CN103590006B - A kind of multifunctional vacuum Revolving rack of film-plating machine - Google Patents
A kind of multifunctional vacuum Revolving rack of film-plating machine Download PDFInfo
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- CN103590006B CN103590006B CN201310632160.3A CN201310632160A CN103590006B CN 103590006 B CN103590006 B CN 103590006B CN 201310632160 A CN201310632160 A CN 201310632160A CN 103590006 B CN103590006 B CN 103590006B
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Abstract
The invention discloses a kind of multifunctional vacuum Revolving rack of film-plating machine, it comprises main frame body part, driving part and workpiece rotating element, described main frame body part comprise along the vertical direction parallel opposed successively top board, cog, lower gear, support unit, external toothing tooth and Lock Part, described in cog and to be connected by multiple union lever with between described top board; Described driving part comprise multiple by bearing and described top board and described in cog the transmission rod be connected, described lower gear is also provided with internal messing tooth, cog described in each described transmission rod extends to below and be provided with the lower transmissioning gear be meshed with described internal messing tooth.The present invention not only can realize the Fixed-point Motion of A of workpiece, and can specified target cardinal distance arbitrarily, and ensure planetary rotation and the rotation of workpiece, also can realize the use of freely arranging in pairs or groups separately or arbitrarily of large revolution, planetary rotation and rotation three kinds of rotating manners, the multiple application target of vacuum plating unit can be met.
Description
Technical field
The present invention relates to a kind of multifunctional vacuum Revolving rack of film-plating machine, belong to vacuum coating film equipment technical field.
Background technology
Vacuum plating unit is used in a vacuum to workpiece plated film, and vacuum plating unit comprises the vacuum chamber of the process chamber being formed in workpiece, is provided with pivoted frame in vacuum chamber, and this pivoted frame can be driven by drive unit and rotate, thus realizes the rotation of workpiece.
See Fig. 1, vacuum plating unit pivoted frame 10 of the prior art comprises fixed gear 101, moving gear 102, transmitting gear 103, union lever 104, transmission rod 105 and top board 106 etc.Wherein, fixed gear 101 is fixed on the inner bottom surface of housing, remains static all the time, is formed in the engagement track of transmitting gear; Moving gear 102 is supported by the supplemental support parts (figure does not indicate) being arranged in housing inner bottom surface, and can rotate around its axis under the driving of drive unit (not indicating in figure); Top board 106 is positioned at above moving gear 102, and connected by multiple union lever 104, multiple transmission rod 105 is provided with between top board 106 and moving gear 102, each transmission rod 105 is provided with bearing with the junction of top board 106 and moving gear 102, so that transmission rod 105 can rotate, the lower end of transmission rod 105 extends to the below of moving gear 102 and arranges transmitting gear 103, and transmitting gear 103 is arranged in the periphery of fixed gear 101.The combination of transmitting gear 103 and transmission rod 105 totally 8 in figure, is called that 8 axles rotate.8 axles are not limited only in reality.If additional another set of transmission rig, also can realize the rotation of workpiece on transmission rod 105 simultaneously.
The principle of work of existing vacuum plating unit pivoted frame is: drive unit drives moving gear 102 to rotate, moving gear 102 drives the transmitting gear 103 engaged with fixed gear 101 to rotate, make transmitting gear 103 and transmission rod 105 wraparound turn the pivoted frame center rotating of shape, keep transmitting gear 103 and transmission rod 105 to rotate around the axis of transmission rod 105 simultaneously.Finally, realize around pivoted frame center rotating with the workpiece that transmission rod 105 adopts fixing or alternate manner transmission to be combined, or realize workpiece rotation by transmission rig.
Visible, the moving gear 102 in existing vacuum plating unit pivoted frame and fixed gear 101 position and function are fixing, and the realization that a series of workpiece rotates all is based upon moving gear 102 and completes on the basis of large revolution with nutating gear 103 and transmission rod 105.Because trade union college is on transmission rod 105, therefore, in any rotating manner, the rotate rotation at frame center of workpiece all can not stop.
In scientific research or process exploitation stage, quantitative examination to be carried out on the key parameter affecting rete.As density and temperature and the target-substrate distance etc. of plasma body.Often need these parameters of quantitative examination on the impact of coating growth in research.
Plasma density and temperature determine the key factor of coating growth, and because the arrangement mode of plated film negative electrode in vacuum chamber and plasma body are with the feature of range attenuation, the distribution of plasma body in vacuum chamber is uneven.In other words, when workpiece is in different positions in vacuum chamber, coating growth situation there are differences.Want the research plasma body of accurate quantification on the impact of coating growth, workpiece must be made can to reach different positions in vacuum chamber and can be fixed on this position; Meanwhile, consider for workpiece membrane uniformity, the rotation of workpiece need ensure unaffected.Simplified summary, the pivoted frame of vacuum plating unit needs to realize Fixed-point Motion of A.
By describing above, the rotating function of existing vacuum plating unit pivoted frame generally transfers basis to grand duke.Like this, workpiece is change at vacuum indoor location all the time, and Fixed-point Motion of A can not realize, and the impact of quantitative examination plasma distribution on coating growth becomes impossible.
In addition, target-substrate distance is another key parameter affecting film performance, and the position relationship of target affects very large on plated film homogeneity and rate of film build.Also need to measure the difference of coating growth under different target-substrate distance in research, this will ask the pivoted frame of vacuum plating unit can regulate arbitrarily the distance of workpiece distance cathode target surface and fix it.For the workpiece that there is curved surface or complex surface, maintaining the rotation of workpiece is necessary equally, on the basis keeping above-mentioned Fixed-point Motion of A, namely realize the adjustment of target-substrate distance.
The target-substrate distance of existing vacuum plating unit pivoted frame regulates, and generally adopt and be fixed on length-adjustable cantilever by workpiece, cantilever is fixed on the transmission rod of pivoted frame.Target-substrate distance is changed by the length of cantilever.For ensureing that target-substrate distance is fixed, pivoted frame can not rotate.As describing in Fixed-point Motion of A, when adopting in this way, workpiece, without rotation, cannot realize the needs to single workpiece uniform coated.
Summary of the invention
For the problems referred to above that prior art exists, the present invention aims to provide a kind of Fixed-point Motion of A that not only can realize workpiece, and can specified target cardinal distance arbitrarily, and ensure planetary rotation and the rotation of workpiece, also can realize the multifunctional vacuum Revolving rack of film-plating machine of use of freely arranging in pairs or groups separately or arbitrarily of large revolution, planetary rotation and rotation three kinds of rotating manners, to meet the multiple application target of vacuum plating unit.
For achieving the above object, the technical scheme taked of the present invention is as follows:
A kind of multifunctional vacuum Revolving rack of film-plating machine, comprise main frame body part, driving part and workpiece rotating element, described workpiece rotating element can be driven by described driving part and rotate, wherein,
Described main frame body part comprise along the vertical direction parallel opposed successively top board, cog and lower gear, described cog and described lower gear pass through support unit supports, and, describedly to cog and described lower gear all has for being driven by drive unit thus cogging described in making or external toothing tooth that lower gear rotates, described support unit is provided with cog described in optionally locking or the Lock Part of described lower gear, described in cog and to be connected by multiple union lever with between described top board;
Described driving part comprise multiple by bearing and described top board and described in cog the transmission rod be connected, described lower gear is also provided with internal messing tooth, cog described in each described transmission rod extends to below and be provided with the lower transmissioning gear be meshed with described internal messing tooth.
As a kind of preferred version, the quantity of described support unit is three covers, the described support unit of three covers along described in cog and the circumferential direction of described lower gear is uniformly distributed.
As further preferred version, described support unit comprises the main part vertically arranged, described main part is provided with two extension extended below described cog below and described lower gear respectively, and the described extension below cog described in being positioned at below and described lower gear is provided with steady bearing.
As a kind of preferred version, described Lock Part is two lock levers be arranged at movably on described main part, lock lever described in one of them can by the external toothing tooth cogged described in mobile snapping in, and lock lever described in another can by the mobile external toothing tooth snapping in described lower gear.
As a kind of preferred version, on described transmission rod described top board and described cog between location interval be provided with two cantilevers, the described transmission rod between described two cantilevers is provided with upper transfer gear, described workpiece rotating element comprises the support bar between the end being arranged at described two cantilevers, described support bar is set with the follower gear engaged with described upper transfer gear, on described support bar, the position be positioned at above described follower gear is also set with planetary plate, the sun gear being placed in described support bar is provided with in the below of described planetary plate, at the periphery of described planetary plate, bearing is provided with the vertical workpiece rotating shaft of multiple and described planetary plate, one end of described workpiece rotating shaft is positioned at above described planetary plate, for installing described workpiece, the other end to extend to below described planetary plate and is provided with the satellite gear engaged with described sun gear, position between described follower gear and described planetary plate is provided with linkage system, and described linkage system optionally connects described follower gear with described planetary plate or be connected described follower gear and described sun gear.
As further preferred version, the quantity of described linkage system is three groups, and described in three groups, linkage system is uniformly distributed along the circumferential direction of described planetary plate.
As further preferred version, described linkage system comprises the base portion be fixed on described follower gear, and described base portion is provided with the first pin be connected with described planetary plate by described follower gear by movement and the second pin be connected with described sun gear by described follower gear by movement.
As further preferred version, each described cantilever is set on described transmission rod all rotationally.
Compared with prior art, multifunctional vacuum Revolving rack of film-plating machine provided by the invention, has following essential distinction and significance progress:
1) dynamic tooth is no longer fixing with the position and function of determining tooth, but can exchange, this changes existing vacuum plating unit pivoted frame from principle and transfers basic rotating manner to grand duke, to revolve round the sun greatly originally, planetary rotation will be separated with workpiece rotation, achieve any collocation between large revolution, planetary rotation, workpiece rotation, especially achieve without the Fixed-point Motion of A under large revolution prerequisite, workpiece any point can stop on large orbital path, makes the impact of each position of research on coating growth become possibility.
2) regulated by cantilever, target-substrate distance can electrodelessly regulate, and especially in conjunction with Fixed-point Motion of A, target-substrate distance can also be accurately fixing, keep simultaneously planetary rotation and rotation unaffected, make realization become possibility to single workpiece uniform coated.
3) workpiece rotating element adopts above-mentioned linkage system control mode, achieves workpiece and rotates around the rotation of himself axis or the axis around planetary plate, facilitate the plated film situation of observing workpiece.
In a word, multifunctional vacuum Revolving rack of film-plating machine provided by the present invention, not only can realize the Fixed-point Motion of A of workpiece, and can specified target cardinal distance arbitrarily, and ensure planetary rotation and the rotation of workpiece, also can realize the use of freely arranging in pairs or groups separately or arbitrarily of large revolution, planetary rotation and rotation three kinds of rotating manners, the multiple application target of vacuum plating unit can be met, facilitate the research and development to technique for vacuum coating, there is extremely strong using value.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing vacuum plating unit pivoted frame;
Fig. 2 is the structural representation of a kind of multifunctional vacuum Revolving rack of film-plating machine provided by the present invention;
Fig. 3 is the structural representation of main frame body part in Fig. 2;
Fig. 4 is the schematic enlarged-scale view of support unit in Fig. 3;
Fig. 5 is the structural representation of driving part in Fig. 2;
Fig. 6 is the structural representation of driving part in Fig. 2, which further illustrates driving part and top board and relation between cogging;
Fig. 7 is the structural representation of workpiece rotating element in Fig. 2;
Fig. 8 is the schematic diagram adopting multifunctional vacuum Revolving rack of film-plating machine of the present invention to carry out target-substrate distance adjustment.
Embodiment
In order to make the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with embodiment and accompanying drawing, the present invention is described in more detail.
For ease of describing, in the present invention, define following term, except special instruction, this term is applicable to each several part of the present invention.
Large revolution: refer to that gear or workpiece rotate the rotation mode of central axis of rack device;
Planetary rotation: refer to the rotation mode around transmission rod axis;
Rotation: refer to gear, transmission rod or the workpiece rotation mode around own axes;
Fixed-point Motion of A: the strict workpiece that is defined as does not exist other rotating manner except rotation, general reference is without the rotating manner set on large revolution basis herein.
Target-substrate distance: the slant range of working face to workpiece surface referring to plated film negative electrode.
Shown in Figure 2: a kind of multifunctional vacuum Revolving rack of film-plating machine 1 provided by the present invention comprises main frame body part 11, driveline components 12 and workpiece rotating element 13, main frame body part 11 can be driven by drive unit (not shown) and rotate; Driveline components 12 coordinates with main frame body part 11, and receives the power from main frame body part 11; Workpiece rotating element 13 is for controlling the rotation of workpiece to realize plated film.Rotary frame device 1 is installed in vacuum chamber (not shown, to be generally barrel-shaped), and rotary frame device 1 entirety is made up to ensure the diathermanous of workpiece of the metal with good heat conductive character, is specifically as follows 304 stainless steels etc.
Shown in Figure 3: described main frame body part 11 comprises lower gear 111, cog 112 and top board 115, three's parallel opposed (the two adjacent end face is relative), lower gear 111 has external toothing tooth and internal messing tooth simultaneously, cog 112 and have external toothing tooth, lower gear 111 112 all can be driven by drive unit and realize rotating with cogging.Lower gear 111 and cogging 112 is supported by support unit 113, and support unit 113 is preferably many covers, as illustrated in the drawing three covers, and along lower gear 111 and cog 112 circumferential direction be uniformly distributed.
Shown in Figure 4, as a kind of optimal way, described support unit 113 comprises a main part 1134 vertically arranged, main part 1134 is provided with two extension 1135 perpendicular to main part 1134, two extension 1135 respectively towards the below of lower gear 111 and cog 112 below extend, and each extension 1135 is provided with steady bearing 1131 so that respectively to lower gear 111 and 112 supports ensure lower gear 111 and cog 112 can normal rotation of cogging.Support unit 113 is provided with the Lock Part in order to optionally to lock cog 112 or lower gear 111, namely lower gear 111 can lock by this Lock Part, drive by drive unit cog 112 rotations or 112 lockings that will cog, drive lower gear 111 to rotate by drive unit.Lock Part can be accomplished in several ways, particularly, in the present invention, Lock Part is be arranged at lock lever 1132 on the main part 1134 of support unit 113 and lock lever 1133, lock lever 1133 and lock lever 1132 are arranged in the top of two steady bearings 1131 respectively, wherein lock lever 1133 is just to the external toothing tooth of lower gear 111, lock lever 1132 just to cog 112 external toothing tooth, when lock lever 1133, 1132 towards close lower gear 111, cog 112 side when moving, lower gear 111 can be snapped in or cog in 112, when snapping in, corresponding gear can not rotate.The movement of lock lever 1132,1133 can be moved for spiral, by arranging outside screw at the middle portion of lock lever 1132,1133 and arrange threaded hole on main part 1134.When lock lever 1132 inwardly precession withstand and cog 112, when lock lever 1133 outwards screws out, cogging 112 is locked, and now, lower gear 111 can be driven by drive unit and rotate; Otherwise, when lower gear 111 is withstood in the inside precession of lock lever 1133, when lock lever 1132 outwards screws out, lower gear 111 is locked, now, cog and 112 can be driven by drive unit and rotate, lower gear 111 can be realized like this and cog 112 one of them rotate the function of a locking (maintaining static).For ensureing locking force, the end of lock lever 1132,1133 is taper.Cog between 112 with top board 115 and be connected by three union levers 114, three union levers 114 are uniformly distributed along the circumferential direction of cog 112 and top board 115, and three union levers 114 are mutually 120 ° of angles.
Shown in Fig. 2, Fig. 5, Fig. 6: described driving part 12 is arranged on and cogs between 112 and top board 115, comprise transmission rod 123, two cantilevers 124, upper transfer gear 122 and lower transmissioning gears 121; Transmission rod 123 112 to be connected, so that transmission rod 123 can rotate relative to the two with top board 115 and cogging respectively by bearing support 125, bearing support 126; The lower end of transmission rod 123 extends to and to cog below 112 and to be provided with the lower transmissioning gear 121 be meshed with the internal messing tooth of lower gear 111.Workpiece rotating element 13 can directly be arranged at above upper transfer gear 122, also can be connected with upper transfer gear 122 by other type of drive.
Shown in Figure 6: its viewing angle is different from Fig. 5, and with the addition of partial association parts.Bearing support 125 is fixedly mounted on top board 115, bearing support 126 is fixedly mounted on and cogs on 112, transmission rod 123 is through bearing support 125 and bearing support 126, transmission rod 123 lower end is fixedly installed lower transmissioning gear 121, and lower transmissioning gear 121 and transmission rod 123 all can rotate around the axis of transmission rod 123.Upper transfer gear 122 is fixed on transmission rod 123, also rotates with transmission rod 123 and synchronous rotation.Upper transfer gear 122 shown in Fig. 5, Fig. 6 is two, arrange, but the position of upper transfer gear 122 and quantity all can adjust according to demand, and be not limited only to the situation in Fig. 5, Fig. 6 along transmission rod 123 above-below direction.
Continue see Fig. 6, two cantilevers 124 are installed in parallel in respectively and cog in 112 and corresponding two planes of top board 115, and cantilever 124 can lock around the arbitrarily angled rotation of transmission rod 123.For sake of convenience, Fig. 5 omits bearing support 125 and bearing support 126 and installs the top board 115 at place and cog 112.Cantilever 124 is only set on transmission rod 123, and cantilever 124 and transmission rod 123 do not exist fixed relationship, in the present invention, workpiece rotating element 13 is installed between cantilever, but it should be noted that, workpiece rotating element must not be installed between cantilever, as long as the needs of plated film can be met.
The installation quantity of driving part 12, by designing decision, has been reserved three cover installation sites, has been arranged at equal intervals with 120 ° in the present invention.As required and practical situation, it is installed quantity and can change, and is not limited only to situation shown in this example, but its to arrange be all similar to the mode at circumference 360 ° of decile intervals.
Shown in Fig. 2, Fig. 5, Fig. 7: described workpiece rotating element 13 is arranged between two cantilevers 124, and workpiece rotating element 13 comprises support bar 135, follower gear 131, planetary plate 134, sun gear 133, satellite gear 132 and linkage system 136.The quantity of the linkage system 136 shown in figure and satellite gear 132 is three groups, and all arranges at equal intervals with 120 ° around support bar 135.Support bar 135 is fixedly mounted between two cantilevers 124, follower gear 131 is placed on support bar 135 (be namely contained on support bar 135 by bearing housing, so as can relative support bar 135 rotate), follower gear 131 engages with upper transfer gear 122.Sun gear 133 and planetary plate 134 are all placed on support bar 135 and (are namely contained on support bar 135 by bearing housing, to relatively rotate), both all can rely on linkage system 136 and follower gear 131 connection for transmission to realize rotating, also or be locked on support bar 135.Concrete linked manner can see the partial enlarged drawing on the right side of Fig. 7, and it represents a set of linkage system 136 and associated member thereof.Linkage system 136 is fixed on follower gear 131, and linkage system 136 comprises the base portion 1363 that is directly fixed on follower gear 131 and is arranged on base portion 1363, for the first pin 1361 of connected row astrolabe 134 and the second pin 1362 for being connected sun gear 133.When the first pin 1361 shifts out and connected row astrolabe 134 and the second pin 1362 do not connect sun gear 133, follower gear 131 and planetary plate 134 achieve interlock; When the second pin 1362 connect sun gear 133 and the first pin 1361 not connected row astrolabe 134 time, follower gear 131 and sun gear 133 achieve interlock.Like this, rely on the action of the first pin 1361 and the second pin 1362, follower gear 131 achieves the interlock with planetary plate 134 and sun gear 133 respectively.Certainly, above-mentioned linkage system is only illustration, and other the device that can realize this function can be selected to realize.Multiple workpiece rotating shaft 137 vertical with planetary plate is provided with by bearing (not indicating in figure) at the periphery of planetary plate 134, workpiece rotating shaft 137 one end is positioned at above planetary plate 134, for installing workpiece by work rest (not indicating in figure), the other end extends to the satellite gear 132 also arranging below planetary plate 134 and engage with sun gear 133.Except support bar 135, the remaining part of workpiece rotating element 13 relies on follower gear 131 and the meshing relation of upper transfer gear 122, installs with the latter's one_to_one corresponding.The upper-lower position of each parts and quantity all can adjust according to demand, and what represent in Fig. 7 is the arrangement mode of the upper transfer gear 122 of corresponding diagram 5.Therefore, except having a support bar 135, there is the component combination of two cover workpiece rotating elements 13, but practical situation comprise and are not limited to this.
Below, the specific works mode of workpiece in the present invention is described.
Embodiment one, Fixed-point Motion of A+planetary rotation+rotation
See Fig. 2, Fig. 3, Fig. 5 and Fig. 7, lock lever 1132 will cog and 112 to fix, and lower gear 111 engages with drive unit (not shown), make to cog 112 to fix, and lower gear 111 can drive and rotate by driven device.112 static owing to cogging, connected top board 115, be arranged on all can not the rotate central axis of rack device of cog driving part 12 between 112 and top board 115 and workpiece rotating element 13 and rotate, the object of Fixed-point Motion of A reached by workpiece.
Dependence lower transmissioning gear 121 engages with lower gear 111, and power is delivered to workpiece rotating element 13 via upper transfer gear 122 by driving part 12.Rely on the engagement of follower gear 131 and upper transfer gear 122, make follower gear 131 around support bar 135 rotation.Linkage system 136 links follower gear 131 and planetary plate 134, locks sun gear 133 on support bar 135 simultaneously.Like this, the planetary rotation that planetary plate 134 drives satellite gear 132 to realize around support bar 135, satellite gear 132 rotation simultaneously.Finally, the workpiece be arranged in workpiece rotating shaft 137 achieves so-called Fixed-point Motion of A+planetary rotation+rotation.
Embodiment two, Fixed-point Motion of A+rotation
With embodiment one, locking cogs 112, drives lower gear 111, makes to cog 112 to fix, and lower gear 111 rotates, and realizes Fixed-point Motion of A, driving part 12 by transmission of power to follower gear 131.
Different from embodiment one, linkage system 136 links follower gear 131 and sun gear 133, and lock line astrolabe 134 is on support bar 135 simultaneously.Like this, all there is not the planetary rotation around support bar 135 in planetary plate 134 and satellite gear 132.Meanwhile, because sun gear 133 engages with satellite gear 132, satellite gear 132 is made to keep rotation.Finally, the workpiece be arranged in workpiece rotating shaft 137 achieves Fixed-point Motion of A+rotation.
The accurate adjustment of embodiment three, target-substrate distance
Based on the Fixed-point Motion of A+rotation of embodiment two, the adjustment mode of target-substrate distance is described.See Fig. 2, Fig. 5 and Fig. 8, two cantilevers 124 of driving part 12 rotate to regulate setting angle around transmission rod 123.Fig. 8, from the overhead view of rotary frame device 1, illustrates two kinds of setting angles of cantilever 124, wherein visible lines astrolabe 134 and outermost satellite gear 132.Long and short dash line circle 203 represents cantilever 124 in different setting angle situation, satellite gear 132 axle center at trade union college place do large revolution form track.It should be noted that, long and short dash line circle 203 does not mean that workpiece one fixes on and does large revolution, just shows that workpiece can rest on grand duke and to go through transition optional position on mark.Rely on the combination with above-mentioned embodiment two, the radius of broken circle 203 can change arbitrarily.Fig. 8 illustrates the two kinds of long and short dash line circles 203 formed corresponding to different cantilever 124 setting angles.In theory, the radius of broken circle 203 accurately can change doubling in cantilever 124 length range.
Target position in coating equipment can on vacuum chamber sidewall 200, and installation site is 201, also can in the central authorities 202 of vacuum chamber.So, the change of target-substrate distance can characterize by the radius change of long and short dash line circle 203.In fig. 8, when negative electrode is arranged on vacuum chamber sidewall 201 position, target-substrate distance equals sidewall installation position 201 deducts long and short dash line circle 203 radius apart from the length at vacuum chamber center.Larger annular radii means less target-substrate distance; When negative electrode is arranged on the central authorities 202 of vacuum chamber, annular radii then becomes target-substrate distance.Now, larger radius means larger target-substrate distance.So, target-substrate distance not only can be fixed, can also be accurately adjustable in very large scope.
In above-mentioned discussion, acquiescence vacuum chamber sidewall 200 is barrel-shaped.In reality, vacuum chamber sidewall 200 can be designed to various shape, is not limited in the explanation of this example.When vacuum chamber side exists other shape, still can weigh target-substrate distance with the radius of long and short dash line circle 203.
Finally be necessary described herein, above display and describe ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand, and the present invention is not restricted to the described embodiments, and based on discussing other change that pivoted frame principle does herein, as long as still can reach above-mentioned pivoted frame function, all should be included in the scope protected herein.About each several part of rotary frame device, without departing from the spirit and scope of the present invention, can make multiple changes and improvements, these changes and improvements all will fall in protection domain of the presently claimed invention.
Claims (7)
1. a multifunctional vacuum Revolving rack of film-plating machine, comprises main frame body part, driving part and workpiece rotating element, and described workpiece rotating element can be driven by described driving part and rotate, and it is characterized in that:
Described main frame body part comprise along the vertical direction parallel opposed successively top board, cog and lower gear, described cog and described lower gear pass through support unit supports, and, describedly to cog and described lower gear all has for being driven by drive unit thus cogging described in making or external toothing tooth that lower gear rotates, described support unit is provided with cog described in optionally locking or the Lock Part of described lower gear, described in cog and to be connected by multiple union lever with between described top board;
Described driving part comprise multiple by bearing and described top board and described in cog the transmission rod be connected, described lower gear is also provided with internal messing tooth, cog described in each described transmission rod extends to below and be provided with the lower transmissioning gear be meshed with described internal messing tooth;
On described transmission rod described top board and described cog between location interval be provided with two cantilevers, the described transmission rod between described two cantilevers is provided with upper transfer gear, described workpiece rotating element comprises the support bar between the end being arranged at described two cantilevers, described support bar is set with the follower gear engaged with described upper transfer gear, on described support bar, the position be positioned at above described follower gear is also set with planetary plate, the sun gear being placed in described support bar is provided with in the below of described planetary plate, at the periphery of described planetary plate, bearing is provided with the vertical workpiece rotating shaft of multiple and described planetary plate, one end of described workpiece rotating shaft is positioned at above described planetary plate, for installing workpiece, the other end to extend to below described planetary plate and is provided with the satellite gear engaged with described sun gear, position between described follower gear and described planetary plate is provided with linkage system, and described linkage system optionally connects described follower gear with described planetary plate or be connected described follower gear and described sun gear.
2. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1, is characterized in that: the quantity of described support unit is three covers, the described support unit of three covers along described in cog and the circumferential direction of described lower gear is uniformly distributed.
3. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1 or 2, it is characterized in that: described support unit comprises the main part vertically arranged, this main part is provided with two extension extended below described cog below and described lower gear respectively, and the described extension below cog described in being positioned at below and described lower gear is provided with steady bearing.
4. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 3, it is characterized in that: Lock Part is two lock levers that can be arranged at movably on described main part, lock lever described in one of them can by the external toothing tooth cogged described in mobile snapping in, and lock lever described in another can by the mobile external toothing tooth snapping in described lower gear.
5. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1, is characterized in that: the quantity of described linkage system is three groups, and described in three groups, linkage system is uniformly distributed along the circumferential direction of described planetary plate.
6. the multifunctional vacuum Revolving rack of film-plating machine as described in claim 1 or 5, it is characterized in that: described linkage system comprises the base portion be fixed on described follower gear, described base portion is provided with first pin that can be connected with described planetary plate by described follower gear by movement and second pin that can be connected with described sun gear by described follower gear by movement.
7. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1, is characterized in that: each described cantilever all can be set on described transmission rod rotationally.
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| JPH0456766A (en) * | 1990-06-22 | 1992-02-24 | Fuji Photo Film Co Ltd | Vacuum conveyor |
| CN101736309A (en) * | 2009-12-18 | 2010-06-16 | 广州市光机电技术研究院 | Horizontal revolution and rotation mechanism for vacuum coating |
| CN201567365U (en) * | 2009-11-17 | 2010-09-01 | 深圳市振恒昌实业有限公司 | Novel multipurpose film coating machine rotating frame |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN203569179U (en) * | 2013-12-02 | 2014-04-30 | 上海沃家真空设备科技有限公司 | Rotating stand device of vacuum coating machine |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0456766A (en) * | 1990-06-22 | 1992-02-24 | Fuji Photo Film Co Ltd | Vacuum conveyor |
| CN201567365U (en) * | 2009-11-17 | 2010-09-01 | 深圳市振恒昌实业有限公司 | Novel multipurpose film coating machine rotating frame |
| CN101736309A (en) * | 2009-12-18 | 2010-06-16 | 广州市光机电技术研究院 | Horizontal revolution and rotation mechanism for vacuum coating |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN203569179U (en) * | 2013-12-02 | 2014-04-30 | 上海沃家真空设备科技有限公司 | Rotating stand device of vacuum coating machine |
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| CN103590006A (en) | 2014-02-19 |
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