CN110438459A - A kind of horizontal vacuum coating machine - Google Patents
A kind of horizontal vacuum coating machine Download PDFInfo
- Publication number
- CN110438459A CN110438459A CN201910748001.7A CN201910748001A CN110438459A CN 110438459 A CN110438459 A CN 110438459A CN 201910748001 A CN201910748001 A CN 201910748001A CN 110438459 A CN110438459 A CN 110438459A
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- China
- Prior art keywords
- vacuum coating
- workpiece
- horizontal vacuum
- gear ring
- coating chamber
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of horizontal vacuum coating machines, including horizontal vacuum coating chamber and two workpiece charging and discharging mechanisms, the two sides of the horizontal vacuum coating chamber are provided with material mouth up and down to be opened/closed, and two workpiece charging and discharging mechanisms correspond to the material mouth up and down and are arranged and workpiece is alternately sent into the horizontal vacuum coating chamber.Traditional vertical structure is changed to horizontal type structure by the vacuum coating equipment in the present invention, without building plateau, facilitate worker's workpiece loading and unloading, advantageously ensure that safety in production, it, can alternately feeding, blanking and at the same time setting is there are two workpiece charging and discharging mechanism, high production efficiency, workshop requirement is reduced, production cost is advantageously reduced, it is practical.
Description
Technical field
The invention belongs to vacuum coating equipment technical fields, and in particular to a kind of horizontal vacuum coating machine.
Background technique
Sputtering type vacuum coating equipment is common one of vacuum coating equipment, and traditional sputtering type vacuum coating equipment is vertical
Formula structure, when workpieces processing is tubular structure or strip structure, coating machine is set using the structure of upper endfeed, discharging
It sets, therefore usually requires to build plateau in the side of coating machine in the actual operation process, in order in vacuum coating room
Turntable frame moves up worker's workpiece loading and unloading after discharging.Due to being generally fitted with multiple workpiece, this structure, mould on turntable frame
Formula design coating machine need to consume a longer time in each workpiece loading and unloading, influence production efficiency.And worker's plateau operates
There are security risks, are unfavorable for the progress of safety in production.When producing tubular workpiece or strip workpiece simultaneously, vertical film plating machine sheet
Height degree is higher, and the space for also needing reserved turntable frame to move up above coating machine, higher to the requirement for height of workshop,
Connect raising production cost.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of horizontal vacuum coating machine, including horizontal vacuum coating chamber and two
A workpiece charging and discharging mechanism, the two sides of the horizontal vacuum coating chamber are provided with material mouth up and down to be opened/closed, two workpiece
Charging and discharging mechanism corresponds to the material mouth up and down and is arranged and workpiece is alternately sent into the horizontal vacuum coating chamber.
Preferably, the dodge gate that can be opened and closed the loading and unloading mouth, and the work are provided on the horizontal vacuum coating chamber
Part charging and discharging mechanism is provided with the barrier structure that can be closed the material mouth up and down far from one end of the horizontal vacuum coating chamber.
Preferably, guiding mechanism is provided in the horizontal vacuum coating chamber, the guiding mechanism is used for the workpiece
Cutting agency motion guide.
Preferably, the guiding mechanism is provided at least two sliding rails, the workpiece charging and discharging mechanism be provided with it is described
The pulley of sliding rail adaptation.
Preferably, the sliding rail is provided with adjustment structure, with the height and two sliding rails for adjusting the sliding rail
Between width.
Preferably, the workpiece charging and discharging mechanism is provided with mobile device on the outside of the horizontal vacuum coating chamber, institute
It states mobile device and is provided with the driving workpiece charging and discharging mechanism and pass in and out the driving assembly of the horizontal vacuum coating chamber and in institute
State the support component that workpiece charging and discharging mechanism exits workpiece charging and discharging mechanism described in the sliding rail rear support.
Preferably, the driving component includes guide rail, the sliding rack relative to horizontal vacuum coating chamber fixed setting
The driving motor of idler wheel and driving the idler wheel rotation on the guide rail, the support component liftably set to be several
The fixed pulley being placed on the guide rail.
Preferably, the workpiece charging and discharging mechanism is provided with mounting rack and turntable frame, and the turntable frame can turn around trunnion axis
It is installed on the mounting rack dynamicly, and is provided with the workpiece mounting structure for installing workpiece, the work on the turntable frame
Part mounting structure and the turntable frame link, thus it is described turn gantry rotation when rotate with it.
Preferably, turntable frame setting is right between two rotary disc assemblies there are two rotary disc assembly and several connecting rods
Claim the both ends for being set to the connecting rod, to form workpiece loading space, the turntable group between two rotary disc assemblies
Part includes that fixed gear ring, revolution gear ring, transmission component and rotation holder assembly, the inner ring of the fixed gear ring and revolution gear ring are all provided with
The gear teeth are equipped with, the fixed gear ring is fixedly installed on the mounting rack, and the rotation holder assembly is provided with multiple and same circumference
Ground is distributed on the revolution gear ring, and the rotation holder assembly is provided with the transmission gear for engaging the fixed gear ring, described
Revolution gear ring is fitted on the fixed gear ring by the cooperation of multiple transmission gears and the fixed gear ring, the biography
Dynamic component is provided with the driving gear for engaging the revolution gear ring, passes through the rotation holder assembly on two rotary disc assemblies
Form the workpiece mounting structure.
Preferably, the workpiece mounting structure is provided with clamping sleeve and is correspondingly arranged on retaining sleeve with the clamping sleeve
Cylinder, the gripper sleeve are provided with a removably semicolumn side wall.
The beneficial effects of the present invention are:
Traditional vertical structure is changed to horizontal type structure by the vacuum coating equipment in the present invention, without building plateau, facilitates work
People's workpiece loading and unloading advantageously ensures that safety in production, and at the same time setting is there are two workpiece charging and discharging mechanism, can alternately on
Material, blanking, high production efficiency reduce workshop requirement, advantageously reduce production cost, practical.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples:
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the cooperation schematic diagram between workpiece charging and discharging mechanism and horizontal vacuum coating chamber；
Fig. 3 is the scheme of installation of sliding rail；
Fig. 4 is a kind of structural schematic diagram of sliding rail；
Fig. 5 is a kind of structural schematic diagram of turntable frame；
Fig. 6 is the scheme of installation of turntable frame；
Fig. 7 is a kind of structural schematic diagram of gripper sleeve.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.Therefore, below to the reality of the invention provided in the accompanying drawings
The detailed description for applying example is not intended to limit the range of claimed invention, but is merely representative of selected implementation of the invention
Example.
Referring to Fig.1, the present invention discloses a kind of horizontal vacuum coating machine, including horizontal vacuum coating chamber 100 and two workpiece
Charging and discharging mechanism 200, the two sides of horizontal vacuum coating chamber 100 are provided with material mouth 101 up and down to be opened/closed, two workpiece loading and unloading
Workpiece is simultaneously alternately sent into horizontal vacuum coating chamber 100 by the corresponding setting of material mouth 101 up and down of mechanism 200.
It is arranged using the above structure, traditional vertical structure is changed to horizontal type structure, nothing by the vacuum coating equipment in the present invention
Plateau need to be built, worker's workpiece loading and unloading is facilitated, advantageously ensures that safety in production, and at the same time there are two workpiece charging & discharging machines for setting
Structure 200, can alternately feeding, blanking, high production efficiency, reduce workshop requirement, advantageously reduce production cost, it is practical
Property is strong.
When workpiece charging and discharging mechanism 200 is sent into horizontal vacuum coating chamber 100 and is processed, the material mouth up and down at both ends
101 are both needed to closure, sealing, in order to simplify structure composition, preferably, as shown in Figure 1, setting on horizontal vacuum coating chamber 100
Be equipped with the dodge gate 300 that can be opened and closed upper and lower material mouth 101, and workpiece charging and discharging mechanism 200 far from horizontal vacuum coating chamber 100 one
End is provided with the barrier structure that can be closed upper and lower material mouth 101.Workpiece charging and discharging mechanism 200 in this way in side is sent into horizontal vacuum
When being processed in coating chamber 100, the material mouth up and down 101 of the side is closed by the barrier structure on the workpiece charging and discharging mechanism 200
Sealing is closed, and the material mouth up and down 101 of the other side efficiently uses workpiece charging and discharging mechanism 200 then by 300 closing seam of dodge gate
Working motion mechanism, reduce production cost.
The dodge gate 300, which can be, to be slidably arranged on horizontal vacuum coating chamber 100, is also possible to be rotatably arranged on horizontal
Vacuum film coating chamber 100, the mode for making it through sliding are realized the opening and closing of upper and lower material mouth 101 or are realized by way of rotation
The open and close control of feed opening 101.Since such control mode, control structure belong to common knowledge, therefore its specific installation is tied
Structure, drive control mode etc. are not described in detail here.And the barrier structure on workpiece charging and discharging mechanism 200 be preferably disposed on one with it is upper
The baffle that feed opening 101 is adapted to, to save production cost.Certainly, the structures such as hermatic door be may be set to be in actual production.
From aforementioned structure it is found that workpiece charging and discharging mechanism 200 during the work time can in horizontal vacuum coating chamber 100 into
Out, when Workpiece length is longer, the length of workpiece charging and discharging mechanism 200 is also inevitable longer, if therefore using the side such as manipulator
The mode that formula is carried from the clamping of the outside of workpiece charging and discharging mechanism 200 can not be suitable for such situation, in view of this, it is preferred that
Guiding mechanism is provided in horizontal vacuum coating chamber 100, guiding mechanism is used for 200 motion guide of workpiece charging and discharging mechanism.In this way
Workpiece charging and discharging mechanism 200 can be supported by guiding mechanism, improve job stability.Specifically, as shown in Figures 2 and 3,
Guiding mechanism is provided at least two sliding rails 102, and workpiece charging and discharging mechanism 200 is provided with the pulley 213 being adapted to sliding rail 102.
In order to improve the scope of application, it is preferred that sliding rail 102 is provided with adjustment structure, with the height for adjusting sliding rail 102
Width between two sliding rails 102.Specifically, as shown in figure 4, sliding rail 102 includes pedestal 103 and guide part 105, guide part
105 be strip structure, to cooperate pulley 213 to work, is equipped with height adjustment support by bolt or screw on pedestal 103
104, and several adjusting bolts 107 positioned at 104 lower section of height adjustment support are installed on pedestal 103, it is adjusted by rotation
Bolt 107 adjusts the height of height adjustment support 104, and guide part 105 is installed on height adjustment support 104.Guide part
Offer strip-shaped hole 106 on 105, the length direction of strip-shaped hole 106 perpendicular to 213 direction of motion of pulley, guide part 105 by
Bolt is installed to be fixed on height adjustment support 104 in strip-shaped hole 106.Pass through height adjustment support 104 and strip-shaped hole in this way
106 setting come realize height, width adjusting, can be applicable in different structure setting workpiece charging and discharging mechanism 200.Pass through height
Degree adjusts the structures such as support 104 and strip-shaped hole 106 and forms adjustment structure.
The mode passed in and out in view of aforementioned mechanical hand or other similar control workpiece charging and discharging mechanism 200 is excessively complicated, no
Just, it is preferred that workpiece charging and discharging mechanism 200 is provided with mobile device in the outside of horizontal vacuum coating chamber 100, and mobile device is set
It is equipped with driving workpiece charging and discharging mechanism 200 and passes in and out the driving assembly of horizontal vacuum coating chamber 100 and in workpiece charging and discharging mechanism 200
Exit the support component of 102 rear support workpiece charging and discharging mechanism 200 of sliding rail.
As shown in Fig. 2, driving assembly includes guide rail 201, the sliding rack being fixedly installed relative to horizontal vacuum coating chamber 100
The driving motor 204 that idler wheel 203 and driving idler wheel 203 on guide rail 201 rotate, support component liftably set to be several
The fixed pulley being placed on guide rail 201.
As shown in Figure 5 and Figure 6, the workpiece charging and discharging mechanism 200 in the present invention is provided with mounting rack and turntable frame, turntable frame
It can be rotatably mounted on mounting rack around trunnion axis, and be provided with the workpiece mounting structure for installing workpiece, work on turntable frame
Part mounting structure and turntable frame link, to rotate with it when turning gantry rotation.
As shown in Figure 5 and Figure 6, processed to preferably install workpiece, the setting of turntable frame there are two rotary disc assembly and
Several connecting rods 205 are symmetrically disposed on the both ends of connecting rod 205 between two rotary disc assemblies, thus the shape between two rotary disc assemblies
At workpiece loading space, rotary disc assembly includes fixed gear ring 207, revolution gear ring 208, transmission component and rotation holder assembly, is fixed
The inner ring of gear ring 207 and revolution gear ring 208 is provided with the gear teeth, and fixed gear ring 207 is fixedly installed on mounting rack, from swivel base group
Part be provided with it is multiple and with circumferentially around on revolution gear ring 208, and rotation holder assembly is provided with engagement fixed gear ring 207
Transmission gear 209, revolution gear ring 208 are fitted to fixed gear ring by the cooperation of multiple transmission gears 209 and fixed gear ring 207
On 207, transmission component is provided with the driving gear 210 of engagement revolution gear ring 208, passes through corresponding rotation on two rotary disc assemblies
Holder assembly forms workpiece mounting structure.As shown in figure 5, the circumferential spread of fixed gear ring 207, revolution gear ring 208, rotation holder assembly
Coaxial distribution.
Wherein rotation holder assembly further includes the first bearing seat being fixedly mounted on revolution gear ring 208, is arranged in first axle
The first rotating shaft holding the first bearing in seat and being arranged in first bearing, transmission gear 209 are fixed at first rotating shaft
End.Since two rotary disc assemblies are to rotate synchronously, it is therefore preferred that being joined between two transmission components by a transmission shaft
Dynamic, i.e., two driving gears 210 are installed on same transmission shaft.
Corresponding with above structure, mounting rack is provided with horizontal bottom plate 215 and is vertically arranged at 215 both ends of bottom plate
Side plate 202, pulley 213, driving motor 204, idler wheel 203 are arranged on the mounting rack, and turntable frame is located at two side plates 202
Between, fixed gear ring 207 can be fixed on side plate 202, can also be arranged in relatively fixedly on bottom plate 215.And
As shown in Fig. 2, being to form barrier structure by side plate 202 in some embodiments.
Further, in order to reduce the pressure to rotation holder assembly, side plate 202 is arranged in the peripheral side of revolution gear ring 208
There are several load-bearing fixed pulleys 206, the region of the lower half circumference of revolution gear ring 208 is preferably disposed on, with abundant load-bearing.
In view of fixed gear ring 207, revolution gear ring 208 are circular ring structure, so further, the plated film in the present invention
Machine installs target core, target by the target head component on two side plates 202 also in being equipped with target head component on two side plates 202.Target
Head assembly is provided with second shaft for passing through side plate 202, and the end of the second shaft is equipped with linkage gear, which uses
In connection power source.In addition, the internal structure of second shaft, the other structures of target head component, structure of target core etc. belong to
Common knowledge, and the improvement in the present invention is not directed to, therefore be not described further.
During the work time, on two rotation holder assemblies, transmission component drives clamping workpiece under the driving of power source
The gear ring 208 that revolves rotates, and in the course of rotation, rotation holder assembly is synchronous under the action of fixed gear ring 207 for revolution gear ring 208
Rotation also carries out rotation, while linkage gear being rotated by power source so that workpiece both revolves, and drives target
It is rotated with target core, to complete sputter coating.
In the plated film processing for carrying out part tubular workpiece (such as glass tube), the both ends of workpiece are not necessarily to plated film, for this purpose, one
In a little embodiments, workpiece mounting structure is formed by different toolings is arranged on corresponding two rotation holder assemblies.Specifically, such as
Shown in Fig. 5 and Fig. 7, clamping sleeve 211 is set on a rotation holder assembly, on another rotation holder assembly with clamping sleeve 211
It is correspondingly arranged on gripper sleeve 212, gripper sleeve 212 is provided with a removably semicolumn side wall 214.When workpiece is installed,
Semicolumn side wall 214 is first removed, gripper sleeve 212 is placed into after workpiece is inserted into gripper sleeve 212 later, semicircle is finally installed
Column side wall 214 is locked, and both can effectively realize installation, the driving of workpiece in this way, blocking for workpiece both ends also may be implemented, be not necessarily to
Subsequent processing, it is practical.The semicolumn side wall 214 is preferably made of polytetrafluoroethylene (PTFE), to avoid disfiguring workpiece.
In addition, coating machine others composed structure belongs to common knowledge, can't because by vacuum film coating chamber 100 from vertical
The change being changed on horizontal just recurring structure, and improvement of the invention is not related to this class formation yet, therefore is not described further.
Above-described embodiment is preferred embodiment of the invention, and the present invention can also have other embodiments.The technology of this field
Personnel can also make equivalent deformation or replacement on the premise of without prejudice to spirit of the invention, these equivalent variation or replacement are wrapped
It is contained in range set by the claim of this application.
Claims (10)
1. a kind of horizontal vacuum coating machine, which is characterized in that including horizontal vacuum coating chamber and two workpiece charging and discharging mechanisms, institute
The two sides for stating horizontal vacuum coating chamber are provided with material mouth, two workpiece charging and discharging mechanisms up and down to be opened/closed and correspond on described
Feed opening is arranged and workpiece is alternately sent into the horizontal vacuum coating chamber.
2. a kind of horizontal vacuum coating machine as described in claim 1, which is characterized in that be arranged on the horizontal vacuum coating chamber
There are the dodge gate that can be opened and closed the loading and unloading mouth, and the one end of the workpiece charging and discharging mechanism far from the horizontal vacuum coating chamber
It is provided with the barrier structure that can be closed the material mouth up and down.
3. a kind of horizontal vacuum coating machine as claimed in claim 2, which is characterized in that setting in the horizontal vacuum coating chamber
There is guiding mechanism, the guiding mechanism is used for the workpiece charging and discharging mechanism motion guide.
4. a kind of horizontal vacuum coating machine as claimed in claim 3, which is characterized in that the guiding mechanism is provided at least two
Sliding rail, the workpiece charging and discharging mechanism are provided with the pulley being adapted to the sliding rail.
5. a kind of horizontal vacuum coating machine as claimed in claim 4, which is characterized in that the sliding rail is provided with adjustment structure,
With the height for adjusting the sliding rail and the width between two sliding rails.
6. a kind of horizontal vacuum coating machine as claimed in claim 4, which is characterized in that the workpiece charging and discharging mechanism is in described
Be provided with mobile device on the outside of horizontal vacuum coating chamber, the mobile device be provided with the driving workpiece charging and discharging mechanism into
The driving assembly of the horizontal vacuum coating chamber and cutting agency exits work described in the sliding rail rear support on the workpiece out
The support component of part charging and discharging mechanism.
7. a kind of horizontal vacuum coating machine as claimed in claim 6, which is characterized in that the driving component includes relative to institute
State the idler wheel rotation of the idler wheel and driving of the guide rail, sliding rack of the fixed setting of horizontal vacuum coating chamber on the guide rail
Driving motor, the support component are several fixed pulleys being liftably set on the guide rail.
8. such as a kind of described in any item horizontal vacuum coating machines of claim 1-7, which is characterized in that the workpiece charging & discharging machine
Structure is provided with mounting rack and turntable frame, and the turntable frame can be rotatably mounted on the mounting rack around trunnion axis, and described turn
The workpiece mounting structure for installing workpiece is provided on rack, the workpiece mounting structure and the turntable frame link, thus
It is described turn gantry rotation when rotate with it.
9. a kind of horizontal vacuum coating machine as claimed in claim 8, which is characterized in that there are two turntables for the turntable frame setting
Component and several connecting rods are symmetrically disposed on the both ends of the connecting rod between two rotary disc assemblies, to turn described in two
Form workpiece loading space between disk component, the rotary disc assembly includes fixed gear ring, revolution gear ring, transmission component and from swivel base
The inner ring of component, the fixed gear ring and revolution gear ring is provided with the gear teeth, and the fixed gear ring is fixedly installed in the installation
On frame, the rotation holder assembly be provided with it is multiple and with circumferentially around on the revolution gear ring, and the rotation holder assembly
It is provided with the transmission gear for engaging the fixed gear ring, the revolution gear ring passes through multiple transmission gears and the fixed tooth
The cooperation of circle and be fitted on the fixed gear ring, the transmission component be provided with engage it is described revolution gear ring driving gear,
The workpiece mounting structure is formed by the rotation holder assembly on two rotary disc assemblies.
10. a kind of horizontal vacuum coating machine as claimed in claim 8, which is characterized in that the workpiece mounting structure is provided with
Clamping sleeve and it is correspondingly arranged on gripper sleeve with the clamping sleeve, the gripper sleeve is provided with a removably semicircle
Column side wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910748001.7A CN110438459B (en) | 2019-08-14 | 2019-08-14 | Horizontal vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910748001.7A CN110438459B (en) | 2019-08-14 | 2019-08-14 | Horizontal vacuum coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110438459A true CN110438459A (en) | 2019-11-12 |
| CN110438459B CN110438459B (en) | 2023-08-22 |
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ID=68435258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910748001.7A Active CN110438459B (en) | 2019-08-14 | 2019-08-14 | Horizontal vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110438459B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342518A (en) * | 2020-10-21 | 2021-02-09 | 派珂纳米科技(苏州)有限公司 | Horizontal vacuum coating machine for magnetic ring coating |
| CN114086145A (en) * | 2021-10-29 | 2022-02-25 | 南京丙辰表面技术有限公司 | Vacuum coating machine |
| CN114855127A (en) * | 2022-07-06 | 2022-08-05 | 靖江市苏伦工程机械有限公司 | Loader round pin axle processing rust-resistant automatic cladding device |
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| US4560462A (en) * | 1984-06-22 | 1985-12-24 | Westinghouse Electric Corp. | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| US20050005860A1 (en) * | 2003-07-07 | 2005-01-13 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd) | Vacuum evaporator |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN106637112A (en) * | 2016-11-16 | 2017-05-10 | 上海交通大学 | Horizontal type magnetron sputtering system used for fuel cell metal bipolar plates and coating process |
| CN206538465U (en) * | 2017-01-24 | 2017-10-03 | 沙伯特（中山）有限公司 | Magnetic control film coating machine |
| CN211497769U (en) * | 2019-08-14 | 2020-09-15 | 湖南菲尔姆真空设备有限公司 | Horizontal vacuum coating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4560462A (en) * | 1984-06-22 | 1985-12-24 | Westinghouse Electric Corp. | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| EP0166256A2 (en) * | 1984-06-22 | 1986-01-02 | Westinghouse Electric Corporation | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| US20050005860A1 (en) * | 2003-07-07 | 2005-01-13 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd) | Vacuum evaporator |
| CN105239051A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-way in and out alternating film plating device and method |
| CN106637112A (en) * | 2016-11-16 | 2017-05-10 | 上海交通大学 | Horizontal type magnetron sputtering system used for fuel cell metal bipolar plates and coating process |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342518A (en) * | 2020-10-21 | 2021-02-09 | 派珂纳米科技(苏州)有限公司 | Horizontal vacuum coating machine for magnetic ring coating |
| CN114086145A (en) * | 2021-10-29 | 2022-02-25 | 南京丙辰表面技术有限公司 | Vacuum coating machine |
| CN114855127A (en) * | 2022-07-06 | 2022-08-05 | 靖江市苏伦工程机械有限公司 | Loader round pin axle processing rust-resistant automatic cladding device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110438459B (en) | 2023-08-22 |
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