacuum assembly is fixedly connected to the bottom of the bracket;
the bottom of the film coating assembly is fixedly connected to the bottom of the inner wall of the operation assembly, the film coating assembly comprises a voltage adjusting box, the bottom of the voltage adjusting box is fixedly connected with the bottom of the inner wall of the operation assembly, the top of the voltage adjusting box is fixedly connected with a liquid storage box, and the bottom of the inner wall of the liquid storage box is provided with a voltage emitter;
and the two sides of the fixing component are fixedly connected between the two sides of the inner wall of the operation component.
Preferably, the operation assembly comprises an operation frame, the bottom of the operation frame is fixedly connected with the top of the support, a silica gel pad is arranged on the front face of the operation frame, a box door is arranged on the operation frame, and a glass observation window is arranged on the front face of the box door.
Preferably, the vacuum assembly comprises a vacuum frame, the top of the vacuum frame is fixedly connected with the bottom of the support, the bottom of the inner wall of the vacuum frame is fixedly connected with a vacuum pump, an air exhaust port of the vacuum pump is provided with a double-way pipe, air exhaust pipes are arranged on two sides of the double-way pipe and penetrate through two sides of the inner wall of the vacuum frame, and an air exhaust base is arranged at the top of each air exhaust pipe.
Preferably, the top fixedly connected with that the incasement wall was deposited to liquid has the collection frame, the top of collecting the frame is rotated and is connected with flexible trachea, the first motor cabinet of right side fixed connection of case is deposited to liquid, the top fixedly connected with of first motor cabinet rotates the motor, the output shaft fixed connection who rotates the motor has power bevel gear.
Preferably, the top sliding connection that the case was deposited to liquid has the sliding block, the top of sliding block is provided with the spout, liquid is deposited and is rotated between the relative one side of case and be connected with first threaded rod, and the left side that the case was deposited to liquid is run through to the right side of first threaded rod, the supplementary conical gear of right side fixedly connected with of first threaded rod.
Preferably, the fixed subassembly includes the dead lever, the both sides of dead lever and the both sides fixed connection of operating element inner wall, it is connected with the second threaded rod to rotate between the both sides of dead lever inner wall, the both sides on second threaded rod surface are provided with the fixed block, two the equal fixedly connected with mount in bottom of fixed block.
Preferably, the surface of the right side of the second threaded rod is fixedly connected with a driven wheel, the bottom of the fixed rod is fixedly connected with a second motor base, the right side of the second motor base is fixedly connected with a mobile motor, and an output shaft of the mobile motor is fixedly connected with a power wheel.
Compared with the prior art, the utility model provides a PVD instrument vacuum coating machine has following beneficial effect:
the utility model provides a PVD instrument vacuum coating machine, the use of operating assembly can effectually provide a vacuum environment to can in time see inside coating film situation through the glass observation window, then can be stable fix the instrument that needs the coating film through the use of fixed subassembly, improved the practicality of device, can evenly be with the surface coating film of instrument through the use of coating film subassembly, the subassembly is mutually supported and is used the efficiency that has improved production.
Drawings
FIG. 1 is a schematic structural view of a PVD tool vacuum coater according to a preferred embodiment of the present invention;
FIG. 2 is a schematic front view of the structure of FIG. 1;
fig. 3 is a schematic structural diagram of a shown in fig. 1.
Reference numbers in the figures: 1. the device comprises a support, 2, an operation assembly, 21, an operation frame, 22, a silica gel pad, 23, a box door, 24, a glass observation window, 3, a vacuum assembly, 31, a vacuum frame, 32, a vacuum pump, 33, a double-way pipe, 34, an exhaust pipe, 35, an exhaust base, 4, a coating assembly, 41, a voltage regulation box, 42, a liquid storage box, 43, a voltage emitter, 44, a collection frame, 45, a telescopic air pipe, 46, a first motor base, 47, a rotating motor, 48, a power conical gear, 49, a sliding block, 410, a nozzle, 411, a first threaded rod, 412, an auxiliary conical gear, 5, a fixed assembly, 51, a fixed rod, 52, a second threaded rod, 53, a fixed block, 54, a fixed frame, 55, a driven wheel, 56, a second motor base, 57, a moving motor, 58 and a power wheel.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and embodiments.
Referring to fig. 1, fig. 2 and fig. 3, wherein fig. 1 is a schematic structural view of a PVD vacuum coater according to a preferred embodiment of the present invention; FIG. 2 is a schematic front view of the structure of FIG. 1; fig. 3 is a schematic structural diagram of a shown in fig. 1. The PVD tool vacuum coating machine comprises a bracket 1;
the operating assembly 2; operating assembly 2 the bottom of the operating assembly 2 is fixedly connected to the top of the bracket 1;
the top of the vacuum component 3 is fixedly connected to the bottom of the bracket 1;
the bottom of the coating component 4 is fixedly connected to the bottom of the inner wall of the operation component 2, the coating component 4 comprises a regulating voltage box 41, the regulating voltage box 41 is externally connected with a power supply, the bottom of the regulating voltage box 41 is fixedly connected with the bottom of the inner wall of the operation component 2, the top of the regulating voltage box 41 is fixedly connected with a liquid storage box 42, and the bottom of the inner wall of the liquid storage box 42 is provided with a voltage emitter 43;
and the two sides of the fixing component 5 are fixedly connected between the two sides of the inner wall of the operation component 2.
The operation assembly 2 comprises an operation frame 21, the bottom of the operation frame 21 is fixedly connected with the top of the support, a silica gel pad 22 is arranged on the front surface of the operation frame 21, a box door 23 is arranged on the operation frame 21, and a glass observation window 24 is arranged on the front surface of the box door 23.
Vacuum module 3 includes vacuum frame 31, the bottom fixed connection of the top of vacuum frame 31 and support 1, the bottom fixedly connected with vacuum pump 32 of vacuum frame 31 inner wall, vacuum pump 32 external power supply, the extraction opening of vacuum pump 32 is provided with two-way pipe 33, two sides of two-way pipe 33 all are provided with exhaust tube 34, two exhaust tubes 34 all run through the both sides of vacuum frame 31 inner wall, the top of two exhaust tubes 34 all is provided with air exhaust base 35, two air exhaust base 35 all set up in the both sides of operation frame 21 inner wall bottom.
The top fixedly connected with that the liquid deposited the case 42 inner wall has collection frame 44, and the top of collecting frame 44 is rotated and is connected with flexible trachea 45, and the first motor cabinet 46 of right side fixed connection of case 42 is deposited to liquid, and the top fixedly connected with of first motor cabinet 46 rotates motor 47, and the external power supply of rotation motor 47 is three-phase asynchronous motor, and the output shaft fixedly connected with power conical gear 48 of rotation motor 47.
The top of the liquid storage box 42 is slidably connected with a sliding block 49, the top of the sliding block 49 is provided with a nozzle 410, a first threaded rod 411 is rotatably connected between the opposite sides of the liquid storage box 42, the surface of the first threaded rod 411 is in threaded connection with the front surface of the sliding block 49, the right side of the first threaded rod 411 penetrates through the left side of the liquid storage box 42, and an auxiliary bevel gear 412 is fixedly connected to the right side of the first threaded rod 411.
The fixing component 5 comprises a fixing rod 51, two sides of the fixing rod 51 are fixedly connected with two sides of the inner wall of the operating component 2, a second threaded rod 52 is rotatably connected between two sides of the inner wall of the fixing rod 51, two fixing blocks 53 are arranged on two sides of the surface of the second threaded rod 52, and fixing frames 54 are fixedly connected to the bottoms of the two fixing blocks 53.
The surface of the right side of the second threaded rod 52 is fixedly connected with a driven wheel 55, the surfaces of the driven wheel 55 and a power wheel 58 are connected through a belt, the bottom of the fixed rod 51 is fixedly connected with a second motor base 56, the right side of the second motor base 56 is fixedly connected with a mobile motor 57, an external power supply of the mobile motor 57 is a three-phase asynchronous motor, and an output shaft of the mobile motor 57 is fixedly connected with the power wheel 58.
The working principle of the PVD tool vacuum coating machine provided by the utility model is as follows:
the box door 23 is opened, a required film coating tool is placed between the fixed frames 54, then the moving motor 57 is started, then the power wheel 58 is driven to rotate by the output shaft of the moving motor 57, the driven wheel 55 is driven to rotate by a belt, the second threaded rod 52 is driven to rotate by the rotation of the driven wheel 55, the fixed block 53 is driven to move by the rotation of the second threaded rod 52, the tool is fixed by the fixed frame 54, then the box door 23 is closed, the vacuum pump 32 is started, then the air in the operation frame 21 is pumped out by the air pumping base 35, the inside can reach a vacuum state due to the silica gel pad 22, then the voltage adjusting box 41 is started, the electric arc is emitted by the voltage emitter 43, then the liquid in the liquid storage box 42 is atomized, then the fog is sprayed out through the nozzle 410 by the telescopic air pipe 45, and then the rotating motor 47 is started to drive the, so that the first threaded rod 411 rotates and then slides the slide block 49 left and right.
Compared with the prior art, the utility model provides a PVD instrument vacuum coating machine has following beneficial effect:
the operation assembly 2 can effectively provide a vacuum environment, the inner coating situation can be seen through the glass observation window 24 in time, then the tool needing coating can be stably fixed through the fixing assembly 5, the practicability of the device is improved, the surface coating of the tool can be uniformly carried out through the coating assembly 4, and the assembly is matched with each other to improve the production efficiency.
The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent processes of the present invention are used in the specification and the attached drawings, or directly or indirectly applied to other related technical fields, and the same principle is included in the protection scope of the present invention.

Claims (7)

1. The utility model provides a PVD instrument vacuum coating machine which characterized in that: comprises a bracket (1);
an operating assembly (2); the bottom of the operating component (2) is fixedly connected to the top of the bracket (1);
the top of the vacuum component (3) is fixedly connected to the bottom of the bracket (1);
the bottom of the coating component (4) is fixedly connected to the bottom of the inner wall of the operation component (2), the coating component (4) comprises a voltage adjusting box (41), the bottom of the voltage adjusting box (41) is fixedly connected with the bottom of the inner wall of the operation component (2), the top of the voltage adjusting box (41) is fixedly connected with a liquid storage box (42), and the bottom of the inner wall of the liquid storage box (42) is provided with a voltage emitter (43);
the fixing component (5), the two sides of the fixing component (5) are fixedly connected between the two sides of the inner wall of the operation component (2).
2. The PVD tool vacuum coater according to claim 1, characterized in that the operating assembly (2) comprises an operating frame (21), the bottom of the operating frame (21) is fixedly connected with the top of the support, a silica gel pad (22) is arranged on the front surface of the operating frame (21), a box door (23) is arranged on the operating frame (21), and a glass observation window (24) is arranged on the front surface of the box door (23).
3. The PVD tool vacuum coater according to claim 1, characterized in that the vacuum assembly (3) comprises a vacuum frame (31), the top of the vacuum frame (31) is fixedly connected with the bottom of the support (1), the bottom of the inner wall of the vacuum frame (31) is fixedly connected with a vacuum pump (32), an air suction opening of the vacuum pump (32) is provided with a double-pipe (33), both sides of the double-pipe (33) are provided with air suction pipes (34), both air suction pipes (34) penetrate both sides of the inner wall of the vacuum frame (31), and the tops of both air suction pipes (34) are provided with air suction bases (35).
4. The PVD tool vacuum coater according to claim 1, characterized in that a collection frame (44) is fixedly connected to the top of the inner wall of the liquid storage box (42), a telescopic air pipe (45) is rotatably connected to the top of the collection frame (44), a first motor base (46) is fixedly connected to the right side of the liquid storage box (42), a rotating motor (47) is fixedly connected to the top of the first motor base (46), and a power bevel gear (48) is fixedly connected to an output shaft of the rotating motor (47).
5. The PVD tool vacuum coater according to claim 4, characterized in that a sliding block (49) is slidably connected to the top of the liquid storage tank (42), a nozzle (410) is arranged on the top of the sliding block (49), a first threaded rod (411) is rotatably connected between the opposite sides of the liquid storage tank (42), the right side of the first threaded rod (411) penetrates through the left side of the liquid storage tank (42), and an auxiliary bevel gear (412) is fixedly connected to the right side of the first threaded rod (411).
6. The PVD tool vacuum coater according to claim 1, characterized in that the fixing component (5) comprises a fixing rod (51), two sides of the fixing rod (51) are fixedly connected with two sides of the inner wall of the operating component (2), a second threaded rod (52) is rotatably connected between two sides of the inner wall of the fixing rod (51), two fixing blocks (53) are arranged on two sides of the surface of the second threaded rod (52), and fixing frames (54) are fixedly connected to the bottoms of the two fixing blocks (53).
7. The PVD tool vacuum coater according to claim 6, characterized in that a driven wheel (55) is fixedly connected to the right surface of the second threaded rod (52), a second motor base (56) is fixedly connected to the bottom of the fixed rod (51), a moving motor (57) is fixedly connected to the right side of the second motor base (56), and a power wheel (58) is fixedly connected to an output shaft of the moving motor (57).
CN202022498721.3U 2020-11-03 2020-11-03 PVD instrument vacuum coating machine Active CN213538078U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022498721.3U CN213538078U (en) 2020-11-03 2020-11-03 PVD instrument vacuum coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022498721.3U CN213538078U (en) 2020-11-03 2020-11-03 PVD instrument vacuum coating machine

Publications (1)

Publication Number Publication Date
CN213538078U true CN213538078U (en) 2021-06-25

Family

ID=76479031

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022498721.3U Active CN213538078U (en) 2020-11-03 2020-11-03 PVD instrument vacuum coating machine

Country Status (1)

Country Link
CN (1) CN213538078U (en)

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