GB1081324A - Process and apparatus for vacuum coating articles - Google Patents

Process and apparatus for vacuum coating articles

Info

Publication number
GB1081324A
GB1081324A GB48660/64A GB4866064A GB1081324A GB 1081324 A GB1081324 A GB 1081324A GB 48660/64 A GB48660/64 A GB 48660/64A GB 4866064 A GB4866064 A GB 4866064A GB 1081324 A GB1081324 A GB 1081324A
Authority
GB
United Kingdom
Prior art keywords
cylinders
tank
coating
rings
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB48660/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of GB1081324A publication Critical patent/GB1081324A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

<PICT:1081324/C6-C7/1> Se vapour discharged horizontally from an evaporation chamber is deposited on Al cylinders to form an electro-photo-sensitive coating. Within a vacuum chamber formed by a tank 15 and a base 16, aluminium cylinder 5 are mounted between spacing rings 6 on supporting members 3 by spring clips 8. The members 3 can be rotated by driving mechanisms 10 and maintained at a constant temperature by circulation of hot water, this temperature being measured by an electric signal from slip rings 12. The evaporation chamber 1 comprises a side wall pierced with a large number of 1-2 mm dia holes and a closable inlet 2 for charging Se into a vessel within chamber 1. Heaters are disposed inside, outside or around the side wall to prevent deposition on this wall. Coating is carried out in a vacuum of 5 x 10-5 mm Hg by heating the Se to 295 DEG C. and rotating the cylinders. To load and unload cylinders the tank 15 provided with hangers 14 may be raised by a travelling crane and the cylinders moved on rings 6 to avoid touching them. With the tank raised prior to coating dust may be removed from rotating cylinders with an air spray.
GB48660/64A 1963-12-02 1964-11-30 Process and apparatus for vacuum coating articles Expired GB1081324A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6461963 1963-12-02

Publications (1)

Publication Number Publication Date
GB1081324A true GB1081324A (en) 1967-08-31

Family

ID=13263439

Family Applications (1)

Application Number Title Priority Date Filing Date
GB48660/64A Expired GB1081324A (en) 1963-12-02 1964-11-30 Process and apparatus for vacuum coating articles

Country Status (3)

Country Link
US (1) US3417733A (en)
DE (1) DE1521238B2 (en)
GB (1) GB1081324A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033793A1 (en) * 1980-02-07 1981-08-19 Matsushita Electric Industrial Co., Ltd. Method of forming a glass spacer in the magnetic gap of a magnetic head
CN112342518A (en) * 2020-10-21 2021-02-09 派珂纳米科技(苏州)有限公司 Horizontal vacuum coating machine for magnetic ring coating

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615275A (en) * 1967-12-12 1971-10-26 Texas Instruments Inc Homogeneously fine-grained vapor-deposited material in bulk form
US3770211A (en) * 1971-11-03 1973-11-06 Gen Electric Gas distributor for casting mold manufacture
US3911162A (en) * 1972-04-17 1975-10-07 Xerox Corp System for vapor deposition of thin films
DE2854654C2 (en) * 1978-12-18 1983-04-28 Ukrainskij nau&ccaron;no-issledovatel'skij institut special'nych stalej splavov i ferrosplavov, Zaporo&zcaron;'e Method and device for applying protective coatings to metal pipes
US4440803A (en) * 1979-11-01 1984-04-03 Xerox Corporation Process for preparing arsenic-selenium photoreceptors
US5090350A (en) * 1989-12-27 1992-02-25 Xerox Corporation Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
US5032052A (en) * 1989-12-27 1991-07-16 Xerox Corporation Modular apparatus for cleaning, coating and curing photoreceptors in a dual planetary array
US5038707A (en) * 1989-12-27 1991-08-13 Xerox Corporation Modular apparatus for cleaning, coating and curing photoreceptors in an enclosed planetary array
DE10256038A1 (en) * 2002-11-30 2004-06-17 Applied Films Gmbh & Co. Kg A steamer
JP4447256B2 (en) * 2003-06-27 2010-04-07 株式会社半導体エネルギー研究所 Method for manufacturing light emitting device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1965059A (en) * 1930-04-03 1934-07-03 Seibt Georg Apparatus for producing high ohmic resistances or the like
US2439983A (en) * 1944-01-15 1948-04-20 Libbey Owens Ford Glass Co Means for thermally evaporating various materials in vacuums for coating purposes
US3128205A (en) * 1961-09-11 1964-04-07 Optical Coating Laboratory Inc Apparatus for vacuum coating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0033793A1 (en) * 1980-02-07 1981-08-19 Matsushita Electric Industrial Co., Ltd. Method of forming a glass spacer in the magnetic gap of a magnetic head
CN112342518A (en) * 2020-10-21 2021-02-09 派珂纳米科技(苏州)有限公司 Horizontal vacuum coating machine for magnetic ring coating

Also Published As

Publication number Publication date
DE1521238A1 (en) 1969-07-24
US3417733A (en) 1968-12-24
DE1521238B2 (en) 1971-08-19

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