CN207062370U - A kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device - Google Patents
A kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device Download PDFInfo
- Publication number
- CN207062370U CN207062370U CN201720919070.6U CN201720919070U CN207062370U CN 207062370 U CN207062370 U CN 207062370U CN 201720919070 U CN201720919070 U CN 201720919070U CN 207062370 U CN207062370 U CN 207062370U
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- rotary table
- rotation
- drive component
- arc ion
- pivoted frame
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Abstract
It the utility model is related to a kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device.The multi-arc ion coating includes support body with pivoted frame, the support body includes top rotary table, lower rotary table, connection top rotary table and the main shaft at lower rotary table center and around circumferentially disposed multiple axis of rotation between top rotary table and lower rotary table, each axis of rotation is provided with the fixture for being used for clamping workpiece, and the pivoted frame also includes revolution drive component, the multiple axis of rotation of driving that drive shaft rotates and then driven whole support body to rotate together and is respectively relative to the rotation drive component that top rotary table and lower rotary table rotate and the linear reciprocation drive component for driving whole support body to move back and forth up and down.Multi-arc ion coating of the present utility model with pivoted frame and using the pivoted frame multi-arc ion coating film device not only by revolution plus rotation by the way of solve homogeneity question in horizontal direction, the homogeneity question that also pumping on vertical is solved on vertical direction by pivoted frame, so as to improve workpiece quality of forming film.
Description
Technical field
Multi-arc ion coating is the utility model is related to, should more specifically to a kind of multi-arc ion coating pivoted frame and use
The multi-arc ion coating film device of pivoted frame.
Background technology
The principle of common multi-arc ion coating (vacuum coating) technology is as shown in figure 1, workpiece 5 is clamped in vacuum chamber 1
On interior pivoted frame 2, pivoted frame 2 is rotated under the drive of drive mechanism 6, and multiple ion plating arcs are housed in the side wall of vacuum chamber 1
Source, for producing plasma 4, last plasma is in workpiece surface film forming.But the setting of arc source position be it is fixed,
Although it can accomplish as far as possible uniformly, in coating process, still to lead because of the inhomogeneities of plasma by distribution
Cause workpiece quality of forming film all differences.
In order that workpiece plated film homogenize, at present generally using pivoted frame all be revolution plus rotation by the way of, i.e. pivoted frame is whole
Body revolves round the sun in vacuum chamber around center, while the rotating shaft difference rotation of each clamping workpiece on pivoted frame.This mode, effectively
Ground improves the homogeneity question for receiving plasma in each rotating shaft on workpiece level direction, but does not account for vertical side
Upward homogeneity question, cause workpiece quality of forming film or there is some difference.
Utility model content
The technical problems to be solved in the utility model is, for the drawbacks described above of prior art, there is provided one kind not only may be used
With revolve round the sun and rotation and the multi-arc ion coating pivoted frame that can also vertically move back and forth up and down and using the pivoted frame multi sphere from
Sub- filming equipment.
The utility model proposes a kind of multi-arc ion coating pivoted frame, including frame to solve its technical problem in first aspect
Body, the support body include top rotary table, lower rotary table, connection top rotary table and the main shaft at lower rotary table center and around circumferentially disposed in upper turn
Multiple axis of rotation between disk and lower rotary table, each axis of rotation are provided with the fixture for clamping workpiece, and the pivoted frame also includes
Revolution drive component, the multiple axis of rotation of driving for driving the main axis and then driving whole support body to rotate together are distinguished
The linear reciprocation that the rotation drive component and the whole support body of driving rotated relative to top rotary table and lower rotary table moves back and forth up and down is driven
Dynamic component.
According in one embodiment of the utility model first aspect, the revolution drive component include the first motor and by
The decelerator of first motor driven, the output shaft of the decelerator couple with the main shaft.
According in one embodiment of the utility model first aspect, the rotation drive component includes being arranged at lower rotary table
The gear wheel of lower section and the multiple little gears for setting and engaging around the gear wheel, the multiple little gear respectively with it is right
The multiple axis of rotation lower ends answered are fixedly connected, and the gear wheel is provided with the central through hole passed through for main shaft and is provided with support base.
According in one embodiment of the utility model first aspect, the linear reciprocation drive component includes the second motor
Connect with the runner by the second motor driven and the eccentric connecting rod for being connected to the runner, the connecting rod with the support base
Connect.
The utility model proposes a kind of multi-arc ion coating film device, including stove to solve its technical problem in second aspect
Body, the multiple ion plating arc sources being arranged on sidewall of the furnace body, the inlet duct being arranged at the top of body of heater, it is arranged at bottom of furnace body
Vacuum extractor, it is characterised in that also including pivoted frame, the pivoted frame includes support body, the support body include top rotary table, lower rotary table,
Connect the main shaft at top rotary table and lower rotary table center and around circumferentially disposed multiple axis of rotation between top rotary table and lower rotary table, often
One axis of rotation is provided with the fixture for clamping workpiece, and the pivoted frame also includes driving the main axis and then drives whole frame
Revolution drive component that body rotates together, the multiple axis of rotation of driving are respectively relative to the rotation that top rotary table and lower rotary table rotate
The linear reciprocation drive component that drive component and the whole support body of driving move back and forth up and down, wherein, the support body and rotation driving
For component in the vacuum chamber of the body of heater, the revolution drive component and linear reciprocation drive component are located at the bottom of body of heater
Lower section.
According in one embodiment of the utility model second aspect, the revolution drive component include the first motor and by
The decelerator of first motor driven, the output shaft of the decelerator couple with stretching out the main shaft of bottom of furnace body.
According in one embodiment of the utility model second aspect, the rotation drive component includes being arranged at lower rotary table
The gear wheel of lower section and the multiple little gears for setting and engaging around the gear wheel, the multiple little gear respectively with it is right
The multiple axis of rotation lower ends answered are fixedly connected, and the gear wheel is provided with the central through hole passed through for main shaft and is provided with support base,
The support base is arranged at the upper surface of bottom of furnace body.
According in one embodiment of the utility model second aspect, the linear reciprocation drive component includes the second motor
Connect with the runner by the second motor driven and the eccentric connecting rod for being connected to the runner, the connecting rod with the support base
Connect.
According in one embodiment of the utility model second aspect, the linear reciprocation drive component also includes a bottom plate
With the multiple guide pillars being fixed on the bottom plate, the multiple guide pillar is connected through bottom of furnace body with the support base, described
Connecting rod is connected with the bottom plate.
Not only may be used according to multi-arc ion coating pivoted frame of the present utility model and using the multi-arc ion coating film device of the pivoted frame
Solve the homogeneity question that workpiece receives plasma in the horizontal direction in a manner of by revolution plus rotation, but also can be with
Solve the homogeneity question that workpiece in the vertical direction receives plasma by pivoted frame pumping on vertical, from
And improve workpiece quality of forming film.
Brief description of the drawings
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing：
Fig. 1 is the principle schematic of multi-arc ion coating in the prior art；
Fig. 2 is the structural representation according to the multi-arc ion coating film device of the utility model one embodiment；
Fig. 3 is the structural representation of Fig. 2 transfer racks.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit the utility model.
Fig. 2 shows the structural representation of the multi-arc ion coating film device according to the utility model one embodiment.Such as Fig. 2
Shown, the multi-arc ion coating film device is mainly by body of heater 10, pivoted frame 20, ion plating arc source 30, inlet duct 40 and vacuum means
Put 50 compositions.Body of heater 10 further comprises bottom 11, top 12 and the side wall 13 at connection bottom 11 and top 12, the top of body of heater 10
Portion 12 is provided with inlet duct 40, and the bottom 11 of body of heater 10 is provided with vacuum extractor 50, so as to internally form vacuum chamber 14.Stove
It is uniformly distributed in the side wall of body 10 and is provided with multiple ion plating arc sources 30, for the workpiece production into vacuum chamber 14 on pivoted frame 20
Raw plasma.This is prior art, is just no longer described in detail herein.
Further combined with shown in Fig. 2 and Fig. 3, pivoted frame 20 is mainly by support body and revolution drive component 210, rotation drive component
230 and linear reciprocation drive component 220 form.Support body further comprises top rotary table 241, lower rotary table 242, main shaft 243 and more
The individual axis of rotation 244.Main shaft 241 connects the center of top rotary table 241 and lower rotary table 242 and extended downwardly to stretch out the bottom of body of heater 10
11 lower sections.Multiple axis of rotation 244 are circumferentially arranged between top rotary table 241 and lower rotary table 242 around main shaft 243, and lower end point
Shen Chu not the bottom of lower rotary table 242.Each axis of rotation 244 is provided with the fixture 245 for clamping workpiece, and this is prior art,
This is just no longer described in detail.
Revolution drive component 220 rotates for drive shaft 243 and then drives whole support body to revolve round the sun together.Specific such as Fig. 2
Shown, revolution drive component 220 is arranged at the lower section of bottom 11 of body of heater 10, including the first motor 211 and decelerator 212.First
The input of the output end connection reducer 212 of motor 211, the output end of decelerator couples with main shaft 243, so as to drive main shaft
243 rotations, and then drive top rotary table 241 and lower rotary table 242 to rotate by main shaft 243, multiple axis of rotation 244 are also with top rotary table
241 and lower rotary table 242 revolve round the sun together.
Rotation drive component 230 is used to drive multiple axis of rotation 244 to be respectively relative to 242 turns of top rotary table 241 and lower rotary table
It is dynamic.Specifically as shown in figure 3, rotation drive component 230 is arranged in vacuum chamber 14, including gear wheel 231 and multiple little gears
232.Gear wheel 231 is provided with the central through hole passed through for main shaft 243, and the peripheral support of gear wheel 231 is in solid in support base 246
On fixed multiple pillars 247, support base 246 is arranged at the upper surface of the bottom 11 of body of heater 10.Multiple little gears 232 are around canine tooth
Wheel 231 is set and engaged, and multiple little gears 232 are respectively fixedly connected with corresponding multiple lower ends of the axis of rotation 244.Such as
This, when whole support body revolves round the sun, multiple little gears 232 around gear wheel 231 rotate while rotation, so as to drive multiple axis of rotation
244 rotate relative to top rotary table 241 and lower rotary table 242.
Linear reciprocation drive component 220 is used to drive whole support body to move back and forth up and down.Shown in specific Fig. 2, linear reciprocation
Drive component 220 is arranged at the bottom part down of body of heater 10, including the second motor 221, runner 222, connecting rod 223, bottom plate 224 and leads
Post 225.The output end of second motor 221 drives runner 222 to rotate, and connects 223 one end and is connected with the bias of runner 222, another
End is connected with bottom plate 224, so as to make bottom plate 224 be moved back and forth up and down with the rotation of the second motor 221.It is solid on bottom plate 224
Surely multiple guide pillars 225 are connected with, the bottom 11 of the plurality of guide pillar 225 through body of heater 10 is connected with support base 246, so that the bottom of by
Moving back and forth up and down for plate 224 passes to support base 246, and then drives whole support body also to move back and forth up and down therewith.Herein
During, multiple guide pillars 225 furthermore provide guide effect.According in other embodiment of the present utility model, linear reciprocation
Drive component also can or possible appropriate technology means existing using other realize.
The above-mentioned multi-arc ion coating film device of the utility model not only can solve workpiece by way of revolution plus rotation
Receive the homogeneity question of plasma in the horizontal direction, but also can by pivoted frame pumping on vertical
Solves the homogeneity question that workpiece in the vertical direction receives plasma, so as to improve workpiece quality of forming film.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (9)
1. a kind of multi-arc ion coating pivoted frame, it is characterised in that including support body, the support body includes top rotary table, lower rotary table, connection
The main shaft at top rotary table and lower rotary table center and around circumferentially disposed multiple axis of rotation between top rotary table and lower rotary table, it is each from
Rotating shaft is provided with the fixture for clamping workpiece, and the pivoted frame also includes driving the main axis and then drives whole support body one
Act the revolution drive component rotated, the multiple axis of rotation of driving is respectively relative to the rotation driving that top rotary table and lower rotary table rotate
The linear reciprocation drive component that component and the whole support body of driving move back and forth up and down.
2. multi-arc ion coating pivoted frame according to claim 1, it is characterised in that the revolution drive component includes first
Motor and the decelerator by the first motor driven, the output shaft of the decelerator couple with the main shaft.
3. multi-arc ion coating pivoted frame according to claim 2, it is characterised in that the rotation drive component includes setting
Multiple little gears that gear wheel and the circular gear wheel below lower rotary table set and engaged, the multiple little gear
It is fixedly connected respectively with corresponding multiple axis of rotation lower ends, the gear wheel is provided with the central through hole passed through for main shaft and is provided with branch
Support base.
4. multi-arc ion coating pivoted frame according to claim 3, it is characterised in that the linear reciprocation drive component includes
Second motor and the runner by the second motor driven and the eccentric connecting rod for being connected to the runner, the connecting rod and the support
Base connects.
5. a kind of multi-arc ion coating film device, including body of heater, be arranged on sidewall of the furnace body multiple ion plating arc sources, be arranged at stove
Inlet duct at the top of body, the vacuum extractor for being arranged at bottom of furnace body, it is characterised in that also including pivoted frame, the pivoted frame bag
Include support body, the support body include top rotary table, lower rotary table, connection top rotary table and the main shaft at lower rotary table center and around it is circumferentially disposed in
Multiple axis of rotation between top rotary table and lower rotary table, each axis of rotation are provided with the fixture for clamping workpiece, and the pivoted frame is also
Including revolution drive component, the multiple axis of rotation of driving for driving the main axis and then driving whole support body to rotate together
The straight line for being respectively relative to top rotary table and lower rotary table the rotation drive component rotated and driving whole support body to move back and forth up and down is past
Multiple drive component, wherein, the support body and rotation drive component are in the vacuum chamber of the body of heater, the revolution driving group
Part and linear reciprocation drive component are located at the bottom part down of body of heater.
6. multi-arc ion coating film device according to claim 5, it is characterised in that the revolution drive component includes first
Motor and the decelerator by the first motor driven, the output shaft of the decelerator couple with stretching out the main shaft of bottom of furnace body.
7. multi-arc ion coating film device according to claim 6, it is characterised in that the rotation drive component includes setting
Multiple little gears that gear wheel and the circular gear wheel below lower rotary table set and engaged, the multiple little gear
It is fixedly connected respectively with corresponding multiple axis of rotation lower ends, the gear wheel is provided with the central through hole passed through for main shaft and is provided with branch
Base is supportted, the support base is arranged at the upper surface of bottom of furnace body.
8. multi-arc ion coating film device according to claim 7, it is characterised in that the linear reciprocation drive component includes
Second motor and the runner by the second motor driven and the eccentric connecting rod for being connected to the runner, the connecting rod and the support
Base connects.
9. multi-arc ion coating film device according to claim 8, it is characterised in that the linear reciprocation drive component also wraps
A bottom plate and the multiple guide pillars being fixed on the bottom plate are included, the multiple guide pillar connects through bottom of furnace body and the support base
Connect, the connecting rod is connected with the bottom plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720919070.6U CN207062370U (en) | 2017-07-27 | 2017-07-27 | A kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720919070.6U CN207062370U (en) | 2017-07-27 | 2017-07-27 | A kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207062370U true CN207062370U (en) | 2018-03-02 |
Family
ID=61516947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720919070.6U Expired - Fee Related CN207062370U (en) | 2017-07-27 | 2017-07-27 | A kind of multi-arc ion coating pivoted frame and multi-arc ion coating film device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207062370U (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108543948A (en) * | 2018-04-17 | 2018-09-18 | 海宁金瑞金属制品有限公司 | Shaking assembly in powder metallurgy device for soaking oil |
| CN109306463A (en) * | 2018-12-19 | 2019-02-05 | 浙江工业大学 | A kind of self-action pole sample plated film clamping device suitable for magnetic control sputtering device |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN109930127A (en) * | 2019-03-06 | 2019-06-25 | 深圳市乐业科技有限公司 | A kind of heavy duty detergent vacuum coating equipment for piezoelectric ceramics production |
| CN110273128A (en) * | 2019-06-27 | 2019-09-24 | 中国人民解放军空军工程大学 | A kind of fixture being used to prepare ion coating plating |
| CN110735117A (en) * | 2019-11-29 | 2020-01-31 | 中国航发沈阳黎明航空发动机有限责任公司 | duplex guide vane thermal barrier coating preparation method |
| CN110760810A (en) * | 2019-11-27 | 2020-02-07 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
| CN112481596A (en) * | 2020-11-27 | 2021-03-12 | 厦门大学 | Workpiece rotating device and ion beam physical vapor deposition device |
| CN112626479A (en) * | 2020-12-21 | 2021-04-09 | 贵阳航发精密铸造有限公司 | Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment |
| CN112899636A (en) * | 2021-01-28 | 2021-06-04 | 中国核动力研究设计院 | Workpiece frame of large length-diameter ratio pipe vacuum coating machine for reactor and coating machine thereof |
| CN113186499A (en) * | 2021-03-19 | 2021-07-30 | 法德(浙江)机械科技有限公司 | High-energy pulse arc evaporation source |
| CN114790540A (en) * | 2022-05-11 | 2022-07-26 | 纳峰真空镀膜（上海）有限公司 | Film coating rotating stand |
| CN115652265A (en) * | 2022-12-08 | 2023-01-31 | 常州夸克涂层科技有限公司 | Conveying system for multi-arc ion plating and multi-arc ion plating process |
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- 2017-07-27 CN CN201720919070.6U patent/CN207062370U/en not_active Expired - Fee Related
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| CN108543948A (en) * | 2018-04-17 | 2018-09-18 | 海宁金瑞金属制品有限公司 | Shaking assembly in powder metallurgy device for soaking oil |
| CN109306463A (en) * | 2018-12-19 | 2019-02-05 | 浙江工业大学 | A kind of self-action pole sample plated film clamping device suitable for magnetic control sputtering device |
| CN109930127A (en) * | 2019-03-06 | 2019-06-25 | 深圳市乐业科技有限公司 | A kind of heavy duty detergent vacuum coating equipment for piezoelectric ceramics production |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN110273128A (en) * | 2019-06-27 | 2019-09-24 | 中国人民解放军空军工程大学 | A kind of fixture being used to prepare ion coating plating |
| CN110760810A (en) * | 2019-11-27 | 2020-02-07 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
| CN110760810B (en) * | 2019-11-27 | 2022-04-08 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
| CN110735117A (en) * | 2019-11-29 | 2020-01-31 | 中国航发沈阳黎明航空发动机有限责任公司 | duplex guide vane thermal barrier coating preparation method |
| CN110735117B (en) * | 2019-11-29 | 2021-06-29 | 中国航发沈阳黎明航空发动机有限责任公司 | Preparation method of thermal barrier coating of duplex guide blade |
| CN112481596A (en) * | 2020-11-27 | 2021-03-12 | 厦门大学 | Workpiece rotating device and ion beam physical vapor deposition device |
| CN112626479A (en) * | 2020-12-21 | 2021-04-09 | 贵阳航发精密铸造有限公司 | Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment |
| CN112899636A (en) * | 2021-01-28 | 2021-06-04 | 中国核动力研究设计院 | Workpiece frame of large length-diameter ratio pipe vacuum coating machine for reactor and coating machine thereof |
| CN113186499A (en) * | 2021-03-19 | 2021-07-30 | 法德(浙江)机械科技有限公司 | High-energy pulse arc evaporation source |
| CN114790540A (en) * | 2022-05-11 | 2022-07-26 | 纳峰真空镀膜（上海）有限公司 | Film coating rotating stand |
| CN115652265A (en) * | 2022-12-08 | 2023-01-31 | 常州夸克涂层科技有限公司 | Conveying system for multi-arc ion plating and multi-arc ion plating process |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180302 Termination date: 20180727 |
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| CF01 | Termination of patent right due to non-payment of annual fee |