CN110904422A - Coating film storage rack and coating film mechanism - Google Patents
Coating film storage rack and coating film mechanism Download PDFInfo
- Publication number
- CN110904422A CN110904422A CN201911329125.8A CN201911329125A CN110904422A CN 110904422 A CN110904422 A CN 110904422A CN 201911329125 A CN201911329125 A CN 201911329125A CN 110904422 A CN110904422 A CN 110904422A
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- coating
- support base
- tray
- base body
- rack
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- 239000011248 coating agent Substances 0.000 title claims abstract description 75
- 238000000576 coating method Methods 0.000 title claims abstract description 75
- 238000003860 storage Methods 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000003780 insertion Methods 0.000 claims description 28
- 230000037431 insertion Effects 0.000 claims description 28
- 238000009434 installation Methods 0.000 claims description 19
- 239000007888 film coating Substances 0.000 abstract description 8
- 238000009501 film coating Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 6
- 230000033001 locomotion Effects 0.000 abstract description 5
- 238000007747 plating Methods 0.000 description 15
- 230000005540 biological transmission Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a film coating storage rack and a film coating mechanism, which comprise a material carrying disc, a support base body and a material disc, wherein a plurality of mounting cavities are arranged on the material carrying disc, the support base body can rotate, the material carrying disc is rotationally connected to the support base body, the material carrying disc can rotate along with the support base body and rotate relative to the support base body, and the material disc is arranged in the mounting cavities and can rotate along with the material carrying disc. The coating storage rack provided by the invention adopts a rotation form of rotation and revolution, so that the material tray can rotate along with the rotation of the support base body while rotating relative to the support base body, when coating is carried out, the parts to be coated positioned at different positions of the support base body can move along with the movement of the material tray, the material tray initially positioned at the edge of the support base body can move to the center of the support base body and other areas, the parts to be coated can not be thin at the edge of the coating because of position constraint, the thickness of the coating is more uniform, and the coating effect and the product performance of a workpiece are optimized.
Description
Technical Field
The invention relates to the technical field of coating, in particular to a coating storage rack and a coating mechanism.
Background
In order to improve the product performance, the surfaces of most industrial products are plated with functional films to optimize the optical and thermal properties of the surfaces of the products, the traditional vacuum coating technology is generally a physical vapor deposition technology and a chemical vapor deposition technology, the physical vapor deposition technology is a preparation method for converting solid materials into gaseous substances in a courtyard, molecule or particle state by utilizing physical forms such as evaporation or sputtering and the like to deposit the gaseous substances on the surfaces of a substrate or a part to form a film, and the physical vapor deposition technology has the advantages of uniform films, wide target materials and wide sputtering range.
When a workpiece is coated, the workpiece to be coated is placed on the coating frame for coating, the traditional coating frame is single in coating form, the center of the coating is thick, the edge of the coating is thin, and the flatness of the coating is poor, the coating is uneven and the coating effect is poor.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides a film coating storage rack and a film coating mechanism, which can overcome the defect of uneven film coating thickness.
In a first aspect, an embodiment of the present invention provides a rack for depositing a coating, including:
the loading disc is provided with a plurality of mounting cavities;
the bracket base body can rotate, the object carrying disc is connected to the bracket base body in a rotating mode, and the object carrying disc can rotate along with the bracket base body and rotate relative to the bracket base body;
and the material tray is arranged in the mounting cavity and can rotate along with the material carrying tray.
The film-coated storage rack in the embodiment of the invention at least has the following beneficial effects:
the coating storage rack provided by the invention adopts a rotation form of rotation and revolution, so that the material tray can rotate along with the rotation of the support base body while rotating relative to the support base body, when coating is carried out, the parts to be coated, which are positioned at different positions of the support base body, can move along with the movement of the material tray, the material tray which is initially positioned at the edge of the support base body can move to the center and other areas of the support base body, the material tray which is initially positioned at the center of the support can move to the edge and other areas of the support base body, the parts to be coated can not have the condition of thin coating edge and thick coating center due to position constraint, the thickness of a coating layer is more uniform, and the coating effect and the product performance of a.
According to the film-coated commodity shelf provided by the other embodiments of the invention, the central wheel disc is mounted on the support base body, and the commodity carrying discs are uniformly distributed around the central wheel disc.
According to the film-coated commodity shelf provided by the other embodiments of the invention, the central wheel disc can rotate along with the support base body, and the commodity carrying disc can rotate along with the rotation of the central wheel disc.
According to the film-coated commodity shelf provided by the other embodiments of the invention, the support base body comprises the connecting frame and a plurality of support frames, one end of each support frame is connected to the center of the support base body, and the other end of each support frame is connected with the connecting frame and outwards diverges based on the center of the support base body.
According to other embodiments of the present invention, the rack base further comprises a rack, the rack is rotatably connected to the supporting frame, and the rack tray is placed on the rack.
According to other embodiments of the present invention, the edge of the central wheel disk is provided with a first gear, the edge of the object carrier is provided with a second gear, and the first gear is engaged with the second gear.
According to the film-coated storage rack of other embodiments of the present invention, a plurality of first insertion blocks are distributed on the storage tray, a plurality of second insertion blocks are distributed on the storage rack, and the first insertion blocks can be inserted into the second insertion blocks.
According to the film coating storage rack of other embodiments of the invention, the side part of the material tray is provided with the mounting step, and the mounting step can be abutted against the end face of the mounting cavity, so that a mounting space is formed between the surface of the material tray and the wall surface of the mounting cavity.
According to the coating storage rack provided by other embodiments of the invention, a plurality of coating holes are formed in the material tray and are communicated with the installation space.
In a second aspect, an embodiment of the invention provides a coating mechanism, which includes the above-mentioned coating rack.
The coating mechanism in the embodiment of the invention at least has the following beneficial effects:
through setting up the coating film supporter, make coating mechanism more even to the coating film thickness of plating the piece, improve coating film yields of coating mechanism.
Drawings
FIG. 1 is a schematic view of an embodiment of a coated shelf;
FIG. 2 is a schematic view of the hidden tray of FIG. 1;
FIG. 3 is a schematic structural view of the stent base of FIG. 1;
FIG. 4 is a schematic view of the carrier tray of FIG. 1;
FIG. 5 is an enlarged view of portion A of FIG. 2;
FIG. 6 is an enlarged view of portion B of FIG. 3;
FIG. 7 is a schematic view of the tray of FIG. 1;
fig. 8 is a partial schematic view of the tray after installation is completed.
Detailed Description
The concept and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments to fully understand the objects, features and effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention.
In the description of the embodiments of the present invention, if an orientation description is referred to, for example, the orientations or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", etc. are based on the orientations or positional relationships shown in the drawings, only for convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the embodiments of the present invention, if a feature is referred to as being "disposed", "fixed", "connected", or "mounted" to another feature, it may be directly disposed, fixed, or connected to the other feature or may be indirectly disposed, fixed, connected, or mounted to the other feature. In the description of the embodiments of the present invention, if "a number" is referred to, it means one or more, if "a plurality" is referred to, it means two or more, if "greater than", "less than" or "more than" is referred to, it is understood that the number is not included, and if "greater than", "lower" or "inner" is referred to, it is understood that the number is included. If reference is made to "first" or "second", this should be understood to distinguish between features and not to indicate or imply relative importance or to implicitly indicate the number of indicated features or to implicitly indicate the precedence of the indicated features.
Fig. 1 to 4 are schematic structural views illustrating a coating shelf in an embodiment, and referring to fig. 1 to 4, the coating shelf in the embodiment includes a rotatable bracket base 100, a tray 200 and a tray 300, the bracket base 100 is used for mounting and supporting the tray 200, the tray 200 is used for mounting and supporting the tray 300, and the tray 300 is used for preventing a workpiece to be coated; specifically, the support base body 100 can rotate, the object carrying plate 200 is rotatably connected to the support base body 100, in the process of rotation of the support base body 100, the object carrying plate 200 can rotate relative to the support base body 100, the object carrying plate 200 is made to form a rotation form of rotation and revolution, a plurality of installation cavities 210 are formed in the object carrying plate 200, the material plate 300 can be clamped into the installation cavities 210, fixing between the material plate 300 and the object carrying plate 200 is achieved, the material plate 300 can rotate along with rotation of the object carrying plate 200, through the arrangement of the installation cavities 210, the number of pieces to be plated of a single-time film plating is increased, film plating efficiency is improved, the pieces to be plated can be installed in the installation cavities 210, the upper surface of the material plate 300 can receive the pieces to be plated, fixed connection between the pieces to be plated and the material plate 300 is achieved, and the pieces to be plated can rotate along with the material plate 300.
The coating shelf in the embodiment adopts a rotation form of rotation plus revolution, so that the material tray 300 can rotate along with the rotation of the support base 100 while rotating relative to the support base 100, when coating is performed, the parts to be coated, which are positioned at different positions of the support base 100, can move along with the movement of the material tray 300, the material tray 300 which is initially positioned at the edge of the support base 100 can move to the center of the support base 100 and other regions, the material tray 300 which is initially positioned at the center of the support can move to the edge of the support base 100 and other regions, the parts to be coated can not have the condition of thin coating edge and thick coating edge center due to position constraint, the thickness of a coating layer is more uniform, and the coating effect and the product performance of a workpiece are optimized.
It should be noted that, in the present embodiment, the support base 100 is connected to a power driving device, and the power driving device may be selected from a motor, a rotary cylinder, an electric cylinder, and the like, so as to provide power support for the rotation of the support base 100, and the power driving device may be connected to the center of the support base 100 or other positions on the premise that the driving force driving device is connected to the support base 100 and can drive the support base 100 to move.
In this embodiment, the center of the support base 100 is provided with the central wheel disc 110, the object carrying discs 200 are uniformly distributed around the central wheel disc 110, the bottom of the support base 100 is provided with the central shaft 120, the central wheel disc 110 is connected with the central shaft 120, and the central shaft 120 is connected with the power driving device and can be driven by the power driving device to rotate, so that the central wheel disc 110 can rotate along with the rotation of the central shaft 120. The central shaft 120 may be rotatably connected to the central wheel disc 110, and the central wheel disc 110 and the central shaft 120 may be powered by different driving devices, so as to realize the rotation of the central shaft 120 and the central wheel disc 110. In the embodiment, the object carrying disc 200 is uniformly provided with a circle at the periphery of the central wheel disc 110, and the whole object carrying disc 200 is centrosymmetric relative to the center of the central wheel disc 110 so as to ensure the uniformity of film coating; of course, the object carrying discs 200 may be alternatively distributed (jumping near the central area and far from the central area in the area far from the central disc 110) or arranged at least two times on the periphery of the central disc 110 to further improve the film coating efficiency.
Referring to fig. 3, in the present embodiment, the support base 100 includes a connecting frame 130 and a plurality of supporting frames 140, the connecting frame 130 is annular and is disposed on the top of the support base 100, one end of the supporting frame 140 is connected to the central shaft 120, the other end of the supporting frame 140 is connected to the connecting frame 130, and the supporting frame 140 diverges towards a direction away from the central shaft 120 based on a connection with the central shaft 120, so that the support base 100 is umbrella-shaped, the object carrying tray 200 is rotatably connected to the supporting frame 140, and the diverging distribution of the supporting frame 140 provides an installation space 320 for the object carrying tray 200, so as to avoid interference between adjacent object carrying trays 200.
Power elements may be disposed on the bracket base 100, the power elements are connected to the object carrying tray 200 and are used for driving the object carrying tray 200 to rotate, each power element may be connected to the object carrying tray 200 and drive the first object carrying tray 200 to rotate, or each power element is connected to a plurality of object carrying trays 200 and is used for driving the plurality of object carrying trays 200 to rotate simultaneously; the power element can be selected from a motor, a motor and the like. A power transmission element may also be disposed between the carrier disc 200 and the central wheel disc 110 to realize power transmission from the central wheel disc 110 to the carrier disc 200, for example, a transmission belt is wound around the peripheries of the carrier disc 200 and the central wheel disc 110 to realize power transmission and synchronous motion between the central wheel disc 110 and the carrier disc 200 through belt transmission, so that the carrier disc 200 rotates relative to the carrier base 100 while rotating along with the carrier base 100. Referring to fig. 5, in the present embodiment, the rack 150 is further fixed on the supporting frame 140, the object carrying trays 200 are mounted on the object carrying trays 150, the edge of the central wheel disc 110 is provided with the first gear teeth 111, the edge of the object carrying trays 150 is provided with the second gear teeth 152, and the first gear teeth 111 and the second gear teeth 152 are engaged with each other, so that the object carrying trays 200 can rotate along with the rotation of the central wheel disc 110 along with the rotation of the object carrying trays 150, and all the object carrying trays 200 can rotate along with the central wheel disc 110 synchronously because the second gear teeth 152 of all the object carrying trays 150 are engaged with the gear teeth of the central wheel disc 110, so that the rotation speeds and the displacements of all the object carrying trays 300 are the same, and the uniformity of the plated film; the supporting frame 140 is provided with a rotating shaft 153, the rotating shaft 153 is connected with the object carrier 150, and the object carrier 150 can rotate relative to the bracket base 100 along with the rotation of the rotating shaft 153.
The above-mentioned engaging form between the racks 150 and the central wheel 110 is not limited to this, for example, only the gear teeth of one rack 150 is engaged with the gear teeth of the central wheel 110, so that only one rack 150 is driven to rotate when the central wheel 110 rotates, the second gear teeth 152 of the adjacent racks 150 are engaged with each other, and the other racks 150 can rotate synchronously with the central wheel 110 by the driving of the racks 150 engaged with the central wheel 110, and the power transmission between the racks 150 and the central wheel 110 can also be realized.
In the present embodiment, each supporting frame 140 is provided with a rack 150, and the rack 150 is shaped like a plate and is used for mounting and supporting the tray 200. Specifically, referring to fig. 6, a plurality of first insertion blocks 210 are arranged on the bottom surface of the tray 200, a plurality of second insertion blocks 151 are distributed on the upper surface of the rack 150, the number of the first insertion blocks 210 is the same as that of the second insertion blocks 151, and the first insertion blocks 210 and the second insertion blocks 151 are both provided with grooves 211 and protrusions 212 which are mutually matched, the protrusions 212 on the first insertion blocks 210 can be inserted into the grooves 211 on the second insertion blocks 151, and the protrusions 212 on the second insertion blocks 151 can be inserted into the grooves 211 on the first insertion blocks 210, so that the first insertion blocks 210 and the second insertion blocks 151 are inserted; the first insertion blocks 210 and the second insertion blocks 151 are distributed in the same manner, and taking the first insertion blocks 210 as an example, the opening directions of the grooves 211 on the different first insertion blocks 210 are all parallel to the tangential direction of the carrier tray 200, so when the first insertion blocks 210 are inserted into the second insertion blocks 151, the grooves 211 and the protrusions 212 of the first insertion blocks 210 and the second insertion blocks 151 are aligned, and the carrier tray 200 or the carrier rack 150 is rotated by an angle, which is convenient and fast to operate. In this embodiment, the carrying tray 200 is further fixed with a plurality of handles 220, which are convenient for an operator to hold and facilitate the installation of the carrying tray 200.
Referring to fig. 7 and 8, the edge of the tray 300 in this embodiment is provided with an installation step 310, and the installation step 310 can be fastened on the wall surface of the installation cavity 210 of the object-carrying tray 200, so as to limit and fix the tray 300 by the installation cavity 210. The installation cavities 210 can be arranged in an annular shape and in a divergent straight line on the object carrying tray 200, in the embodiment, the installation cavities 210 are arranged in three straight lines on the object carrying tray 200 in a circular and divergent arrangement mode, the object carrying tray 200 is divided into trisected fan shapes by the three straight lines, and in each fan-shaped area, the installation cavities 210 are arranged in two annular shapes.
After the tray 300 is placed in the installation cavity 210, the upper surface of the tray 300 is recessed inwards based on the upper surface of the object carrying tray 200 to form an installation space 320 capable of accommodating the to-be-coated parts, and the to-be-coated parts can be embedded into the installation space 320 to position the to-be-coated parts. The charging tray 300 is provided with a plurality of coating holes 330, the back of the charging tray 300 is also provided with a plurality of accommodating cavities 340, the accommodating cavities 340 and the coating holes 330 are communicated with the mounting space 320, when coating is carried out, a coating source is positioned below the charging tray 300 and can extend into the coating holes 330, and redundant coating sources can be stored in the accommodating cavities 340 through the coating holes 330, so that excessive coating is prevented from being caused, the cause value of a part to be coated is influenced, and the coating yield is improved.
The invention also provides a coating mechanism which comprises the coating storage rack, and the coating thickness of the coating mechanism to the coated piece is more uniform by arranging the coating storage rack, so that the coating yield of the coating mechanism is improved. The coating mechanism further comprises a coating source and a coating platform, wherein the coating platform is used for installing and supporting the coating source, and enabling the coating source to rotate and move so as to ensure that the coating source can correspond to the material discs 300 at different positions. The plating source can adopt an evaporation crucible, a plurality of plating sources can be arranged on the plating table, and each plating source can select a corresponding type according to the number and the arrangement mode of evaporation holes, such as a point-rotation type plating source, a line-rotation type plating source or a surface-rotation type plating source. The plating table adopts a rotatable form, and the plating source can move along with the rotation of the plating table after being installed on the plating table, so that the plating source can plate films on parts to be plated at different positions, and the uniformity of the film on the parts to be plated is improved through circulating movement.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. Furthermore, the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.
Claims (10)
1. A coating film supporter, its characterized in that includes:
the loading disc is provided with a plurality of mounting cavities;
the bracket base body can rotate, the object carrying disc is connected to the bracket base body in a rotating mode, and the object carrying disc can rotate along with the bracket base body and rotate relative to the bracket base body;
and the material tray is arranged in the mounting cavity and can rotate along with the material carrying tray.
2. The coated shelf of claim 1 wherein said carrier base has a central wheel disk mounted thereon, said carrier disks being evenly distributed about said central wheel disk.
3. The coated commodity shelf of claim 2, wherein the central wheel disc is capable of rotating relative to the support base, and the commodity carrying disc is capable of rotating along with the rotation of the central wheel disc.
4. The coated commodity shelf according to claim 1, wherein the support base comprises a connecting frame and a plurality of support frames, one end of each support frame is connected to the center of the support base, and the other end of each support frame is connected with the connecting frame and outwards diverges based on the center of the support base.
5. The plated rack of claim 4, wherein the rack base further comprises a rack, the rack is rotatably connected to the supporting frame, and the tray is placed on the rack.
6. The coating storage rack according to claim 5, wherein the edge of the central wheel disk is provided with a first gear, the edge of the storage rack is provided with a second gear, and the first gear is engaged with the second gear.
7. The coating storage rack of claim 5, wherein a plurality of first insertion blocks are distributed on the storage tray, a plurality of second insertion blocks are distributed on the storage rack, and the first insertion blocks can be inserted into the second insertion blocks.
8. The coating storage rack according to claim 1, wherein the side of the tray is provided with a mounting step, and the mounting step can be abutted against the end face of the mounting cavity, so that a mounting space is formed between the surface of the tray and the wall surface of the mounting cavity.
9. The coating storage rack of claim 8, wherein the tray is provided with coating holes, and the coating holes are communicated with the installation space.
10. A coating mechanism, comprising the coating rack of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911329125.8A CN110904422A (en) | 2019-12-20 | 2019-12-20 | Coating film storage rack and coating film mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911329125.8A CN110904422A (en) | 2019-12-20 | 2019-12-20 | Coating film storage rack and coating film mechanism |
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| Publication Number | Publication Date |
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| CN110904422A true CN110904422A (en) | 2020-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911329125.8A Pending CN110904422A (en) | 2019-12-20 | 2019-12-20 | Coating film storage rack and coating film mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959622A (en) * | 2022-05-17 | 2022-08-30 | 无锡清鑫光学技术有限公司 | Stainless steel precision optical coating umbrella and manufacturing process thereof |
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| CN104294234A (en) * | 2014-09-23 | 2015-01-21 | 东莞市华星镀膜科技有限公司 | Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig |
| CN107658366A (en) * | 2016-07-26 | 2018-02-02 | 福建钧石能源有限公司 | The film plating process and PVD support plates and coating apparatus of a kind of hetero-junction solar cell |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN211522312U (en) * | 2019-12-20 | 2020-09-18 | 凯茂科技(深圳)有限公司 | Coating film storage rack and coating film mechanism |
-
2019
- 2019-12-20 CN CN201911329125.8A patent/CN110904422A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294234A (en) * | 2014-09-23 | 2015-01-21 | 东莞市华星镀膜科技有限公司 | Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig |
| CN107658366A (en) * | 2016-07-26 | 2018-02-02 | 福建钧石能源有限公司 | The film plating process and PVD support plates and coating apparatus of a kind of hetero-junction solar cell |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN211522312U (en) * | 2019-12-20 | 2020-09-18 | 凯茂科技(深圳)有限公司 | Coating film storage rack and coating film mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114959622A (en) * | 2022-05-17 | 2022-08-30 | 无锡清鑫光学技术有限公司 | Stainless steel precision optical coating umbrella and manufacturing process thereof |
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