CN206814840U - A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure - Google Patents
A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure Download PDFInfo
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- CN206814840U CN206814840U CN201720578698.4U CN201720578698U CN206814840U CN 206814840 U CN206814840 U CN 206814840U CN 201720578698 U CN201720578698 U CN 201720578698U CN 206814840 U CN206814840 U CN 206814840U
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- pipe
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Abstract
The utility model discloses a kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure, it is related to glass evacuated coating technique, new material and new technology field, the both ends of power transmission shaft are respectively arranged with gear, and gear is meshed with the first rack, first rack is arranged on the both ends of cavity, the both ends of cavity are also respectively provided with guide groove, the both sides of frame are separately installed with several directive wheels, and several directive wheels are slidably installed on guide groove, the side of cavity is provided with reductor, spur gear is installed on the axle of reductor, spur gear is meshed with the second rack, second rack is arranged on the side of frame, the rear of cavity is provided with casing., by the way that pipe is arranged in special frame, pipe enters with frame horizontal line on a production line, while is rotated around own axes for it, forms circular pipe type surface vacuum magnetic control film coating continuous production, production efficiency increases substantially, and meets pipe surface coating uniformity requirement.
Description
Technical field
A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure is the utility model is related to, belongs to glass evacuated plated film
Technology, new material and novel technique field.
Background technology
Pipe surface vacuum magnetic control film coating substantially takes uniset in recent years, tens of is once loaded in machine, at " planet "
Pipe revolves round the sun under mechanism driving and rotation, vertical type cylinder target can only once produce tens of in center, start, Wu Falian
Continuous production, efficiency is low, and membrane system is single.
The content of the invention
In view of the above-mentioned problems, the technical problems to be solved in the utility model is to provide a kind of horizontal continuous circular pipe type real surface
Empty magnetic control film coating structure.
The horizontal continuous circular pipe type surface vacuum magnetic control film coating structure of one kind of the present utility model, it includes cavity, frame, rotation
Turn pipe, power transmission shaft, the second helical gear, gear, the first rack, guide groove, directive wheel, reductor, spur gear, the second rack,
Casing, organic frame is set on cavity, several horizontal rotation pipes advanced is mounted side by side in frame, rotation pipe is by justifying
Pipe, scroll chuck, plain bearing housing, fixed bearing block, chute, screw mandrel, nut seat, handwheel and the first helical gear composition, circle
The both ends of pipe are separately installed with scroll chuck, and its one end is connected with plain bearing housing, and the other end is connected with fixed bearing block, slide
Bearing block is arranged on chute, and plain bearing housing is connected by screw mandrel with nut seat, and nut seat is connected with handwheel, fixed bearing block
One end be connected with the first helical gear, the front end of frame is provided with power transmission shaft, several second spiral shells is evenly arranged with power transmission shaft
Gear is revolved, and several second helical gears are meshed with first helical gear of several rotation pipe one end, the both ends of power transmission shaft
Gear is respectively arranged with, and gear is meshed with the first rack, the first rack is arranged on the both ends of cavity, and the both ends of cavity are also divided
Guide groove is not provided with, the both sides of frame are separately installed with several directive wheels, and several directive wheels are slidably installed on guide groove, and the one of cavity
Side is provided with reductor, and spur gear is provided with the axle of reductor, and spur gear is meshed with the second rack, and the second rack is arranged on
The side of frame, the rear of cavity are provided with casing.
Preferably, the side of described frame is provided with several position-limited wheels, position-limited wheel is mainly used in controlling rack level
Sideslip is not easy in traveling.
The beneficial effects of the utility model：It is reasonable in design, and installation is simple, easy to use, by the way that pipe is installed
In special frame, pipe enters with frame horizontal line on a production line, while is rotated around own axes, forms circular pipe type real surface
Empty magnetic control film coating continuous production, the big degree of convergence of production efficiency improve, and meet pipe surface coating uniformity requirement.
Brief description of the drawings：
For ease of explanation, the utility model is described in detail by following specific implementations and accompanying drawing.
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of frame in the utility model；
Fig. 3 is Fig. 2 side view；
Fig. 4 is the dimensional structure diagram of frame in the utility model；
Fig. 5 is the structural representation that pipe is rotated in the utility model；
Fig. 6 is the structural representation of scroll chuck in the utility model；
Fig. 7 is A portions enlarged drawing in Fig. 1；
Fig. 8 is B portions enlarged drawing in Fig. 1；
Fig. 9 is C portions enlarged drawing in Fig. 1.
1- cavitys；2- frames；2-1- position-limited wheels；3- rotates pipe；3-1- pipes；3-2- scroll chucks；3-3- sliding axles
Bearing；3-4- fixed bearing blocks；3-5- chutes；3-6- screw mandrels；3-7- nut seats；3-8- handwheels；The helical gears of 3-9- first；4-
Power transmission shaft；The helical gears of 5- second；6- gears；The racks of 7- first；8- guide grooves；9- directive wheels；10- reductors；11- spur gears；
The racks of 12- second；13- casings.
Embodiment：
As shown in Fig. 1-Fig. 9, present embodiment uses following technical scheme：It includes cavity 1, frame 2, rotational circle
Pipe 3, power transmission shaft 4, the second helical gear 5, gear 6, the first rack 7, guide groove 8, directive wheel 9, reductor 10, spur gear 11,
Two racks 12, casing 13, organic frame 2 is set on cavity 1, several horizontal rotation pipes 3 advanced are mounted side by side in frame 2,
Rotation pipe 3 be by pipe 3-1, scroll chuck 3-2, plain bearing housing 3-3, fixed bearing block 3-4, chute 3-5, screw mandrel 3-6,
Nut seat 3-7, handwheel 3-8 and the first helical gear 3-9 compositions, pipe 3-1 both ends are separately installed with scroll chuck 3-2, its
One end is connected with plain bearing housing 3-3, and the other end is connected with fixed bearing block 3-4, and plain bearing housing 3-3 is arranged on chute 3-5
On, plain bearing housing 3-3 is connected by screw mandrel 3-6 with nut seat 3-7, and nut seat 3-7 is connected with handwheel 3-8, fixed bearing block
3-4 one end is connected with the first helical gear 3-9, and the front end of frame 2 is provided with power transmission shaft 4, number is evenly arranged with power transmission shaft 4
Individual second helical gear 5, and several second helical gears 5 and the first helical gear 3-9 phases of several rotation pipe 3 one end are nibbled
Close, the both ends of power transmission shaft 4 are respectively arranged with gear 6, and gear 6 is meshed with the first rack 7, and the first rack 7 is arranged on cavity 1
Both ends, the both ends of cavity 1 are also respectively provided with guide groove 8, and the both sides of frame 2 are separately installed with several directive wheels 9, and several lead
It is slidably installed in wheel 9 on guide groove 8, the side of cavity 1 is provided with reductor 10, spur gear 11 is provided with the axle of reductor 10, directly
Gear 11 is meshed with the second rack 12, and the second rack 12 is arranged on the side of frame 2, and the rear of cavity 1 is provided with casing 13.
Wherein, the side of described frame 2 is provided with several position-limited wheel 2-1, and position-limited wheel 2-1 is mainly used in controlling frame 2
Level is not easy sideslip in advancing.
Present embodiment when in use, rotates handwheel 3-8, can make sliding bearing by nut seat 3-7, screw mandrel 3-6
Seat 3-3 axially moves together with the scroll chuck 3-2 being fixed in the above along chute, utilizes the radial direction for being distributed on movable claw on chuck
Move round tube inside diameter stretching, on a production line, rotate, lead in frame 2 while rotation pipe 3 is advanced with frame 2 is horizontal
The spur gear 11 crossed on the axle of reductor 10 rotates, and drives the second rack 12 in frame 2 to be advanced together with frame 2 is horizontal, frame 2 is horizontal
Traveling middle gear 6 passes through power transmission shaft 4, the second helical gear 5, the first helical tooth by being rotated with the relative motion of the first rack 7
Wheel 3-9 drives rotation pipe 3 to rotate.
The number of teeth of gear 6 in present embodiment is Z1=17（Root is avoided to cut minimum teeth number）, modulus is m1=3, tooth
It is Z3=23 that wheel, which rotates one week frame 2 travel distance position S=π mz, second helical gear position 5Z2=11, the first helical gear 3-9, rotation
Turn pipe 3 to rotate a circle the travel distance position H=π mz.11/23=76.6mm of frame 2, the effective sputtering zone field width of rotating cathode of selection
About 150-200mm, overlap coefficient is more than 2.
Present embodiment is uneven because of pipe itself rotary curl film layer band in order to further eliminate, also
Employ twin target, twin target is away from for H/2（38.3）Odd-multiple.From 191.57, so, two targets are in magnetron sputtering in circle
180 ° of pipe surface formation helical form film layer band difference, which is overlapped mutually, further increases pipe surface coating uniformity.
Present embodiment is reasonable in design, and installation is simple, easy to use, by the way that pipe is arranged on into special frame
On, pipe enters with frame horizontal line on a production line, while is rotated around own axes, forms circular pipe type surface vacuum magnetic control film coating
Continuous production, production efficiency increase substantially, and meet pipe surface coating uniformity requirement.
The advantages of general principle and principal character of the present utility model and the utility model has been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the utility model is not restricted to the described embodiments, described in above-described embodiment and specification
Simply illustrate principle of the present utility model, on the premise of the spirit and scope of the utility model is not departed from, the utility model is also
Various changes and modifications are had, these changes and improvements are both fallen within claimed the scope of the utility model.The utility model
Claimed scope is by appended claims and its equivalent thereof.
Claims (2)
- A kind of 1. horizontal continuous circular pipe type surface vacuum magnetic control film coating structure, it is characterised in that：It includes cavity (1), frame (2) pipe (3), power transmission shaft (4), the second helical gear (5), gear (6), the first rack (7), guide groove (8), directive wheel, are rotated (9), reductor (10), spur gear (11), the second rack (12), casing (13), organic frame (2), frame are set on cavity (1) (2) several horizontal rotation pipes (3) advanced are mounted side by side on, rotation pipe (3) is by pipe (3-1), scroll chuck (3- 2), plain bearing housing (3-3), fixed bearing block (3-4), chute (3-5), screw mandrel (3-6), nut seat (3-7), handwheel (3-8) Formed with the first helical gear (3-9), the both ends of pipe (3-1) are separately installed with scroll chuck (3-2), and its one end is connected with cunning Moving axis bearing (3-3), the other end are connected with fixed bearing block (3-4), and plain bearing housing (3-3) is arranged on chute (3-5), sliding Moving axis bearing (3-3) is connected by screw mandrel (3-6) with nut seat (3-7), and nut seat (3-7) is connected with handwheel (3-8), fixing axle One end of bearing (3-4) is connected with the first helical gear (3-9), and the front end of frame (2) is provided with power transmission shaft (4), power transmission shaft (4) On be evenly arranged with several second helical gears (5), and several second helical gears (5) and several rotation pipe (3) one end First helical gear (3-9) is meshed, and the both ends of power transmission shaft (4) are respectively arranged with gear (6), and gear (6) and the first rack (7) it is meshed, the first rack (7) is arranged on the both ends of cavity (1), and the both ends of cavity (1) are also respectively provided with guide groove (8), machine The both sides of frame (2) are separately installed with several directive wheels (9), and several directive wheels (9) are slidably installed on guide groove (8), and the one of cavity (1) Side is provided with reductor (10), and spur gear (11), spur gear (11) and the second rack (12) are provided with the axle of reductor (10) It is meshed, the second rack (12) is arranged on the side of frame (2), and the rear of cavity (1) is provided with casing (13).
- 2. the horizontal continuous circular pipe type surface vacuum magnetic control film coating structure of one kind according to claim 1, it is characterised in that：Institute The side for the frame (2) stated is provided with several position-limited wheels (2-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720578698.4U CN206814840U (en) | 2017-05-23 | 2017-05-23 | A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720578698.4U CN206814840U (en) | 2017-05-23 | 2017-05-23 | A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure |
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| Publication Number | Publication Date |
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| CN206814840U true CN206814840U (en) | 2017-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720578698.4U Active CN206814840U (en) | 2017-05-23 | 2017-05-23 | A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure |
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| CN (1) | CN206814840U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107022748A (en) * | 2017-05-23 | 2017-08-08 | 上海子创镀膜技术有限公司 | A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure |
| CN110527966A (en) * | 2019-09-05 | 2019-12-03 | 西安交通大学 | A kind of horizontal magnetron sputtering apparatus for long tube plated film |
-
2017
- 2017-05-23 CN CN201720578698.4U patent/CN206814840U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107022748A (en) * | 2017-05-23 | 2017-08-08 | 上海子创镀膜技术有限公司 | A kind of horizontal continuous circular pipe type surface vacuum magnetic control film coating structure |
| CN110527966A (en) * | 2019-09-05 | 2019-12-03 | 西安交通大学 | A kind of horizontal magnetron sputtering apparatus for long tube plated film |
| CN110527966B (en) * | 2019-09-05 | 2021-01-08 | 西安交通大学 | Horizontal magnetron sputtering equipment for long pipe coating |
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