CN210736880U

CN210736880U - Continuous automatic vacuum coating equipment

Info

Publication number: CN210736880U
Application number: CN201921895444.0U
Authority: CN
Inventors: 海玉龙; 郭红波; 周杰
Original assignee: Suzhou Serrida Nano Technology Co Ltd
Current assignee: Suzhou Serrida Nano Technology Co Ltd
Priority date: 2019-11-06
Filing date: 2019-11-06
Publication date: 2020-06-12
Anticipated expiration: 2029-11-06

Abstract

The utility model relates to the technical field of vacuum coating equipment, in particular to continuous automatic vacuum coating equipment, which solves the defects of low efficiency, increased cost and long coating interval time in the prior art, and comprises a shell, wherein a vacuum coating chamber is arranged inside the shell, a bracket and a base are respectively fixed on the two sides of the shell through nut bolts, a cylinder is arranged at the top of the bracket through bolts, a piston rod is arranged inside the cylinder, the other end of the piston rod is connected with a movable clapboard through bolts, the end part of the movable clapboard is provided with a sealing piece, the separation chamber can be firstly sealed when the workpiece is replaced each time, so that the workpiece is separated from the inside of the vacuum coating chamber, the separation chamber is opened for coating after the workpiece is replaced, at the moment, only a small amount of gas is stored in the vacuum coating chamber, and the vacuum coating chamber can be quickly vacuumized, greatly improving the efficiency of film coating processing and reducing the production cost.

Description

Continuous automatic vacuum coating equipment

Technical Field

The utility model relates to a vacuum coating equipment technical field especially relates to a continuous automatic vacuum coating equipment.

Background

Vacuum coating equipment mainly refers to a type of coating needing to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to divide into evaporation and sputtering.

When the traditional vacuum coating equipment is used for coating a film again after a workpiece is replaced, the vacuum pump needs to pump the vacuum coating chamber to be in a vacuum state again, so that a large amount of energy sources of processing time are consumed in the repeated operation process, the production efficiency is low, the cost is correspondingly increased, in addition, a chain belt is adopted for conveying when the workpiece is replaced in the traditional technology, the interval time between every two coating is long, and the real continuous coating processing cannot be realized.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects of low efficiency, increased cost and long coating interval time in the prior art and providing continuous automatic vacuum coating equipment.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a continuous automatic vacuum coating device comprises a shell, wherein a vacuum coating chamber is arranged inside the shell, a support and a base are respectively fixed on two sides of the shell through nut bolts, an air cylinder is installed on the top of the support through bolts, a piston rod is arranged inside the air cylinder, the other end of the piston rod is connected with a movable partition plate through bolts, a sealing element is arranged at the end part of the movable partition plate, a separation chamber is fixedly arranged inside the shell, the movable partition plate is arranged inside the separation chamber in a sliding mode, a rotating plate is rotatably installed on the top of the shell, support frames are welded on two sides of the rotating plate, a first motor mounting plate is fixed on one side of each support frame through bolts, a first motor is installed on one side of each first motor mounting plate through bolts, the output end of the first motor is connected with a first rotating shaft through a coupler, and the other end of the, the top of the shell is fixedly provided with an adjusting mechanism, and the adjusting mechanism and the center of the separation chamber are on the same axis;

adjustment mechanism includes first fixed plate, second fixed plate and second motor mounting panel, rotate between first fixed plate and the second fixed plate and install the worm, the second motor is installed through the screw in the top of second motor mounting panel, the output of second motor has the second pivot through the coupling joint, the other end of second pivot pass through the nut bolt with the one end fixed connection of worm.

Preferably, the vacuum pump is installed at the top of the base through screws, an air suction opening of the vacuum pump is fixedly connected with an air suction pipe through a flange plate, and the other end of the air suction pipe extends to the inside of the vacuum coating chamber.

Preferably, a square hole is formed in the side wall of the compartment, and the movable partition plate is embedded in the square hole.

Preferably, the both sides of rotor plate all weld the round pin axle, and the square groove has been seted up at the top of casing, and first bearing is all installed to the lateral wall in square groove, the round pin axle box is established the inside of first bearing, the outside cover of one of them round pin axle is equipped with the worm wheel.

Preferably, the first fixing plate and the second fixing plate are both provided with second bearings, two ends of the worm are both sleeved inside the second bearings, and the worm is meshed with the worm wheel.

Preferably, a controller is installed on one side of the shell through screws, and the air cylinder, the first motor, the second motor and the vacuum pump are electrically connected with the controller.

The utility model has the advantages that:

1. the utility model discloses in through the compartment, remove the baffle, the setting of cylinder isotructure, the compartment is add in vacuum coating room's inside to equipment, when changing the work piece at every turn, can seal the compartment earlier, make work piece and vacuum coating room's inside separate, change the back that gets into at the work piece, open the compartment again and carry out coating film processing, only deposit a small amount of gas in the vacuum coating room this moment, can take out vacuum coating room to the vacuum fast, improved coating film processing's efficiency widely and reduced manufacturing cost.

2. The utility model discloses in through the setting of adjustment mechanism, rotor plate, first motor isotructure, the rotor plate is add at the top of coating film processing station to the device, and the bilateral symmetry of rotor plate arranges the mechanism that can drive the work piece, utilizes adjustment mechanism to make the rotor plate rotate and accomplishes the change of work piece fast, can shorten the interval time of coating film several times, and convenient operation, and degree of automation is high, has strong practicality, is fit for using widely.

Drawings

FIG. 1 is a sectional view of a continuous automatic vacuum coating apparatus according to the present invention;

fig. 2 is a schematic structural diagram of the housing according to the present invention;

fig. 3 is an enlarged view of the position A of the continuous automatic vacuum coating equipment of the utility model.

In the figure: the vacuum coating machine comprises a shell 1, a vacuum coating chamber 2, a support 3, a cylinder 4, a movable rod 5, a movable partition 6, a base 7, a vacuum pump 8, an exhaust tube 9, a square hole 10, a partition chamber 11, a rotating plate 12, a pin shaft 13, a support frame 14, a first motor 15, a first motor mounting plate 16, a fixing mechanism 17, a first fixing plate 18, a second fixing plate 19, a second motor 20, a worm wheel 21, a second motor mounting plate 22 and a worm 23.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a continuous automatic vacuum coating apparatus comprises a housing 1, a vacuum coating chamber 2 is arranged inside the housing 1, a support 3 and a base 7 are respectively fixed on two sides of the housing 1 through nuts and bolts, an air cylinder 4 is installed on the top of the support 3 through bolts, a piston rod 5 is arranged inside the air cylinder 4, the other end of the piston rod 5 is connected with a movable partition plate 6 through bolts, a sealing member is arranged at the end of the movable partition plate 6, a compartment 11 is fixedly arranged inside the housing 1, the movable partition plate 6 is slidably arranged inside the compartment 11, a rotating plate 12 is rotatably installed on the top of the housing 1, support frames 14 are welded on two sides of the rotating plate 12, a first motor mounting plate 16 is fixed on one side of each support frame 14 through bolts, a first motor 15 is installed on one side of each first motor mounting plate 16 through bolts, the output end of each first motor 15 is, the other end of the first rotating shaft is connected with a fixing mechanism 17 through a screw, the top of the shell 1 is fixedly provided with an adjusting mechanism, and the adjusting mechanism and the center of the separation chamber 11 are on the same axis; the adjusting mechanism comprises a first fixing plate 18, a second fixing plate 19 and a second motor mounting plate 22, a worm 23 is rotatably mounted between the first fixing plate 18 and the second fixing plate 19, a second motor 20 is mounted at the top of the second motor mounting plate 22 through screws, the output end of the second motor 20 is connected with a second rotating shaft through a coupling, the other end of the second rotating shaft is fixedly connected with one end of the worm 23 through a nut and a bolt, through the arrangement of the structures of the separation chamber 11, the movable partition plate 6, the cylinder 4 and the like, the equipment is additionally provided with the separation chamber 11 in the vacuum coating chamber 2, when a workpiece is replaced each time, the separation chamber 11 can be firstly sealed to separate the workpiece from the interior of the vacuum coating chamber 2, after the workpiece is replaced, the separation chamber 11 is opened for coating, at the moment, only a small amount of gas is stored in the vacuum coating chamber 2, the vacuum coating chamber 2 can be quickly vacuumized, the efficiency of coating processing is greatly improved and the production cost is reduced, through the arrangement of structures such as an adjusting mechanism, a rotating plate 12 and a first motor 15, the device is additionally provided with the rotating plate 12 at the top of a coating processing station, the two sides of the rotating plate 12 are symmetrically provided with mechanisms capable of driving workpieces, the workpiece replacement is rapidly completed by rotating the rotating plate 12 through the adjusting mechanism, the coating interval time can be shortened by multiple times, the operation is convenient, the automation degree is high, the device has strong practicability and is suitable for popularization and use, a vacuum pump 8 is arranged at the top of a base 7 through screws, an air suction opening of the vacuum pump 8 is fixedly connected with an air suction pipe 9 through a flange plate, the other end of the air suction pipe 9 extends to the inside of a vacuum coating chamber 2, a square hole 10 is formed in the side wall of a separation chamber 11, a movable partition plate 6 is embedded in the square hole 10, pin shafts 13 are welded on the two, the square groove has been seted up at casing 1's top, the first bearing is all installed to the lateral wall in square groove, round pin axle 13 cover is established in the inside of first bearing, the outside cover of one of them round pin axle 13 is equipped with worm wheel 21, all install the second bearing on first fixed plate 18 and the second fixed plate 19, the inside at the second bearing is all established at the both ends of worm 23, worm 23 is connected with worm wheel 21 meshing, the controller is installed through the screw in one side of casing 1, cylinder 4, first motor 15, second motor 20 and vacuum pump 8 all with controller electric connection.

In this embodiment, as shown in the drawing, when the apparatus is in operation, a user fixes a workpiece on a fixing mechanism on one side of the external support frame 14, the fixing mechanism 17 is a fixing mechanism common in the market, and is not described herein again, after the fixing is completed, a controller (not shown in the drawing) sends a signal to enable the second motor 20 to operate, the second motor 20 drives the rotating plate 12 to rotate, under the control of the controller, the rotating plate 12 can accurately rotate to a processing position, at this time, the movable partition plate 6 is in an open state, the controller firstly enables the vacuum pump 8 to pump the vacuum coating chamber 2 to a vacuum state through the exhaust pipe 9, and then the controller enables the first motor 15 to drive the workpiece to rotate to perform coating processing;

furthermore, in the process of coating processing, a user can fix the next workpiece to be processed on the fixing mechanism 17 at the other side of the rotating plate 12, after the first workpiece is processed, the controller enables the cylinder 4 to act, the cylinder 4 pushes the movable partition plate 6 through the piston rod 5 to seal the bottom opening of the separation chamber 11, the separation chamber 11 is in a closed state, the sealing element at the end part of the movable partition plate 6 is pressed on the inner wall of the separation chamber 11, the sealing effect is enhanced, it is required to be noted that the movable partition plate 6 is designed not to collide with the workpiece, then the adjusting mechanism acts again, the rotating plate 12 rotates to replace the workpiece to be processed and the processed workpiece, the workpiece to be processed enters the vacuum coating chamber 2, after the rotating plate 12 rotates to a proper position, the cylinder 4 acts to slide the movable partition plate 6 to the left, the separation chamber 11 is opened, the vacuum pump 8 further acts to pump out a small amount of gas inside, the first motor 15 drives the workpiece again to perform film coating processing, and the operation actions are repeated, so that the workpiece can be continuously and automatically subjected to film coating processing, the film coating efficiency is high, and the interval time is short.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The continuous automatic vacuum coating equipment comprises a shell (1) and is characterized in that a vacuum coating chamber (2) is arranged inside the shell (1), a support (3) and a base (7) are respectively fixed on two sides of the shell (1) through nuts and bolts, an air cylinder (4) is installed at the top of the support (3) through bolts, a piston rod (5) is arranged inside the air cylinder (4), the other end of the piston rod (5) is connected with a movable partition plate (6) through bolts, a sealing piece is arranged at the end part of the movable partition plate (6), a separation chamber (11) is fixedly arranged inside the shell (1), the movable partition plate (6) is arranged inside the separation chamber (11) in a sliding mode, a rotating plate (12) is rotatably installed at the top of the shell (1), support frames (14) are welded on two sides of the rotating plate (12), a first motor mounting plate (16) is fixed on one side of each support frame (14) through bolts, a first motor (15) is installed on one side of a first motor installation plate (16) through a bolt, the output end of the first motor (15) is connected with a first rotating shaft through a coupler, the other end of the first rotating shaft is connected with a fixing mechanism (17) through a screw, an adjusting mechanism is fixedly arranged on the top of the shell (1), and the adjusting mechanism and the center of the separation chamber (11) are on the same axis;

adjustment mechanism includes first fixed plate (18), second fixed plate (19) and second motor mounting panel (22), rotate between first fixed plate (18) and second fixed plate (19) and install worm (23), second motor (20) are installed through the screw in the top of second motor mounting panel (22), there is the second pivot output of second motor (20) through the coupling joint, the other end of second pivot pass through the nut bolt with the one end fixed connection of worm (23).

2. The continuous automatic vacuum coating equipment according to claim 1, wherein the top of the base (7) is provided with a vacuum pump (8) through screws, an air suction opening of the vacuum pump (8) is fixedly connected with an air suction pipe (9) through a flange plate, and the other end of the air suction pipe (9) extends to the inside of the vacuum coating chamber (2).

3. The apparatus according to claim 1, wherein the side wall of the compartment (11) is provided with a square hole (10), and the movable partition (6) is embedded in the square hole (10).

4. The continuous automatic vacuum coating equipment according to claim 1, wherein pin shafts (13) are welded on two sides of the rotating plate (12), a square groove is formed at the top of the shell (1), first bearings are installed on the side walls of the square groove, the pin shafts (13) are sleeved inside the first bearings, and a worm wheel (21) is sleeved outside one of the pin shafts (13).

5. The continuous automatic vacuum coating equipment according to claim 4, wherein the first fixing plate (18) and the second fixing plate (19) are respectively provided with a second bearing, two ends of the worm (23) are respectively sleeved in the second bearings, and the worm (23) is meshed with the worm wheel (21).

6. The apparatus according to claim 1, wherein a controller is mounted on one side of the housing (1) by screws, and the cylinder (4), the first motor (15), the second motor (20) and the vacuum pump (8) are electrically connected to the controller.