CN106835027A - Coating machine diaphragm rotational structure with planetary plate - Google Patents
Coating machine diaphragm rotational structure with planetary plate Download PDFInfo
- Publication number
- CN106835027A CN106835027A CN201710109225.4A CN201710109225A CN106835027A CN 106835027 A CN106835027 A CN 106835027A CN 201710109225 A CN201710109225 A CN 201710109225A CN 106835027 A CN106835027 A CN 106835027A
- Authority
- CN
- China
- Prior art keywords
- coating machine
- rotating cylinder
- rotation
- fixed
- cover body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C37/00—Cooling of bearings
- F16C37/007—Cooling of bearings of rolling bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of coating machine diaphragm rotational structure with planetary plate,It is related to coating machine technical field,Coating machine diaphragm revolution structure,Including transmission mechanism,Dead axle,Around the rotating cylinder of fixed-axis rotation,Cover body and the annular chassis that can be fixed at the top of coating machine,The upper end of the dead axle is fixed on the top of cover body,A reduction gearing is fixedly installed on the outer peripheral face of the rotating cylinder,The drive gear is driven by external motor and rotated,Drive gear is engaged with reduction gearing so as to drive reduction gearing to rotate,It is further driven to drum rotation,The annular chassis top sets a thrust ball bearing for axially supporting rotating cylinder,The ball bearing for preventing rotating cylinder radial deflection is also set up between the inwall and rotating cylinder outer peripheral face of the cover body,Rotating cylinder lower end is fixedly installed a travelling gear and a swivel plate,Swivel plate sets multiple diaphragm planet disc mechanisms.Duplex bearing set favorably with the stable rotation of rotating cylinder, reduce the stuck of bearing, be capable of achieving diaphragm rotation.
Description
Technical field
The present invention relates to coating machine technical field, and in particular to a kind of coating machine diaphragm rotational structure with planetary plate.
Background technology
Vacuum coating equipment is mainly comprised the following steps：Vacuum cavity, extract system inflates gas distribution system, heating system
System, thin film deposition control system, high voltage system, low voltage control system, vaporizing-source system, workpiece rotation system.Its function
It is described as follows：
Vacuum cavity：One space of plated film processing
Extract system：Plated film is set to reach required vacuum
Inflation gas distribution system：Pneumatic element is set to obtain enough air pressure execution
Heating system：Temperature needed for making substrate reach plated film
Thin film deposition control system：The thickness plated on substrate is set to reach required requirement
High voltage system:Evaporation source is set to obtain enough voltage
Low voltage control system：The element of coating machine is controlled to complete the action for specifying
Vaporizing-source system：Coating materials is allowed to evaporate
Workpiece rotation system：Load substrate and rotate it
Coating machine work in current industry turns mainly single-bearing, and the problems such as easily there is stuck, shake, revolution and rotation are general
All over being sprocket wheel and chain structure, but this structure is unstable when rotate, and noise is big, and chain sprocket structure is when long
Between can fluff after use, so as to influence the uniformity of film layer.
The content of the invention
The technical problem to be solved in the present invention is to solve above-mentioned the deficiencies in the prior art, there is provided one kind is difficult stuck, stabilization
Achievable substrate revolution and rotation coating machine diaphragm rotating mechanism.
In order to solve above-mentioned the deficiencies in the prior art, the technical solution adopted by the present invention is：Coating machine diaphragm revolution structure,
It is described including transmission mechanism, dead axle, the rotating cylinder around fixed-axis rotation, cover body and the annular chassis that can be fixed at the top of coating machine
Transmission mechanism mainly includes a drive gear, and the cover body is fixed on chassis, and the rotating cylinder and dead axle pass through annular chassis
The Vacuum Deposition membrane cavity of coating machine is stretched into, the upper end of the dead axle is fixed on the top of cover body, it is solid on the outer peripheral face of the rotating cylinder
Surely set a reduction gearing, the drive gear by external motor drive rotate, drive gear engaged with reduction gearing so that
Drive reduction gearing to rotate, be further driven to drum rotation, one axial direction support rotating cylinder of setting pushes away above the annular chassis
Power ball bearing, also sets up the ball bearing for preventing rotating cylinder radial deflection, under rotating cylinder between the inwall and rotating cylinder outer peripheral face of the cover body
End is fixedly installed a travelling gear and a swivel plate, and swivel plate sets multiple diaphragm planet disc mechanisms, the planetary plate machine
Structure includes the axis of rotation and the support member of radial and axial support is carried out to the axis of rotation, and support member is arranged on swivel plate,
The axis of rotation upper end is fixed with the driven gear concentric with the axis of rotation, and driven gear can engage drive certainly with travelling gear
The rotation of rotating shaft, axis of rotation lower end is used to install the rack-mounted load substrate of workpiece.
Further, the thrust ball bearing includes seat ring, blowout patche and ball retainer composition, blowout patche and reduction gearing or
Person's rotating cylinder is fixed, and seat ring is fixed on annular chassis.
Further, the cover body sets toroidal cavity and uses near the end of annular chassis and thrust ball bearing correspondence position
In injection cooling water, cover body sets water injection hole and apopore at toroidal cavity is used for water circulation.
Further, the ball bearing is arranged on covering on top, and covering on top sets cooling water circulation networking to be used for ball
Bearing is lowered the temperature.
Further, also including a device for sealing magnetic fluid, connection motor in device for sealing magnetic fluid one end is another
Stretch into coating machine vacuum chamber connection drive gear in end.
Further, the dead axle is central structure, sets the brilliant control for measuring substrate coating film thickness through dead axle
Probe.
Further, it is coated with resistant to elevated temperatures lubricating grease on the ball bearing and thrust ball bearing.
Further, the driven gear that the upper end of the axis of rotation is set has multiple, and gear is different, and the support member can phase
Setting is moved up and down for swivel plate.
Further, multiple annular grooves are set in the support member, and groove spacing is equal to gear spacing, is set along groove
A pair of pads of semi-circular shape are put, screw is set on pad, pad grips support member after being fixed on swivel plate.
From above-mentioned technical proposal it can be seen that the present invention has advantages below：The stabilization that duplex bearing sets favorably with rotating cylinder turns
It is dynamic, the stuck of bearing is reduced, heat is taken away by the circulation of cooling water, so it is greatly lowered the temperature inside work rotation structure
Degree, so as to reduce thermal expansion deformation cause it is stuck, set planetary plate realize revolution and rotation of the substrate in inside cavity so that
The uniformity of film layer is improved, and the different gear of multiple numbers of teeth is set, the speed of rotation can be adjusted；Magnet fluid sealing
To substitute original O-ring, J-type sealing ring is combined, and it had not only had the mobility of liquid but also had had the magnetic of solid magnetic material,
And then the quality of guarantee substrate coating, good sealing effect, and also it is very durable, it is several times of traditional rubber seal, can keep
Plate the vacuum of membrane cavity.
Brief description of the drawings
Fig. 1 is sectional structure chart of the invention.
Fig. 2 is diaphragm planet disc mechanism in the present invention.
Fig. 3 is top view of the invention.
Specific embodiment
Specific embodiment of the invention is elaborated below in conjunction with accompanying drawing.
As shown in figure 1, coating machine diaphragm of the invention revolution structure, including transmission mechanism, dead axle 10, around fixed-axis rotation
Rotating cylinder 9, cover body 2 and the annular chassis 1 that can be fixed at the top of coating machine, the transmission mechanism mainly include the He of drive gear 7
Device for sealing magnetic fluid 6, device for sealing magnetic fluid 6 connects the motor of outside, and the other end stretches into the plated film vacuum of coating machine
Chamber connects drive gear 7, and magnet fluid sealing substitutes original O-ring, the combination of J-type sealing ring.Its both flowing with liquid
Property again with solid magnetic material magnetic.Good sealing effect, and very durable, is several times of traditional rubber seal, can be with
Keep the vacuum of plating membrane cavity.
Cover body 2 is fixed on chassis 1 so as to be fixed on coating machine, and rotating cylinder 9 and dead axle 10 stretch into plating through annular chassis 1
The Vacuum Deposition membrane cavity of film machine, the upper end of dead axle 10 is fixed on the top of cover body 2, rotating cylinder 9 and the concentric setting of dead axle 10, rotating cylinder
A reduction gearing 8, reduction gearing 8 and the concentric setting of rotating cylinder 9, drive gear 7 and reducing gear are fixedly installed on 9 outer peripheral face
The engagement of wheel 8 is further driven to rotating cylinder 9 and is rotated around dead axle 10 so as to drive reduction gearing 8 to rotate, and is set in the top of annular chassis 1
One thrust ball bearing for axially supporting rotating cylinder 9, thrust ball bearing is constituted including seat ring 14, blowout patche 3 and ball retainer 13, axle
Circle 3 is fixed with reduction gearing or rotating cylinder, and seat ring 14 is fixed on annular chassis 1, the inwall and the outer peripheral face of rotating cylinder 9 of cover body 2 it
Between also set up the ball bearing 4 for preventing the radial deflection of rotating cylinder 9.Duplex bearing set favorably with the stable rotation of rotating cylinder, reduce bearing
It is stuck, and then ensure the quality of substrate coating.
Periphery to work rotation structure increased water-cooled, and heat is taken away by the circulation of cooling water, thus substantially reduce
Temperature inside work rotation structure, it is stuck so as to reduce that thermal expansion deformation causes.Water-cooling structure is as follows, and ball bearing is arranged on
Covering on top, covering on top sets cooling water circulation networking 12 to be used to give ball bearing cooling；Cover body 2 is near the end of annular chassis 1
Portion sets toroidal cavity 11 with thrust ball bearing correspondence position to be used to inject cooling water, and cover body sets water injection hole at toroidal cavity
It is used for water circulation with apopore
Dead axle 10 is central structure, sets the brilliant control probe 5 for measuring substrate coating film thickness through dead axle.
And can not have the presence for waving oil in coating process, because in film deposition process, the presence of oil can influence film
The firmness of deposition.Therefore, resistant to elevated temperatures lubricating grease is coated with ball bearing and thrust ball bearing.The basic reason of shake is
The abrasion of bearing, therefore selected a kind of high vacuum nonvolatile, resistant to elevated temperatures lubricating grease.
As shown in Fig. 1,2 and Fig. 3, the lower end of rotating cylinder 9 is fixedly installed a travelling gear 16 and a swivel plate 17, swivel plate
Multiple diaphragm planet disc mechanisms are set on 17, the planet disc mechanism include the axis of rotation 20 and the axis of rotation 20 is carried out radially and
The support member 15 for axially supporting, support member 15 is arranged on swivel plate 17, and the upper end of the axis of rotation 20 is fixed with multiple
The driven gear 18 concentric with the axis of rotation, the gear of driven gear 18 is different, and driven gear 18 can be engaged with travelling gear 16
The rotation of the axis of rotation 20 is driven, the lower end of the axis of rotation 20 is used to install the loading substrate of work rest 19.Setting planetary plate can realize base
The rotation of piece, so that plated film is more uniform, and can change rotational velocity by selecting the number of teeth of the driven number of teeth.
The inside of support member can be by setting the support of ball bearing and thrust ball bearing realization to the axis of rotation, specific knot
Structure may be referred to the supporting way of rotating cylinder, not repeat herein.Support member 15 can move up and down setting relative to swivel plate 17,
Moving up and down for support member can be realized by following structure, the groove 22 of multiple annulars is set outside support member, it is recessed
The spacing of groove 22 is equal to the spacing of driven gear 18, and a pair of pads of semi-circular shape 22 set along groove and clamp support member,
Pad 22 is fixed by screws on swivel plate 17.
When moving up and down, the screw on pad is unclamped, remove pad, move up and down support member one or more groove
After spacing, then support member is fixed on swivel plate by pad.
Claims (9)
1. a kind of coating machine diaphragm rotational structure with planetary plate, including transmission mechanism, dead axle, the rotating cylinder around fixed-axis rotation, cover
Body and the annular chassis that can be fixed at the top of coating machine, the transmission mechanism mainly include a drive gear, the cover body
It is fixed on chassis, it is characterised in that：The rotating cylinder and dead axle stretch into the Vacuum Deposition membrane cavity of coating machine through annular chassis, described
The upper end of dead axle is fixed on the top of cover body, and a reduction gearing, the driving are fixedly installed on the outer peripheral face of the rotating cylinder
Gear is driven by external motor and rotated, and drive gear is engaged so as to drive reduction gearing to rotate with reduction gearing, is further driven to
Drum rotation, annular chassis top sets a thrust ball bearing for axial support rotating cylinder, the inwall of the cover body with turn
The ball bearing for preventing rotating cylinder radial deflection is also set up between cylinder outer peripheral face, rotating cylinder lower end is fixedly installed a travelling gear and one
Swivel plate, swivel plate sets multiple diaphragm planet disc mechanisms, and the planet disc mechanism includes the axis of rotation and the axis of rotation is carried out
The support member of radial and axial support, support member is arranged on swivel plate, and the axis of rotation upper end is fixed with and rotation
The concentric driven gear of axle, driven gear can engage the rotation for driving the axis of rotation with travelling gear, and axis of rotation lower end is used to pacify
Dress work rest loads substrate.
2. the coating machine diaphragm rotational structure with planetary plate according to claim 1, it is characterised in that：The thrust ball axle
Contract and include seat ring, blowout patche and ball retainer composition, blowout patche is fixed with reduction gearing or rotating cylinder, and seat ring is fixed on annular chassis
On.
3. the coating machine diaphragm rotational structure with planetary plate according to claims 1 or 2, it is characterised in that：The cover
Body sets toroidal cavity near the end of annular chassis and thrust ball bearing correspondence position to be used to inject cooling water, and cover body is in annular
Water injection hole and apopore are set at cavity is used for water circulation.
4. the coating machine diaphragm rotational structure with planetary plate according to claims 1 or 2, it is characterised in that：The ball
Bearing is arranged on covering on top, and covering on top sets cooling water circulation networking to be used to give ball bearing cooling.
5. the coating machine diaphragm rotational structure with planetary plate according to claim 1, it is characterised in that：Also include a magnetic
Fluid seal apparatus, device for sealing magnetic fluid one end connection motor, the other end stretches into coating machine vacuum chamber connection sliding tooth
Wheel.
6. the coating machine diaphragm rotational structure with planetary plate according to claim 1, it is characterised in that：During the dead axle is
Portion's structure, sets the brilliant control probe for measuring substrate coating film thickness through dead axle.
7. the coating machine diaphragm rotational structure with planetary plate according to claim 2, it is characterised in that：The ball bearing and
Resistant to elevated temperatures lubricating grease is coated with thrust ball bearing.
8. the coating machine diaphragm rotational structure with planetary plate according to claim 1, it is characterised in that：The upper end of the axis of rotation
The driven gear of setting has multiple, and gear is different, and the support member can move up and down setting relative to swivel plate.
9. the coating machine diaphragm rotational structure with planetary plate according to claim 8, it is characterised in that：The support member
Upper to set multiple annular grooves, groove spacing is equal to gear spacing, and a pair of pads of semi-circular shape are set along groove, is set on pad
Screw is put, pad grips support member after being fixed on swivel plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710109225.4A CN106835027B (en) | 2017-02-27 | 2017-02-27 | Coating machine diaphragm rotational structure with planetary plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710109225.4A CN106835027B (en) | 2017-02-27 | 2017-02-27 | Coating machine diaphragm rotational structure with planetary plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106835027A true CN106835027A (en) | 2017-06-13 |
| CN106835027B CN106835027B (en) | 2019-05-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710109225.4A Active CN106835027B (en) | 2017-02-27 | 2017-02-27 | Coating machine diaphragm rotational structure with planetary plate |
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| Country | Link |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108677160A (en) * | 2018-08-13 | 2018-10-19 | 武汉科瑞达真空科技有限公司 | A kind of new type of continuous coating film production line based on public rotation loading pallet |
| CN109402595A (en) * | 2018-12-29 | 2019-03-01 | 湖南宇诚精密科技有限公司 | A kind of coating machine umbrella stand driving device |
| CN110331375A (en) * | 2019-07-29 | 2019-10-15 | 光驰科技(上海)有限公司 | A kind of coating chamber substrate loading device |
| CN110848393A (en) * | 2019-10-17 | 2020-02-28 | 浙江大学 | Multistage magnetic fluid sealing device |
| CN112126909A (en) * | 2020-10-16 | 2020-12-25 | 江阴市中兴光电实业有限公司 | Film coating machine diaphragm revolution structure with light control system |
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| CN203487225U (en) * | 2013-10-21 | 2014-03-19 | 中国航空工业第六一八研究所 | Planetary mechanism for improving coating uniformity |
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| CN205974653U (en) * | 2016-08-29 | 2017-02-22 | 沈阳威利德真空技术有限公司 | Work piece that vacuum coating machine used is from rotary mechanism |
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| CN102864434A (en) * | 2012-09-05 | 2013-01-09 | 常州大成绿色镀膜科技有限公司 | Workpiece rotating stand transmission device of vertical coating machine |
| CN203487225U (en) * | 2013-10-21 | 2014-03-19 | 中国航空工业第六一八研究所 | Planetary mechanism for improving coating uniformity |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108677160A (en) * | 2018-08-13 | 2018-10-19 | 武汉科瑞达真空科技有限公司 | A kind of new type of continuous coating film production line based on public rotation loading pallet |
| CN108677160B (en) * | 2018-08-13 | 2020-12-29 | 武汉科瑞达真空科技有限公司 | Continuous coating production line based on revolution and rotation loading tray |
| CN109402595A (en) * | 2018-12-29 | 2019-03-01 | 湖南宇诚精密科技有限公司 | A kind of coating machine umbrella stand driving device |
| CN110331375A (en) * | 2019-07-29 | 2019-10-15 | 光驰科技(上海)有限公司 | A kind of coating chamber substrate loading device |
| CN110331375B (en) * | 2019-07-29 | 2022-07-01 | 光驰科技(上海)有限公司 | Substrate loading device for coating chamber |
| CN110848393A (en) * | 2019-10-17 | 2020-02-28 | 浙江大学 | Multistage magnetic fluid sealing device |
| CN112126909A (en) * | 2020-10-16 | 2020-12-25 | 江阴市中兴光电实业有限公司 | Film coating machine diaphragm revolution structure with light control system |
Also Published As
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|---|---|
| CN106835027B (en) | 2019-05-03 |
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