CN220812588U - Precision control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment - Google Patents
Precision control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment Download PDFInfo
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- CN220812588U CN220812588U CN202322220887.2U CN202322220887U CN220812588U CN 220812588 U CN220812588 U CN 220812588U CN 202322220887 U CN202322220887 U CN 202322220887U CN 220812588 U CN220812588 U CN 220812588U
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- importer
- coating apparatus
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 31
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000003068 static effect Effects 0.000 description 7
- 238000009987 spinning Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
The utility model relates to a precision control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment, which comprises a vacuum flange; the vacuum flange is provided with a vacuum cavity and a vacuum cavity at two sides, a first vacuum rotary importer is arranged outside the vacuum cavity, a revolution disc of a target table is arranged in the vacuum cavity, the first vacuum rotary importer drives the revolution disc to revolve, a plurality of target holders are annularly arranged on the revolution disc, a second vacuum rotary importer is arranged outside the vacuum cavity at a position where the first vacuum rotary importer is avoided, and the second vacuum rotary importer drives the target holders to rotate; the first vacuum rotary importer in the vacuum cavity is provided with a speed reducer, the speed reducer is connected with a center rod, and the center rod drives the revolution disc to revolve.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating equipment for manufacturing instruments and meters, relates to products for manufacturing vacuum coating equipment by instruments and meters, and particularly relates to a precision control target table capable of simultaneously carrying out rotation and revolution in the vacuum coating equipment.
Background
In the vacuum coating equipment, a target material is required to be placed on a target support of a target table, the target material can follow the target support to perform rotary motion according to growth requirements, and when the target material rotates, the revolution and the rotation of the existing old target table are realized by vacuum rotation and mechanical gear transmission in cooperation with vacuum in the vacuum.
The gear meshing gap also enables the gear to be unsmooth in rotation, sometimes the phenomenon of jamming occurs, and noise is easy to occur. The control accuracy of the target is not high, and the control accuracy of the thin film process is affected, which is a fundamental problem. On this basis, the common gear meshing has a certain clearance, so that poor return stroke occurs. When the gear rotates back, the position of the gear can be delayed by a certain angle due to the return stroke difference caused by the gear clearance, and the control is inaccurate.
Disclosure of utility model
The utility model aims to provide a precise control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment. Greatly increases the static moment and enables the static moment to move quickly and smoothly.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a precise control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment comprises a vacuum flange; the vacuum flange is provided with a vacuum cavity and a vacuum cavity at two sides, a first vacuum rotary importer is arranged outside the vacuum cavity, a revolution disc of a target table is arranged in the vacuum cavity, the first vacuum rotary importer drives the revolution disc to revolve, a plurality of target holders are annularly arranged on the revolution disc, a second vacuum rotary importer is arranged outside the vacuum cavity at a position where the first vacuum rotary importer is avoided, and the second vacuum rotary importer drives the target holders to rotate; the first vacuum rotary importer in the vacuum cavity is provided with a speed reducer, the speed reducer is connected with a center rod, and the center rod drives the revolution disc to revolve.
Further, a transmission motor is arranged on the first vacuum rotary importer, a coupler is arranged at the vacuum flange, and the first vacuum rotary importer is connected with the coupler.
Further, a transmission motor is arranged on the second vacuum rotary importer, a coupler is arranged at the vacuum flange, and the second vacuum rotary importer is connected with the coupler.
Still further, the inner extension end of the second vacuum rotary importer is provided with a third target spin gear, one side of the revolution disk, which is close to the speed reducer, is provided with a first target spin gear, the first target spin gear and the revolution disk are coaxially arranged, a plurality of annular pinions are arranged between the first target spin gear and the revolution disk, each pinion is coaxially arranged with each target support, the third target spin gear is meshed with the first target spin gear, and the third target spin gear drives the first target spin gear to drive the pinions to rotate to form target support autorotation.
Still further, the axle center department of first target spin gear sets up first rotation bearing base, and first rotation bearing base inboard sets up second target spin gear, second target spin gear with every pinion meshing.
Still further, set up the pinion base between every pinion and every target holder, the pinion base overlaps on the little bearing.
Still further, the first autorotation bearing base is provided with a bearing, and the first target spin gear and the second target spin gear are sleeved on the bearing.
Still further, a second anti-pollution baffle is arranged on the inner side of each target holder, and a first anti-pollution baffle is arranged on the inner side of the second anti-pollution baffle.
Further, a third vacuum rotary importer is arranged at the side of the first vacuum rotary importer and the side of the second vacuum rotary importer, a transmission motor is arranged on the third vacuum rotary importer, and a baffle is arranged at the inner end of the third vacuum rotary importer.
Further, a position indication part is arranged beside the target table.
The utility model has the technical effects that: the vacuum coating equipment can be provided with the rotation and revolution precision control target table. Aiming at the problems in the background technology, the static moment is greatly increased, so that the static moment can move quickly and smoothly.
Furthermore, the utility model also provides a novel transmission structure which effectively reduces the return stroke difference, reduces the return stroke difference on one hand and improves the control precision on the other hand.
Drawings
FIG. 1 is a block diagram of the present utility model;
Fig. 2a is a structural view of a revolution plate portion of the present utility model;
FIG. 2b is a cross-sectional view of FIG. 2 a;
FIG. 3 is a perspective view of the present utility model;
Fig. 4 is a cross-sectional view of the present utility model.
Detailed Description
Referring to the attached drawings, the vacuum coating equipment can be provided with a precision control target table with rotation and revolution at the same time, and comprises a vacuum flange 5; the two sides of the vacuum flange 5 are respectively arranged outside the vacuum cavity and inside the vacuum cavity, a first vacuum rotary introducer 1 is arranged outside the vacuum cavity, a revolution disc 10 of a target table is arranged inside the vacuum cavity, the first vacuum rotary introducer 1 drives the revolution disc 10 to revolve, a plurality of target holders 7 are annularly arranged on the revolution disc 10, a second vacuum rotary introducer 2 is arranged outside the vacuum cavity at the avoiding position of the first vacuum rotary introducer 1, and the second vacuum rotary introducer 2 drives the target holders 7 to rotate; a speed reducer 6 is arranged on the first vacuum rotary introducer 1 in the vacuum cavity, a center rod is connected to the speed reducer 6, and the center rod drives the revolution disc 10 to revolve.
Further, a transmission motor is arranged on the first vacuum rotary introducer 1, a coupler 4 is arranged at the vacuum flange 5, and the first vacuum rotary introducer 1 is connected with the coupler 4.
Further, a transmission motor is arranged on the second vacuum rotary importer 2, a coupler 4 is arranged at the vacuum flange 5, and the second vacuum rotary importer 2 is connected with the coupler 4.
Still further, the inner extending end of the second vacuum rotary introducer 2 is provided with a third target spin gear 14, one side of the revolution disc 10, which is close to the speed reducer 6, is provided with a first target spin gear 12, the first target spin gear 12 and the revolution disc 10 are coaxially arranged, a plurality of annular pinions are arranged between the first target spin gear 12 and the revolution disc 10, each pinion is coaxially arranged with each target support 7, the third target spin gear 14 is meshed with the first target spin gear 12, and the third target spin gear 14 drives the first target spin gear 12 to drive the pinions to rotate to form target supports 7 to rotate.
Still further, a first self-rotating bearing base 17 is arranged at the axle center of the first target self-rotating gear 12, a second target self-rotating gear 13 is arranged at the inner side of the first self-rotating bearing base 17, and the second target self-rotating gear 13 is meshed with each pinion.
Still further, a pinion base is provided between each pinion and each backing plate 7, the pinion base being fitted over the pinion bearing 11 a.
Still further, a bearing 11 is disposed on the first rotation bearing base 17, and the first target spinning gear 12 and the second target spinning gear 13 are sleeved on the bearing 11.
Still further, a second anti-pollution baffle 16 is disposed inside each target holder 7, and a first anti-pollution baffle 15 is disposed inside the second anti-pollution baffle 16.
Further, a third vacuum rotary introducer 3 is arranged at the side of the first vacuum rotary introducer 1 and the second vacuum rotary introducer 2, a transmission motor is arranged on the third vacuum rotary introducer 3, and a baffle plate 8 is arranged at the inner end of the third vacuum rotary introducer 3.
Further, a position indication part 9 is provided beside the target table.
The vacuum coating equipment can be provided with the rotation and revolution precision control target table. Greatly increases the static moment and enables the static moment to move quickly and smoothly.
Furthermore, the utility model solves the problems of poor control precision and poor return stroke of the traditional target table, and influences the film growth effect in the film preparation process, especially in the process of growing a multi-layer film. The utility model provides a novel transmission structure which effectively reduces return stroke difference, and by introducing a speed reducer 6 with a large reduction ratio and return stroke difference into vacuum, on one hand, the return stroke difference is reduced, on the other hand, the control precision is improved, and meanwhile, the static moment is greatly increased, so that the speed reducer can rapidly and smoothly move. The reduction ratio of the speed reducer 6 is one to fifty, and the return difference is greater than 0.5mm.
Revolution is controlled by the first vacuum rotation introducer 1; the second vacuum rotary introducer 2 controls autorotation; the third vacuum rotary introducer 3 controls the baffle 8.
As shown in fig. 1, the first vacuum rotary introducer 1 is arranged at the left side of the vacuum flange 5, namely outside the vacuum cavity, and can be connected with a transmission motor, and drives the revolution plate 10 of the whole target table to rotate at the right side of the vacuum flange 5, namely inside the vacuum cavity through the coupling 4. As shown in fig. 2a, 2b, six (small) backing plates 7 are provided on the turntable 10, each also being rotatable, which is controlled by the second vacuum rotary introducer 2 in fig. 3.
Further description: the second vacuum rotary introducer 2 is connected to a third target spin gear 14 in the (vacuum) cavity through a coupling 4, which is meshed with the first target spin gear 12, the first target spin gear 12 coaxially rotates with the second target spin gear 13 through a first rotation bearing base 17, the second target spin gear 13 is meshed with pinions of the other six target holders 7, and the pinion base is sleeved on the pinion bearing 11a, thereby rotating. Referring to fig. 4, several gears are fitted over the bearing 11, as in fig. 4, so that the rotation is not affected when the center rod, which is coaxial with the first rotation bearing base 17, revolves.
The first vacuum rotary introducer 1 is connected to the revolution plate 10 through a speed reducer 6 connected to the (vacuum) chamber, which in turn drives the rotation of the central rod, which passes through two bearings 11 of a first target spinning gear 12 and a second target spinning gear 13. The whole target tray revolution tray 10 is in rigid connection with the output shaft of the speed reducer 6, and the revolution speed is equal to the rotation speed of the output shaft of the speed reducer 6. The speed reducer 6 has a near zero return clearance, so that the accuracy of the whole control can be ensured to be greatly improved. Since the speed reducer 6 has a large reduction ratio, the revolution rotation is smoother and the accuracy is higher.
In summary, the utility model is more exquisite in structure and more silky in motion no matter revolution and rotation, and is smoother in start and stop, the return stroke difference is greatly reduced, and the control precision is greatly improved.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (10)
1. A precise control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment comprises a vacuum flange (5); the vacuum flange (5) both sides are outside the vacuum cavity and in the vacuum cavity respectively, set up first vacuum rotatory importer (1) outside the vacuum cavity, set up revolution dish (10) of target stand in the vacuum cavity, first vacuum rotatory importer (1) drive revolution dish (10), its characterized in that: a plurality of target holders (7) are annularly arranged on the revolution plate (10), a second vacuum rotary importer (2) is arranged outside the vacuum cavity body at the avoidance position of the first vacuum rotary importer (1), and the second vacuum rotary importer (2) drives the target holders (7) to rotate; a speed reducer (6) is arranged on a first vacuum rotary importer (1) in the vacuum cavity, the speed reducer (6) is connected with a center rod, and the center rod drives a revolution disc (10) to revolve.
2. The vacuum coating apparatus according to claim 1, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: the first vacuum rotary importer (1) is provided with a transmission motor, the vacuum flange (5) is provided with a coupler (4), and the first vacuum rotary importer (1) is connected with the coupler (4).
3. The vacuum coating apparatus according to claim 1, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: the second vacuum rotary importer (2) is provided with a transmission motor, the vacuum flange (5) is provided with a coupler (4), and the second vacuum rotary importer (2) is connected with the coupler (4).
4. A vacuum coating apparatus according to claim 3, wherein the vacuum coating apparatus comprises a precision control target table capable of simultaneously rotating and revolving, and further comprising: the inner extending end of the second vacuum rotary importer (2) is provided with a third target spin gear (14), one side of the revolution disc (10) close to the speed reducer (6) is provided with a first target spin gear (12), the first target spin gear (12) and the revolution disc (10) are coaxially arranged, a plurality of annular pinions are arranged between the first target spin gear (12) and the revolution disc (10), each pinion is coaxially arranged with each target support (7), the third target spin gear (14) is meshed with the first target spin gear (12), and the third target spin gear (14) drives the first target spin gear (12) to drive the pinions to rotate to form target supports (7) to rotate.
5. The vacuum coating apparatus according to claim 4, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: the axis of the first target spin gear (12) is provided with a first rotation bearing base (17), the inner side of the first rotation bearing base (17) is provided with a second target spin gear (13), and the second target spin gear (13) is meshed with each pinion.
6. The vacuum coating apparatus according to claim 5, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: a pinion base is arranged between each pinion and each target holder (7), and the pinion base is sleeved on a pinion bearing (11 a).
7. The vacuum coating apparatus according to claim 5, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: the first autorotation bearing base (17) is provided with a bearing (11), and the first target spin gear (12) and the second target spin gear (13) are sleeved on the bearing (11).
8. The vacuum coating apparatus according to claim 5, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: the inner side of each target holder (7) is provided with a second anti-pollution baffle plate (16), and the inner side of the second anti-pollution baffle plate (16) is provided with a first anti-pollution baffle plate (15).
9. The vacuum coating apparatus according to claim 1, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: a third vacuum rotary importer (3) is arranged at the side of the first vacuum rotary importer (1) and the side of the second vacuum rotary importer (2), a transmission motor is arranged on the third vacuum rotary importer (3), and a baffle (8) is arranged at the inner end of the third vacuum rotary importer (3).
10. The vacuum coating apparatus according to claim 1, wherein the vacuum coating apparatus further comprises a precision control target table capable of rotating and revolving simultaneously, and further comprising: a position indication part (9) is arranged beside the target table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322220887.2U CN220812588U (en) | 2023-08-16 | 2023-08-16 | Precision control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322220887.2U CN220812588U (en) | 2023-08-16 | 2023-08-16 | Precision control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220812588U true CN220812588U (en) | 2024-04-19 |
Family
ID=90712399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322220887.2U Active CN220812588U (en) | 2023-08-16 | 2023-08-16 | Precision control target table capable of simultaneously carrying out rotation and revolution in vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220812588U (en) |
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2023
- 2023-08-16 CN CN202322220887.2U patent/CN220812588U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 230000 West, 1st Floor, 8 #, Tianyuan Dike Science and Technology Park, No. 66 Yunfei Road, High tech Zone, Hefei City, Anhui Province Patentee after: Anhui Epitaxy Technology Co.,Ltd. Country or region after: China Address before: Room 105, 1st Floor, Block B, Building H5, Phase II, Innovation Industrial Park, No. 2800, Chuangxin Avenue, High-tech Zone, Hefei City, Anhui Province, 230000 Patentee before: Anhui Epitaxy Technology Co.,Ltd. Country or region before: China |