CN210560700U - But optical vacuum coating machine of automated inspection gas tightness - Google Patents
But optical vacuum coating machine of automated inspection gas tightness Download PDFInfo
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- CN210560700U CN210560700U CN201921817834.6U CN201921817834U CN210560700U CN 210560700 U CN210560700 U CN 210560700U CN 201921817834 U CN201921817834 U CN 201921817834U CN 210560700 U CN210560700 U CN 210560700U
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Abstract
The utility model discloses an optical vacuum coating machine capable of automatically detecting air tightness, which comprises a coating machine case, wherein a vacuum cavity is arranged inside the coating machine case, a sealing groove is arranged outside one end of the vacuum cavity, first electric telescopic rods are arranged around the sealing groove, a sealing door of the coating machine is opened and closed through a second electric telescopic rod, the stability is strong, a coated piece can be drawn out in the opening process of the sealing door, a worker can conveniently assemble and disassemble the coated piece, a fixed plate is stretched out through the first electric telescopic rods around the sealing groove during sealing, so that a silica gel air bag on the fixed plate extrudes a sealing bayonet lock on the sealing door, the sealing door is sealed, the air pressure of the silica gel air bag during extrusion is sensed through a pressure sensor in a pressure gauge, and the air tightness of the sealing door is known, the realization carries out real-time detection to the gas tightness of sealing door, ensures the gas tightness of sealing door.
Description
Technical Field
The utility model relates to a vacuum coating field specifically is an optics vacuum coating machine of automated inspection gas tightness.
Background
Vacuum deposition is a method of forming a thin film by heating a metal or non-metal material under high vacuum to evaporate and condense the material on the surface of a workpiece (metal, semiconductor or insulator). Vacuum coating needs a vacuum coating machine for coating, and the vacuum coating machine mainly refers to a type of coating needing to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The existing vacuum coating machine has many defects in sealing performance, 1: the existing film plating machine cannot detect the air tightness of the sealing door on the sealing door, and the sealing door is used for a long time, so that the phenomenon of reduction of the sealing performance can occur, the vacuum chamber cannot be quickly vacuumized, and the film plating is influenced; 2: most of sealing doors of the existing film plating machines adopt sealing gaskets for sealing, the sealing is single, the sealing performance is poor, the sealing gaskets are easy to age and fall off, and the replacement is very complicated; 3: the sealing door of the existing coating machine is connected with the coating machine through a flange, the sealing door cannot be automatically opened or closed, and a coated part cannot be pulled out while the sealing door is opened, so that a worker is not convenient to disassemble and assemble the coated part.
Disclosure of Invention
The utility model aims at the defects of the prior art and provides an optical vacuum coating machine capable of automatically detecting air tightness so as to solve the problems provided by the background technology.
In order to achieve the above object, the utility model provides a following technical scheme: an optical vacuum coating machine capable of automatically detecting air tightness comprises a coating machine case, wherein a vacuum cavity is arranged inside the coating machine case, a sealing groove is formed in the outer side of one end of the vacuum cavity, first electric telescopic rods are installed on the periphery of the sealing groove, a fixing plate is installed at one end of each first electric telescopic rod, a silica gel air bag is installed on each fixing plate, a gas conveying pipe is connected onto each silica gel air bag, second electric telescopic rods are installed on the bottom end and the top end of the coating machine case respectively, a sealing door is installed at one end of each second electric telescopic rod, a sealing clamping pin is arranged on one side of each sealing door, a vacuumizing device is installed at the top end of the coating machine case, a heater is installed at one end of the coating machine case, a condensing box is installed at the bottom end of the heater, a control box is installed at the bottom end of the condensing box, and a, the bottom of the visual window is provided with a barometer, the bottom of the barometer is provided with a power switch, and the back of the coating machine case is provided with an electron gun.
As a preferred technical scheme of the utility model, the gear box is installed to the opposite side of sealing door, the motor is installed on the top of gear box, one side of gear box is connected with the coating film piece mount, the equal threaded connection in both sides of coating film piece mount has the threaded rod, the one end welding of threaded rod has the fixed block, and the other end welding has the threaded rod handle, the bottom of coating film piece mount is equipped with the crucible fixed plate.
As an optimal technical scheme of the utility model, the gear box passes through the bolt fastening and is in on the sealing door, the pivot of motor with gear engagement in the gear box links to each other, coating film spare mount through the pivot with the gear box links to each other, the welding of crucible fixed plate is on the sealing door, be equipped with a plurality of crucible on the crucible fixed plate.
As an optimal technical scheme of the utility model, second electric telescopic handle passes through the bolt fastening on the top and the bottom of coating machine case, the sealing door with second electric telescopic handle passes through the bolt fastening and links to each other, sealed bayonet lock with the sealing door welding links to each other, sealed bayonet lock with sealed recess activity links to each other.
As a preferred technical scheme of the utility model, an electric telescopic handle passes through the bolt fastening on the outside of sealed recess, the silica gel gasbag passes through the bolt fastening on the fixed plate, the fixed plate passes through the bolt fastening on the electric telescopic handle, the silica gel gasbag passes through the gas-supply pipe and links to each other with the barometer, be equipped with pressure sensor in the barometer.
As an optimal technical scheme of the utility model, evacuating device, heater, condensation box and electron gun all pass through the bolt fastening and are in on the coating machine case, evacuating device includes mechanical pump, lobe pump and diffusion pump, all with the coating machine case links to each other, be equipped with condenser, water tank and condenser pipe in the condensation box, be equipped with the positive and negative two poles of the earth on the electron gun.
As a preferred technical scheme of the utility model, switch links to each other with external power supply, switch respectively with first electric telescopic handle, second electric telescopic handle, barometer and motor electric connection, the control box respectively with evacuating device, heater, condensing box and electron gun electric connection.
The utility model has the advantages that:
1: the coating machine senses the air pressure of the silica gel air bag during extrusion through a pressure sensor in a pressure gauge, so that the air tightness of the sealing door is known, the real-time detection of the air tightness of the sealing door is realized, the air tightness of the sealing door is guaranteed, a vacuum chamber is always kept in a vacuum state, and the coating quality is improved;
2: when the film coating machine is sealed, the fixing plate is stretched out through the first electric telescopic rods around the sealing groove, so that the silica gel air bag on the fixing plate extrudes the sealing bayonet lock on the sealing door, the sealing door is sealed, when the sealing door is opened, the fixing plate is retracted through the first electric telescopic rods, the sealing performance is good, the sealing door is not easy to damage, the service life is long, the sealing performance can be adjusted, and the flexibility is strong;
3: this coating machine's sealing door all connects through second electric telescopic handle, can realize opening and closing through second electric telescopic handle, all is connected with second electric telescopic handle in four corners of sealing door moreover, and stability can be strong, opens at the sealing door in-process and can pull out the coating film spare, and the staff of being convenient for carries out the dismouting to the coating film spare.
Drawings
FIG. 1 is a schematic view of the disassembled structure of the present invention;
FIG. 2 is a schematic view of the assembly structure of the present invention;
fig. 3 is a schematic back structural view of the sealing door of the present invention;
fig. 4 is a schematic structural diagram of the sealing groove of the present invention.
In the figure: 1. coating machine case, 2, vacuum chamber, 3, sealing door, 4, electron gun, 5, first electric telescopic handle, 6, second electric telescopic handle, 7, evacuating device, 8, heater, 9, condensation box, 10, visual window, 11, switch, 12, sealed recess, 13, gear box, 14, motor, 15, sealed bayonet lock, 16, coating piece mount, 17, threaded rod, 18, fixed block, 19, crucible fixed plate, 20, threaded rod handle, 21, fixed plate, 22, silica gel gasbag, 23, barometer, 24, gas-supply pipe, 25, control box.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the protection scope of the present invention can be clearly and clearly defined.
Example (b): referring to fig. 1-4, the present invention provides a technical solution: an optical vacuum coating machine capable of automatically detecting air tightness comprises a coating machine case 1, a vacuum cavity 2 is arranged inside the coating machine case 1, a sealing groove 12 is arranged on the outer side of one end of the vacuum cavity 2, first electric telescopic rods 5 are arranged around the sealing groove 12, a fixing plate 21 is arranged at one end of each first electric telescopic rod 5, a silica gel air bag 22 is arranged on each fixing plate 21, a gas pipe 24 is connected onto each silica gel air bag 22, second electric telescopic rods 6 are arranged on the two sides of the bottom end and the top end of the coating machine case 1, a sealing door 3 is arranged at one end of each second electric telescopic rod 6, a sealing bayonet lock 15 is arranged on one side of each sealing door 3, a vacuumizing device 7 is arranged at the top end of the coating machine case 1, a heater 8 is arranged at one end of the coating machine case 1, a condensing box 9 is arranged at the bottom end of the, one side of the film coating machine case 1 is provided with a visual window 10, the bottom end of the visual window 10 is provided with a barometer 23, the bottom end of the barometer 23 is provided with a power switch 11, and the back of the film coating machine case 1 is provided with an electron gun 4.
The gear box 13 is fixed on the sealing door 3 through bolts, a rotating shaft of the motor 14 is meshed with gears in the gear box 13, the film coating piece fixing frame 16 is connected with the gear box 13 through the rotating shaft, the crucible fixing plate 19 is welded on the sealing door 3, the crucible fixing plate 19 is provided with a plurality of crucibles, and the film coating piece is coated with films through film coating materials in the crucibles.
Second electric telescopic handle 6 passes through the bolt fastening on coating machine case 1's top and bottom, sealing door 3 links to each other through bolt fastening with second electric telescopic handle 6, sealed bayonet lock 15 links to each other with sealing door 3 welding, sealed bayonet lock 15 links to each other with sealed recess 12 activity, can directly stretch out sealing door 3 from coating machine case 1 through second electric telescopic handle 6, thereby will seal bayonet lock 15 and come from the pull in sealed recess 12, also with coating film spare mount 16 from the vacuum cavity 2 interior pull out, be convenient for direct dismouting coating film spare.
First electric telescopic handle 5 passes through the bolt fastening on the outside of sealed recess 12, silica gel gasbag 22 passes through the bolt fastening on fixed plate 21, fixed plate 21 passes through the bolt fastening on first electric telescopic handle 5, silica gel gasbag 22 passes through the gas-supply pipe 24 and links to each other with barometer 23, be equipped with pressure sensor in the barometer 23, braking through first electric telescopic handle 5, can extrude sealed bayonet lock 15 on the sealing door 3 with silica gel gasbag 22 on the fixed plate 21, deformation through silica gel gasbag 22, gas is extruded and is carried gas-supply pipe 24, and carry in the barometer 23, respond to atmospheric pressure through the pressure sensor in the barometer 23, can brake the degree that silica gel gasbag 22 extrudes sealed bayonet lock 15 through the change of atmospheric pressure, also can know the gas tightness of sealing door 3.
The vacuumizing device 7, the heater 8, the condensing box 9 and the electronic gun 4 are all fixed on the coating machine case 1 through bolts, the vacuumizing device 7 comprises a mechanical pump, a roots pump and a diffusion pump which are all connected with the coating machine case 1, a condenser, a water tank and a condensing pipe are arranged in the condensing box 9, the electronic gun 4 is provided with a positive electrode and a negative electrode, the vacuum cavity 2 is vacuumized through the vacuumizing device 7, the coating machine case 1 can be cooled through the condensing box 9, a temperature sensor is arranged in the vacuum cavity 2 and is connected with the heater 8 through a controller, the heater 8 is controlled to brake through the temperature sensor, so that the temperature in the vacuum cavity 2 is constant, the electronic gun 4 generates high-intensity current to dissolve coating materials in a crucible on the crucible fixing plate 19, the coating materials are atomized and volatilized, and coating is performed on the coating pieces on the coating piece fixing frame 16.
Switch 11 links to each other with external power supply, switch 11 respectively with first electric telescopic handle 5, second electric telescopic handle 6, barometer 23 and motor 14 electric connection, control box 25 respectively with evacuating device 7, heater 8, condensate tank 9 and electron gun 4 electric connection, switch on first electric telescopic handle 5 respectively through switch 11, second electric telescopic handle 6, the power of barometer 23 and motor 14, control evacuating device 7 respectively through control box 25, heater 8, condensate tank 9 and the circular telegram work of electron gun 4.
The working principle is as follows: an optical vacuum coating machine capable of automatically detecting air tightness is characterized in that when a sealing door 3 needs to be opened, a power switch 11 is connected with a power switch of a first electric telescopic rod 5, the first electric telescopic rod 5 retracts a silica gel air bag 22 on a fixing plate 21 to the original position, the silica gel air bag 22 on the fixing plate 21 is separated from a sealing bayonet 15 on the sealing door 3, then the power switch 11 is connected with a power switch of a second electric telescopic rod 6, the second electric telescopic rod 6 stretches out the sealing door 3, the sealing bayonet 15 on the sealing door 3 is pulled out from a sealing groove 12, a coating piece fixing frame 16 is pulled out from a vacuum cavity 2, a threaded rod handle 20 on a threaded rod 17 is rotated, the coating piece can be disassembled and assembled, a coating material can be added into a crucible on a crucible fixing plate 19, and then the sealing door 3 is retracted to a coating machine case 1 by the second electric telescopic rod 6, the sealing bayonet 15 on the sealing door 3 is inserted into the sealing groove 12, then the first electric telescopic rod 5 is used for braking, so that the silica gel air bag 22 on the fixing plate 21 is pushed to extrude the sealing bayonet 15 on the sealing door 3, in the extrusion process, the gas in the silica gel air bag 22 is conveyed to the barometer 23 through the air conveying pipe 24, the barometer 23 is internally provided with a pressure sensor which can detect the air pressure, the air tightness is worse when the pressure is smaller, the extending length of the first electric telescopic rod 5 can be adjusted through the number of the barometer 23, then the vacuum chamber 2 is vacuumized by the vacuumizing device 7, then the high-intensity current generated by the electronic gun 4 is used for dissolving the coating material in the crucible on the crucible fixing plate 19, so that the coating material is atomized and volatilized, the coating piece on the coating piece fixing frame 16 is coated, and the gear in the gear box 13 can be driven to rotate through the braking of the motor 14, thereby drive the rotation of coating film spare mount 16, can improve coating film efficiency, can cool down coating machine case 1 through condensing box 9, be equipped with temperature sensor in the vacuum cavity 2 to link to each other with heater 8 through the controller, control the braking of heater 8 through temperature sensor, thereby the temperature of guarantee vacuum cavity 2 is the constant temperature, and guarantee vacuum coating can normally go on.
The coating machine senses the air pressure of the silica gel air bag during extrusion through a pressure sensor in a pressure gauge, so that the air tightness of the sealing door is known, the real-time detection of the air tightness of the sealing door is realized, the air tightness of the sealing door is guaranteed, a vacuum chamber is always kept in a vacuum state, and the coating quality is improved; when the film coating machine is sealed, the fixing plate is stretched out through the first electric telescopic rods around the sealing groove, so that the silica gel air bag on the fixing plate extrudes the sealing bayonet lock on the sealing door, the sealing door is sealed, when the sealing door is opened, the fixing plate is retracted through the first electric telescopic rods, the sealing performance is good, the sealing door is not easy to damage, the service life is long, the sealing performance can be adjusted, and the flexibility is strong; this coating machine's sealing door all connects through second electric telescopic handle, can realize opening and closing through second electric telescopic handle, all is connected with second electric telescopic handle in four corners of sealing door moreover, and stability can be strong, opens at the sealing door in-process and can pull out the coating film spare, and the staff of being convenient for carries out the dismouting to the coating film spare.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.
Claims (7)
1. The utility model provides a but optical vacuum coating machine of automated inspection gas tightness, includes coating machine case (1), its characterized in that: the vacuum cavity (2) is arranged in the coating machine case (1), a sealing groove (12) is formed in the outer side of one end of the vacuum cavity (2), first electric telescopic rods (5) are installed on the periphery of the sealing groove (12), a fixing plate (21) is installed at one end of each first electric telescopic rod (5), a silica gel air bag (22) is installed on each fixing plate (21), a gas pipe (24) is connected onto each silica gel air bag (22), second electric telescopic rods (6) are installed on the bottom end and the two sides of the top end of the coating machine case (1), a sealing door (3) is installed at one end of each second electric telescopic rod (6), a sealing clamping pin (15) is arranged on one side of each sealing door (3), a vacuumizing device (7) is installed on the top end of the coating machine case (1), and a heater (8) is installed at one end of the coating machine case (1), condensing box (9) are installed to the bottom of heater (8), control box (25) are installed to the bottom of condensing box (9), visual window (10) are installed to one side of coating machine case (1), barometer (23) are installed to the bottom of visual window (10), switch (11) are installed to the bottom of barometer (23), the back mounted of coating machine case (1) has electron gun (4).
2. The optical vacuum coating machine capable of automatically detecting the air tightness according to claim 1, is characterized in that: gear box (13) are installed to the opposite side of sealing door (3), motor (14) are installed on the top of gear box (13), one side of gear box (13) is connected with coating film spare mount (16), the equal threaded connection in both sides of coating film spare mount (16) has threaded rod (17), the one end welding of threaded rod (17) has fixed block (18), and the other end welding has threaded rod handle (20), the bottom of coating film spare mount (16) is equipped with crucible fixing plate (19).
3. The optical vacuum coating machine capable of automatically detecting the air tightness as claimed in claim 2, characterized in that: the crucible coating machine is characterized in that the gear box (13) is fixed on the sealing door (3) through bolts, a rotating shaft of the motor (14) is meshed with gears in the gear box (13) to be connected, the coating piece fixing frame (16) is connected with the gear box (13) through the rotating shaft, the crucible fixing plate (19) is welded on the sealing door (3), and a plurality of crucibles are arranged on the crucible fixing plate (19).
4. The optical vacuum coating machine capable of automatically detecting the air tightness according to claim 1, is characterized in that: the second electric telescopic rod (6) is fixed to the top and the bottom of the coating machine case (1) through bolts, the sealing door (3) is fixedly connected with the second electric telescopic rod (6) through bolts, the sealing clamping pin (15) is connected with the sealing door (3) in a welded mode, and the sealing clamping pin (15) is movably connected with the sealing groove (12).
5. The optical vacuum coating machine capable of automatically detecting the air tightness according to claim 1, is characterized in that: first electric telescopic handle (5) pass through the bolt fastening on the outside of sealed recess (12), silica gel gasbag (22) pass through the bolt fastening on fixed plate (21), fixed plate (21) pass through the bolt fastening on first electric telescopic handle (5), silica gel gasbag (22) link to each other with barometer (23) through gas-supply pipe (24), be equipped with pressure sensor in barometer (23).
6. The optical vacuum coating machine capable of automatically detecting the air tightness according to claim 1, is characterized in that: the vacuum pumping device (7), the heater (8), the condensing box (9) and the electronic gun (4) are all fixed on the film plating machine case (1) through bolts, the vacuum pumping device (7) comprises a mechanical pump, a roots pump and a diffusion pump, and is connected with the film plating machine case (1), a condenser, a water tank and a condensing pipe are arranged in the condensing box (9), and the electronic gun (4) is provided with a positive electrode and a negative electrode.
7. The optical vacuum coating machine capable of automatically detecting the air tightness according to claim 1, is characterized in that: switch (11) link to each other with external power supply, switch (11) respectively with first electric telescopic handle (5), second electric telescopic handle (6), barometer (23) and motor (14) electric connection, control box (25) respectively with evacuating device (7), heater (8), condensing box (9) and electron gun (4) electric connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921817834.6U CN210560700U (en) | 2019-10-28 | 2019-10-28 | But optical vacuum coating machine of automated inspection gas tightness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921817834.6U CN210560700U (en) | 2019-10-28 | 2019-10-28 | But optical vacuum coating machine of automated inspection gas tightness |
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| Publication Number | Publication Date |
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| CN210560700U true CN210560700U (en) | 2020-05-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921817834.6U Active CN210560700U (en) | 2019-10-28 | 2019-10-28 | But optical vacuum coating machine of automated inspection gas tightness |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115181940A (en) * | 2022-07-15 | 2022-10-14 | 吴雪峰 | Optical vacuum coating equipment |
| CN117660898A (en) * | 2023-12-06 | 2024-03-08 | 丹阳市海之鑫光学有限公司 | Blue light-proof optical lens coating equipment and coating process thereof |
-
2019
- 2019-10-28 CN CN201921817834.6U patent/CN210560700U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115181940A (en) * | 2022-07-15 | 2022-10-14 | 吴雪峰 | Optical vacuum coating equipment |
| CN115181940B (en) * | 2022-07-15 | 2023-10-13 | 苏州东福来机电科技有限公司 | Optical vacuum coating equipment |
| CN117660898A (en) * | 2023-12-06 | 2024-03-08 | 丹阳市海之鑫光学有限公司 | Blue light-proof optical lens coating equipment and coating process thereof |
| CN117660898B (en) * | 2023-12-06 | 2024-06-07 | 丹阳市海之鑫光学有限公司 | Blue light-proof optical lens coating equipment and coating process thereof |
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