CN203487225U - Planetary mechanism for improving coating uniformity - Google Patents
Planetary mechanism for improving coating uniformity Download PDFInfo
- Publication number
- CN203487225U CN203487225U CN201320651561.9U CN201320651561U CN203487225U CN 203487225 U CN203487225 U CN 203487225U CN 201320651561 U CN201320651561 U CN 201320651561U CN 203487225 U CN203487225 U CN 203487225U
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- fixed
- planetary mechanism
- improving
- disc
- pinion
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- 230000007246 mechanism Effects 0.000 title claims abstract description 31
- 238000000576 coating method Methods 0.000 title abstract description 9
- 239000011248 coating agent Substances 0.000 title abstract 7
- 238000004544 sputter deposition Methods 0.000 claims abstract description 11
- 239000004519 grease Substances 0.000 claims abstract description 9
- 238000005461 lubrication Methods 0.000 claims abstract description 9
- 239000007888 film coating Substances 0.000 claims description 9
- 238000009501 film coating Methods 0.000 claims description 9
- 239000010408 film Substances 0.000 abstract description 11
- 239000012788 optical film Substances 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 abstract description 2
- 230000003749 cleanliness Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
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Abstract
The utility model belongs to the field of vacuum coating equipment, and relates to a planetary mechanism for improving coating uniformity. The planetary mechanism for improving coating uniformity comprises a greaseless lubrication bearing, a rotation disc, a revolution disc, a rotary shaft, workpiece holes, a pinion, an output shaft and a fixed large gear, wherein the fixed large gear is fixed on the rotary mechanism fixed shaft of an ion sputtering coating machine; one end of the revolution disc is engaged with the fixed large gear by the pinion, and the other end of the revolution disc is fixed with the rotary shaft; the rotation disc is connected with the pinion by the output shaft; and the workpiece holes are uniformly distributed in the rotation disc along a circumferential direction. The planetary mechanism for improving coating uniformity disclosed by the utility model is simple in structure and capable of being conveniently interchanged with the original high-speed disc; the various rotary mechanisms (systems) located in a vacuum chamber are not lubricated by grease, thus ensuring the cleanliness and no introduced pollution in the vacuum chamber, and improving the uniformity of film preparation of the high-speed disc mechanism of the SPECTOR ion sputtering coating machine; the planetary mechanism for improving coating uniformity is especially suitable for users with high accuracy requirements on optical films.
Description
Technical field
The utility model belongs to vacuum coating film equipment field, is a kind of for improving the inhomogeneity planetary mechanism of plated film.
Background technology
At present, along with improving constantly of optical thin film performance index, traditional thermal evaporation plated film mode has not been suitable for some high-precision optical thin film preparation, and ion beam sputtering deposition mode is application and high-precision optical film industry more and more.For some, require precisely to control film thickness and inhomogeneity user, optical thin film prepared by the high speed rotating workpiece plate that the SPECTOR ion sputtering film coating machine of choice for use U.S. veeco company is equipped with also might not reach user's requirement, this is due to the inherent defect of this kind equipment own---there is the ununiformity along workpiece plate central ray direction, causes part face anisotropic parameters deviation.Although there is revision board correction, precision still can not meet high precision user service requirements.If but selected the planetary plate mechanism of veeco company just can not select high-speed disc mechanism, their two kinds of systems could not compatible on an equipment, exchange use.
Summary of the invention
The purpose of this utility model is: in order to overcome prior art SPECTOR ion sputtering film coating machine planetary plate mechanism and high-speed disc mechanism incompatibility problem, propose a kind of planetary mechanism at the not broken former high-speed disc rotating mechanism of ring apparatus, make workpiece plate increase to two degree of freedom by original one degree of freedom, with this, improve face homogeneity, can exchange quickly and easily with high-speed disc device again simultaneously.
The technical solution of the utility model is: a kind of for improving the inhomogeneity planetary mechanism of plated film, it comprises without grease lubrication bearing, autorotation disk, rotary table, rotation axis, workpiece hole, pinion(gear), output shaft, fixing master wheel, wherein, described fixedly master wheel is fixed on the rotating mechanism stationary shaft of ion sputtering film coating machine, described rotary table one end by pinion(gear) and fixedly master wheel mesh, the other end and rotation axis are fixed, described autorotation disk is connected with pinion(gear) by output shaft, and workpiece hole is distributed on autorotation disk by even circumferential.
Described rotary table is erected in vacuum chamber.
Described autorotation disk is fixed by screws in output shaft one end, and output shaft is by being arranged on fixing without grease lubrication bearing on rotary table.
Described fixedly master wheel is fixed by screws on the rotating mechanism stationary shaft of SPECTOR ion sputtering film coating machine.
The utility model technique effect is: the utility model does not destroy the original rotation system of equipment and space, tightness system.Simple in structure, can conveniently exchange with original high-speed disc, each rotating mechanism (system) that is positioned at vacuum chamber does not use grease lubrication, guaranteed totally in vacuum chamber without introducing, to pollute, and has improved the homogeneity that film is prepared by the SPECTOR of veeco company ion sputtering film coating machine high-speed disc mechanism simultaneously.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present utility model.
In figure: 1 is without grease lubrication bearing; 2 is autorotation disk; 3 is screw; 4 is rotary table; 5 is nut; 6 is rotation axis; 7 is workpiece hole; 8 is pinion(gear); 9 is output shaft; 10 is screw; 11 is fixing master wheel; 12 is screw.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.Protection domain of the present utility model is not only confined to the statement of following content.
Shown in Figure 1, the utility model is used for improving the inhomogeneity planetary mechanism of plated film and comprises without grease lubrication bearing 1, autorotation disk 2, screw 3, rotary table 4, nut 5, rotation axis 6, workpiece hole 7, pinion(gear) 8, output shaft 9, screw 10, fixedly master wheel 11, screw 12.Described fixedly master wheel 11 is fixed on by described screw 12 on the rotating mechanism stationary shaft of SPECTOR ion sputtering film coating machine, not movable.Described rotary table 4 is erected in vacuum chamber, and one end is by described pinion(gear) 8 and described fixedly master wheel 11 engagements, and the other end is fixing with described rotation axis 6 by described nut 5, and described rotary table 4 can rotate with described rotation axis 6.Described autorotation disk 2 by described output shaft 9, be connected with described pinion(gear) 8 without grease lubrication bearing 1 and screw 3, can rotate with described rotary table 4.Described workpiece hole 7 is distributed on autorotation disk 2 by even circumferential, for loading various film plating substrates.
The utility model planetary mechanism is in erect-type in coating process, and during rotation, not only rotary table rotates round the rotation axis at center, and autorotation disk can also be round output shaft rotation, thereby can effectively improve the homogeneity of coating process film deposition.
The utility model planetary mechanism does not encircle in any veeco SPECTOR of company ion sputtering film coating machine equipment hardware and vacuum-sealing situation broken, can exchange with first wife's high-speed disc quickly and easily according to demand, be specially adapted to optical thin film to have the user of high-precision requirement.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (4)
1. one kind for improving the inhomogeneity planetary mechanism of plated film, it is characterized in that: comprise without grease lubrication bearing, autorotation disk, rotary table, rotation axis, workpiece hole, pinion(gear), output shaft, fixing master wheel, wherein, described fixedly master wheel is fixed on the rotating mechanism stationary shaft of ion sputtering film coating machine, described rotary table one end by pinion(gear) and fixedly master wheel mesh, the other end and rotation axis are fixed, described autorotation disk is connected with pinion(gear) by output shaft, and workpiece hole is distributed on autorotation disk by even circumferential.
2. according to claim 1 for improving the inhomogeneity planetary mechanism of plated film, it is characterized in that: described rotary table is erected in vacuum chamber.
3. according to claim 2ly for improving the inhomogeneity planetary mechanism of plated film, it is characterized in that: described autorotation disk is fixed by screws in output shaft one end, output shaft is by being arranged on fixing without grease lubrication bearing on rotary table.
4. according to claim 3 for improving the inhomogeneity planetary mechanism of plated film, it is characterized in that: described fixedly master wheel is fixed by screws on the rotating mechanism stationary shaft of SPECTOR ion sputtering film coating machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320651561.9U CN203487225U (en) | 2013-10-21 | 2013-10-21 | Planetary mechanism for improving coating uniformity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320651561.9U CN203487225U (en) | 2013-10-21 | 2013-10-21 | Planetary mechanism for improving coating uniformity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203487225U true CN203487225U (en) | 2014-03-19 |
Family
ID=50258069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320651561.9U Expired - Lifetime CN203487225U (en) | 2013-10-21 | 2013-10-21 | Planetary mechanism for improving coating uniformity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203487225U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294234A (en) * | 2014-09-23 | 2015-01-21 | 东莞市华星镀膜科技有限公司 | Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig |
| CN105127065A (en) * | 2015-09-17 | 2015-12-09 | 科汇纳米技术（深圳）有限公司 | Cutter installing clamp for PVD coating |
| CN106835027A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotational structure with planetary plate |
| CN108531847A (en) * | 2017-12-19 | 2018-09-14 | 北京金轮坤天特种机械有限公司 | A kind of plasma physical vapor deposition multi-station turning fitting device |
| CN109254177A (en) * | 2018-10-22 | 2019-01-22 | 航天长屏科技有限公司 | A kind of precision rotation device of small-sized anti-strong electromagnetic radiation |
| CN115369369A (en) * | 2022-09-28 | 2022-11-22 | 潍坊科技学院 | Workpiece inner curved surface coating mechanism of magnetron sputtering coating machine |
| CN105127065B (en) * | 2015-09-17 | 2024-05-31 | 科汇纳米技术（深圳）有限公司 | PVD coating is with dress sword anchor clamps |
-
2013
- 2013-10-21 CN CN201320651561.9U patent/CN203487225U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104294234A (en) * | 2014-09-23 | 2015-01-21 | 东莞市华星镀膜科技有限公司 | Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig |
| CN105127065A (en) * | 2015-09-17 | 2015-12-09 | 科汇纳米技术（深圳）有限公司 | Cutter installing clamp for PVD coating |
| CN105127065B (en) * | 2015-09-17 | 2024-05-31 | 科汇纳米技术（深圳）有限公司 | PVD coating is with dress sword anchor clamps |
| CN106835027A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotational structure with planetary plate |
| CN108531847A (en) * | 2017-12-19 | 2018-09-14 | 北京金轮坤天特种机械有限公司 | A kind of plasma physical vapor deposition multi-station turning fitting device |
| CN108531847B (en) * | 2017-12-19 | 2023-10-20 | 北京金轮坤天特种机械有限公司 | Multi-station rotary tool device for plasma physical vapor deposition |
| CN109254177A (en) * | 2018-10-22 | 2019-01-22 | 航天长屏科技有限公司 | A kind of precision rotation device of small-sized anti-strong electromagnetic radiation |
| CN109254177B (en) * | 2018-10-22 | 2020-10-23 | 航天长屏科技有限公司 | Small-size anti strong electromagnetic radiation's accurate rotary device |
| CN115369369A (en) * | 2022-09-28 | 2022-11-22 | 潍坊科技学院 | Workpiece inner curved surface coating mechanism of magnetron sputtering coating machine |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140319 |