CN103590006A - Multifunctional vacuum-coating machine rotating rack - Google Patents
Multifunctional vacuum-coating machine rotating rack Download PDFInfo
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- CN103590006A CN103590006A CN201310632160.3A CN201310632160A CN103590006A CN 103590006 A CN103590006 A CN 103590006A CN 201310632160 A CN201310632160 A CN 201310632160A CN 103590006 A CN103590006 A CN 103590006A
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Abstract
The invention discloses a multifunctional vacuum-coating machine rotating rack. The multifunctional vacuum-coating machine rotating rack comprises a main rack part, a transmission part and a workpiece rotation part. The main rack part comprises a top plate, an upper gear, a lower gear, a support unit, an external meshing gear and a locking part, and the top plate, the upper gear and the lower gear are orderly and oppositely arranged in parallel along a vertical direction. The upper gear and the top plate are connected by multiple connection rods. The transmission part comprises multiple transmission rods connected to the top plate and the upper gear by bearings. The lower gear is provided with an internal meshing gear. Each one of the transmission rods extends to a position below the upper gear and is provided with a lower transmission gear engaged with the internal meshing gear. The multifunctional vacuum-coating machine rotating rack realizes workpiece rotation around a fixed point, freely assigns a target-substrate distance, guarantees workpiece planet rotation and autorotation, realizes individual use and free collocation use of big revolution, planet rotation and autorotation ways, and satisfies a plurality of use purposes of a vacuum coating machine.
Description
Technical field
The present invention relates to a kind of multifunctional vacuum Revolving rack of film-plating machine, belong to vacuum coating film equipment technical field.
Background technology
Vacuum plating unit is used in a vacuum to workpiece plated film, and the vacuum chamber that vacuum plating unit comprises the process chamber that is formed in workpiece, is provided with pivoted frame in vacuum chamber, and this pivoted frame can drive rotation by drive unit, thereby realizes the rotation of workpiece.
Referring to Fig. 1, vacuum plating unit pivoted frame 10 of the prior art comprises fixed gear 101, moving gear 102, transmitting gear 103, union lever 104, transmission rod 105 and top board 106 etc.Wherein, fixed gear 101 is fixed on the inner bottom surface of housing, remains static all the time, is formed in the engagement track of transmitting gear; Moving gear 102 is supported by the supplemental support parts (figure does not indicate) that are arranged in housing inner bottom surface, and can under the driving of drive unit (not indicating in figure), around its axis, rotate; Top board 106 is positioned at moving gear 102 tops, and connect by a plurality of union levers 104, between top board 106 and moving gear 102, be provided with a plurality of transmission rods 105, each transmission rod 105 is provided with bearing with the junction of top board 106 and moving gear 102, so that transmission rod 105 can rotate, the lower end of transmission rod 105 extends to the below of moving gear 102 and transmitting gear 103 is set, and transmitting gear 103 is arranged in the periphery of fixed gear 101.In figure, the combination of transmitting gear 103 and transmission rod 105 is totally 8, is called 8 axles and rotates.In reality, be not limited only to 8 axles.If additional another set of transmission rig, also can realize the rotation of workpiece on transmission rod 105 simultaneously.
The principle of work of existing vacuum plating unit pivoted frame is: drive unit drives moving gear 102 to rotate, moving gear 102 drives with the transmitting gear 103 of fixed gear 101 engagements and rotates, make transmitting gear 103 and transmission rod 105 wraparounds turn the pivoted frame center rotating of shape, keep transmitting gear 103 and transmission rod 105 to rotate around the axis of transmission rod 105 simultaneously.Finally, adopt workpiece fixing or that alternate manner transmission is combined to realize around pivoted frame center rotating with transmission rod 105, or realize workpiece rotation by transmission rig.
Visible, the moving gear 102 in existing vacuum plating unit pivoted frame and fixed gear 101 positions and function are fixed, and the realization that a series of workpiece rotates is all based upon moving gear 102 and completes on the basis of large revolution with nutating gear 103 and transmission rod 105.Because workpiece is arranged on transmission rod 105, therefore, in any rotating manner, the rotate rotation at frame center of workpiece all can not stop.
In scientific research or process exploitation stage, carry out quantitative examination to affecting the key parameter of rete.As the density of plasma body and temperature and target-substrate distance etc.In research, often need the impact of these parameters of quantitative examination on coating growth.
Plasma density and temperature are the key factors that determines coating growth, and due to the arrangement mode of plated film negative electrode in vacuum chamber and the plasma body feature with range attenuation, the distribution of plasma body in vacuum chamber is inhomogeneous.In other words, workpiece is in vacuum chamber during different positions, and coating growth situation there are differences.The impact of the research plasma body of wanting accurate quantification on coating growth, must make workpiece can reach in vacuum chamber different positions and can be fixed on this position; , for workpiece membrane uniformity, consider, the rotation of workpiece need guarantee unaffected meanwhile.Simplified summary, the pivoted frame of vacuum plating unit need to be realized Fixed-point Motion of A.
By above narrating, the rotating function of existing vacuum plating unit pivoted frame generally transfers basis to grand duke.Like this, workpiece changes all the time at vacuum indoor location, and Fixed-point Motion of A can not be realized, and quantitative examination plasma distribution becomes impossible to the impact of coating growth.
In addition, target-substrate distance is another key parameter that affects film performance, and the position relationship of target is very large on plated film homogeneity and rate of film build impact.In research, also need to measure the difference of coating growth under different target-substrate distances, this will ask the pivoted frame of vacuum plating unit can regulate arbitrarily workpiece apart from the distance of cathode target surface and fix it.For the workpiece that has curved surface or complex surface, the rotation that maintains workpiece is necessary equally, on the basis of the above-mentioned Fixed-point Motion of A of maintenance, realizes the adjusting of target-substrate distance.
The target-substrate distance of existing vacuum plating unit pivoted frame regulates, and generally adopts workpiece is fixed on length-adjustable cantilever, and cantilever is fixed on the transmission rod of pivoted frame.Length by cantilever changes target-substrate distance.For guaranteeing that target-substrate distance fixes, pivoted frame can not rotate.As the narration in Fixed-point Motion of A, while adopting in this way, workpiece, without rotation, cannot be realized the needs to single workpiece uniform coated.
Summary of the invention
The problems referred to above that exist for prior art, the present invention aims to provide a kind of Fixed-point Motion of A that not only can realize workpiece, and specified target cardinal distance arbitrarily, and guarantee planetary rotation and the rotation of workpiece, also can realize the multifunctional vacuum Revolving rack of film-plating machine of the use of freely arranging in pairs or groups separately or arbitrarily of large revolution, planetary rotation and three kinds of rotating manners of rotation, to meet the multiple application target of vacuum plating unit.
For achieving the above object, the technical scheme that the present invention takes is as follows:
A Revolving rack of film-plating machine, comprises main frame body part, driving part and workpiece rotating element, and described workpiece rotating element can be driven and be rotated by described driving part, wherein,
Described main frame body partly comprise along the vertical direction parallel opposed successively top board, cog and lower gear, described cogging passed through support unit supports with described lower gear, and, described cog and thereby described lower gear all has for driving by drive unit and cogs described in making or external toothing tooth that lower gear rotates, on described support unit, be provided with in order to described in locking optionally and cog or the Lock Part of described lower gear, described in cog with described top board between by a plurality of union levers, be connected;
Described driving part comprise a plurality of by bearing and described top board and described in the transmission rod that cogs and be connected, described lower gear is also provided with interior engaging tooth, cog described in extending to below be provided with the lower transmissioning gear being meshed with described interior engaging tooth of transmission rod described in each.
As a kind of preferred version, the quantity of described support unit is three covers, the described support unit of three covers along described in cog and the circumferential direction of described lower gear is uniformly distributed.
As further preferred version, described support unit comprises the main part of vertical setting, described main part is provided with two respectively towards the extension of described cog below and the extension of described lower gear below, in the described extension of cog described in being positioned at below and described lower gear below, is provided with steady bearing.
As a kind of preferred version, described Lock Part is for being arranged at movably two lock levers on described main part, the external toothing tooth that described in one of them, lock lever cogs described in can snapping in by movement, described in another, lock lever can snap in by movement the external toothing tooth of described lower gear.
As a kind of preferred version, on described transmission rod described top board and described in location interval between cogging be provided with two cantilevers, on the described transmission rod between described two cantilevers, be provided with upper transfer gear, described workpiece rotating element comprises the support bar between the end that is arranged at described two cantilevers, on described support bar, be set with the follower gear with described upper transfer gear engagement, the position being positioned on described support bar above described follower gear is also set with planetary plate, below described planetary plate, be provided with the sun gear that is placed in described support bar, periphery at described planetary plate is provided with by bearing the workpiece rotating shaft that a plurality of and described planetary plate is vertical, one end of described workpiece rotating shaft is positioned at described planetary plate top, be used for installing described workpiece, the other end extends to described planetary plate below and is provided with the satellite gear meshing with described sun gear, position between described follower gear and described planetary plate is provided with linkage system, and described linkage system optionally connects described follower gear with described planetary plate or is connected described follower gear and described sun gear.
As further preferred version, the quantity of described linkage system is three groups, and described in three groups, linkage system is uniformly distributed along the circumferential direction of described planetary plate.
As further preferred version, described linkage system comprises the base portion being fixed on described follower gear, is provided with and can and can passes through mobile the second pin that described follower gear is connected with described sun gear by mobile the first pin that described follower gear is connected with described planetary plate on described base portion.
As further preferred version, described in each, cantilever is all set on described transmission rod rotationally.
Compared with prior art, multifunctional vacuum Revolving rack of film-plating machine provided by the invention, has following essential distinction and significance progress:
1) moving tooth is no longer fixing with position and the function of determining tooth, but can exchange, this has changed existing vacuum plating unit pivoted frame from principle and has transferred basic rotating manner to grand duke, originally that revolution greatly, planetary rotation is separated with workpiece rotation, realized any collocation between large revolution, planetary rotation, workpiece rotation, especially realized without the Fixed-point Motion of A under large revolution prerequisite, workpiece can any point stop on large revolution path, and making to study each position becomes possibility to the impact of coating growth.
2) by cantilever, regulate, target-substrate distance can electrodelessly regulate, and especially in conjunction with Fixed-point Motion of A, target-substrate distance can also be accurately fixing, keeps planetary rotation and rotation unaffected simultaneously, and making to realize becomes possibility to single workpiece uniform coated.
3) workpiece rotating element adopts above-mentioned linkage system control mode, has realized workpiece and has rotated or rotate around the axis of planetary plate around himself axis, has facilitated the plated film situation of observing workpiece.
In a word, multifunctional vacuum Revolving rack of film-plating machine provided by the present invention, not only can realize the Fixed-point Motion of A of workpiece, and specified target cardinal distance arbitrarily, and guarantee planetary rotation and the rotation of workpiece, and also can realize the use of freely arranging in pairs or groups separately or arbitrarily of large revolution, planetary rotation and three kinds of rotating manners of rotation, can meet the multiple application target of vacuum plating unit, facilitate the research and development to technique for vacuum coating, there is extremely strong using value.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing vacuum plating unit pivoted frame;
Fig. 2 is the structural representation of a kind of multifunctional vacuum Revolving rack of film-plating machine provided by the present invention;
Fig. 3 is the structural representation of main frame body part in Fig. 2;
Fig. 4 is the structure enlarged view of support unit in Fig. 3;
Fig. 5 is the structural representation of driving part in Fig. 2;
Fig. 6 is the structural representation of driving part in Fig. 2, its further show driving part and top board and cog between relation;
Fig. 7 is the structural representation of workpiece rotating element in Fig. 2;
Fig. 8 is the schematic diagram that adopts multifunctional vacuum Revolving rack of film-plating machine of the present invention to carry out target-substrate distance adjustment.
Embodiment
In order to make the object, technical solutions and advantages of the present invention clearer, below in conjunction with embodiment and accompanying drawing, the present invention is described in more detail.
For ease of describing, in the present invention, following term is defined, except special instruction, this term is applicable to each several part of the present invention.
Large revolution: refer to the rotate rotation mode of central axis of rack device of gear or workpiece;
Planetary rotation: refer to the rotation mode around transmission rod axis;
Rotation: refer to that gear, transmission rod or workpiece are around the rotation mode of self axis;
Fixed-point Motion of A: the strict workpiece that is defined as does not exist other rotating manner except rotation, general reference is without the rotating manner set on large revolution basis herein.
Target-substrate distance: refer to that the working face of plated film negative electrode is to the slant range of workpiece surface.
Shown in Figure 2: a kind of multifunctional vacuum Revolving rack of film-plating machine 1 provided by the present invention comprises main frame body part 11, transmission system part 12 and workpiece rotating element 13, main frame body part 11 can be driven and be rotated by drive unit (not shown); Transmission system part 12 coordinates with main frame body part 11, and receives the power from main frame body part 11; Workpiece rotating element 13 is for controlling the rotation of workpiece to realize plated film.Rotary frame device 1 is installed in vacuum chamber (not shown, to be generally barrel-shaped), and rotary frame device 1 integral body is made to guarantee the diathermanous of workpiece by the metal with good heat conductive character, is specifically as follows 304 stainless steels etc.
Shown in Figure 3: described main frame body part 11 comprises lower gear 111, cog 112 and top board 115, three's parallel opposed (the two adjacent end face is relative), lower gear 111 has external toothing tooth and interior engaging tooth simultaneously, cog 112 and have external toothing tooth, lower gear 111 112 all can be driven and be realized rotation by drive unit with cogging.Lower gear 111 and cogging 112 supports by support unit 113, and support unit 113 is preferably many covers, three covers as shown in FIG., and be uniformly distributed along lower gear 111 and 112 the circumferential direction of cogging.
Shown in Figure 4, as a kind of optimal way, described support unit 113 comprises a main part 1134 vertically arranging, main part 1134 is provided with two perpendicular to the extension 1135 of main part 1134, two extension 1135 are extended towards the below of lower gear 111 and 112 the below of cogging respectively, and in each extension 1135, are provided with steady bearing 1131 so that respectively to lower gear 111 and 112 supports guarantee lower gear 111 and cog 112 can normal rotation of cogging.On support unit 113, be provided with in order to locking optionally and cog 112 or the Lock Part of lower gear 111, this Lock Part can be by lower gear 111 lockings, by drive unit, drive 112 rotations that cog, or 112 lockings that will cog, by drive unit, drive lower gear 111 to rotate.Lock Part can be accomplished in several ways, particularly, in the present invention, Lock Part is lock lever 1132 and the lock lever 1133 being arranged on the main part 1134 of support unit 113, lock lever 1133 and lock lever 1132 are arranged in respectively the top of two steady bearings 1131, wherein lock lever 1133 is over against the external toothing tooth of lower gear 111, lock lever 1132 is over against cogging 112 external toothing tooth, when lock lever 1133, 1132 towards close lower gear 111, while cogging a side shifting of 112, can snap in lower gear 111 or cog in 112, while snapping in, corresponding gear can not rotate.The movement of lock lever 1132,1133 can be moved for spiral, by the middle portion at lock lever 1132,1133, outside screw is set and on main part 1134, threaded hole is set.When the inside precession of lock lever 1132, withstand and cog 112, when lock lever 1133 outwards screws out, cog 112 locked, now, lower gear 111 can be driven and be rotated by drive unit; Otherwise, when lower gear 111 is withstood in the inside precession of lock lever 1133, when lock lever 1132 outwards screws out, lower gear 111 is locked, now, cogging 112 can be driven and be rotated by drive unit, can realize like this lower gear 111 and cog 112 one of them rotate the function of lockings (maintaining static).For guaranteeing locking force, the end of lock lever 1132,1133 is taper.Cog 112 with top board 115 between by three union levers 114, be connected, three union levers 114 along cog 112 and the circumferential direction of top board 115 be uniformly distributed, three union levers 114 are mutually 120 ° of angles.
Shown in Fig. 2, Fig. 5, Fig. 6: described driving part 12 be arranged on cog 112 and top board 115 between, comprise transmission rod 123, two cantilevers 124, upper transfer gear 122 and lower transmissioning gears 121; Transmission rod 123 by bearing support 125, bearing support 126 respectively with top board 115 and cog and 112 be connected, so that transmission rod 123 can rotate with respect to the two; The lower end of transmission rod 123 extends to and cogs 112 belows and be provided with the lower transmissioning gear 121 being meshed with the interior engaging tooth of lower gear 111.Workpiece rotating element 13 can directly be arranged at upper transfer gear 122 tops, also can be connected with upper transfer gear 122 by other type of drive.
Shown in Figure 6: its viewing angle is different from Fig. 5, and added partial association parts.Bearing support 125 is fixedly mounted on top board 115, bearing support 126 is fixedly mounted on and cogs on 112, transmission rod 123 is through bearing support 125 and bearing support 126, transmission rod 123 lower ends are fixedly installed lower transmissioning gear 121, and lower transmissioning gear 121 and transmission rod 123 all can rotate around the axis of transmission rod 123.Upper transfer gear 122 is fixed on transmission rod 123, also with transmission rod 123, rotates and synchronous rotation.Upper transfer gear 122 shown in Fig. 5, Fig. 6 is two, arrange, but the position of upper transfer gear 122 and quantity all can adjust according to demand, and be not limited only to the situation in Fig. 5, Fig. 6 along transmission rod 123 above-below directions.
Continuation is referring to Fig. 6, two cantilevers 124 be installed in parallel in respectively cog 112 and corresponding two planes of top board 115 on, cantilever 124 can be around the arbitrarily angled rotation of transmission rod 123 locking.For sake of convenience, Fig. 5 has omitted the top board 115 at bearing support 125 and bearing support 126 installation places and has cogged 112.Cantilever 124 is only set on transmission rod 123, and cantilever 124 and transmission rod 123 do not exist fixed relationship, in the present invention, workpiece rotating element 13 is installed between cantilever, but it should be noted that, workpiece rotating element must not be installed between cantilever, as long as can meet the needs of plated film.
The installation quantity of driving part 12, by designing decision, has been reserved three cover installation sites in the present invention, with 120 °, uniformly-spaced arrange.As required and practical situation, it is installed quantity and can change, and is not limited only to situation shown in this example, but its to arrange be all similarly by the mode at 360 ° of decile intervals of circumference.
Shown in Fig. 2, Fig. 5, Fig. 7: described workpiece rotating element 13 is arranged between two cantilevers 124, and workpiece rotating element 13 comprises support bar 135, follower gear 131, planetary plate 134, sun gear 133, satellite gear 132 and linkage system 136.The quantity of the linkage system 136 shown in figure and satellite gear 132 is three groups, and all around support bar 135, with 120 °, uniformly-spaced arranges.Support bar 135 is fixedly mounted between two cantilevers 124, and follower gear 131 is placed on support bar 135 and (by bearing housing, is contained on support bar 135, to can rotate relative to support bar 135), follower gear 131 and upper transfer gear 122 engagements.Sun gear 133 and planetary plate 134 are all placed on support bar 135 and (by bearing housing, are contained on support bar 135, to relatively rotate), both all can rely on linkage system 136 and follower gear 131 connection for transmissions to rotate to realize, also or be locked on support bar 135.Concrete interlock mode can be referring to the partial enlarged drawing on Fig. 7 right side, and it represents a set of linkage system 136 and associated member thereof.Linkage system 136 is fixed on follower gear 131, linkage system 136 comprise the base portion 1363 being directly fixed on follower gear 131 and be arranged on base portion 1363, for connect the first pin 1361 of planetary plate 134 with for being connected the second pin 1362 of sun gear 133.When the first pin 1361 shifts out and connects planetary plate 134 and the second pin 1362 and do not connect sun gear 133, follower gear 131 and planetary plate 134 have been realized interlock; When the second pin 1362 connects sun gears 133 and the first pin 1361 and do not connect planetary plate 134, follower gear 131 and sun gear 133 have been realized interlock.Like this, rely on the action of the first pin 1361 and the second pin 1362, follower gear 131 has been realized respectively the interlock with planetary plate 134 and sun gear 133.Certainly, above-mentioned linkage system is only illustration, can select other the device that can realize this function to realize.Periphery at planetary plate 134 is provided with a plurality of workpiece rotating shafts 137 vertical with planetary plate by bearing (not indicating in figure), workpiece rotating shaft 137 one end are positioned at planetary plate 134 tops, for passing through work rest (figure does not indicate), workpiece is installed, the other end extends to planetary plate 134 belows and the satellite gear 132 meshing with sun gear 133 is set.Except support bar 135, the remaining part of workpiece rotating element 13 relies on the meshing relation of follower gear 131 and upper transfer gear 122, with the latter's corresponding installation one by one.The upper-lower position of each parts and quantity all can be adjusted according to demand, and what in Fig. 7, represent is the arrangement mode of the upper transfer gear 122 of corresponding diagram 5.Therefore,, except having a support bar 135, have the component combination of two cover workpiece rotating elements 13, but practical situation comprise and are not limited to this.
Below, the specific works mode of workpiece in the present invention is described.
Embodiment one, Fixed-point Motion of A+planetary rotation+rotation
Referring to Fig. 2, Fig. 3, Fig. 5 and Fig. 7, it is 112 fixing that lock lever 1132 will cog, and lower gear 111 and the engagement of drive unit (not shown) make to cog 112 fixing, and lower gear 111 can driven device drives and rotates.112 static owing to cogging, connected top board 115, be arranged on cog 112 and top board 115 between driving part 12 and can the not rotate central axis rotation of rack device of workpiece rotating element 13, workpiece is reached the object of Fixed-point Motion of A.
Rely on the engagement of lower transmissioning gear 121 and lower gear 111, driving part 12 is delivered to workpiece rotating element 13 by power via upper transfer gear 122.Rely on the engagement of follower gear 131 and upper transfer gear 122, make follower gear 131 around support bar 135 rotations.Linkage system 136 interlock follower gear 131 and planetary plates 134 lock sun gear 133 on support bar 135 simultaneously.Like this, the planetary rotation that planetary plate 134 drives satellite gear 132 to realize around support bar 135, simultaneously satellite gear 132 rotations.Finally, the workpiece being arranged in workpiece rotating shaft 137 has been realized so-called Fixed-point Motion of A+planetary rotation+rotation.
Embodiment two, Fixed-point Motion of A+rotation
With embodiment one, locking cogs 112, drives lower gear 111, makes to cog 112 fixing, and lower gear 111 rotates, and realizes Fixed-point Motion of A, driving part 12 by transmission of power to follower gear 131.
Different from embodiment one, linkage system 136 interlock follower gear 131 and sun gears 133, lock line astrolabe 134 is on support bar 135 simultaneously.Like this, all there is not the planetary rotation around support bar 135 in planetary plate 134 and satellite gear 132.Meanwhile, due to sun gear 133 and satellite gear 132 engagements, make satellite gear 132 keep rotation.Finally, the workpiece being arranged in workpiece rotating shaft 137 has been realized Fixed-point Motion of A+rotation.
The accurate adjustment of embodiment three, target-substrate distance
With the Fixed-point Motion of A of embodiment two+certainly transfer basis to, the adjustment mode of target-substrate distance is described.Referring to Fig. 2, Fig. 5 and Fig. 8, two cantilevers 124 of driving part 12 rotate to regulate setting angle around transmission rod 123.Fig. 8, from the overhead view of rotary frame device 1, has shown two kinds of setting angles of cantilever 124, wherein visible lines astrolabe 134 and outermost satellite gear 132.Long and short dash line circle 203 represents that cantilever 124 is in different setting angle situations, and workpiece is installed satellite gear 132 axle center at place and done track that large revolution forms.It should be noted that, long and short dash line circle 203 do not mean that workpiece one fixes on and does large revolution, just shows that workpiece can rest on the grand duke optional position on mark of going through transition.The combination of dependence and above-mentioned embodiment two, the radius of broken circle 203 can change arbitrarily.Fig. 8 has shown corresponding to the formed two kinds of long and short dash line circle 203 of different cantilevers 124 setting angles.In theory, the radius of broken circle 203 can accurately change in doubling cantilever 124 length ranges.
Target position in coating equipment can be on vacuum chamber sidewall 200, and installation site is 201, also can be in the central authorities 202 of vacuum chamber.So, the variation of target-substrate distance can characterize by the change in radius of long and short dash line circle 203.In Fig. 8, when negative electrode is arranged on vacuum chamber sidewall 201 position, target-substrate distance equals sidewall installation position 201 and apart from the length at vacuum chamber center, deducts the radius of long and short dash line circle 203.Larger annular radii means less target-substrate distance; When negative electrode is arranged on the central authorities 202 of vacuum chamber, annular radii becomes target-substrate distance.Now, larger radius means larger target-substrate distance.So, target-substrate distance not only can be fixed, can also be accurately adjustable in very large scope.
In above-mentioned discussion, acquiescence vacuum chamber sidewall 200 is barrel-shaped.In reality, vacuum chamber sidewall 200 can be designed to various shape, is not limited in the explanation of this example.Vacuum chamber side exists in the situation of other shape, still can weigh target-substrate distance with the radius of long and short dash line circle 203.
Finally be necessary described herein, above demonstration and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand, and the present invention is not restricted to the described embodiments, and based on other that discuss that pivoted frame principle does herein, changes, as long as still can reach above-mentioned pivoted frame function, all should be included in the scope of protecting herein.About the each several part of rotary frame device, without departing from the spirit and scope of the present invention, can make multiple changes and improvements, these changes and improvements all will fall in protection domain of the presently claimed invention.
Claims (8)
1. a multifunctional vacuum Revolving rack of film-plating machine, comprises main frame body part, driving part and workpiece rotating element, and described workpiece rotating element can be driven and be rotated by described driving part, it is characterized in that:
Described main frame body partly comprise along the vertical direction parallel opposed successively top board, cog and lower gear, described cogging passed through support unit supports with described lower gear, and, described cog and thereby described lower gear all has for driving by drive unit and cogs described in making or external toothing tooth that lower gear rotates, on described support unit, be provided with in order to described in locking optionally and cog or the Lock Part of described lower gear, described in cog with described top board between by a plurality of union levers, be connected;
Described driving part comprise a plurality of by bearing and described top board and described in the transmission rod that cogs and be connected, described lower gear is also provided with interior engaging tooth, cog described in extending to below be provided with the lower transmissioning gear being meshed with described interior engaging tooth of transmission rod described in each.
2. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1, is characterized in that: the quantity of described support unit is three covers, the described support unit of three covers along described in cog and the circumferential direction of described lower gear is uniformly distributed.
3. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1 or 2, it is characterized in that: described support unit comprises the main part of vertical setting, described main part is provided with two respectively towards the extension of described cog below and the extension of described lower gear below, in the described extension of cog described in being positioned at below and described lower gear below, is provided with steady bearing.
4. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1, it is characterized in that: described Lock Part is for being arranged at movably two lock levers on described main part, the external toothing tooth that described in one of them, lock lever cogs described in can snapping in by movement, described in another, lock lever can snap in by movement the external toothing tooth of described lower gear.
5. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 1, it is characterized in that: on described transmission rod described top board and described in location interval between cogging be provided with two cantilevers, on the described transmission rod between described two cantilevers, be provided with upper transfer gear, described workpiece rotating element comprises the support bar between the end that is arranged at described two cantilevers, on described support bar, be set with the follower gear with described upper transfer gear engagement, the position being positioned on described support bar above described follower gear is also set with planetary plate, below described planetary plate, be provided with the sun gear that is placed in described support bar, periphery at described planetary plate is provided with by bearing the workpiece rotating shaft that a plurality of and described planetary plate is vertical, one end of described workpiece rotating shaft is positioned at described planetary plate top, be used for installing described workpiece, the other end extends to described planetary plate below and is provided with the satellite gear meshing with described sun gear, position between described follower gear and described planetary plate is provided with linkage system, and described linkage system optionally connects described follower gear with described planetary plate or is connected described follower gear and described sun gear.
6. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 5, is characterized in that: the quantity of described linkage system is three groups, and described in three groups, linkage system is uniformly distributed along the circumferential direction of described planetary plate.
7. the multifunctional vacuum Revolving rack of film-plating machine as described in claim 5 or 6, it is characterized in that: described linkage system comprises the base portion being fixed on described follower gear, on described base portion, be provided with and can and can pass through mobile the second pin that described follower gear is connected with described sun gear by mobile the first pin that described follower gear is connected with described planetary plate.
8. multifunctional vacuum Revolving rack of film-plating machine as claimed in claim 5, is characterized in that: described in each, cantilever is all set on described transmission rod rotationally.
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| CN201310632160.3A CN103590006B (en) | 2013-12-02 | 2013-12-02 | A kind of multifunctional vacuum Revolving rack of film-plating machine |
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| CN201310632160.3A CN103590006B (en) | 2013-12-02 | 2013-12-02 | A kind of multifunctional vacuum Revolving rack of film-plating machine |
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| CN105603377A (en) * | 2016-02-23 | 2016-05-25 | 东莞市汇成真空科技有限公司 | Vacuum plating workpiece rotating stand motion mechanism allowing speed to be adjusted independently during revolution and autorotation |
| CN106835027A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotational structure with planetary plate |
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| CN107699862A (en) * | 2017-11-14 | 2018-02-16 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
| CN108315706A (en) * | 2018-04-02 | 2018-07-24 | 上海应用技术大学 | A kind of vacuum coater carrying out PVD coatings to cutter |
| CN108642455A (en) * | 2018-05-17 | 2018-10-12 | 宁波大红鹰学院 | Vacuum coating sample stage |
| CN108866308A (en) * | 2017-05-11 | 2018-11-23 | 重庆理工大学 | A kind of horizontal gear surface electron beam treatment system |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN110760808A (en) * | 2019-12-10 | 2020-02-07 | 湘潭宏大真空技术股份有限公司 | Curved surface screen magnetron sputtering subassembly |
| CN112435538A (en) * | 2020-12-04 | 2021-03-02 | 汪胡畏 | University student's occupation planning is guided with device of explaining |
| CN114481073A (en) * | 2022-02-21 | 2022-05-13 | 兰州交通大学 | Multifunctional foundation and application research composite physical vapor deposition system |
| CN114752911A (en) * | 2022-04-22 | 2022-07-15 | 捷捷微电(南通)科技有限公司 | Planetary dome mounting rack and vacuum coating machine |
| CN115261808A (en) * | 2022-08-13 | 2022-11-01 | 北京北方华创真空技术有限公司 | Multi-dimensional rotating workpiece frame and vacuum coating machine with same |
| CN117448771A (en) * | 2023-12-26 | 2024-01-26 | 成都国泰真空设备有限公司 | Multistage planetary workpiece carrier mechanism with adjustable substrate vacuum coating angle |
| CN118407013A (en) * | 2024-07-03 | 2024-07-30 | 汕头超声显示器技术有限公司 | Rotating frame coating machine and coating method thereof |
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| CN103820766A (en) * | 2014-03-22 | 2014-05-28 | 沈阳中北真空设备有限公司 | Magnetron coating apparatus for neodymium-iron-boron rare-earth permanent magnet devices, and manufacturing method thereof |
| CN105603377B (en) * | 2016-02-23 | 2018-06-08 | 东莞市汇成真空科技有限公司 | Revolution with rotation can each speed regulation vacuum coating equipment workpiece rotating frame motion |
| CN105603377A (en) * | 2016-02-23 | 2016-05-25 | 东莞市汇成真空科技有限公司 | Vacuum plating workpiece rotating stand motion mechanism allowing speed to be adjusted independently during revolution and autorotation |
| CN106835027A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotational structure with planetary plate |
| CN106835059A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotating mechanism with adjustable angle planetary plate |
| CN108866308A (en) * | 2017-05-11 | 2018-11-23 | 重庆理工大学 | A kind of horizontal gear surface electron beam treatment system |
| CN107699862A (en) * | 2017-11-14 | 2018-02-16 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
| CN107699862B (en) * | 2017-11-14 | 2019-06-18 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
| CN108315706A (en) * | 2018-04-02 | 2018-07-24 | 上海应用技术大学 | A kind of vacuum coater carrying out PVD coatings to cutter |
| CN108642455A (en) * | 2018-05-17 | 2018-10-12 | 宁波大红鹰学院 | Vacuum coating sample stage |
| CN108642455B (en) * | 2018-05-17 | 2020-04-07 | 宁波大学科学技术学院 | Vacuum coating sample table |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN110760808A (en) * | 2019-12-10 | 2020-02-07 | 湘潭宏大真空技术股份有限公司 | Curved surface screen magnetron sputtering subassembly |
| CN110760808B (en) * | 2019-12-10 | 2023-10-31 | 湘潭宏大真空技术股份有限公司 | Curved surface screen magnetron sputtering assembly |
| CN112435538A (en) * | 2020-12-04 | 2021-03-02 | 汪胡畏 | University student's occupation planning is guided with device of explaining |
| CN114481073A (en) * | 2022-02-21 | 2022-05-13 | 兰州交通大学 | Multifunctional foundation and application research composite physical vapor deposition system |
| CN114481073B (en) * | 2022-02-21 | 2024-02-20 | 兰州交通大学 | Multifunctional basic and application research composite physical vapor deposition system |
| CN114752911A (en) * | 2022-04-22 | 2022-07-15 | 捷捷微电(南通)科技有限公司 | Planetary dome mounting rack and vacuum coating machine |
| CN114752911B (en) * | 2022-04-22 | 2024-04-05 | 捷捷微电(南通)科技有限公司 | Planet type dome mounting frame and vacuum coating machine |
| CN115261808A (en) * | 2022-08-13 | 2022-11-01 | 北京北方华创真空技术有限公司 | Multi-dimensional rotating workpiece frame and vacuum coating machine with same |
| CN117448771A (en) * | 2023-12-26 | 2024-01-26 | 成都国泰真空设备有限公司 | Multistage planetary workpiece carrier mechanism with adjustable substrate vacuum coating angle |
| CN117448771B (en) * | 2023-12-26 | 2024-03-19 | 成都国泰真空设备有限公司 | Multistage planetary workpiece carrier mechanism with adjustable substrate vacuum coating angle |
| CN118407013A (en) * | 2024-07-03 | 2024-07-30 | 汕头超声显示器技术有限公司 | Rotating frame coating machine and coating method thereof |
| CN118407013B (en) * | 2024-07-03 | 2024-09-10 | 汕头超声显示器技术有限公司 | Rotating frame coating machine and coating method thereof |
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Effective date of registration: 20180227 Address after: 201616 Kungang highway, Songjiang District, Shanghai, Songjiang District, 4 B District, No. 888 Patentee after: Shanghai Yi Yan Industrial Co.,Ltd. Address before: 201600 Kungang highway 888, Kunshan Town, Songjiang District, Shanghai, 4 Patentee before: SHANGHAI VAKIA COATING TECHNOLOGY Co.,Ltd. |
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