CN210683923U - Cooling device for optical vacuum coating - Google Patents
Cooling device for optical vacuum coating Download PDFInfo
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- CN210683923U CN210683923U CN201921770288.5U CN201921770288U CN210683923U CN 210683923 U CN210683923 U CN 210683923U CN 201921770288 U CN201921770288 U CN 201921770288U CN 210683923 U CN210683923 U CN 210683923U
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Abstract
The utility model discloses a cooling device for optical vacuum coating, which comprises a coating box, wherein a vacuum chamber is arranged inside the coating box, a tray is arranged at the bottom end of the vacuum chamber, a second electric telescopic rod is arranged at the bottom end of the tray, a vacuumizing device is arranged at the top end of the coating box, first centrifugal fans are arranged on two sides of the vacuumizing device, a suction pipe is connected on each centrifugal fan, the cooling device of the coating machine adopts two condensing boxes which are respectively arranged at the bottom and one side of the coating machine, when the temperature needs to be reduced, the condensing box at the bottom transmits cold air to the bottom of the vacuum chamber, the cold air extrudes hot air to the top of the vacuum chamber from the bottom, then the hot air is transmitted into the condensing box at the side edge through the centrifugal fan at the top to cool the hot air and then is discharged, thereby reducing the outdoor temperature, and meanwhile, the coating piece can rotate back and forth, the efficiency of cooling coating film spare is improved, also improves the quality of coating film, makes the coating film more even.
Description
Technical Field
The utility model relates to a vacuum coating field specifically is a cooling device for optics vacuum coating.
Background
Vacuum deposition is a method of forming a thin film by heating a metal or non-metal material under high vacuum to evaporate and condense the material on the surface of a workpiece (metal, semiconductor or insulator). Vacuum coating often adopts the vacuum coating machine to carry out the coating film, and current vacuum coating machine performance is poor in the aspect of the cooling, can not effectively quick take away the temperature in the vacuum chamber, can not cool down the temperature of taking away, prevents that external temperature is too high to cause the influence to the coating machine, can not carry out effectual cooling to the coating film spare, and the cooling effect is poor, and is inefficient, and is slow.
Disclosure of Invention
The utility model aims at providing a cooling device for optical vacuum coating to solve the problem that the above-mentioned background art provided to the defect of prior art.
In order to achieve the above object, the utility model provides a following technical scheme: a cooling device for optical vacuum coating comprises a coating box, wherein a vacuum chamber is arranged inside the coating box, a tray is arranged at the bottom end of the vacuum chamber, a second electric telescopic rod is arranged at the bottom end of the tray, a vacuumizing device is arranged at the top end of the coating box, first centrifugal fans are arranged on two sides of the vacuumizing device, a suction pipe is connected onto each first centrifugal fan, a second condensation box is connected onto one end of the suction pipe, second centrifugal fans are arranged on two sides of the coating box, an air inlet pipe is connected onto each second centrifugal fan, an electromagnetic valve is arranged at one end of the air inlet pipe, a brake box is arranged at the top end of each second centrifugal fan, a motor is arranged inside the brake box, one end of the motor is connected with the first electric telescopic rod, a bearing and a coating piece fixing head are fixed onto the first electric telescopic rod, a first condensation box is arranged at the bottom of the coating box, the bottom of first condensing box is equipped with the control box, real empty room's both sides all are equipped with out the tuber plate, be connected with the vacuum door on the coating case, the middle part of vacuum door is equipped with the visual window, the heater is all installed to the top and the bottom of visual window, the back mounted of coating case has the electron gun, four corners in the bottom of coating case have all welded the bracing piece.
As a preferred technical scheme of the utility model, the brake box welding is in on the both sides of coating film case, the motor passes through the bolt fastening and is in the inside of brake box, the bearing is fixed one of brake box is served, first electric telescopic handle fix on the bearing and with the pivot of motor is fixed continuously, the welding of coating film spare fixed head is in on the first electric telescopic handle.
As an optimal technical scheme of the utility model, first centrifugal fan and second centrifugal fan all pass through the bolt fastening on the coating case, first centrifugal fan pass through the suction tube with second condensing box and real empty room link to each other, second centrifugal fan passes through the intake pipe and links to each other with real empty room and first condensing box.
As an optimal technical scheme of the utility model, all be equipped with water tank, compressor, condenser pipe and condenser in first condensing box and the second condensing box, first condensing box and second condensing box are all through the bolt fastening on the coating film case.
As an optimized technical scheme of the utility model, the vacuum door pass through the hinge and sealed the pad with the coating film case is fixed continuous, the heater passes through the bolt fastening on the vacuum door.
As an optimal technical scheme of the utility model, the electron gun passes through the bolt to be installed on the back of coating case, the electron gun is equipped with the positive and negative two poles of the earth, evacuating device includes mechanical pump, lobe pump and diffusion pump, the diffusion pump with real empty room links to each other.
As an optimal technical scheme of the utility model, the tray with second electric telescopic handle passes through the bolt fastening and links to each other, second electric telescopic handle passes through the bolt fastening on the bottom of coating case.
As an optimal technical scheme of the utility model, one side of first condensing box is equipped with switch, switch respectively with first electric telescopic handle, second electric telescopic handle, motor, first condensing box, second condensing box, first centrifugal fan, second centrifugal fan and solenoid valve electric connection.
As an optimized technical scheme of the utility model, the control box respectively with heater, electron gun and evacuating device electric connection.
The utility model has the advantages that: this coating machine's cooling device adopts two condensers, install respectively on coating machine's bottom and one side, when needs cooling, the condenser box of bottom conveys real empty room's bottom with air conditioning, air conditioning extrudees real empty room top with steam from the bottom, then discharge after cooling down steam in the condenser box of side is carried with steam through the centrifugal fan at top, thereby reduce outdoor temperature, the rotation that can make a round trip with this coating film spare simultaneously, improve the efficiency of cooling coating film spare, also improve the quality of coating film, let the coating film more even.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the internal structure of the brake box of the present invention;
FIG. 3 is a schematic view of the connection structure of the tray of the present invention;
in the figure: 1. coating film case, 2, vacuum chamber, 3, vacuum door, 4, visual window, 5, heater, 6, evacuating device, 7, first centrifugal fan, 8, suction tube, 9, first condensing box, 10, bracing piece, 11, tray, 12, electron gun, 13, solenoid valve, 14, intake pipe, 15, second centrifugal fan, 16, coating film spare fixed head, 17, electric telescopic handle, 18, bearing, 19, second condensing box, 20, switch, 21, motor, 22, control box, 23, play tuber plate, 24, brake box, 25, second electric telescopic handle.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the protection scope of the present invention can be clearly and clearly defined.
Example (b): referring to fig. 1-3, the present invention provides a technical solution: a cooling device for optical vacuum coating comprises a coating box 1, a vacuum chamber 2 is arranged in the coating box 1, a tray 11 is arranged at the bottom end of the vacuum chamber 2, a second electric telescopic rod 25 is arranged at the bottom end of the tray 11, a vacuumizing device 6 is arranged at the top end of the coating box 1, first centrifugal fans 7 are arranged on two sides of the vacuumizing device 6, a suction pipe 8 is connected onto each first centrifugal fan 7, a second condensation box 19 is connected onto one end of the suction pipe 8, second centrifugal fans 15 are arranged on two sides of the coating box 1, an air inlet pipe 14 is connected onto each second centrifugal fan 15, an electromagnetic valve 13 is arranged at one end of each air inlet pipe 14, a brake box 24 is arranged at the top end of each second centrifugal fan 15, a motor 21 is arranged in each brake box 24, one end of each motor 21 is connected with a first electric telescopic rod 17, a bearing 18 and a coating part fixing head 16 are fixed on each first electric telescopic, the bottom of coating case 1 is equipped with first condensing box 9, and the bottom of first condensing box 9 is equipped with control box 22, and real empty room 2's both sides all are equipped with out aerofoil 23, are connected with vacuum door 3 on the coating case 1, and the middle part of vacuum door 3 is equipped with visual window 4, and heater 5 is all installed on the top and the bottom of visual window 4, and the back mounted of coating case 1 has electron gun 12, and four corners in the bottom of coating case 1 have all welded bracing piece 10.
Brake box 24 welds on the both sides of coating case 1, motor 21 passes through the inside of bolt fastening at brake box 24, bearing 18 is fixed in one of brake box 24 and is served, first electric telescopic handle 17 is fixed on bearing 18 and links to each other with motor 21's pivot is fixed, 16 welding of coating piece fixed head are on first electric telescopic handle 17, the coating piece can be fixed through coating piece fixed head 16 on first electric telescopic handle 17, also can drive first electric telescopic handle 17 positive and negative rotation through motor 21, thereby it makes a round trip to rotate to drive the coating piece, improve the coating quality of coating piece, also improve the cooling efficiency of coating piece.
First centrifugal fan 7 and second centrifugal fan 15 are all fixed on coating case 1 through the bolt, and first centrifugal fan 7 passes through suction tube 8 and links to each other with second condensate tank 19 and real empty room 2, and second centrifugal fan 15 passes through intake pipe 14 and links to each other with real empty room 2 and first condensate tank 9, and first centrifugal fan 7 takes out the heat in the real empty room 2, and second centrifugal fan 15 sucks the air conditioning in the first condensate tank 9 to real empty room 2.
All be equipped with water tank, compressor, condenser pipe and condenser in first condensing box 9 and the second condensing box 19, first condensing box 9 and second condensing box 19 all pass through the bolt fastening on coating film case 1, and the air passes through the compressor compression then passes through the refrigerated condenser pipe of condenser to let the air produce air conditioning.
The vacuum door 3 is fixedly connected with the coating box 1 through a hinge and a sealing gasket, the heater 5 is fixed on the vacuum door 3 through a bolt, and during coating, the heater 5 controls and detects the temperature of the vacuum chamber 2 through a temperature sensor and a controller arranged in the vacuum chamber 2, so that the temperature in the vacuum chamber 2 is in a constant temperature state.
The electron gun 12 is installed on the back of the film coating box 1 through a bolt, the electron gun 12 is provided with a positive electrode and a negative electrode, the vacuumizing device 6 comprises a mechanical pump, a roots pump and a diffusion pump and is connected with the vacuum chamber 2, a high-voltage electric cabinet is used for providing power for the electron gun 12, the tray 11 is fixedly connected with the second electric telescopic rod 25 through a bolt, the second electric telescopic rod 25 is fixed on the bottom of the film coating box 1 through a bolt, a crucible is installed on the tray 11, the electron gun 12 generates high-intensity current to dissolve film coating materials in the crucible on the tray 11, the film coating materials are atomized and volatilized, so that film coating is performed on the film coating parts, the control box 22 sequentially opens the mechanical pump, the roots pump and the diffusion pump, the vacuum chamber 2 is pumped into a vacuum state, vacuum detection is performed through a vacuum gauge arranged outside the film coating box 1, the tray 11 can be lifted to a proper height by using the second electric telescopic rod 25, and the installation of the film coating, the crucible can also be adjusted to a suitable height.
One side of first condensing tank 9 is equipped with switch 20, switch 20 respectively with first electric telescopic handle 17, second electric telescopic handle 25, motor 21, first condensing tank 9, second condensing tank 19, first centrifugal fan 7, second centrifugal fan 15 and solenoid valve 13 electric connection, switch on first electric telescopic handle 17 respectively through switch 20, second electric telescopic handle 25, motor 21, first condensing tank 9, second condensing tank 19, first centrifugal fan 7, the power of second centrifugal fan 15 and solenoid valve 13.
The control box 22 is electrically connected with the heater 5, the electron gun 12 and the vacuum extractor 6 respectively, and the power supply of the heater 5, the electron gun 12 and the vacuum extractor 6 is connected through the control box 22.
The working principle is as follows: a cooling device for optical vacuum coating comprises a coating box 1, a vacuum chamber 2, a vacuum door 3, a visible window 4, a heater 5, a vacuumizing device 6, a first centrifugal fan 7, a suction pipe 8, a first condensing box 9, a support rod 10, a tray 11, an electron gun 12, an electromagnetic valve 13, an air inlet pipe 14, a second centrifugal fan 15, a coating part fixing head 16, a first electric telescopic rod 17, a bearing 18, a second condensing box 19, a power switch 20, a motor 21, a control box 22, an air outlet plate 23, a brake box 24 and a second electric telescopic rod 25, wherein when the coating is finished and cooling is needed, the power switch 20 is used for opening the first condensing box 9, the second condensing box 19, the first centrifugal fan 7, the second centrifugal fan 15 and the electromagnetic valve 13, so that a condenser in the first condensing box 9 works to compress and refrigerate air and convey the air to the air outlet plate 23 by using the second centrifugal fan 15, the air outlet plate 23 discharges cold air from the bottom of the vacuum chamber 2, meanwhile, the first centrifugal fan 7 is electrified to suck hot air in the vacuum chamber 2 into the second condensing box 19 through the suction pipe 8, the second condensing box 19 compresses and refrigerates the hot air, and then the hot air is discharged, the heat can be extruded and moved upwards by the continuous increase of the cold air at the bottom of the vacuum chamber 2, the first centrifugal fan 7 is favorable for conveying the heat away quickly, the cooling efficiency is improved, the motor 21 can also be braked through the motor 21, the motor 21 is a forward and reverse rotating motor, the first electric telescopic rod 17 can be driven to rotate around the bearing 18, so that a film coating part on the film coating part fixing head 16 is driven to rotate, the cooling efficiency is improved, the film coating quality is also improved in the film coating process, and the film coating of the film coating part is.
This coating machine's cooling device adopts two condensers, install respectively on coating machine's bottom and one side, when needs cooling, the condenser box of bottom conveys real empty room's bottom with air conditioning, air conditioning extrudees real empty room top with steam from the bottom, then discharge after cooling down steam in the condenser box of side is carried with steam through the centrifugal fan at top, thereby reduce outdoor temperature, the rotation that can make a round trip with this coating film spare simultaneously, improve the efficiency of cooling coating film spare, also improve the quality of coating film, let the coating film more even.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention.
Claims (9)
1. The utility model provides a cooling device for optical vacuum coating, includes coating film case (1), its characterized in that: the vacuum chamber (2) is arranged in the coating box (1), the tray (11) is arranged at the bottom end of the vacuum chamber (2), the second electric telescopic rod (25) is arranged at the bottom end of the tray (11), the vacuumizing device (6) is installed at the top end of the coating box (1), the first centrifugal fans (7) are arranged on two sides of the vacuumizing device (6), the suction pipe (8) is connected onto the first centrifugal fan (7), the second condensing box (19) is connected to one end of the suction pipe (8), the second centrifugal fans (15) are arranged on two sides of the coating box (1), the air inlet pipe (14) is connected onto the second centrifugal fans (15), the electromagnetic valve (13) is installed at one end of the air inlet pipe (14), the brake box (24) is installed at the top end of the second centrifugal fans (15), and the motor (21) is installed inside the brake box (24), the one end of motor (21) is connected with first electric telescopic handle (17), be fixed with bearing (18) and coating film spare fixed head (16) on first electric telescopic handle (17), the bottom of coating film case (1) is equipped with first condensing box (9), the bottom of first condensing box (9) is equipped with control box (22), the both sides of real empty room (2) all are equipped with out aerofoil (23), be connected with vacuum door (3) on coating film case (1), the middle part of vacuum door (3) is equipped with visual window (4), heater (5) are all installed to the top and the bottom of visual window (4), the back mounted of coating film case (1) has electron gun (12), four corners in the bottom of coating film case (1) all weld bracing piece (10).
2. The cooling device for optical vacuum coating according to claim 1, wherein: brake case (24) welding is in on the both sides of coating film case (1), motor (21) pass through the bolt fastening in the inside of brake case (24), bearing (18) are fixed one of brake case (24) is served, first electric telescopic handle (17) fix on bearing (18) and with the pivot of motor (21) is fixed continuous, coating film spare fixed head (16) welding is in on first electric telescopic handle (17).
3. The cooling device for optical vacuum coating according to claim 1, wherein: the first centrifugal fan (7) and the second centrifugal fan (15) are fixed on the film coating box (1) through bolts, the first centrifugal fan (7) is connected with the second condensation box (19) and the vacuum chamber (2) through a suction pipe (8), and the second centrifugal fan (15) is connected with the vacuum chamber (2) and the first condensation box (9) through an air inlet pipe (14).
4. The cooling device for optical vacuum coating according to claim 1, wherein: all be equipped with water tank, compressor, condenser pipe and condenser in first condensing box (9) and second condensing box (19), first condensing box (9) and second condensing box (19) are all through the bolt fastening on coating case (1).
5. The cooling device for optical vacuum coating according to claim 1, wherein: the vacuum door (3) is fixedly connected with the coating box (1) through a hinge and a sealing gasket, and the heater (5) is fixed on the vacuum door (3) through a bolt.
6. The cooling device for optical vacuum coating according to claim 1, wherein: the electron gun (12) is mounted on the back of the film coating box (1) through bolts, the electron gun (12) is provided with a positive electrode and a negative electrode, and the vacuumizing device (6) comprises a mechanical pump, a roots pump and a diffusion pump and is connected with the vacuum chamber (2).
7. The cooling device for optical vacuum coating according to claim 1, wherein: the tray (11) is fixedly connected with the second electric telescopic rod (25) through bolts, and the second electric telescopic rod (25) is fixed to the bottom of the film coating box (1) through bolts.
8. The cooling device for optical vacuum coating according to claim 1, wherein: one side of first condensing box (9) is equipped with switch (20), switch (20) respectively with first electric telescopic handle (17), second electric telescopic handle (25), motor (21), first condensing box (9), second condensing box (19), first centrifugal fan (7), second centrifugal fan (15) and solenoid valve (13) electric connection.
9. The cooling device for optical vacuum coating according to claim 1, wherein: the control box (22) is respectively electrically connected with the heater (5), the electron gun (12) and the vacuumizing device (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921770288.5U CN210683923U (en) | 2019-10-22 | 2019-10-22 | Cooling device for optical vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921770288.5U CN210683923U (en) | 2019-10-22 | 2019-10-22 | Cooling device for optical vacuum coating |
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| Publication Number | Publication Date |
|---|---|
| CN210683923U true CN210683923U (en) | 2020-06-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921770288.5U Active CN210683923U (en) | 2019-10-22 | 2019-10-22 | Cooling device for optical vacuum coating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113278943A (en) * | 2021-05-24 | 2021-08-20 | 南京凯泽瑞兹光电科技有限公司 | High-uniformity vacuum coating machine for large-diameter and high-curvature optical lens |
-
2019
- 2019-10-22 CN CN201921770288.5U patent/CN210683923U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113278943A (en) * | 2021-05-24 | 2021-08-20 | 南京凯泽瑞兹光电科技有限公司 | High-uniformity vacuum coating machine for large-diameter and high-curvature optical lens |
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