CN115181940A - Optical vacuum coating equipment - Google Patents

Optical vacuum coating equipment Download PDF

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Publication number
CN115181940A
CN115181940A CN202210835662.5A CN202210835662A CN115181940A CN 115181940 A CN115181940 A CN 115181940A CN 202210835662 A CN202210835662 A CN 202210835662A CN 115181940 A CN115181940 A CN 115181940A
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China
Prior art keywords
fixedly connected
coating machine
box body
box door
push
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Granted
Application number
CN202210835662.5A
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Chinese (zh)
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CN115181940B (en
Inventor
吴雪峰
陈从礼
陈穴涛
华其中
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Suzhou Dofly M & E Technology Co ltd
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Individual
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Priority to CN202210835662.5A priority Critical patent/CN115181940B/en
Publication of CN115181940A publication Critical patent/CN115181940A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to the field of film plating equipment, in particular to optical vacuum film plating equipment which comprises a film plating machine box body, wherein an opening of the film plating machine box body is arranged on one side, a sealing groove is formed in the periphery of the opening of the film plating machine box body and is of a frame structure, moving grooves are formed in the inner walls of the front part and the rear part of the lower end of the film plating machine box body, a second sliding groove is formed in the outer wall of the lower end of the film plating machine box body, and a second limiting shell is fixedly connected to the outer wall of the lower end of the film plating machine box body. When the box door is used, the first pulling mechanism and the second pulling mechanism are driven by the driving mechanism to operate, the box door is pulled out of the box body of the film plating machine, and the placing frame is pulled out of the box body of the film plating machine, so that workers can take film plating products on the placing frame conveniently.

Description

Optical vacuum coating equipment
Technical Field
The invention relates to the field of coating equipment, in particular to optical vacuum coating equipment.
Background
Optical coating refers to a process of coating one (or more) layers of metal (or medium) films on the surface of an optical part. The purpose of coating on the surface of optical parts is to reduce or increase the reflection, beam splitting, color separation, light filtering, polarization and other requirements of light, vacuum coating is one of the methods used for optical coating, and a vacuum coater is the device used for optical coating.
The vacuum coating machine who uses at present is the inside of putting into the coating machine with the coating film product the manual work at the during operation mostly, then manual inside from the coating machine is taken out, because the inner space of coating film is less, the process of taking is comparatively troublesome, the staff is when taking, the easy and interior parts bump of coating film product with the coating machine, cause the damage, and the staff all is manual the coating machine of opening, the pulling in-process leads to the fact the whole emergence of coating film machine to rock easily, lead to the coating film product to rock in the inside of coating machine, also make the coating film product striking on the interior parts of coating machine easily.
Disclosure of Invention
The invention provides an optical vacuum coating device aiming at the problems in the prior art.
The technical scheme adopted by the invention for solving the technical problem is as follows: an optical vacuum coating device comprises a coating machine box body, wherein an opening of the coating machine box body is arranged on one side, a sealing groove is formed in the periphery of the opening of the coating machine box body and is of a frame-shaped structure, moving grooves are formed in the inner walls of the front part and the rear part of the lower end of the coating machine box body, a second sliding groove is formed in the outer wall of the lower end of the coating machine box body, a second limiting shell is fixedly connected to the outer wall of the lower end of the coating machine box body, a second pulling mechanism is arranged in the second limiting shell, a first sliding groove is formed in the outer wall of the upper end of the coating machine box body, a first limiting shell is fixedly connected to the outer wall of the upper end of the coating machine box body, a first pulling mechanism is arranged in the first limiting shell, the first pulling mechanism and the second pulling mechanism are jointly connected with a box door, the box door is positioned on one side of the coating machine box body, an observation window is fixedly connected to the inner upper end and lower end of the box door, a first sealing frame is fixedly connected to the periphery of one side of the box door close to the coating machine box body, a second pulling mechanism, a third sealing frame is connected to the box body, a third sealing mechanism, a bevel gear is connected to the sealing mechanism, a third bevel gear and a third bevel gear are connected to the sealing mechanism, a fixing rod is connected to the box door, a third bevel gear and a third bevel gear are connected to the sealing mechanism, the all fixed connection of third mounting panel is on the outer wall of coating machine box, overlap on the middle part outer wall of dead lever and establish and fixedly connected with awl ring gear, fixedly connected with shell on the opposite side outer wall of coating machine box, the shell cover is in the outside of first coupling mechanism and second coupling mechanism, install actuating mechanism on the lateral wall in one side middle part that the coating machine box was kept away from to the shell, actuating mechanism and awl ring gear meshing are connected, all fixedly connected with backup pad on the outer wall of the lower extreme both sides of coating machine box front and back portion.
Specifically, two first coupling mechanism all includes first bull stick, all establish and the first mounting panel of fixedly connected with through the bearing housing on the upper and lower end circumference outer wall of first bull stick, the equal fixed connection of first mounting panel is on the outer wall of coating machine box, the equal fixedly connected with third bevel gear in upper end of first bull stick, the equal fixedly connected with fourth bevel gear of lower extreme of first bull stick, fourth bevel gear all meshes with homonymy seventh bevel gear and connects.
Specifically, two the second coupling mechanism all includes the second bull stick, all establish and fixedly connected with second mounting panel through the bearing housing on the upper and lower end circumference outer wall of second bull stick, the equal fixed connection of second mounting panel is on the outer wall of coating machine box, the equal fixedly connected with sixth bevel gear of lower extreme of second bull stick, the equal fixedly connected with fifth bevel gear in upper end of second bull stick, fifth bevel gear all meshes with homonymy seventh bevel gear and connects.
Specifically, the first pulling mechanism comprises a first push-pull plate, the first push-pull plate is slidably connected inside a first limiting shell, one side, close to the box door, of the first push-pull plate extends to the outside of the first limiting shell and is fixedly connected to the upper end of the box door, first screw holes are formed in the front side and the rear side of the inside of the first push-pull plate, openings of the first screw holes are formed in one side, far away from the box door, of the first push-pull plate, first screw rods are connected to the inside of the first screw holes in a threaded mode, one ends, far away from the box door, of the first screw rods extend to the outside of the first push-pull plate, one ends, far away from the box door, of the first screw rods penetrate through and are fixedly connected to the side wall, far away from the box door, of the first push-pull plate are fixedly connected to a first bevel gear, the first bevel gear is meshed with a third bevel gear of a first connecting mechanism on the same side, a first sliding block is fixedly connected to one side, far away from the box door, and the first sliding block is slidably connected to the inside of the first sliding groove.
Specifically, the second pulling mechanism comprises a second push-pull plate, the second push-pull plate is slidably connected inside the second limiting shell, one side, close to the box door, of the second push-pull plate extends to the outside of the second limiting shell and is fixedly connected to the lower end of the box door, second screw holes are formed in the front side and the rear side of the inside of the second push-pull plate, openings of the second screw holes are formed in one side, far away from the box door, of the second push-pull plate, second screw rods are connected to the inside of the second screw holes in a threaded manner, one ends, far away from the box door, of the second screw rods extend to the outside of the second push-pull plate, one ends, far away from the box door, of the second screw rods penetrate through and are fixedly connected to the side wall, far away from the box door, of the second screw rods are fixedly connected to the side wall of the second limiting shell, one ends, far away from the box door, of the second screw rods are fixedly connected to second bevel gears which are connected to the second connecting mechanism on the same side in a meshed manner, one side of the upper end of the second push-pull plate is fixedly connected to a second slider, and the second slider is slidably connected to the inside of the second sliding groove.
The rack comprises a bottom plate and a top plate, the bottom plate and the top plate are respectively fixedly connected to the lower end and the upper end of one side, close to the box body, of the box door, the bottom plate and the top plate are respectively connected to the inside of the box door, the bottom plate and the top plate are respectively connected to one side, close to the box door, of the bottom plate and the top plate and respectively connected to the front side and the rear side of the part, close to the box door, of the box door, and respectively connected to the front side and the rear side of the part, respectively and fixedly connected to a vertical plate and a middle plate, close to the middle part of the box door, the middle plate is fixedly connected to the part, between two observation windows, of one side, far away from the vertical plate, of the bottom plate is connected to the front side and the rear side of the box door, respectively, and the lower end of the sliding seat is connected to the inside of the same side sliding groove.
Specifically, actuating mechanism includes driving motor, driving motor fixed connection is on the shell, driving motor's output is towards the awl ring gear, through drive shaft fixedly connected with drive gear on driving motor's the output, drive gear and awl ring gear meshing are connected, driving motor's outside cover is equipped with the protective housing, the protective housing is close to one side cover of shell and establishes and the fixed frame of fixedly connected with, fixed frame passes through the bolt and can dismantle the connection on the outer wall of shell.
Specifically, the front and rear parts of one side, close to the box door, of the lower end of the second push-pull plate are fixedly connected with rollers, and the lower ends of the rollers are flush with the lower end of the supporting plate.
The invention has the beneficial effects that:
(1) When the box door is used, the first pulling mechanism and the second pulling mechanism are driven by the driving mechanism to operate, the box door is pulled out of the box body of the film plating machine, and the placing frame is pulled out of the box body of the film plating machine, so that workers can take film plating products on the placing frame conveniently.
(2) When the box door is opened, the placing frame can be pulled out of the box body of the film coating machine, so that the film coating product is convenient to take, and the situation that the film coating product collides with parts in the box body of the film coating machine in the taking process to cause damage can be prevented.
(3) Because the box door is pulled out of the box body of the film coating machine through the operation of the driving mechanism, the box door does not need to be pulled manually, and the situation that a film coating product on the placing frame shakes and impacts parts in the box body of the film coating machine in the process of opening the box door can be avoided.
Drawings
The invention is further illustrated by the following examples in conjunction with the drawings.
FIG. 1 is a schematic view of a cutaway structure provided by the present invention;
FIG. 2 is an enlarged view of the area A in FIG. 1;
FIG. 3 is a schematic view of the connection structure of the first connection mechanism, the second connection mechanism and the driving mechanism provided by the present invention;
fig. 4 is a schematic view of a rack structure provided by the present invention;
FIG. 5 is a schematic diagram of the first push-pull plate and the second push-pull plate according to the present invention;
FIG. 6 is a schematic view of a slider structure according to the present invention;
fig. 7 is a schematic side view of the present invention.
In the figure: 1. a film plating machine box body; 2. a moving groove; 3. a sealing groove; 4. a first pulling mechanism; 41. a first push-pull plate; 42. a first screw hole; 43. a first screw; 44. a first bevel gear; 45. a first slider; 5. a second pulling mechanism; 51. a second push-pull plate; 52. a second screw hole; 53. a second screw; 54. a second bevel gear; 55. a second slider; 56. a roller; 6. a first connecting mechanism; 61. a first rotating lever; 62. a first mounting plate; 63. a third bevel gear; 64. a fourth bevel gear; 7. a second connecting mechanism; 71. a second rotating rod; 72. a second mounting plate; 73. a fifth bevel gear; 74. a sixth bevel gear; 8. a drive mechanism; 81. a drive motor; 82. a drive gear; 83. a protective shell; 84. a fixing frame; 85. a bolt; 9. placing a rack; 91. a base plate; 92. a vertical plate; 93. a top plate; 94. a middle plate; 95. a slide base; 96. rolling a groove; 97. a ball bearing; 10. a box door; 11. a sealing frame; 12. a first chute; 13. a second chute; 14. a first limit case; 15. a second limit shell; 16. a support plate; 17. a housing; 18. a seventh bevel gear; 19. a fixing rod; 20. a third mounting plate; 21. a bevel ring; 22. and (4) an observation window.
Detailed Description
The present invention will be further described with reference to the following detailed description so that the technical means, the creation features, the achievement purposes and the effects of the present invention can be easily understood.
As shown in fig. 1-7, the optical vacuum coating equipment of the present invention comprises a coating machine box 1, wherein an opening of the coating machine box 1 is disposed at one side, a sealing groove 3 is disposed at the periphery of the opening of the coating machine box 1, the sealing groove 3 is in a frame-shaped structure, moving grooves 2 are disposed on the inner walls of the front and rear portions of the lower end of the coating machine box 1, a second sliding groove 13 is disposed on the outer wall of the lower end of the coating machine box 1, a second limiting shell 15 is fixedly connected to the outer wall of the lower end of the coating machine box 1, a second pulling mechanism 5 is disposed inside the second limiting shell 15, a first sliding groove 12 is disposed on the outer wall of the upper end of the coating machine box 1, a first limiting shell 14 is fixedly connected to the outer wall of the upper end of the coating machine box 1, a first pulling mechanism 4 is disposed inside the first limiting shell 14, a first pulling mechanism 4 is disposed inside the first limiting shell 4, the first pulling mechanism 4 and the second pulling mechanism 5 are commonly connected to a box door 10, the box door 10 is disposed at one side of the coating machine box 1, an observation window 22 is fixedly connected to the inner upper end of the box 10, a box door 10, a sealing frame 7 is connected to a second connecting mechanism, a second connecting mechanism 6, a sealing frame 7 is disposed on the front side of the box door 6, a second connecting mechanism 7, a sealing frame 7 is connected to a sealing frame 6, a sealing mechanism 7, a sealing frame 7 connected to a sealing mechanism 7, a sealing frame 6 connected to a sealing mechanism 7, a sealing mechanism 7 connected to a sealing frame 6 connected to a sealing mechanism 7, a fixing rod 19 is fixedly connected between the two seventh bevel gears 18, third mounting plates 20 are fixedly connected to the circumferential outer walls of the front and rear parts of the fixing rod 19 through bearing sleeves, the third mounting plates 20 are fixedly connected to the outer walls of the film plating machine box body 1, a bevel gear ring 21 is fixedly connected to the middle outer wall of the fixing rod 19 in a sleeved mode, a shell 17 is fixedly connected to the outer wall of the other side of the film plating machine box body 1, the shell 17 covers the outer parts of the first connecting mechanism 6 and the second connecting mechanism 7, a driving mechanism 8 is mounted on the side wall of the middle part of one side, far away from the film plating machine box body 1, of the shell 17, the driving mechanism 8 is in meshed connection with the bevel gear ring 21, supporting plates 16 are fixedly connected to the outer walls of the two sides of the front and rear ends of the film plating machine box body 1, and the film plating machine box body 1 can be supported by the supporting plates 16 during use, so that the film plating machine is conveniently and stably placed on the ground.
Specifically, two first connecting mechanisms 6 each include a first rotating rod 61, a first mounting plate 62 is fixedly connected to the outer walls of the circumferences of the upper and lower ends of the first rotating rod 61 through a bearing sleeve, the first mounting plates 62 are fixedly connected to the outer wall of the coating machine box 1, a third bevel gear 63 is fixedly connected to the upper end of the first rotating rod 61, a fourth bevel gear 64 is fixedly connected to the lower end of the first rotating rod 61, the fourth bevel gear 64 is engaged with a seventh bevel gear 18 on the same side, two second connecting mechanisms 7 each include a second rotating rod 71, a second mounting plate 72 is fixedly connected to the outer walls of the circumferences of the upper and lower ends of the second rotating rod 71 through a bearing sleeve, the second mounting plates 72 are fixedly connected to the outer wall of the coating machine box 1, a sixth bevel gear 74 is fixedly connected to the lower end of the second rotating rod 71, a fifth bevel gear 73 is fixedly connected to the upper end of the second rotating rod 71, the fifth bevel gear 73 is engaged with the seventh bevel gear 18, and when the door is used, the first rotating mechanism 4 and the second rotating rod 5 can be pulled by a driving mechanism 8 and a second driving mechanism 8.
Specifically, the first pulling mechanism 4 includes a first push-pull plate 41, the first push-pull plate 41 is slidably connected inside the first limit shell 14, one side of the first push-pull plate 41 close to the door 10 extends to the outside of the first limit shell 14 and is fixedly connected to the upper end of the door 10, the front and rear sides inside the first push-pull plate 41 are both provided with a first screw hole 42, the openings of the first screw holes 42 are both arranged on one side of the first push-pull plate 41 away from the door 10, the inside of the first screw hole 42 is both in threaded connection with a first screw 43, one end of the first screw 43 away from the door 10 extends to the outside of the first push-pull plate 41, one end of the first screw 43 away from the door 10 is both fixedly connected to the side wall of the first limit shell 14 away from the door 10 through a bearing, one end of the first screw 43 away from the door 10 is both fixedly connected with a first bevel gear 44, the first bevel gear 44 is both engaged with a third bevel gear 63 of the first connecting mechanism 6 on the same side, one side of the first push-pull plate 41 away from the first limit shell is fixedly connected to the second push-pull plate 51, one side of the second push-pull plate 5 is connected to the second push plate 51, one side of the second push plate 52, the second push plate extends to the second push-pull plate 52, the side of the second push-pull plate 51, the second push plate 51 is both outside the slide plate and is arranged on one side of the slide plate 10, the slide plate 51, the slide plate 52 extends to the second push plate 52 of the second push plate and is both outside the slide plate 5, one end of the second screw 53, which is far away from the box door 10, is fixedly connected to the side wall of the second limiting shell 15, which is far away from the box door 10, through a bearing, the other end of the second screw 53, which is far away from the box door 10, is fixedly connected to the second bevel gear 54, the second bevel gear 54 is meshed with the sixth bevel gear 74 of the second connecting mechanism 7 on the same side, one side, which is far away from the box door 10, of the upper end of the second push-pull plate 51 is fixedly connected to the second slider 55, the second slider 55 is slidably connected to the inside of the second chute 13, the front and rear parts of one side, which is close to the box door 10, of the lower end of the second push-pull plate 51 are fixedly connected to the roller 56, the lower end of the roller 56 is flush with the lower end of the support plate 16, so that the box door 10 can be connected to the box body 1 of the coating machine during use, and the box door 10 can be conveniently fixed to the box body 1 of the coating machine and pulled out of the coating machine.
Specifically, the placing rack 9 includes a bottom plate 91 and a top plate 93, the bottom plate 91 and the top plate 93 are respectively and fixedly connected to the lower end and the upper end of one side of the box door 10 close to the box body 1 of the film coating machine, one side of the bottom plate 91 and the one side of the top plate 93 far away from the box door 10 all extend to the inside of the box body 1 of the film coating machine, one side of the bottom plate 91 and the one side of the top plate 93 close to the box door 10 and the front side and the rear side of the part far away from the box door 10 are both fixedly connected with vertical plates 92, two middle plates 94 are both fixedly connected to the middle part of one side of the middle plate 94 far away from the vertical plates 92 and the front side and the rear side of the part of the box door 10 are both fixedly connected with sliding seats 95, rolling grooves 96 are respectively formed in the lower ends of the sliding seats 95, balls 97 are all slidably connected to the outside of the lower ends of the sliding seats 95 and are slidably connected to the inside of the moving grooves 2 on the same side, and can be used for placing film coating products, so that the coating parts in the box body 1 of the film coating machine can treat the coating products, and the products can be pulled out of the box body 1 of the coating machine, and the worker can take the product conveniently.
Specifically, actuating mechanism 8 includes driving motor 81, driving motor 81 fixed connection is on shell 17, driving motor 81's output is towards awl ring gear 21, there is drive gear 82 through drive shaft fixedly connected with on driving motor 81's the output, drive gear 82 and awl ring gear 21 meshing are connected, driving motor 81's outside cover is equipped with protective housing 83, protective housing 83 is close to one side cover of shell 17 and establishes and the fixed frame 84 of fixedly connected with, fixed frame 84 can dismantle the connection on shell 17's outer wall through bolt 85 and can drive first pulling mechanism 4 and second pulling mechanism 5 during the use and function, conveniently opens and close chamber door 10.
When the device is used, the device is moved to a working place, a power supply is switched on, the driving motor 81 is started, the driving motor 81 rotates the driving gear 82, the driving gear 82 rotates the fixing rod 19 through the bevel ring 21, the front part and the rear part of the fixing rod 19 both rotate the same-side fourth bevel gear 64 and the fifth bevel gear 73 through the seventh bevel gear 18, the fourth bevel gear 64 both rotates the same-side third bevel gear 63 through the first rotating rod 61, the third bevel gear 63 rotates the same-side first bevel gear 44, the first bevel gear 44 rotates the connected first screw 43, the two first screws 43 jointly drive the first push-pull plate 41 to move in a direction away from the first bevel gear 44, meanwhile, the fifth bevel gear 73 both rotates the same-side sixth bevel gear 74 through the second rotating rod 71, the same-side second bevel gear 54 rotates the same-side second bevel gear 54, and the same-side second screw 53 rotates through the second rotating rod 54, the two second screws 53 drive the second push-pull plate 51 to move in the direction away from the second bevel gear 54, the second push-pull plate 51 and the first push-pull plate 41 push the box door 10 to move in the direction away from the coating machine box 1, and gradually pull the placing frame 9 out of the interior of the coating machine box 1, then the worker can place the product to be coated on the bottom plate 91 and the middle plate 94 of the placing frame 9, and then reversely operate the driving motor 81 to move the box door 10 in the direction close to the coating machine box 1 until the sealing frame 11 on the box door 10 is clamped inside the sealing groove 3 formed at the opening of the coating machine box 1 to seal the coating machine box 1, and then start the coating component on the coating machine box 1 to perform coating treatment on the coated product on the placing frame 9, in the process, the worker can observe the coating condition of the coated product through the observation window 22, and when taking the coated product, make driving motor 81 forward function, pull out rack 9 from coating machine box 1, then take off the coating film product from rack 9, because rack 9 is located coating machine box 1's outside this moment, the in-process of taking can prevent that the coating film product striking from appearing damaging on coating machine box 1's internals.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and the embodiments and descriptions given above are only illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which fall within the scope of the claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (8)

1. The optical vacuum coating equipment comprises a coating machine box body (1) and is characterized in that an opening of the coating machine box body (1) is arranged on one side, a sealing groove (3) is formed in the periphery of the opening of the coating machine box body (1), the sealing groove (3) is of a frame-shaped structure, moving grooves (2) are formed in the inner walls of the front part and the rear part of the lower end of the coating machine box body (1), a second sliding groove (13) is formed in the outer wall of the lower end of the coating machine box body (1), a second limiting shell (15) is fixedly connected to the outer wall of the lower end of the coating machine box body (1), a second pulling mechanism (5) is installed inside the second limiting shell (15), a first sliding groove (12) is formed in the outer wall of the upper end of the coating machine box body (1), a first limiting shell (14) is fixedly connected to the outer wall of the upper end of the coating machine box body (1), a first pulling mechanism (4) is installed inside the first limiting shell (14), the first pulling mechanism (4) and the second pulling mechanism (5) are jointly connected with a box door (10), and a box door (10) is fixedly connected to one side of the box body (1), and a box door window (10) is connected to the box door (10), the sealing frame (11) is matched with the sealing groove (3), one side of the box door (10) close to the film coating machine box body (1) is provided with a placing frame (9), the upper end outer wall of the front rear part of the other side of the film coating machine box body (1) is provided with a first connecting mechanism (6), the two first connecting mechanisms (6) are connected with a first pulling mechanism (4), the lower end outer wall of the front rear part of the other side of the film coating machine box body (1) is provided with a second connecting mechanism (7), the two second connecting mechanisms (7) are connected with a second pulling mechanism (5), the two second connecting mechanisms (7) and the first connecting mechanism (6) on the same side are both connected with a seventh bevel gear (18) together, a fixing rod (19) is fixedly connected between the two seventh bevel gears (18) together, the front and rear circumference outer walls of the fixing rod (19) are both fixedly connected with a third mounting plate (20) through a bearing sleeve, the third mounting plate (20) is fixedly connected with the outer wall of the film coating machine box body (1) on the outer wall of the second connecting mechanism (17), the outer wall of the second connecting mechanism (17) is connected with a film coating machine box body (17), the coating machine box is characterized in that a driving mechanism (8) is mounted on the side wall of the middle of one side, away from the coating machine box body (1), of the shell (17), the driving mechanism (8) is meshed with the bevel gear ring (21) and connected with the bevel gear ring, and supporting plates (16) are fixedly connected to the outer walls of the two sides of the lower end of the front portion and the rear portion of the coating machine box body (1).
2. An optical vacuum coating apparatus according to claim 1, characterized in that: two first connecting mechanism (6) all include first bull stick (61), all establish and first mounting panel of fixedly connected with (62) through the bearing housing on the upper and lower end circumference outer wall of first bull stick (61), the equal fixed connection of first mounting panel (62) is on the outer wall of coating machine box (1), the equal fixedly connected with third bevel gear (63) in upper end of first bull stick (61), the equal fixedly connected with fourth bevel gear (64) of lower extreme of first bull stick (61), fourth bevel gear (64) all with homonymy seventh bevel gear (18) meshing connection.
3. The optical vacuum plating apparatus according to claim 1, characterized in that: two second coupling mechanism (7) all include second bull stick (71), all establish and fixedly connected with second mounting panel (72) through the bearing housing on the upper and lower end circumference outer wall of second bull stick (71), the equal fixed connection of second mounting panel (72) is on the outer wall of coating machine box (1), the equal fixedly connected with sixth bevel gear (74) of lower extreme of second bull stick (71), the equal fixedly connected with fifth bevel gear (73) of upper end of second bull stick (71), fifth bevel gear (73) all with homonymy seventh bevel gear (18) meshing connection.
4. An optical vacuum coating apparatus according to claim 1, characterized in that: the first pulling mechanism (4) comprises a first push-pull plate (41), the first push-pull plate (41) is connected to the inside of the first limiting shell (14) in a sliding mode, one side of the first push-pull plate (41) close to the box door (10) extends to the outside of the first limit shell (14) and is fixedly connected with the upper end of the box door (10), the front side and the rear side of the interior of the first push-pull plate (41) are both provided with a first screw hole (42), the openings of the first screw holes (42) are all arranged on one side of the first push-pull plate (41) far away from the box door (10), the inner parts of the first screw holes (42) are all in threaded connection with first screw rods (43), one end of the first screw rod (43) far away from the box door (10) extends to the outside of the first push-pull plate (41), one end of the first screw rod (43) far away from the box door (10) is fixedly connected on the side wall of the first limit shell (14) far away from the box door (10) through a bearing in a penetrating way, one end of the first screw rod (43) far away from the box door (10) is fixedly connected with a first bevel gear (44), the first bevel gears (44) are all in meshed connection with third bevel gears (63) of the first connecting mechanisms (6) on the same side, a first sliding block (45) is fixedly connected with one side of the lower end of the first push-pull plate (41) far away from the box door (10), the first sliding block (45) is connected inside the first sliding groove (12) in a sliding mode.
5. An optical vacuum coating apparatus according to claim 1, characterized in that: the second pulling mechanism (5) comprises a second push-pull plate (51), the second push-pull plate (51) is connected to the inside of the second limiting shell (15) in a sliding mode, one side of the second push-pull plate (51) close to the box door (10) extends to the outside of the second limit shell (15) and is fixedly connected with the lower end of the box door (10), the front side and the rear side of the interior of the second push-pull plate (51) are both provided with a second screw hole (52), the openings of the second screw holes (52) are all arranged on one side of the second push-pull plate (51) far away from the box door (10), the inner part of the second screw hole (52) is connected with a second screw (53) in a threaded manner, one end of the second screw rod (53) far away from the box door (10) extends to the outside of the second push-pull plate (51), one end of the second screw rod (53) far away from the box door (10) is fixedly connected on the side wall of the second limit shell (15) far away from the box door (10) through a bearing in a penetrating way, one end of the second screw rod (53) far away from the box door (10) is fixedly connected with a second bevel gear (54), the second bevel gears (54) are engaged with a sixth bevel gear (74) of the second connecting mechanism (7) on the same side, a second sliding block (55) is fixedly connected with one side of the upper end of the second push-pull plate (51) far away from the box door (10), the second sliding block (55) is connected inside the second sliding chute (13) in a sliding mode.
6. An optical vacuum coating apparatus according to claim 1, characterized in that: rack (9) include bottom plate (91) and roof (93), bottom plate (91) and roof (93) fixed connection respectively are at one side lower extreme and the upper end that coating machine box (1) is close to in chamber door (10), one side that chamber door (10) was kept away from to bottom plate (91) and roof (93) all extends to the inside of coating machine box (1), one side that bottom plate (91) and roof (93) are close to mutually just keep away from all fixedly connected with riser (92) of the part front and back side of chamber door (10), two equal fixedly connected with medium plate (94) in one side middle part that riser (92) are close to chamber door (10), one side fixed connection that riser (92) were kept away from in medium plate (94) is on partial chamber door (10) between two observation window (22), the equal fixedly connected with slide (95) in one side front and back portion that chamber door (10) were kept away from to bottom plate (91) lower extreme, equal fixedly connected with roll groove (96) have all been seted up to the lower extreme of slide (95), the inside equal sliding connection of roll groove (96) has ball (97), the lower extreme of roll groove (97) all extends to the same side of slide (95) and outside sliding groove (2) that the outside sliding movement groove (2) that slide (2) just move.
7. An optical vacuum coating apparatus according to claim 1, characterized in that: actuating mechanism (8) are including driving motor (81), driving motor (81) fixed connection is on shell (17), the output of driving motor (81) is towards awl ring gear (21), through drive shaft fixedly connected with drive gear (82) on the output of driving motor (81), drive gear (82) and awl ring gear (21) meshing are connected, the outside cover of driving motor (81) is equipped with protective housing (83), protective housing (83) are close to one side cover of shell (17) and establish and fixed frame (84) of fixedly connected with, fixed frame (84) can be dismantled through bolt (85) and connect on the outer wall of shell (17).
8. An optical vacuum coating apparatus according to claim 5, wherein: the front and the rear parts of one side of the lower end of the second push-pull plate (51) close to the box door (10) are fixedly connected with rollers (56), and the lower ends of the rollers (56) are flush with the lower end of the supporting plate (16).
CN202210835662.5A 2022-07-15 2022-07-15 Optical vacuum coating equipment Active CN115181940B (en)

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CN115181940B CN115181940B (en) 2023-10-13

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN210560700U (en) * 2019-10-28 2020-05-19 常州鑫立离子技术有限公司 But optical vacuum coating machine of automated inspection gas tightness
CN112706279A (en) * 2021-01-29 2021-04-27 李龙洋 Concrete pipe pile pouring device
CN114311628A (en) * 2021-12-30 2022-04-12 派珂纳米科技(苏州)有限公司 Plasma vacuum coating film covering machine and using method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN210560700U (en) * 2019-10-28 2020-05-19 常州鑫立离子技术有限公司 But optical vacuum coating machine of automated inspection gas tightness
CN112706279A (en) * 2021-01-29 2021-04-27 李龙洋 Concrete pipe pile pouring device
CN114311628A (en) * 2021-12-30 2022-04-12 派珂纳米科技(苏州)有限公司 Plasma vacuum coating film covering machine and using method thereof

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