CN109852939B - Tool coating rotating stand device of high-vacuum multi-arc ion coating machine - Google Patents
Tool coating rotating stand device of high-vacuum multi-arc ion coating machine Download PDFInfo
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- CN109852939B CN109852939B CN201910250715.5A CN201910250715A CN109852939B CN 109852939 B CN109852939 B CN 109852939B CN 201910250715 A CN201910250715 A CN 201910250715A CN 109852939 B CN109852939 B CN 109852939B
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- 239000011248 coating agent Substances 0.000 title claims abstract description 37
- 238000000576 coating method Methods 0.000 title claims abstract description 37
- 230000005540 biological transmission Effects 0.000 claims abstract description 49
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 230000007246 mechanism Effects 0.000 description 9
- 239000007888 film coating Substances 0.000 description 8
- 238000009501 film coating Methods 0.000 description 8
- 230000009471 action Effects 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
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Abstract
本发明公开的一种高真空多弧离子镀膜机的工具镀膜转架装置，包括上下相对设置的下转盘和上转盘，下转盘的边缘位置设置有一圈中心对称的U型通孔，沿U型通孔垂直方向设置有下轴承，下轴承上连接下传动轴，每个下传动轴下端嵌套有小齿轮，小齿轮啮合在位于下转盘下方中心位置的大齿轮上；下传动轴上连接有嵌套设置在工件转盘上的上传动轴，工件转盘上设置有工件座，工件座下面设置有若干个均匀分布的自转齿轮，上转盘和下转盘之间固定有一圈均匀分布的支撑柱，支撑柱位于下传动轴或上传动轴的内侧，每个支撑柱上还设置有拨杆架，拨杆架一端与自转齿轮相接触。该装置成功解决了传统公转和自转装置结构复杂、高温下转架转速不平稳的技术难题。
The invention discloses a tool coating turret device for a high-vacuum multi-arc ion coating machine, comprising a lower turntable and an upper turntable which are arranged up and down opposite to each other. A lower bearing is arranged in the vertical direction of the through hole, the lower bearing is connected with the lower transmission shaft, a pinion is nested at the lower end of each lower transmission shaft, and the pinion meshes with the large gear located at the center position below the lower turntable; the lower transmission shaft is connected with a The upper drive shaft is nested on the workpiece turntable, the workpiece turntable is provided with a workpiece seat, a number of evenly distributed autorotation gears are arranged under the workpiece seat, and a circle of evenly distributed support columns are fixed between the upper turntable and the lower turntable. The column is located on the inner side of the lower transmission shaft or the upper transmission shaft, and each support column is also provided with a lever bracket, and one end of the lever bracket is in contact with the rotation gear. The device successfully solves the technical problems of the complex structure of the traditional revolution and rotation devices and the unstable rotation speed of the turret under high temperature.
Description
Technical Field
The invention belongs to the technical field of high-vacuum arc ion plating devices, and relates to a tool coating rotating stand device of a high-vacuum multi-arc ion coating machine.
Background
The tool coating rotating frame device of the high vacuum multi-arc ion coating machine is a moving mechanism used for clamping a cutter, and the moving mechanism is driven to rotate by a variable frequency motor, so that revolution and rotation of a workpiece are realized. The motion mode of the motion mechanism is usually double and triple motion, the motion mechanism is used for the motion mechanism of the high vacuum coating machine, mainly comprises components such as a power transmission gear, an upper gear, a lower gear support, a lower gear support and the like, the motion mechanism mainly realizes the stable revolution and autorotation of a workpiece through the meshing of the gears, during coating, the revolution of the workpiece is realized through the rotation of the gear of the upper gear driven by the rotation of a variable frequency motor, and the autorotation of the workpiece is realized through the rotation of the lower gear, however, when the film preparation is carried out on the tool, the tool needs to be heated, the heating temperature is generally 400 ℃ to 500 ℃, under the high temperature, the gear rotation is easy to generate the blocking phenomenon, the motion mechanism can not work normally, the friction resistance between the gears is larger and larger, the abrasion is serious, finally, the phenomenon of the motion mechanism blocking occurs, and the service, the film coating time of the workpiece is inconsistent, the film quality is seriously influenced, in addition, in recent years, the shape of the workpiece is more and more complex, new requirements are provided for the film coating process, a moving mechanism is expected to rotate at fixed points in the film coating process, and the tool film coating rotating stand device of the existing multi-arc ion film coating machine cannot meet the process requirements of the tool plating, so the workpiece film coating rotating stand device which has a simple structure and can provide multiple operation modes is required.
The Chinese patent with publication number CN 103590006A and publication number 2014.02.19 discloses a structure of a multifunctional vacuum coating machine rotating frame, the structure adopts the transmission of a plurality of bearings and gears and the meshing of the gears to realize the revolution and rotation of a workpiece, and the structure is complex and difficult to maintain; and when the multi-arc ion coating machine is used for coating the tool, the tool needs to be heated, and under the heating condition, the gear meshing is easy to cause seizure phenomenon, so that the rotating frame rotates unstably and even stops rotating, the film coating time is not uniform, and the whole film quality is influenced. Therefore, a novel tool coating rotating stand device of a high-vacuum multi-arc ion coating machine is provided.
Disclosure of Invention
The invention aims to provide a tool coating rotating stand device of a high-vacuum multi-arc ion coating machine, which solves the problems of gear locking and inconsistent coating time in the prior art.
The invention adopts the technical scheme that the tool coating rotating frame device of the high-vacuum multi-arc ion coating machine comprises a lower rotating disc and an upper rotating disc which are oppositely arranged up and down, wherein a circle of central symmetrical U-shaped through holes are formed in the edge position of the lower rotating disc, a lower bearing is arranged in the vertical direction of the U-shaped through holes, a lower transmission shaft is connected onto the lower bearing, a small gear is nested at the lower end of each lower transmission shaft, and the small gear is meshed with a fixed large gear positioned in the central position below the lower rotating disc; the upper transmission shaft is connected to the lower transmission shaft, and the upper part of the upper transmission shaft is embedded on the workpiece turntable; a plurality of uniformly distributed workpiece seats are arranged on the workpiece turntable, a plurality of uniformly distributed rotation gears are arranged below the workpiece seats, and the rotation gears are fixed with the workpiece seats through screws which penetrate through the lower rotation plate from bottom to top;
a circle of support columns which are uniformly distributed and vertically arranged are fixed between the upper turntable and the lower turntable, the support columns are positioned on the inner side of the lower transmission shaft or the upper transmission shaft, each support column is also provided with a deflector rod frame, and one end of each deflector rod frame is in contact with the rotation gear;
the lower transmission shaft and the upper transmission shaft are fixedly connected by a connector.
The present invention is also characterized in that,
the pinion is mounted on the drive shaft by screws.
The lower transmission shaft is arranged on the lower turntable through a lower bearing fixed on the U-shaped through hole of the lower turntable.
The connector is a plug-in connector.
The upper transmission shaft is connected with the upper rotary disc through an upper bearing.
The support column lower extreme passes to be located the big screw hole on the lower carousel and fixes, and the support column upper end passes to be located the nut on the carousel of going up fixedly.
The beneficial effect of the invention is that,
1. the tool coating rotating stand device of the high-vacuum multi-arc ion coating machine is simple in structure. The device is improved on the basis of the original workpiece rotating frame, the improvement is convenient, and the technical problems of complex structure, uneven workpiece plating and unstable rotating speed of the rotating frame at high temperature of the traditional revolution and rotation device are successfully solved;
2. the device has low cost and is easy to install and maintain, so that the cost is greatly reduced, the working efficiency is improved, the efficiency can be improved by more than 10 times compared with the original efficiency, and the film uniformity of the obtained tool is obviously improved;
3. the device has simple and efficient structure, and can easily manufacture products after the conventional design is finished.
The product can quickly occupy the market and play a role by combining the fire heat state of the tool coating of the high-vacuum multi-arc ion coating machine. Therefore, the tool film coating rotating frame device designed by the invention has certain social and economic benefits.
Drawings
FIG. 1 is a schematic structural diagram of a tool coating turret device of a high vacuum multi-arc ion coater of the present invention;
FIG. 2 is a schematic view of the lower turntable structure of the tool coating turret device of the high vacuum multi-arc ion coater of the present invention;
FIG. 3 is a schematic view of the upper turntable structure of the tool coating turret device of the high vacuum multi-arc ion coater of the present invention;
FIG. 4 is a top view of the workpiece turntable and the deflector rod of the tool coating turret device of the high vacuum multi-arc ion coater of the present invention.
In the figure, 1, a large gear, 2, a small gear, 3, a lower transmission shaft, 4, a lower bearing, 5, a connector, 6, a rotation gear, 7, a workpiece turntable, 8, a workpiece seat, 9, an upper transmission shaft, 10, a support column, 11, an upper turntable, 12, an upper bearing, 13, a deflector rod fixing ring, 14, a deflector rod frame and 15, a lower turntable.
Detailed Description
The tool coating rotating frame device structure of the high vacuum multi-arc ion coating machine provided by the invention is shown in figure 1, and comprises a lower rotating disc 15 and an upper rotating disc 11 (shown in figure 3) which are oppositely arranged up and down, wherein a circle of central symmetrical U-shaped through holes are formed in the edge position of the lower rotating disc 15 (shown in figure 2), a lower bearing 4 is arranged in the vertical direction of the U-shaped through holes, the lower bearing 4 is connected with lower transmission shafts 3, a pinion 2 is nested at the lower end of each lower transmission shaft 3, and the pinion 2 is meshed with a fixed gearwheel 1 positioned in the central position below the lower rotating disc 15; the lower transmission shaft 3 is connected with an upper transmission shaft 9, and the upper part of the upper transmission shaft 9 is embedded on the workpiece turntable 7; a plurality of uniformly distributed workpiece seats 8 are arranged on the workpiece turntable 7, a plurality of uniformly distributed rotation gears 6 are arranged below the workpiece seats 8, and the rotation gears 6 are fixed with the workpiece seats 8 through screws which penetrate through the workpiece turntable 7 from bottom to top;
a circle of supporting columns 10 which are uniformly distributed and vertically arranged are fixed between the upper rotary table 11 and the lower rotary table 15, the supporting columns 10 are positioned on the inner side of the lower transmission shaft 3 or the upper transmission shaft 9, each supporting column 10 is also provided with a shifting rod frame 14, and one end of each shifting rod frame 14 is in contact with the rotation gear 6 (as shown in fig. 4).
The lower transmission shaft 3 and the upper transmission shaft 9 are fixedly connected by a connector 5.
The pinion 2 is mounted on the propeller shaft 3 by the pinion 2 with screws.
The lower transmission shaft 3 is arranged on the lower rotary table 15 through a lower bearing 4 fixed on a U-shaped through hole of the lower rotary table 15.
The connector 5 is a plug-in connector.
The upper transmission shaft 9 and the upper rotary disc 11 are connected through an upper bearing 12.
The lower end of the supporting column 10 penetrates through a large threaded hole on the lower rotary table 15 to be fixed, and the upper end of the supporting column 10 penetrates through a nut on the upper rotary table 11 to be fixed.
The lower bearing 4 is nested in the bearing seat, and the bearing seat is fixed in the lower turntable 15.
The working principle of the tool coating rotating stand device of the high vacuum multi-arc ion coating machine is as follows:
the large gear 1 is fixed at the bottom of the vacuum chamber, the lower rotary table 15 is connected with a variable frequency motor, when the vacuum coating machine operates, the variable frequency motor outside the vacuum chamber drives the lower rotary table 15 to revolve, the lower bearing 4 revolves around the axis of the lower rotary table 15, and simultaneously drives the lower transmission shaft 3 and the upper transmission shaft 9 to revolve, and simultaneously the workpiece rotary table 7 drives the workpiece seat 8 to revolve; the lower transmission shaft 3 rotates while revolving due to the meshing action of the pinion 2 and the bull gear 1, the upper transmission shaft 9 also rotates through the connector 5, at this time, the workpiece rotary table 7 and the workpiece seat 8 revolve around the upper transmission shaft 9, and the workpiece seat 8 rotates around the center of the workpiece seat 8 due to the shifting action of the dial bar frame 14, so that the workpiece seat 8 can rotate in a triple manner (revolution and rotation).
When the large gear 1 is connected with a variable frequency motor, the lower turntable 15 is fixed at the bottom of the vacuum chamber, and the rotating frame device realizes fixed-point rotation. The working principle is as follows: when the variable frequency motor drives the gearwheel 1 to rotate, the lower transmission shaft 3 and the upper transmission shaft 9 drive the workpiece disc 7 to rotate around the center of the upper transmission shaft 9 under the meshing action of the pinion 2, namely, the workpiece seat 8 revolves around the center of the upper transmission shaft 9, and due to the stirring action of the dial rod frame 14, the workpiece seat 8 rotates around the center of the workpiece seat 8, so that the workpiece seat 8 rotates at a fixed point. Therefore, the tool coating rotating stand device of the multifunctional vacuum coating machine with triple rotation and fixed-point rotation is realized.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910250715.5A CN109852939B (en) | 2019-03-29 | 2019-03-29 | Tool coating rotating stand device of high-vacuum multi-arc ion coating machine |
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| CN201910250715.5A CN109852939B (en) | 2019-03-29 | 2019-03-29 | Tool coating rotating stand device of high-vacuum multi-arc ion coating machine |
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| CN109852939A CN109852939A (en) | 2019-06-07 |
| CN109852939B true CN109852939B (en) | 2021-04-27 |
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| CN110592550A (en) * | 2019-10-28 | 2019-12-20 | 上海映晓电子科技有限公司 | A kind of magnetron sputtering and electron beam evaporation double-chamber coating device and using method thereof |
| CN110760810B (en) * | 2019-11-27 | 2022-04-08 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
| CN110904422A (en) * | 2019-12-20 | 2020-03-24 | 凯茂科技(深圳)有限公司 | Coating film storage rack and coating film mechanism |
| CN112626479A (en) * | 2020-12-21 | 2021-04-09 | 贵阳航发精密铸造有限公司 | Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment |
| CN113667990B (en) * | 2021-07-28 | 2022-06-03 | 仪征纳环科技有限公司 | Vacuum film removing machine for DLC film removing of piston ring |
| CN114457318B (en) * | 2022-02-09 | 2023-01-13 | 上海惠而顺精密工具股份有限公司 | All-round surface coating frock mechanism |
| CN114990515B (en) * | 2022-06-28 | 2023-09-26 | 集美大学 | A tool coating tool |
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