CN208995588U - A kind of aluminum evaporation device of thyristor - Google Patents
A kind of aluminum evaporation device of thyristor Download PDFInfo
- Publication number
- CN208995588U CN208995588U CN201821695308.2U CN201821695308U CN208995588U CN 208995588 U CN208995588 U CN 208995588U CN 201821695308 U CN201821695308 U CN 201821695308U CN 208995588 U CN208995588 U CN 208995588U
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- China
- Prior art keywords
- fixedly connected
- outer container
- partition
- belt pulley
- thyristor
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Abstract
The utility model discloses a kind of aluminum evaporation devices of thyristor, including outer container and bottom plate, it is fixedly connected at the top of the bottom of the outer container and bottom plate, the side of the outer chamber interior wall bottom is fixedly connected with the first mounting blocks, buffer stopper is fixedly connected at the top of first mounting blocks, it is fixedly connected with motor at the top of the buffer stopper, the utility model relates to thyristor technical fields.The aluminum evaporation device of the thyristor is by installing motor by the first mounting blocks and buffer stopper in the bottom of outer chamber interior wall, the surface of motor output shaft is fixedly connected with the first belt pulley, outer chamber interior wall is rotatablely connected rotating bar, the surface of rotating bar is fixedly connected with the second belt pulley, it is sequentially connected between first belt pulley and the second belt pulley by belt, the top of rotating bar is fixedly connected with functional compartment, such structure setting can be such that functional compartment is rotated, silicon source evaporation rate inside Accelerate Crucible, shorten evaporation time, improves evaporation efficiency.
Description
Technical field
The utility model relates to thyristor technical field, specially a kind of aluminum evaporation device of thyristor.
Background technique
Thyristor is a kind of high-power electric appliance element, and general thyristor is referred to as silicon-controlled, it have it is small in size, high-efficient,
The advantages that service life is long can be used as high-power driving device in automatic control system, realize high-power with the control of small-power control
Equipment, it is widely used in AC/DC motor speed-regulating system, power-regulating system and servomechanism, and silicon-controlled point unidirectional
Silicon-controlled and two kinds of bidirectional triode thyristor, bidirectional triode thyristor is also triode ac switch, and bidirectional triode thyristor is equivalent in structure
Two one-way SCR Opposite direction connections, it is this it is silicon-controlled have the function of bidirectionally conductive, on off operating mode is determined by control electrode G,
The advantages of on control electrode G plus positive pulse (or negative pulse) can be such that its positive (or reversed) is connected, this device is control circuit letter
It is single, there is no reverse withstand voltage problem, therefore be particularly suitable for doing AC contact-less switch use.
The preparation method of thyristor has the evaporation coating processes of metallic aluminium, at present the aluminum evaporation device of thyristor chip, main
If silicon source is placed in crucible made of copper, melting is then bombarded using the high-velocity electron beam of 10KV, becomes solid aluminium
Steam state is loaded with cooling water in the cavity of crucible made of copper, fills the copper earthenware of cooling water since existing silicon source is directly placed at
It in crucible, results in evaporation process, heating power supply power 15KW is added to 85%, and evaporation rate only has 10 angstroms per seconds or so, evaporation
Time, inefficiency, metal film quality was poor, high production cost up to 8.5H or so.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of aluminum evaporation device of thyristor, solves evaporation
The problem of time long inefficiency, metal film quality be poor, high production cost.
In order to achieve the above object, the utility model is achieved by the following technical programs: a kind of aluminum evaporation of thyristor
Device, including outer container and bottom plate are fixedly connected at the top of the bottom of the outer container and bottom plate, the side of the outer chamber interior wall bottom
The first mounting blocks are fixedly connected with, buffer stopper is fixedly connected at the top of first mounting blocks, the top of the buffer stopper is solid
Surely it is connected with motor, the surface of the motor output shaft is fixedly connected with the first belt pulley, and the bottom of the outer chamber interior wall passes through
Rotating block is rotatably connected to rotating bar, and the surface of the rotating bar is fixedly connected with the second belt pulley, first belt pulley with
It is sequentially connected between the surface of second belt pulley by belt, is fixedly connected with partition between the two sides of the outer chamber interior wall, institute
One end of rotating bar is stated through partition and extends to the top of partition, one end that the rotating bar extends at the top of partition passes through company
It connects block and is fixedly connected with functional compartment.
Preferably, the side of the outer chamber interior wall bottom is fixedly connected with guard box, and the bottom of the protection chamber interior wall is solid
Surely the second mounting blocks are connected with, are fixedly connected with vacuum pump at the top of second mounting blocks.
Preferably, the air inlet of the vacuum pump is communicated with gas-guide tube by connector, and one end of the gas-guide tube is run through
The exhaust outlet at guard box and partition and the top for extending to partition, the vacuum pump is communicated with exhaust pipe by connector, described
Exhaust pipe is through guard box and outer container and the outside for extending to outer container.
Preferably, the bottom Yu two sides of the function chamber interior wall are fixedly connected to heater strip fixed plate, and heater strip
The surface of fixed plate passes through mounting assembly and is fixedly connected with heater strip, and the heater strip is made using tantalum heater strip or tungsten heater strip
For heat medium.
Preferably, it is fixedly connected with crucible between the two sides of the function chamber interior wall, the inside of the crucible is placed with aluminium
Source is communicated with feed pipe at the top of the outer container, and the feed pipe is internally provided with solenoid valve, the input terminal of the solenoid valve
It is electrically connected with the output end of control cabinet.
Preferably, the two sides of the bottom base plate are fixedly connected to directive wheel, and the side of two directive wheels is solid
Surely it is connected with brake bar, the side of the outer container is fixedly connected with control cabinet.
Beneficial effect
The utility model provides a kind of aluminum evaporation device of thyristor.Have it is following the utility model has the advantages that
(1), the aluminum evaporation device of the thyristor, by being pacified in the bottom of outer chamber interior wall by the first mounting blocks and buffer stopper
Motor is filled, the surface of motor output shaft is fixedly connected with the first belt pulley, and outer chamber interior wall is rotatablely connected rotating bar, the surface of rotating bar
Be fixedly connected with the second belt pulley, between the first belt pulley and the second belt pulley by belt be sequentially connected, the top of rotating bar with
Functional compartment is fixedly connected, and such structure setting can be such that functional compartment is rotated, the silicon source evaporation rate inside Accelerate Crucible,
Shorten evaporation time, improves evaporation efficiency.
(2), the aluminum evaporation device of the thyristor is fixedly connected with guard box by the bottom inside outer container, guard box
Inside setting vacuum pump, the air inlet of vacuum pump are connected to gas-guide tube, and one end of gas-guide tube through guard box and partition and extends to
The top of partition is vacuum-treated the air in the above space of partition using the working principle of vacuum pump, in this way can be effective
Raising metal film the quality of production, while also reducing the temperature requirement to production, save the cost consumption.
Detailed description of the invention
Fig. 1 is the cross-sectional view of the utility model structure；
Fig. 2 is the structural schematic diagram of the utility model functional compartment.
In figure: 1 outer container, 2 bottom plates, 3 first mounting blocks, 4 buffer stoppers, 5 motors, 6 first belt pulleys, 7 rotating bars, 8 second
Belt pulley, 9 belts, 10 partitions, 11 functional compartments, 12 guard boxs, 13 second mounting blocks, 14 vacuum pumps, 15 gas-guide tubes, 16 exhausts
Mouth, 17 exhaust pipes, 18 heater strip fixed plates, 19 heater strips, 20 crucibles, 21 silicon sources, 22 feed pipes, 23 directive wheels, 24 brake bars,
25 control cabinets.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of technical solution referring to FIG. 1-2: a kind of aluminum evaporation device of thyristor, including outer
Case 1 and bottom plate 2, the two sides of 2 bottom of bottom plate are fixedly connected to directive wheel 23, and the fixed company in the side of two directive wheels 23
It is connected to brake bar 24, the side of outer container 1 is fixedly connected with control cabinet 25, and the bottom of outer container 1 is fixedly connected with the top of bottom plate 2,
The side of 1 inner wall bottom of outer container is fixedly connected with guard box 12, and the bottom of 12 inner wall of guard box is fixedly connected with the second mounting blocks
13, the top of the second mounting blocks 13 is fixedly connected with vacuum pump 14, and the air inlet of vacuum pump 14 is communicated with air guide by connector
Pipe 15, one end of gas-guide tube 15 are run through through guard box 12 and partition 10 and the top for extending to partition 10 positioned at gas-guide tube 15
The interface of partition 10 is provided with sealing ring, ensure that the airtightness in space, the exhaust outlet 16 of vacuum pump 14 are connected by connector
It is connected with exhaust pipe 17, exhaust pipe 17 is through guard box 12 and outer container 1 and the outside for extending to outer container 1, and the one of 1 inner wall bottom of outer container
Side is fixedly connected with the first mounting blocks 3, and the top of the first mounting blocks 3 is fixedly connected with buffer stopper 4, and the top of buffer stopper 4 is fixed
It is connected with motor 5, the surface of 5 output shaft of motor is fixedly connected with the first belt pulley 6, and the bottom of 1 inner wall of outer container passes through rotating block
It is rotatably connected to rotating bar 7, the surface of rotating bar 7 is fixedly connected with the second belt pulley 8, the first belt pulley 6 and the second belt pulley 8
Surface between be sequentially connected by belt 9, partition 10, one end of rotating bar 7 are fixedly connected between the two sides of 1 inner wall of outer container
Through partition 10 and the top of partition 10 is extended to, the interface positioned at rotating bar 7 through partition 10 is provided with sealing ring, guarantees
The airtightness in space, one end that rotating bar 7 extends to 10 top of partition by link block are fixedly connected with functional compartment 11, function
The bottom and two sides of 11 inner wall of case are fixedly connected to heater strip fixed plate 18, and the surface of heater strip fixed plate 18 passes through
Mounting assembly is fixedly connected with heater strip 19, the heater strip 19 using tantalum heater strip or tungsten heater strip as heat medium, can be with
Reaching higher temperature, heating speed is fast, and it is high-efficient, it consumes energy low, is fixedly connected with crucible 20 between the two sides of 11 inner wall of functional compartment,
Evaporation material and heater strip 19 are contactless in crucible 20, increase the service life of crucible 20, the inside of crucible 20 is placed with aluminium
Source 21, the top of outer container 1 are communicated with feed pipe 22, which is internally provided with solenoid valve, the input terminal of solenoid valve with
The output end of control cabinet 25 is electrically connected, and the space on partition 10 can be made to form confined space by the effect of solenoid valve, made
Operation can be effectively performed in vacuum pump 14.
In use, staff's operation control box 25 open feed pipe 22 inside solenoid valve, to crucible 20 inside be added
Silicon source 21, then operation control box 25 close solenoid valve, and vacuum pump 14 is made to start to work, and the space on partition 10 is evacuated
State, operation control box 25 make heater strip 19 and motor 5 start to work, be evaporated processing to the silicon source 21 inside crucible 20,
It is above exactly a kind of whole working principles of the aluminum evaporation device of thyristor.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of aluminum evaporation device of thyristor, including outer container (1) and bottom plate (2), the bottom and bottom plate (2) of the outer container (1)
Top be fixedly connected, it is characterised in that: the side of outer container (1) the inner wall bottom is fixedly connected with the first mounting blocks (3), institute
It states and is fixedly connected at the top of the first mounting blocks (3) buffer stopper (4), be fixedly connected with motor at the top of the buffer stopper (4)
(5), the surface of motor (5) output shaft is fixedly connected with the first belt pulley (6), and the bottom of outer container (1) inner wall passes through
Rotating block is rotatably connected to rotating bar (7), and the surface of the rotating bar (7) is fixedly connected with the second belt pulley (8), and described first
Be sequentially connected between belt pulley (6) and the surface of the second belt pulley (8) by belt (9), the two sides of outer container (1) inner wall it
Between be fixedly connected with partition (10), one end of the rotating bar (7) is through partition (10) and extends to the tops of partition (10), institute
It states one end that rotating bar (7) extends at the top of partition (10) and functional compartment (11) is fixedly connected with by link block.
2. a kind of aluminum evaporation device of thyristor according to claim 1, it is characterised in that: outer container (1) the inner wall bottom
The side in portion is fixedly connected with guard box (12), and the bottom of guard box (12) inner wall is fixedly connected with the second mounting blocks
(13), vacuum pump (14) are fixedly connected at the top of second mounting blocks (13).
3. a kind of aluminum evaporation device of thyristor according to claim 2, it is characterised in that: the vacuum pump (14) into
Port is communicated with gas-guide tube (15) by connector, and guard box (12) and partition (10) are run through simultaneously in one end of the gas-guide tube (15)
The top of partition (10) is extended to, the exhaust outlet (16) of the vacuum pump (14) is communicated with exhaust pipe (17), institute by connector
Exhaust pipe (17) are stated through guard box (12) and outer container (1) and the outside for extending to outer container (1).
4. a kind of aluminum evaporation device of thyristor according to claim 1, it is characterised in that: functional compartment (11) inner wall
Bottom and two sides be fixedly connected to heater strip fixed plate (18), and the surface of heater strip fixed plate (18) passes through installation
Component is fixedly connected with heater strip (19).
5. a kind of aluminum evaporation device of thyristor according to claim 1, it is characterised in that: functional compartment (11) inner wall
Two sides between be fixedly connected with crucible (20), the inside of the crucible (20) is placed with silicon source (21), the top of the outer container (1)
Portion is communicated with feed pipe (22).
6. a kind of aluminum evaporation device of thyristor according to claim 1, it is characterised in that: bottom plate (2) bottom
Two sides are fixedly connected to directive wheel (23), and the side of two directive wheels (23) is fixedly connected to brake bar (24), institute
The side for stating outer container (1) is fixedly connected with control cabinet (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821695308.2U CN208995588U (en) | 2018-10-18 | 2018-10-18 | A kind of aluminum evaporation device of thyristor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821695308.2U CN208995588U (en) | 2018-10-18 | 2018-10-18 | A kind of aluminum evaporation device of thyristor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208995588U true CN208995588U (en) | 2019-06-18 |
Family
ID=66804213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821695308.2U Expired - Fee Related CN208995588U (en) | 2018-10-18 | 2018-10-18 | A kind of aluminum evaporation device of thyristor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208995588U (en) |
-
2018
- 2018-10-18 CN CN201821695308.2U patent/CN208995588U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190618 Termination date: 20201018 |
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| CF01 | Termination of patent right due to non-payment of annual fee |