CN213507163U - Integrated chamber for vacuum coating - Google Patents
Integrated chamber for vacuum coating Download PDFInfo
- Publication number
- CN213507163U CN213507163U CN202022071818.6U CN202022071818U CN213507163U CN 213507163 U CN213507163 U CN 213507163U CN 202022071818 U CN202022071818 U CN 202022071818U CN 213507163 U CN213507163 U CN 213507163U
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- wall
- integrated
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- cavity body
- water pump
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 83
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000001816 cooling Methods 0.000 claims abstract description 10
- 238000003466 welding Methods 0.000 claims abstract description 5
- 238000007789 sealing Methods 0.000 claims description 26
- 238000000576 coating method Methods 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 22
- 238000005086 pumping Methods 0.000 claims description 16
- 238000009833 condensation Methods 0.000 claims description 8
- 230000005494 condensation Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 5
- 239000002699 waste material Substances 0.000 abstract description 5
- 125000004122 cyclic group Chemical group 0.000 abstract description 4
- 239000000498 cooling water Substances 0.000 abstract description 3
- 238000005192 partition Methods 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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Abstract
The utility model discloses an integrated cavity for vacuum coating, including integrated cavity body, the welding of the top inner wall and the bottom inner wall of integrated cavity body has same baffle, and the middle part of baffle has seted up the transmission mouth, the baffle separates integrated cavity body for preheating chamber and cooling chamber, this internal transmission device that is equipped with of integrated cavity, and transmission device include through the bolt install at the servo motor of integrated cavity body one side outer wall, with the lead screw of servo motor output shaft. The utility model discloses in the U type condensate tank was gone into with the cold water pump in the water tank to first water pump, carry out cooling treatment to the work piece on the coated sheet to the second water pump returns U type condensate tank internal cooling water pump to the water tank again, and water-cooled effectual like this can not cause the waste of water resource moreover, can realize the cyclic utilization of water resource, owing to set up controller and aspiration pump, assurance vacuum environment that can be accurate, the workman operates simple swiftly, has improved work efficiency.
Description
Technical Field
The utility model relates to a vacuum coating equipment technical field especially relates to an integrated cavity is used in vacuum coating.
Background
Through retrieval, chinese patent publication No. CN207828407U discloses an integrated chamber for vacuum coating, which comprises an integrated chamber composed of a chamber top plate, four chamber side plates, and a chamber bottom plate, wherein a partition plate is arranged in the integrated chamber, the partition plate divides the integrated chamber into a preheating chamber and a process chamber, an opening for a workpiece to pass through is arranged on the partition plate, and a sealing door for sealing the opening is arranged in the preheating chamber. The preheating chamber and the process chamber are integrated into an integrated chamber, so that the manufacturing manufacturability is improved, and the assembly and the maintenance are convenient; the sealing door has a simple structure and small weight, is convenient to assemble, disassemble and maintain, and reduces purchasing cost; the swinging heat insulation plate is simple in structure, small in occupied space, capable of reducing the size space of the process chamber, capable of reducing the using amount of process gas and convenient for pressure control, two ends of the swinging heat insulation plate are connected and fixed through the rotating shaft, loading and unloading and maintenance are convenient, and operation is reliable.
The above patents suffer from the following disadvantages: on one hand, in the patent, the water cooling effect is not good, the water resource waste is serious, and the water resource can not be recycled; on the other hand, the workpiece is not stable enough, so that the phenomenon of dumping is easy to occur in the transmission process, and the vacuum environment cannot be accurately ensured. Therefore, an integrated chamber for vacuum coating is proposed.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects in the prior art and providing an integrated chamber for vacuum coating.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an integrated chamber for vacuum coating comprises an integrated chamber body, wherein the top inner wall and the bottom inner wall of the integrated chamber body are welded with the same partition plate, the middle part of the partition plate is provided with a transmission port, the partition plate divides the integrated chamber body into a preheating chamber and a cooling chamber, the integrated chamber body is internally provided with a transmission mechanism, the transmission mechanism comprises a servo motor, a screw rod, a sealing threaded bearing and a coating plate, the servo motor is arranged on the outer wall of one side of the integrated chamber body through bolts, the screw rod is connected with an output shaft of the servo motor, the sealing threaded bearing is sleeved on the screw rod, the coating plate is welded on the side wall of the lower part of the sealing threaded bearing, the coating plate is provided with two electric clamping mechanisms, the two electric clamping mechanisms respectively comprise a mounting block welded on the outer wall of the top of the coating plate and a micro cylinder mounted on the side wall of, and install the heating wire that the equidistance distributes in the cavity, the spout has been seted up to the bottom inner wall of integrated cavity body, and the welding of the bottom outer wall of coating plate has the spacing slide bar with spout looks adaptation, the opposite side inner wall of integrated cavity body loops through the bolt and installs first water pump and second water pump, and the welding of the opposite side outer wall of integrated cavity body has the water tank, U type condensate tank has been seted up in the coating plate, and the one end intercommunication of first water pump and U type condensate tank is passed through to the play water end of first threaded hose, and the other end intercommunication of second threaded hose and U type condensate tank is passed through to the end of drawing water of second water pump, the aspiration pump is installed through the bolt in the top of integrated cavity body, and the controller is installed through the bolt to one side outer wall.
Preferably, the circle center of the sealing threaded bearing is provided with an internal threaded hole matched with the external thread of the screw rod, and the sealing threaded bearing is matched with the transmission port.
Preferably, the pressing plates are welded at the ends, close to each other, of the output shafts of the two micro cylinders, and the outer walls of the two sides, close to each other, of the two pressing plates are respectively contacted with the outer walls of the two sides of the workpiece.
Preferably, the screw rod is connected with the inner walls of the two sides of the integrated cavity body through two sealing bearings respectively, and the outer wall of the bottom end of the limiting sliding rod is connected with the inner wall of the bottom of the sliding groove in a sliding mode.
Preferably, the water pumping end of the first water pump and the water outlet end of the second water pump are communicated with the water tank through pipelines, the top of the water tank is provided with a filling port, the air pumping end of the air pump is communicated with the inside of the integrated cavity body, and the air pumping ends of the two pipelines and the air pump are connected with the inner wall of the integrated cavity body through sealing rings.
Preferably, servo motor is connected with the switch of reversing through the wire, and the switch of reversing passes through wire and controller electric connection, and one side outer wall of integrated cavity body articulates through the hinge has sealing door.
Preferably, the micro cylinder, the heating wire, the first water pump, the second water pump and the air pump are electrically connected with the controller through wires, and the controller is connected to the power supply through wires.
The utility model has the advantages that:
1. the first water pump and the second water pump are arranged, so that cold water in the water tank is pumped into the U-shaped condensation tank by the first water pump to cool the workpiece on the coated plate, and the second water pump pumps the cold water in the U-shaped condensation tank back into the water tank, so that the water cooling effect is good, the waste of water resources is avoided, and the cyclic utilization of the water resources can be realized;
2. because two electric clamping mechanisms are arranged, the workpiece can be stably clamped, so that the phenomenon of toppling over is not easy to occur in the transmission process, the workpiece coating process is smooth, the coating quality is improved, the controller and the air pump are arranged, the vacuum environment can be accurately guaranteed, the operation of workers is simple and fast, and the working efficiency is improved.
Drawings
Fig. 1 is a schematic cross-sectional structural view of an integrated chamber for vacuum deposition according to the present invention;
fig. 2 is a schematic view of an installation structure of a sealing door in an integrated chamber for vacuum coating according to the present invention;
fig. 3 is a schematic view of a partial cross-sectional enlarged structure of an integrated chamber for vacuum deposition according to the present invention.
In the figure: the device comprises an integrated chamber body 1, a partition plate 2, a transmission port 3, a servo motor 4, a lead screw 5, a sealed threaded bearing 6, a coated plate 7, an installation block 8, a miniature cylinder 9, a workpiece 10, an electric heating wire 11, a limit slide bar 12, a sliding groove 13, a first water pump 14, a second water pump 15, a water tank 16, a controller 17, an air pump 18 and a sealing door 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, an integrated chamber for vacuum coating comprises an integrated chamber body 1, wherein the top inner wall and the bottom inner wall of the integrated chamber body 1 are welded with a same partition plate 2, the middle part of the partition plate 2 is provided with a transmission port 3, the partition plate 2 divides the integrated chamber body 1 into a preheating chamber and a cooling chamber, the integrated chamber body 1 is internally provided with a transmission mechanism, the transmission mechanism comprises a servo motor 4 arranged on the outer wall of one side of the integrated chamber body 1 through bolts, a screw rod 5 connected with an output shaft of the servo motor 4, a sealing threaded bearing 6 sleeved on the screw rod 5 and a coating plate 7 welded on the lower side wall of the sealing threaded bearing 6, the circle center of the sealing threaded bearing 6 is provided with an internal threaded hole matched with the external thread of the screw rod 5, the sealing threaded bearing 6 is matched with the transmission port 3, and the coating, the two electric clamping mechanisms comprise an installation block 8 welded on the outer wall of the top of the film plating plate 7 and micro cylinders 9 installed on the side walls of the installation block 8 through bolts, a workpiece 10 is placed on the top of the film plating plate 7, pressing plates are welded at the ends, close to each other, of output shafts of the two micro cylinders 9, the outer wall of one side, close to each other, of the two pressing plates is in contact with the outer walls of the two sides of the workpiece 10 respectively, and the two electric clamping mechanisms are arranged, so that the workpiece 10 can be stably clamped, the phenomenon of toppling over is not prone to occurring in the transmission process, the film plating process of the workpiece 10 is enabled to be smoother, and the film;
a cavity is reserved at the top of the coating plate 7, electric heating wires 11 which are distributed equidistantly are installed in the cavity, a sliding groove 13 is formed in the inner wall of the bottom of the integrated cavity body 1, a limiting sliding rod 12 matched with the sliding groove 13 is welded on the outer wall of the bottom of the coating plate 7, a first water pump 14 and a second water pump 15 are installed on the inner wall of the other side of the integrated cavity body 1 sequentially through bolts, a water tank 16 is welded on the outer wall of the other side of the integrated cavity body 1, a U-shaped condensation tank is formed in the coating plate 7, the water outlet end of the first water pump 14 is communicated with one end of the U-shaped condensation tank through a first threaded hose, the water pumping end of the second water pump 15 is communicated with the other end of the U-shaped condensation tank through a second threaded hose, an air suction pump 18 is installed on the top of the integrated cavity body 1 through bolts, a controller 17 is installed on the outer wall of one side of the integrated, the outer wall of the bottom end of the limiting slide rod 12 is connected with the inner wall of the bottom of the slide groove 13 in a sliding manner, the water pumping end of the first water pump 14 and the water outlet end of the second water pump 15 are both communicated with the water tank 16 through pipelines, the top of the water tank 16 is provided with a filling opening, the air pumping end of the air pumping pump 18 is communicated with the inside of the integrated cavity body 1, the two pipelines and the air pumping end of the air pumping pump 18 are both connected with the inner wall of the integrated cavity body 1 through sealing rings, the servo motor 4 is connected with a forward and backward switch through a lead, the forward and backward switch is electrically connected with the controller 17 through a lead, the outer wall of one side of the integrated cavity body 1 is hinged with a sealing door 19 through a hinge, the micro cylinder 9, the heating wire 11, the first water pump 14, the second water pump 15 and the air pumping pump 18 are all electrically connected with the controller 17 through leads, and, first water pump 14 is gone into the U type condensate tank with the cold water pump in the water tank 16 in, carry out cooling treatment to work piece 10 on the coated sheet 7, and second water pump 15 is back to U type condensate tank internal cooling water pump to water tank 16 again, water-cooling is effectual like this, and can not cause the waste of water resource, can realize the cyclic utilization of water resource, owing to set up controller 17 and aspiration pump 18, guarantee vacuum environment that can be accurate, the workman operates simple swiftly, and the work efficiency is improved.
The working principle is as follows: when the device is used, all electrical components are controlled by the controller 17, firstly, the sealing door 19 is opened, the workpiece 10 is placed on the coating plate 7, at the moment, the two micro cylinders 9 work, so that the workpiece 10 is stably clamped by the two pressing plates, the phenomenon of toppling over is not easy to happen in the transmission process, the coating process of the workpiece 10 is smoother, then, the sealing door 19 is closed, at the moment, the servo motor 4 works, the lead screw 5 rotates to drive the sealing threaded bearing 6 to move into the preheating chamber, at the moment, the air pump 18 pumps the integrated chamber body 1 into a vacuum state, then, the heating wires 11 heat and form the workpiece 10, after the heating and forming, the lead screw 5 conveys the coating plate 7 into the cold area, the sealing threaded bearing 6 seals the transmission port 3, then, the first water pump 14 pumps cold water in the water tank 16 into the U-shaped condensation tank, carry out cooling treatment to work piece 10 on the coating plate 7 to second water pump 15 is back to the U type condensate tank internal cooling water pump to the water tank 16 in again, and water-cooled effectual like this can not cause the waste of water resource moreover, can realize the cyclic utilization of water resource, and whole coating process is ended so far.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (7)
1. The utility model provides an integrated cavity for vacuum coating, includes integrated cavity body (1), the top inner wall and the welding of bottom inner wall of integrated cavity body (1) have same baffle (2), and transmission mouth (3) have been seted up at the middle part of baffle (2), baffle (2) separate integrated cavity body (1) for preheating chamber and cooling chamber, its characterized in that, be equipped with transmission device in integrated cavity body (1), and transmission device include through the bolt install servo motor (4) at integrated cavity body (1) one side outer wall, with lead screw (5) of servo motor (4) output shaft, cup joint sealed screw thread bearing (6) on lead screw (5) and weld coating plate (7) at sealed thread bearing (6) lower part lateral wall, be equipped with two electronic fixture on coating plate (7), and two electronic fixture all include the installation piece (8) of welding at coating plate (7) top outer wall and through bolt ann's mounting block (8) and through bolt The miniature cylinder (9) is arranged on the side wall of the mounting block (8), a workpiece (10) is placed at the top of the coating plate (7), a cavity is reserved at the top of the coating plate (7), heating wires (11) distributed at equal intervals are installed in the cavity, a sliding groove (13) is formed in the inner wall of the bottom of the integrated cavity body (1), a limiting sliding rod (12) matched with the sliding groove (13) is welded on the outer wall of the bottom of the coating plate (7), a first water pump (14) and a second water pump (15) are installed on the inner wall of the other side of the integrated cavity body (1) through bolts in sequence, a water tank (16) is welded on the outer wall of the other side of the integrated cavity body (1), a U-shaped condensation groove is formed in the coating plate (7), the water outlet end of the first water pump (14) is communicated with one end of the U-shaped condensation groove through a first threaded hose, and the water pumping end of the second water pump (15) is communicated with the other, the top of the integrated cavity body (1) is provided with an air pump (18) through a bolt, and the outer wall of one side of the integrated cavity body (1) is provided with a controller (17) through a bolt.
2. The integrated chamber for vacuum coating according to claim 1, wherein the center of the sealed threaded bearing (6) is provided with an internal threaded hole matched with the external thread of the screw rod (5), and the sealed threaded bearing (6) is matched with the transmission port (3).
3. The integrated chamber for vacuum coating according to claim 1, wherein a pressing plate is welded to the end of the output shaft of each of the two microcylinders (9) close to each other, and the outer wall of the side of the two pressing plates close to each other is in contact with the outer wall of the workpiece (10) on both sides.
4. The integrated chamber for vacuum coating according to claim 1, wherein the lead screw (5) is connected to the inner walls of the two sides of the integrated chamber body (1) through two sealing bearings, and the outer wall of the bottom end of the limiting slide bar (12) is connected to the inner wall of the bottom of the slide groove (13) in a sliding manner.
5. The integrated chamber for vacuum coating according to claim 1, wherein the water pumping end of the first water pump (14) and the water outlet end of the second water pump (15) are both communicated with the water tank (16) through pipes, the top of the water tank (16) is provided with a filling port, the air pumping end of the air pumping pump (18) is communicated with the inside of the integrated chamber body (1), and the two pipes and the air pumping end of the air pumping pump (18) are both connected with the inner wall of the integrated chamber body (1) through sealing rings.
6. The integrated chamber for vacuum coating according to claim 1, wherein the servo motor (4) is connected with a reversing switch through a lead, the reversing switch is electrically connected with the controller (17) through a lead, and one outer wall of the integrated chamber body (1) is hinged with a sealing door (19) through a hinge.
7. The integrated chamber for vacuum coating according to claim 1, wherein the micro-cylinder (9), the heating wire (11), the first water pump (14), the second water pump (15) and the air pump (18) are electrically connected to a controller (17) through wires, and the controller (17) is connected to a power supply through wires.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022071818.6U CN213507163U (en) | 2020-09-18 | 2020-09-18 | Integrated chamber for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022071818.6U CN213507163U (en) | 2020-09-18 | 2020-09-18 | Integrated chamber for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213507163U true CN213507163U (en) | 2021-06-22 |
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ID=76448717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022071818.6U Expired - Fee Related CN213507163U (en) | 2020-09-18 | 2020-09-18 | Integrated chamber for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213507163U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114134465A (en) * | 2021-11-24 | 2022-03-04 | 成都中建材光电材料有限公司 | Method and device for improving utilization rate of evaporation equipment for photovoltaic module |
-
2020
- 2020-09-18 CN CN202022071818.6U patent/CN213507163U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114134465A (en) * | 2021-11-24 | 2022-03-04 | 成都中建材光电材料有限公司 | Method and device for improving utilization rate of evaporation equipment for photovoltaic module |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210622 |