CN106244993B - A kind of vacuum plating pivoted frame and vacuum coating equipment - Google Patents
A kind of vacuum plating pivoted frame and vacuum coating equipment Download PDFInfo
- Publication number
- CN106244993B CN106244993B CN201610822625.5A CN201610822625A CN106244993B CN 106244993 B CN106244993 B CN 106244993B CN 201610822625 A CN201610822625 A CN 201610822625A CN 106244993 B CN106244993 B CN 106244993B
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- axis
- rotation
- rotary table
- disk
- fixed
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of vacuum plating pivoted frame and vacuum coating equipments, vacuum plating pivoted frame includes rotary table, rotary table can be rotated around revolution center, rotary table is evenly distributed with the more axis of rotation around revolution center is rounded, autorotation disk is rotatably provided on the every axis of rotation, autorotation disk is evenly distributed with more satellite axis around axis of rotation circle, the pawl disk for fixing product is equipped on each satellite axis, the bottom of autorotation disk is fixed with driving gear, fixed gear is fixed at revolution center, fixed gear is engaged with driving gear；When plated film, driving device drives rotary table rotation, and autorotation disk follows rotary table to rotate around revolution center, while driving gear and fixed gear engagement rotation, drives autorotation disk, satellite axis and pawl coiling axis of rotation rotation.The useful load and production efficiency of the product in vacuum plating pivoted frame are improved, saves Coating Materials, plated film is more evenly.
Description
Technical field
The present invention relates to vacuum coating equipment more particularly to a kind of vacuum plating pivoted frames and vacuum coating equipment.
Background technique
Vacuum coating equipment can complete the plated film of product under higher vacuum degree, include vacuum plating in vacuum coating equipment
Pivoted frame, existing vacuum plating pivoted frame is as depicted in figs. 1 and 2, planet axis 31 ' is above arranged in rotary table 1 ', planet axis 31 ' is above set
Pawl disk 32 ' is set, hanging rod 33 ' is fixed between the protrusion 321 ' of two pawl disks 32 ', hanging rod 33 ' above mounts product 4 ', passes through
Driving device drives rotary table 1 ' to rotate, and drives planet axis 31 ', pawl disk 32 ' and hanging rod 33 ' around the center of rotation of rotary table 1 '
Rotation, product 4 ' complete plated film during rotation.Each planet axis 31 ' of such vacuum plating pivoted frame can only above efficiently use
One pawl disk 32 ', useful load is too small, and production efficiency is relatively low.
Summary of the invention
The first object of the present invention is to propose a kind of vacuum plating pivoted frame, can efficiently use on an axis of rotation multiple
Pawl disk, useful load is big, and production efficiency improves, and has saved Coating Materials, and can form rotation, plated film is uniform.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of vacuum plating pivoted frame, including rotary table, the rotary table can be rotated around revolution center, and the rotary table is around public affairs
Turn that center is rounded to be evenly distributed with the more axis of rotation, be rotatably provided with autorotation disk on the every axis of rotation, it is described from
Turntable is evenly distributed with more satellite axis around axis of rotation circle, and the pawl for fixing product is equipped on the every satellite axis
Disk, the bottom of the autorotation disk are fixed with driving gear, are fixed with fixed gear at the revolution center, the fixed gear with
The driving gear engagement；When plated film, driving device drives rotary table rotation, and the autorotation disk follows rotary table around revolution center
Rotation, while gear and fixed gear engagement rotation are driven, drive autorotation disk, satellite axis and pawl coiling axis of rotation rotation.
Wherein, the quantity of the rotary table is two, and two rotary tables are oppositely arranged and are fixed by fixed link, institute
The both ends for stating the axis of rotation are individually fixed in two rotary tables, and rotating disk, the rotating disk are also equipped on the axis of rotation
It is oppositely arranged with the autorotation disk, the both ends of the satellite axis are individually fixed in the autorotation disk and the rotating disk.
Wherein, the pawl disk includes at least two protrusions for being used to connect product outwardly protruded.
Wherein, two pawl disks are at least fixed on the satellite axis, two institutes of lie farthest away on same satellite axis
State the hanging rod being fixed between the corresponding protrusion of pawl disk for mounting product.
Wherein, the hanging rod is provided with multiple mounting parts, the product is mounted on the mounting part.
Wherein, the protrusion is uniformly distributed around the satellite axis.
Wherein, the autorotation disk and the driving gear are coaxial and are fixed by jackshaft, and the jackshaft passes through described
It rotary table and is connect with the rotary table by bearing.
Wherein, the fixed gear and the driving gear are respectively positioned on the same side of the rotary table, the rotary table
Outer peripheral surface is provided with gear, and driving device is engaged with the gear of the outer peripheral surface of the rotary table, to drive the rotary table to rotate.
Wherein, the quantity of the satellite axis is 3-6 root, and the quantity of the axis of rotation is 5-7 root.
The second object of the present invention is to propose a kind of vacuum coating equipment, can efficiently use multiple pawls on an axis of rotation
Disk, useful load is big, and production efficiency improves, and has saved Coating Materials, and can form rotation, plated film is uniform.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of vacuum coating equipment, including above-mentioned vacuum plating pivoted frame.
The utility model has the advantages that the present invention provides a kind of vacuum plating pivoted frame and vacuum coating equipments.Vacuum plating pivoted frame includes public affairs
Turntable, the rotary table can be rotated around revolution center, and the rotary table is evenly distributed with more rotations around revolution center is rounded
Axis is rotatably provided with autorotation disk on the every axis of rotation, and the autorotation disk is evenly distributed with more around axis of rotation circle
Satellite axis is equipped with the pawl disk for fixing product on the every satellite axis, and the bottom of the autorotation disk is fixed with driving
Gear is fixed with fixed gear at the revolution center, and the fixed gear is engaged with the driving gear；When plated film, driving
Device drives rotary table rotation, and the autorotation disk follows rotary table to rotate around revolution center, while driving gear and fixed gear
Engagement rotation drives autorotation disk, satellite axis and pawl coiling axis of rotation rotation.Every satellite axis can efficiently use a pawl
Disk can efficiently use multiple pawl disks on one axis of rotation, improve the production in vacuum plating pivoted frame by the way that more satellite axis are arranged
The useful load and production efficiency of product, due to once can be to more product plated films, each Coating Materials dosage be constant, can be with
Save Coating Materials, and satellite axis can rotate around the axis of rotation, and autorotation disk can form rotation, drive product both participate in revolving or
Rotation is participated in, plated film is more evenly.
Detailed description of the invention
Fig. 1 is the structural schematic diagram one for the vacuum plating pivoted frame that the prior art provides.
Fig. 2 is the structural schematic diagram two for the vacuum plating pivoted frame that the prior art provides.
Fig. 3 is the structural schematic diagram for the vacuum plating pivoted frame that the embodiment of the present invention 1 provides.
Fig. 4 is the partial structure diagram for the vacuum plating pivoted frame that the embodiment of the present invention 1 provides.
Fig. 5 is the partial enlarged view at the A of Fig. 4.
Wherein:
1- rotary table, 11- fixed link, the 21- axis of rotation, 22- autorotation disk, 23- rotating disk, 31- satellite axis, 32- pawl disk,
321- protrusion, 33- hanging rod, 4- product, 1 '-rotary table, 11 '-fixed links, the 31 '-axis of rotation, 32 '-pawl disks, 321 '-protrusions
Portion, 33 '-hanging rods, 4 '-products.
Specific embodiment
To keep the technical problems solved, the adopted technical scheme and the technical effect achieved by the invention clearer, below
In conjunction with attached drawing and pass through specific embodiment to further illustrate the technical scheme of the present invention.
Embodiment 1
As in Figure 3-5, a kind of vacuum plating pivoted frame, including rotary table 1 are present embodiments provided, rotary table 1 can be around public affairs
Turn center rotating, rotary table 1 is evenly distributed with the more axis of rotation 21 around revolution center is rounded, can be rotated on the every axis of rotation 21
Be provided with autorotation disk 22, autorotation disk 22 is evenly distributed with more satellite axis 31 around 21 circle of the axis of rotation, on each satellite axis 31
It is equipped with the pawl disk 32 for fixing product 4, pawl disk 32 includes at least two protrusions for being used to connect product 4 outwardly protruded
Portion 321, the bottom of autorotation disk 22 are fixed with driving gear, and fixed gear, fixed gear and sliding tooth are fixed at revolution center
Wheel engagement；When plated film, driving device drives rotary table 1 to rotate, and autorotation disk 22 follows rotary table 1 to rotate around revolution center, simultaneously
Gear and fixed gear engagement rotation are driven, autorotation disk 22, satellite axis 31 and pawl disk 32 is driven to rotate around the axis of rotation 21.This implementation
In example, every satellite axis 31 can efficiently use a pawl disk 32, in the prior art, directly above be evenly distributed with pawl in rotary table 1 '
Disk 32 ' is compared, and by the way that the more axis of rotation 21 are arranged, more satellite axis 31 is arranged further around the axis of rotation 21, then in an axis of rotation 21
On can efficiently use multiple pawl disks 32, and by adjusting size, an axis of rotation 21 and around the satellite axis 31 and pawl of its setting
Disk 32, the pawl disk 32 ' of the space occupied not than in the prior art is big more, even with smaller pawl disk 32, single pawl
The quantity that product 4 is fixed on disk 32 is reduced, but due to being provided with the more axis of rotation 31 and pawl disk 32 around an axis of rotation 21,
Still the double useful load and production efficiency for improving the product 4 in vacuum plating pivoted frame on the whole.Due to once can be with
To more 4 plated films of product, and each Coating Materials dosage is constant, fail in the prior art the Coating Materials used up all with
It is discharged and is wasted, after the useful load of the product 4 of the plating pivoted frame of the present embodiment is double, the Coating Materials of same dosage can every time
To complete the plated film of more products, therefore Coating Materials can be saved.And satellite axis 31 can be rotated around the axis of rotation 21, autorotation disk
22 can form rotation, on the one hand product 4 is rotated around the axis of rotation 21 with autorotation disk 22, constantly revolved in coating process
The inner side and outer side of disk 1 recycles, while moving to the different location of entire rotary table 1 as rotary table 1 rotates again, process is whole
After the circulation of a revolution, more evenly, and different products 4 is due to continuous cycle rotation for the plated film of single product 4, and the one of plated film
Cause property is also fine.Specifically, being provided with 6 autorotation disks 21 on the rotary table 1 of the present embodiment, it is provided on each autorotation disk 21
4 satellite axis 31, setting is provided with 4 protrusions 321, i.e. this reality on pawl disk 32 there are two pawl disk 32 on each satellite axis 31
It applies example and has lacked two protrusions compared with the pawl disk 32 ' with 6 protrusions 321 ' of the prior art using 4 pawl pawl disks
321, this is because, in order to avoid interfering between each pawl disk 32, passing through after multiple pawl disks 32 are arranged in a circular axis of rotation 21
The quantity for reducing protrusion 321, keeps the size of total almost the same.In fact, since product 4 is in the form of mounting,
Each satellite axis 31 can only efficiently use a pawl disk 32, remaining pawl disk 32 serve it is fixed, with existing 8 rotations
Axis, pawl disk 6 are provided with 6 protrusions 321 and compare, in the quantity of the product 4 of carry on not considering each protrusion 321, this
The useful load of the product 4 of embodiment is 6 × 4 × 4=96, and existing useful load is 8 × 6=48, and the prior art is every
The quantity of the product mounted on a protrusion 321 and the quantity of product of protrusion 321 of the present embodiment are consistent.Therefore, at this
The total of embodiment takes up space with existing structure when taking up space consistent, and useful load can be double, greatly improves
Production efficiency, while Coating Materials has been saved, the investment of equipment can be reduced under the requirement of identical production task.
In the present embodiment, two rotary tables 1 are oppositely arranged and are fixed by fixed link 11, and the both ends of the axis of rotation 21 are solid respectively
Due to being also equipped with rotating disk 23 on two rotary tables 1, the axis of rotation 21, rotating disk 23 is oppositely arranged with autorotation disk 22, satellite axis
31 both ends are individually fixed in autorotation disk 22 and rotating disk 23.Rotating disk 23, satellite axis 31 and 22 three of autorotation disk form stabilization
Structure, rotating disk 23 does not need to support by other structures, simple and reliable for structure, in 22 rotation of autorotation disk, passes through satellite
Axis 31 drives rotating disk 23 to rotate, stability of rotation.The both ends of satellite axis 31 can be welded with autorotation disk 22, rotating disk 23 respectively
It is fixed, it is also possible to be connected through a screw thread or is fixed by modes such as nuts.Two pawl disks are at least fixed on satellite axis 31
32, it is fixed between the corresponding protrusion 321 of two pawl disks 32 of lie farthest away for mounting product 4 on same satellite axis 31
Hanging rod 33.Two pawl disks 32 are provided on the same satellite axis 31 of the present embodiment, respectively close to autorotation disk 22 and rotating disk 23,
If further reinforced to hanging rod 33, also pawl disk 32 is set in middle position again, the centre of hanging rod 33 is further reinforced,
Improve its stability.It can be fixed by the modes such as welding or being connected through a screw thread between hanging rod 33 and protrusion 321.For
Through-hole can be opened up on protrusion 321 as preferred embodiment is compared in the pawl disk 32 that centre reinforces, hung
Screw thread is set on bar 33, and is respectively provided with adjusting nut in the obverse and reverse of protrusion 321, is adjusted by adjusting nut, it will be convex
After portion 321 is adjusted to position proper on hanging rod 33 out, the adjusting nut of obverse and reverse is locked, by protrusion 321
Position locking.Mounting part is provided on hanging rod 33, product 4 is mounted on mounting part, can effectively improve the utilization in short transverse
Rate, such hanging structure, the quantity of the product of the corresponding mounting of each protrusion 321 be it is determining, therefore, even if same satellite
Multiple pawl disks 32 are set on axis 31, really effective use also only one, remaining pawl disk 32 is for positioning and reinforce satellite axis 31.
Comprehensively consider the limitation of the size of rotary table 1, the quantity of satellite axis 31 can be 3-6 root, the quantity of the axis of rotation 21
It can be 5-7 root, the quantity of protrusion 321 can be set to 3-5, and structure arrangement is more reasonable at this time, take into account production matter
Amount and production efficiency reduce waste of material.Protrusion 321 is uniformly distributed around satellite axis 31, and each protrusion 321 can be made right
The product 4 on hanging rod 33 answered is heated consistent, improves the consistency of product 4.
It is rotated for the ease of driving autorotation disk 22, autorotation disk 22 is coaxial with driving gear and is fixed by jackshaft, intermediate
Axis passes through rotary table 1 and is connect with rotary table 1 by bearing, and driving gear is located at the lower section of rotary table 1, does not influence rotary table 1
The plated film of the product 4 of top.Fixed gear and driving gear are respectively positioned on the same side of rotary table 1, the i.e. lower section of rotary table 1, public
The outer peripheral surface of turntable 1 is provided with gear, and driving device is engaged with the gear of the outer peripheral surface of rotary table 1, to drive 1 turn of rotary table
Dynamic, the fixation gear and driving gear of the present embodiment are all set in the lower section of following rotary table 1, the i.e. drive of vacuum plating pivoted frame
Dynamic device is respectively positioned on the lower section of rotary table 1, does not influence the movement of the plated film and each movement mechanism of the product 4 divided on rotary table 1.
Hollow structure both saves material to rotary table 1 in a ring, mitigates weight, is also convenient for the inspections such as fixation gear and the driving gear to lower section
It repairs.
Embodiment 2
A kind of vacuum coating equipment is present embodiments provided, including above-mentioned vacuum plating pivoted frame.Every satellite axis 31 all may be used
To efficiently use a pawl disk 32, in the prior art, pawl disk 32 ' is above directly evenly distributed in rotary table 1 ' and is compared, it is more by being arranged
The root axis of rotation 21 is arranged more satellite axis 31 further around the axis of rotation 21, then can efficiently use multiple pawl disks on an axis of rotation 21
32, and by adjusting size, an axis of rotation 21 and around the satellite axis 31 and pawl disk 32 of its setting, the space occupied is not compared
Pawl disk 32 ' in the prior art is big more, and even with smaller pawl disk 32, the quantity of product 4 is fixed on single pawl disk 32
It reduces, it is still double on the whole to mention but due to being provided with the more axis of rotation 31 and pawl disk 32 around an axis of rotation 21
The useful load and production efficiency of the product 4 in vacuum plating pivoted frame have been risen,.Due to once can to more 4 plated films of product, and
Each Coating Materials dosage is constant, and the Coating Materials for failing to use up in the prior art is all wasted with discharge, this implementation
After the useful load of the product 4 of the plating pivoted frame of example is double, the Coating Materials of same dosage can complete the plating of more products every time
Film, therefore Coating Materials can be saved., and satellite axis 31 can be rotated around the axis of rotation 21, autorotation disk 22 can form rotation, produce
On the one hand product 4 are rotated around the axis of rotation 21 with autorotation disk 22, are constantly followed in the inner side and outer side of rotary table 1 in coating process
Ring, while the different location of entire rotary table 1 is moved to as rotary table 1 rotates again, it drives product both to participate in revolution and also assists in
Rotation, after the circulation entirely to revolve, the plated film of single product 4 more evenly, and different products 4 due to constantly recycle turn
Dynamic, the consistency of plated film is also fine.
In actual job, the evaporation time of vacuum coating equipment is t1, and the time that rotary table rotates a circle is t2, autorotation disk
The time to rotate a circle is that the least common multiple of t3, t2 and t3 are t4, sets t1=n × t4, wherein n is whole not less than 1
Number.At this point, complete revolution and rotation can be obtained in each evaporation time t1, it is ensured that the operating condition of each product is identical,
It ensure that the consistency of product.
The above is only a preferred embodiment of the present invention, for those of ordinary skill in the art, according to the present invention
Thought, there will be changes in the specific implementation manner and application range, and the content of the present specification should not be construed as to the present invention
Limitation.
Claims (8)
1. a kind of vacuum plating pivoted frame, which is characterized in that including rotary table (1), the rotary table (1) can turn around revolution center
Dynamic, the rotary table (1) is evenly distributed with the more axis of rotation (21) around revolution center is rounded, on the every axis of rotation (21)
It is rotatably provided with autorotation disk (22), the autorotation disk (22) is evenly distributed with more satellite axis around the axis of rotation (21) circle
(31), the pawl disk (32) for fixing product (4), the bottom of the autorotation disk (22) are equipped on the every satellite axis (31)
Portion is fixed with driving gear, and fixed gear is fixed at the revolution center, and the fixed gear is engaged with the driving gear；
When plated film, driving device drives rotary table (1) rotation, and the autorotation disk (22) follows rotary table (1) to rotate around revolution center, together
When driving gear and fixed gear engagement rotation, drive autorotation disk (22), satellite axis (31) and pawl disk (32) around the axis of rotation (21)
Rotation；
The pawl disk (32) includes at least two protrusions (321) for being used to connect product (4) outwardly protruded；The rotary table
(1) quantity is two, and two rotary tables (1) are oppositely arranged and, the axis of rotation (21) fixed by fixed link (11)
Both ends be individually fixed in two rotary tables (1), be also equipped with rotating disk (23), the rotation on the axis of rotation (21)
Disk (23) is oppositely arranged with the autorotation disk (22), the both ends of the satellite axis (31) be individually fixed in the autorotation disk (22) and
The rotating disk (23).
2. vacuum plating pivoted frame as described in claim 1, which is characterized in that be at least fixed with two on the satellite axis (31)
The pawl disk (32), on same satellite axis (31) the corresponding protrusion (321) of two pawl disks (32) of lie farthest away it
Between be fixed with hanging rod (33) for mounting product (4).
3. vacuum plating pivoted frame as claimed in claim 2, which is characterized in that the hanging rod (33) is provided with multiple mountings
Portion, the product (4) are mounted on the mounting part.
4. vacuum plating pivoted frame as described in any one of claims 1-3, which is characterized in that the protrusion (321) is around described
Satellite axis (31) is uniformly distributed.
5. vacuum plating pivoted frame as described in any one of claims 1-3, which is characterized in that the autorotation disk (22) and the drive
Moving gear is coaxial and is fixed by jackshaft, and the jackshaft passes through the rotary table (1) and passes through axis with the rotary table (1)
Hold connection.
6. vacuum plating pivoted frame as claimed in claim 5, which is characterized in that the fixed gear and the equal position of the driving gear
In the same side of the rotary table (1), the outer peripheral surface of the rotary table (1) is provided with gear, driving device and the rotary table
(1) gear of outer peripheral surface engages, to drive the rotary table (1) to rotate.
7. vacuum plating pivoted frame as described in any one of claims 1-3, which is characterized in that the quantity of the satellite axis (31) is
3-6 root, the quantity of the axis of rotation (21) are 5-7 root.
8. a kind of vacuum coating equipment, which is characterized in that including the described in any item vacuum plating pivoted frames of claim 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610822625.5A CN106244993B (en) | 2016-09-13 | 2016-09-13 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610822625.5A CN106244993B (en) | 2016-09-13 | 2016-09-13 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
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| CN106244993A CN106244993A (en) | 2016-12-21 |
| CN106244993B true CN106244993B (en) | 2019-10-11 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109112487A (en) * | 2017-12-08 | 2019-01-01 | 常州市知豆信息科技有限公司 | A kind of OLED evaporated device with high stability oled substrate feeder |
| CN109371352A (en) * | 2018-11-15 | 2019-02-22 | 苏州奥曼恩自动化科技有限公司 | A kind of hot spray apparatus |
| CN109455005B (en) * | 2018-12-20 | 2023-10-20 | 江苏华辐光电科技有限公司 | Tectorial membrane iron metal tank rotation solidification equipment |
| CN109852939B (en) * | 2019-03-29 | 2021-04-27 | 陕西理工大学 | Tool coating rotating stand device of high-vacuum multi-arc ion coating machine |
| CN110760810B (en) * | 2019-11-27 | 2022-04-08 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
| CN114836735B (en) * | 2021-02-01 | 2024-01-19 | 江苏菲沃泰纳米科技股份有限公司 | Plasma coating device and method based on ICP |
| CN114150285A (en) * | 2021-12-13 | 2022-03-08 | 湖北扬子江光电仪器有限公司 | Optical lens piece support for coating machine |
| CN116334568A (en) * | 2021-12-23 | 2023-06-27 | 江苏菲沃泰纳米科技股份有限公司 | Unidirectional rotation device, feeding device and vacuum coating equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2716283Y (en) * | 2004-07-21 | 2005-08-10 | 范维海 | High efficiency type vacuum coating rotary support |
| JP6375694B2 (en) * | 2014-05-28 | 2018-08-22 | 日本精機株式会社 | Vapor deposition apparatus and organic EL element manufacturing method |
| CN104264122B (en) * | 2014-09-12 | 2017-02-01 | 南通星维油泵油嘴有限公司 | Clamp for coating tapered surfaces of valve seats |
| CN205529017U (en) * | 2016-02-03 | 2016-08-31 | 台州市黄岩威力真空镀膜厂 | Film plating machine |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
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