CN112342518A - Horizontal vacuum coating machine for magnetic ring coating - Google Patents
Horizontal vacuum coating machine for magnetic ring coating Download PDFInfo
- Publication number
- CN112342518A CN112342518A CN202011130545.6A CN202011130545A CN112342518A CN 112342518 A CN112342518 A CN 112342518A CN 202011130545 A CN202011130545 A CN 202011130545A CN 112342518 A CN112342518 A CN 112342518A
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- CN
- China
- Prior art keywords
- coating
- end cover
- magnetic ring
- cavity
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 96
- 238000000576 coating method Methods 0.000 title claims abstract description 96
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000007888 film coating Substances 0.000 claims abstract description 14
- 238000009501 film coating Methods 0.000 claims abstract description 14
- 238000005086 pumping Methods 0.000 claims abstract description 3
- 239000011553 magnetic fluid Substances 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The invention provides a horizontal vacuum coating machine for magnetic ring coating, which comprises a coating chamber and a coating cavity rotatably arranged in the coating chamber; the side wall of the coating chamber is connected with a vacuum-pumping tube, one end of the coating chamber is provided with an air inlet, the other end of the coating chamber is provided with an outer end cover, and the outer end cover is provided with a rotating motor; a plurality of material rods are inserted and installed in the coating cavity, one end of the coating cavity is provided with an air inlet corresponding to the air inlet, the other end of the coating cavity is provided with an inner end cover, and a rotating shaft is fixed on one side of the inner end cover close to the outer end cover; the magnetic ring is sleeved on the material rod, the material rod is inserted and installed in the film coating cavity, the rotating motor and the rotating shaft can be connected by closing the inner end cover and the outer end cover, so that the film coating cavity is driven to carry out rotary film coating by the rotating motor, the structure is simple, the operation is convenient, meanwhile, the magnetic ring can be coated in an all-dimensional mode at one time, and the film coating efficiency of the magnetic ring is effectively improved.
Description
Technical Field
The invention relates to the field of vacuum coating, in particular to a horizontal vacuum coating machine for coating a magnetic ring.
Background
The vacuum coating technology is a new technology for material synthesis and processing, and a layer of coating with special performance is coated on the surface of a solid by physical and chemical means, so that the surface of the solid has excellent performances of wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electric conduction, magnetic conduction, insulation, decoration and the like, thereby achieving the effects of improving the product quality, prolonging the product service life, saving energy and the like.
In the prior art, when a magnetic ring is coated, the magnetic ring is usually placed on a coating frame of a vertical coating machine, only one side of the magnetic ring can be coated at each time, a workpiece needs to be cooled to a touchable temperature, then the coating processing of the other side can be carried out after manual sheet turning, the production efficiency is low, and the labor intensity is high.
Disclosure of Invention
Aiming at the technical problem, the invention provides a horizontal vacuum coating machine for coating a magnetic ring.
A horizontal vacuum coating machine for coating a magnetic ring comprises a coating chamber transversely fixed on a workbench and a coating cavity rotatably arranged in the coating chamber; the side wall of the coating chamber is connected with a vacuum-pumping tube, one end of the coating chamber is provided with an air inlet, and the other end of the coating chamber is provided with a detachable outer end cover; the outer end cover is provided with a rotating motor for driving the film coating cavity to rotate and coat a film;
a plurality of detachable material rods are inserted into the coating cavity, one end of the coating cavity, which is close to the air inlet, is provided with a corresponding air inlet, and the other end of the coating cavity is provided with a detachable inner end cover; a rotating shaft is fixed on one side of the inner end cover close to the outer end cover; when the inner end cap and the outer end cap are closed, an output shaft of the rotating electric machine is engaged with the rotating shaft.
Preferably, a magnetic fluid sealing element is fixed on the outer end cover, one end of the magnetic fluid sealing element is fixedly connected with an output shaft of the rotating motor through a transmission gear, and the other end of the magnetic fluid sealing element is in inserted fit with the rotating shaft through a spline.
Preferably, both ends of the coating cavity are provided with convex edges for supporting the coating cavity, and the outer diameter of each convex edge is matched with the inner diameter of the coating chamber; and a circular sliding rail clamped with the convex edge is arranged on the inner wall of the coating chamber.
Preferably, a plurality of supporting balls are mounted at the bottom of the inner wall of the coating chamber, and the supporting balls are abutted to the outer side wall of the coating chamber.
Preferably, the outer end cover is detachably connected with the coating chamber through a locking buckle; the inner end cover is detachably connected with the coating cavity through a bolt.
Preferably, the material rod is provided with a thread bulge for preventing adhesion.
Preferably, the side wall of the coating chamber is connected with a vacuum gauge tube for measuring vacuum degree.
The invention has the beneficial effects that: the horizontal coating chamber is utilized to coat a film on the magnetic ring, the magnetic ring is directly sleeved on the material rod during coating, the inner end cover and the outer end cover are closed after the material rod is inserted and installed in the coating cavity, and therefore the rotating shaft of the rotating motor and the rotating shaft of the inner end cover are connected, the rotating motor is utilized to drive the coating cavity to coat the film in a rotating mode, the structure is simple, the operation is convenient, meanwhile, the magnetic ring can be coated in an all-dimensional mode at one time, and the coating efficiency of the magnetic ring is effectively improved.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic overall structure diagram of an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a coating chamber in an embodiment of the invention;
the figures in the drawings represent:
1. the device comprises a workbench 2, a coating chamber 3, a coating cavity 4, a circular slide rail 5, a support ball 6, a vacuum pipe 7, a vacuum gauge pipe 8, an air inlet 9, an outer end cover 10, a locking buckle 11, a magnetic fluid sealing element 12, a rotating motor 13, a transmission gear 14, a material rod 15, an inner end cover 16 and a rotating shaft.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "left", "right", "inside", "outside", and the like, which refer to an orientation or positional relationship based on those shown in the drawings, are used only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
As shown in fig. 1 and 2, a horizontal vacuum coating machine for coating a magnetic ring comprises a coating chamber 2 transversely fixed on a worktable 1 and a coating chamber 3 rotatably installed in the coating chamber 2. The both ends of coating film chamber 3 are equipped with the chimb that is used for supporting coating film chamber 3, and the external diameter of chimb and coating film chamber 2's internal diameter phase-match. The inner wall of the coating chamber 2 is provided with a circular slide rail 4 clamped with the convex edge, so that the coating cavity 3 can rotate in the coating chamber 2. A plurality of support balls 5 are installed to the bottom of 2 inner walls in coating film chamber, support ball 5 and the lateral wall butt in coating film chamber 3, can support great coating film chamber 3 of weight, make things convenient for coating film chamber 3 to rotate.
The side wall of the film coating chamber 2 is connected with an evacuation tube 6 and a vacuum gauge tube 7 for measuring vacuum degree. The right-hand member of coating film room 2 is equipped with the air inlet 8 that supplies coating film material to get into, and outer end cover 9 is installed to the left end of coating film room 2, and outer end cover 9 can be dismantled with coating film room 2 through locking buckle 10 and be connected. The outer end cover 9 is provided with a magnetic fluid sealing element 11 and a rotating motor 12 for driving the coating cavity 3 to rotate for coating, and the left end of the magnetic fluid sealing element 11 is fixedly connected with an output shaft of the rotating motor 12 through a transmission gear 13.
A plurality of detachable material rods 14 are inserted into the coating cavity 3 (two ends of the coating cavity 3 are provided with insertion holes matched with the material rods 14), and thread protrusions for preventing adhesion are arranged on the material rods 14. The right end of the coating cavity 3 is provided with an air inlet corresponding to the air inlet 8, the left end of the coating cavity 3 is provided with an inner end cover 15, and the inner end cover 15 is detachably connected with the coating cavity 3 through a bolt. A rotating shaft 16 is fixed on the left side of the inner end cover 15, and when the inner end cover 15 and the outer end cover 9 are closed, the right end of the magnetic fluid sealing element 11 can be in plug-in fit with the rotating shaft 16 through a spline, so that the rotating motor 12 is utilized to drive the film coating cavity 3 to perform film coating rotation.
During film coating, the magnetic ring (or other workpieces with through holes) is directly sleeved on the material rod 14, and then the material rod 14 is inserted and installed in the film coating cavity 3. The inner end cap 15 and the outer end cap 9 are then closed in sequence, and the output shaft of the rotary electric machine 12 is engaged with the rotary shaft 16 of the inner end cap 15 through the magnetic fluid seal 11. After the coating chamber 2 is vacuumized, the rotating motor 12 is operated to drive the coating cavity 3 to perform rotary coating, the structure is simple, the operation is convenient, meanwhile, the magnetic ring can be coated in an all-dimensional manner at one time, and the coating efficiency of the magnetic ring is effectively improved.
Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention.
Claims (7)
1. The utility model provides a horizontal vacuum coating machine for magnetic ring coating film which characterized in that: comprises a film coating chamber transversely fixed on a workbench and a film coating cavity rotatably arranged in the film coating chamber; the side wall of the coating chamber is connected with a vacuum-pumping tube, one end of the coating chamber is provided with an air inlet, and the other end of the coating chamber is provided with a detachable outer end cover; the outer end cover is provided with a rotating motor for driving the film coating cavity to rotate and coat a film;
a plurality of detachable material rods are inserted into the coating cavity, one end of the coating cavity, which is close to the air inlet, is provided with a corresponding air inlet, and the other end of the coating cavity is provided with a detachable inner end cover; a rotating shaft is fixed on one side of the inner end cover close to the outer end cover; when the inner end cap and the outer end cap are closed, an output shaft of the rotating electric machine is engaged with the rotating shaft.
2. The horizontal vacuum coating machine for magnetic ring coating of claim 1, wherein: and a magnetic fluid sealing element is fixed on the outer end cover, one end of the magnetic fluid sealing element is fixedly connected with an output shaft of the rotating motor through a transmission gear, and the other end of the magnetic fluid sealing element is in inserted fit with the rotating shaft through a spline.
3. The horizontal vacuum coating machine for magnetic ring coating of claim 1, wherein: convex edges for supporting the coating cavity are arranged at two ends of the coating cavity, and the outer diameter of each convex edge is matched with the inner diameter of the coating chamber; and a circular sliding rail clamped with the convex edge is arranged on the inner wall of the coating chamber.
4. The horizontal vacuum coating machine for magnetic ring coating of claim 3, wherein: and the bottom of the inner wall of the coating chamber is provided with a plurality of supporting balls, and the supporting balls are abutted against the outer side wall of the coating chamber.
5. The horizontal vacuum coating machine for magnetic ring coating of claim 1, wherein: the outer end cover is detachably connected with the coating chamber through a locking buckle; the inner end cover is detachably connected with the coating cavity through a bolt.
6. The horizontal vacuum coating machine for magnetic ring coating of claim 1, wherein: the material rod is provided with a thread bulge for preventing adhesion.
7. The horizontal vacuum coating machine for magnetic ring coating of claim 1, wherein: and the side wall of the coating chamber is connected with a vacuum gauge tube for measuring vacuum degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011130545.6A CN112342518A (en) | 2020-10-21 | 2020-10-21 | Horizontal vacuum coating machine for magnetic ring coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011130545.6A CN112342518A (en) | 2020-10-21 | 2020-10-21 | Horizontal vacuum coating machine for magnetic ring coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112342518A true CN112342518A (en) | 2021-02-09 |
Family
ID=74359439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011130545.6A Pending CN112342518A (en) | 2020-10-21 | 2020-10-21 | Horizontal vacuum coating machine for magnetic ring coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112342518A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1081324A (en) * | 1963-12-02 | 1967-08-31 | Fuji Photo Film Co Ltd | Process and apparatus for vacuum coating articles |
| JPH10140355A (en) * | 1996-11-11 | 1998-05-26 | Hitachi Ltd | Door closing/opening device |
| CN2813637Y (en) * | 2005-02-06 | 2006-09-06 | 朱刚毅 | Horizontal electronic beam evaporation type vacuum film coating machine |
| CN101855383A (en) * | 2007-11-13 | 2010-10-06 | 荏原优莱特科技股份有限公司 | Sputtering apparatus and sputtering film forming method |
| CN202226909U (en) * | 2011-08-17 | 2012-05-23 | 王春林 | Vacuum coating loading device |
| CN102912297A (en) * | 2012-10-22 | 2013-02-06 | 东莞市汇成真空科技有限公司 | Horizontal roller vacuum coating machine |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN103649370A (en) * | 2011-07-06 | 2014-03-19 | 株式会社神户制钢所 | Vacuum film formation device |
| CN109355655A (en) * | 2018-10-22 | 2019-02-19 | 西安文理学院 | A kind of Coating Processes |
| CN110438459A (en) * | 2019-08-14 | 2019-11-12 | 湖南菲尔姆真空设备有限公司 | A kind of horizontal vacuum coating machine |
| CN111041444A (en) * | 2019-11-30 | 2020-04-21 | 河南航天精工制造有限公司 | Vacuum coating fixture and vacuum coating equipment |
-
2020
- 2020-10-21 CN CN202011130545.6A patent/CN112342518A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1081324A (en) * | 1963-12-02 | 1967-08-31 | Fuji Photo Film Co Ltd | Process and apparatus for vacuum coating articles |
| JPH10140355A (en) * | 1996-11-11 | 1998-05-26 | Hitachi Ltd | Door closing/opening device |
| CN2813637Y (en) * | 2005-02-06 | 2006-09-06 | 朱刚毅 | Horizontal electronic beam evaporation type vacuum film coating machine |
| CN101855383A (en) * | 2007-11-13 | 2010-10-06 | 荏原优莱特科技股份有限公司 | Sputtering apparatus and sputtering film forming method |
| CN103649370A (en) * | 2011-07-06 | 2014-03-19 | 株式会社神户制钢所 | Vacuum film formation device |
| CN202226909U (en) * | 2011-08-17 | 2012-05-23 | 王春林 | Vacuum coating loading device |
| CN102912297A (en) * | 2012-10-22 | 2013-02-06 | 东莞市汇成真空科技有限公司 | Horizontal roller vacuum coating machine |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN109355655A (en) * | 2018-10-22 | 2019-02-19 | 西安文理学院 | A kind of Coating Processes |
| CN110438459A (en) * | 2019-08-14 | 2019-11-12 | 湖南菲尔姆真空设备有限公司 | A kind of horizontal vacuum coating machine |
| CN111041444A (en) * | 2019-11-30 | 2020-04-21 | 河南航天精工制造有限公司 | Vacuum coating fixture and vacuum coating equipment |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210209 |