CN101311297B - Three-dimensional revolving gear of workpieces of vacuum film coating equipment - Google Patents

Three-dimensional revolving gear of workpieces of vacuum film coating equipment Download PDF

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Publication number
CN101311297B
CN101311297B CN2008100177805A CN200810017780A CN101311297B CN 101311297 B CN101311297 B CN 101311297B CN 2008100177805 A CN2008100177805 A CN 2008100177805A CN 200810017780 A CN200810017780 A CN 200810017780A CN 101311297 B CN101311297 B CN 101311297B
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workpiece
rotation
rotary
rotary table
bar
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CN101311297A (en
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范多旺
范多进
杨树本
牛晓山
武福
孔令刚
王成龙
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Lanzhou Dacheng Technology Co., Ltd.
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Lanzhou Dacheng Technology Co Ltd
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Abstract

The invention relates to a three-dimensional rotation mechanism of a vacuum coating equipment workpiece, which comprises a power input shaft (1-1), a supporting pedestal of a revolution table (1-2), a revolution rotary bearing (1-3), a rotary connecting table (1-4) of a revolution table, the revolution table (1-5); wherein, the revolution table (1-5) is provided with a support bar (13) of a workpiece turntable, an upper bracket (14) is arranged above the support bar (13) of the workpiece turntable; a workpiece bar (4) is connected with the upper bracket (14) by a rotary supporting pedestal (15); the workpiece bar (4) is provided with a workpiece rotation axis (11). The mechanism is characterized in that the revolution table (1-5) is provided with a workpiece rotation and workpiece revolving mechanism, and the rotary connecting table (1-4) of the revolution table is fixedly connected with a rotation gear table (2-2). The mechanism can realize four different moving effects of the workpiece, i.e. revolution, revolution and revolving, revolution and rotation, revolution and rotation and revolving in the vacuum environment, has the advantages of flexibility and diversity as well as improves coating quality and productivity effect.

Description

Three-dimensional revolving gear of workpieces of vacuum film coating equipment
Technical field:
The present invention relates generally to vacuum coating film equipment, relates in particular to the structure of film-coating workpiece turret.
Background technology:
Adopting vacuum coating technology is one of approach of the various performance films of preparation at present, the workpiece pivoted frame of conventional vacuum coating film equipment only has revolution, the function of revolution+rotation, exist peripheral plated film inhomogeneous for this reason, local exposed face plating less than or uneven coating even, circulating type outside body can not be finished vacuum plating by a clamping.
Summary of the invention:
The objective of the invention is to avoid the deficiencies in the prior art part and a kind of three-dimensional revolving gear of workpieces of vacuum film coating equipment is provided, can realize that workpiece is in vacuum environment. the movement effects of revolution, revolution+rotation, revolution+rotation, revolution+rotation+four kinds of different states of rotation, possess handiness, diversity, improve coating quality and production efficiency.
Purpose of the present invention can be by realizing by the following technical solutions: a kind of three-dimensional revolving gear of workpieces of vacuum film coating equipment, include power input shaft (1-1), rotary table supporting seat (1-2), revolution rolling bearing (1-3), the rotary table dish (1-4) that is rotationally connected, rotary table (1-5), on rotary table (1-5), be provided with workpiece carousel supports bar (13), workpiece carousel supports bar (13) top is provided with upper bracket (14), workpiece bar (4) is connected with upper bracket (14) by location rotational support seat (15) in the rotation of workpiece bar, workpiece bar (4) is provided with Workpiece Rotating axle (11), Workpiece Rotating axle (11) is connected by rotation transfer chain chain (12), its principal feature is: be provided with workpiece rotation and Workpiece Rotating mechanism on rotary table (1-5), be rotationally connected dish (1-4) and rotating gear dish (2-2) of rotary table is connected, and is provided with autorotation disk fixed supporting seat (2-1) on rotating gear dish (2-2).
Described workpiece free-wheeling system is that described rotating gear dish (2-2) is meshed with rotating gear (2-3), rotating gear (2-3) is meshed with middle wheel (2-5), middle wheel (2-5) is connected with rotation tubular shaft (2-4), and is connected with workpiece rotation rotary connector (8) and workpiece bar (4).
Described Workpiece Rotating mechanism is that described rotating gear dish (2-2) is meshed with swing pinion (3-1), be provided with the dish (3-3) that is rotatably connected between swing pinion (3-1) and the rotary middle spindle (3-2), the dish (3-3) that is rotatably connected is connected with swing pinion (3-1), rotary middle spindle (3-2); Be provided with conical gear (5-1) on rotary middle spindle (3-2), with the conical gear (5-2) and Workpiece Rotating axle (11) Joint of its engagement, Workpiece Rotating axle (11) is located on the workpiece rotation rotary connector (8).
Described three-dimensional revolving gear of workpieces of vacuum film coating equipment also includes and be provided with locking spindle nose (6-1) on described rotary table (1-5), and locking spindle nose (6-1) produces plate (6-2) by rotation and is connected with rotary middle spindle (3-2).When rotary middle spindle (3-2) does not rotate and workpiece rotation rotary connector (8) when being in autorotation, the Workpiece Rotating axle (11) that is installed on the rotation rotary connector (8) carries out spinning motion with rotation rotary connector (8), do not rotate with the conical gear (5-1) that rotary middle spindle (3-2) is connected this moment, and the conical gear that is engaged with (5-2) carries out spinning motion, Workpiece Rotating axle (11) has been produced rotatablely move.
Described rotary table (1-5) is connected with bearing support (7), is provided with bearing (17) between bearing support (7) and the rotation tubular shaft (2-4); Be provided with bearing (16) between rotation tubular shaft (2-4) and the rotary middle spindle (3-2).
Described three-dimensional revolving gear of workpieces of vacuum film coating equipment also includes described workpiece rotation rotary connector (8) and is connected mutually with rotation constraint gag lever post (9), and rotation constraint gag lever post (9) is fixed on the rotary table (1-5).This state retrains gag lever post (9) by rotation rotation rotary connector (8) is constrained in a fixed position, to realize not rotation of workpiece.
Described three-dimensional revolving gear of workpieces of vacuum film coating equipment is provided with rotation connecting joint (10) between described workpiece bar (4) and workpiece rotation rotary connector (8).
The invention has the beneficial effects as follows:
1. this traveling mechanism can flexible Application, accomplishes: (1). revolution; (2). revolution+rotation; (3) revolution+rotation; (4) revolution+rotation+rotation, the movement effects of four kinds of different states possesses handiness, multifunctionality.
2. in vacuum plating is produced, realized that the vacuum plating of different workpieces satisfies the diversity requirement of different installation under the situation that difference requires, have wide adaptability.
3. realized that the disposable clamping of workpiece finishes the vacuum plating of all exposed surfaces.
4. multifunctional vacuum filming equipment three-dimensional revolving gear of workpieces is installed and used when vacuum plating, solve original vacuum coating film equipment and the time need repeatedly change direction and to cause the superficial film problem of non-uniform being coated with the complex part surface, improved coating quality and production efficiency.
5. multifunctional vacuum filming equipment three-dimensional revolving gear of workpieces uses in vacuum coating film equipment.
Description of drawings:
Fig. 1 is an overall structure synoptic diagram of the present invention;
Fig. 2 is the mounting structure synoptic diagram of embodiments of the invention 1;
Fig. 3 is the mounting structure synoptic diagram of embodiments of the invention 2;
Fig. 4 is the mounting structure synoptic diagram of embodiments of the invention 3;
Fig. 5 is the mounting structure synoptic diagram of embodiments of the invention 4.
Embodiment:
Be described in further detail below in conjunction with the most preferred embodiment shown in the accompanying drawing:
Embodiment 1, see Fig. 1, Fig. 2, a kind of three-dimensional revolving gear of workpieces of vacuum film coating equipment, include power input shaft 1-1, rotary table supporting seat 1-2, revolution rolling bearing 1-3, rotary table is rotationally connected and coils 1-4, rotary table 1-5, on rotary table 1-5, be provided with workpiece carousel supports bar 13, workpiece carousel supports bar 13 tops are provided with upper bracket 14, workpiece bar 4 is connected with upper bracket 14 by location rotational support seat 15 in the rotation of workpiece bar, workpiece bar 4 is provided with Workpiece Rotating axle 11, Workpiece Rotating axle 11 is located on the workpiece rotation rotary connector 8, be provided with rotation connecting joint 10 between workpiece bar 4 and the workpiece rotation rotary connector 8, Workpiece Rotating axle 11 is connected by rotation transfer chain chain 12, is provided with workpiece rotation and Workpiece Rotating mechanism on rotary table 1-5.Rotary table 1-5 and bearing support 7 are connected, and are provided with bearing 17 between bearing support 7 and the rotation tubular shaft 2-4; Be provided with bearing 16 between rotation tubular shaft 2-4 and the rotary middle spindle 3-2.This state rotation tubular shaft 2-4, turning axle 3-2, workpiece rotation rotary connector 8 and Workpiece Rotating axle 11 all do not rotate, all parts that are connected with autorotation disk all are in disengaged condition, the input of external motor power, driving power input shaft 1-1 rotates, make rotary table 1-5 do circumferential motion around input shaft, the workpiece bar that is fixed on the rotary table 1-5 is done the circumference revolution motion synchronously.
Embodiment 2, see Fig. 1, Fig. 3, a kind of three-dimensional revolving gear of workpieces of vacuum film coating equipment, include power input shaft 1-1, rotary table supporting seat 1-2, revolution rolling bearing 1-3, rotary table is rotationally connected and coils 1-4, rotary table 1-5, on rotary table 1-5, be provided with workpiece carousel supports bar 13, workpiece carousel supports bar 13 tops are provided with upper bracket 14, workpiece bar 4 is connected with upper bracket 14 by location rotational support seat 15 in the rotation of workpiece bar, workpiece bar 4 is provided with Workpiece Rotating axle 11, Workpiece Rotating axle 11 is located on the workpiece rotation rotary connector 8, be provided with rotation connecting joint 10 between workpiece bar 4 and the workpiece rotation rotary connector 8, Workpiece Rotating axle 11 is connected by rotation transfer chain chain 12, is provided with workpiece rotation and Workpiece Rotating mechanism on rotary table 1-5.Rotary table 1-5 and bearing support 7 are connected, rotating gear dish 2-2 is provided with autorotation disk fixed supporting seat 2-1, the rotating gear dish 2-2 of workpiece free-wheeling system is meshed with rotating gear 2-3, rotating gear 2-3 is meshed with middle wheel 2-5, middle wheel 2-5 and rotation tubular shaft 2-4 are connected, and are connected with workpiece rotation rotary connector 8 and workpiece bar 4.External motor power input this moment drives power input shaft 1-1 and rotates, and makes rotary table 1-5 do circumferential motion around input shaft, and the workpiece bar 4 that is fixed on the rotary table 1-5 is done the circumference revolution motion synchronously; Rotating gear 2-3 and autorotation disk 2-2 engagement simultaneously, rotating gear 2-3 and middle wheel 2-5 engagement, thereby make rotation tubular shaft 2-4 produce spinning motion, thereby make 4 rotations of workpiece bar, realized the motion of revolution+rotation by the automatic rotary connector 8 of workpiece around rotary middle spindle 3-2.
Embodiment 3, see Fig. 1, Fig. 4, a kind of three-dimensional revolving gear of workpieces of vacuum film coating equipment, include power input shaft 1-1, rotary table supporting seat 1-2, revolution rolling bearing 1-3, rotary table is rotationally connected and coils 1-4, rotary table 1-5, on rotary table 1-5, be provided with workpiece carousel supports bar 13, workpiece carousel supports bar 13 tops are provided with upper bracket 14, workpiece bar 4 is connected with upper bracket 14 by location rotational support seat 15 in the rotation of workpiece bar, workpiece bar 4 is provided with Workpiece Rotating axle 11, Workpiece Rotating axle 11 is located on the workpiece rotation rotary connector 8, be provided with rotation connecting joint 10 between workpiece bar 4 and the workpiece rotation rotary connector 8, workpiece rotation rotary connector 8 is connected mutually with rotation constraint gag lever post 9, and rotation constraint gag lever post 9 is fixed on the rotary table 1-5.This state constrains in a fixed position by rotation constraint gag lever post 9 with rotation rotary connector 8, to realize not rotation of workpiece.Workpiece Rotating axle 11 is connected by rotation transfer chain chain 12, is provided with workpiece rotation and Workpiece Rotating mechanism on rotary table 1-5.Rotary table 1-5 and bearing support 7 are connected, and are provided with bearing 17 between bearing support 7 and the rotation tubular shaft 2-4; Be provided with bearing 16 between rotation tubular shaft 2-4 and the rotary middle spindle 3-2.Rotating gear dish 2-2 is provided with autorotation disk fixed supporting seat 2-1, rotating gear dish 2-2 is meshed with swing pinion 3-1, be provided with the dish 3-3 that is rotatably connected between swing pinion 3-1 and the rotary middle spindle 3-2, be rotatably connected dish 3-3 and swing pinion 3-1, rotary middle spindle 3-2 are connected; On rotary middle spindle 3-2, be provided with conical gear 5-1, with the conical gear 5-2 and Workpiece Rotating axle 11 Joints of its engagement.At this moment, external motor power input drives power input shaft 1-1 and rotates, and makes rotary table 1-5 do circumferential motion around input shaft, and the workpiece bar that is fixed on the rotary table 1-5 is done the circumference revolution motion synchronously; Swing pinion 3-1 and autorotation disk 2-2 engagement rotate turning axle 3-2, and turning axle 3-2 drives transmission conical gear 5-2 through conical gear 5-1, thereby make Workpiece Rotating axle 11 produce rotation.By chain 12 Workpiece Rotating axle 11 is all rotated, realize the motion of revolution+rotation.
Embodiment 4, see Fig. 1, Fig. 5, a kind of three-dimensional revolving gear of workpieces of vacuum film coating equipment, include power input shaft 1-1, rotary table supporting seat 1-2, revolution rolling bearing 1-3, rotary table is rotationally connected and coils 1-4, rotary table 1-5, on rotary table 1-5, be provided with workpiece carousel supports bar 13, workpiece carousel supports bar 13 tops are provided with upper bracket 14, workpiece bar 4 is connected with upper bracket 14 by location rotational support seat 15 in the rotation of workpiece bar, workpiece bar 4 is provided with Workpiece Rotating axle 11, Workpiece Rotating axle 11 is located on the workpiece rotation rotary connector 8, be provided with rotation connecting joint 10 between workpiece bar 4 and the workpiece rotation rotary connector 8, Workpiece Rotating axle 11 is connected by rotation transfer chain chain 12, is provided with workpiece rotation and Workpiece Rotating mechanism on rotary table 1-5.Rotary table 1-5 and bearing support 7 are connected, rotating gear dish 2-2 is provided with autorotation disk fixed supporting seat 2-1, the rotating gear dish 2-2 of workpiece free-wheeling system is meshed with rotating gear 2-3, rotary table 1-5 is provided with locking spindle nose 6-1, and locking spindle nose 6-1 produces plate 6-2 by rotation and rotary middle spindle 3-2 is connected.When rotary middle spindle 3-2 does not rotate and workpiece rotation rotary connector 8 when being in autorotation, the Workpiece Rotating axle 11 that is installed on the rotation rotary connector 8 carries out spinning motion with rotation rotary connector 8, do not rotate with the conical gear 5-1 that rotary middle spindle 3-2 is connected this moment, and the conical gear 5-2 that is engaged with carries out spinning motion, Workpiece Rotating axle 11 has been produced rotatablely move.External motor power input meanwhile drives power input shaft 1-1 and rotates, and makes rotary table 1-5 do circumferential motion around input shaft, and the workpiece bar 4 that is fixed on the rotary table 1-5 is done the circumference revolution motion synchronously; Rotating gear 2-3 and autorotation disk 2-2 engagement, rotating gear 2-3 and middle wheel 2-5 engagement, thereby make rotation tubular shaft 2-4 produce spinning motion around rotary middle spindle 3-2, Workpiece Rotating axle 11 rotates by the transmission of chain 12 and the engaged transmission of conical gear 5-1 and conical gear 5-2, has realized the motion of revolution+rotation+rotation.

Claims (5)

1. three-dimensional revolving gear of workpieces of vacuum film coating equipment, include power input shaft (1-1), rotary table supporting seat (1-2), revolution rolling bearing (1-3), the rotary table dish (1-4) that is rotationally connected, rotary table (1-5), on rotary table (1-5), be provided with workpiece carousel supports bar (13), workpiece carousel supports bar (13) top is provided with upper bracket (14), workpiece bar (4) is connected with upper bracket (14) by location rotational support seat (15) in the rotation of workpiece bar, workpiece bar (4) is provided with Workpiece Rotating axle (11), Workpiece Rotating axle (11) is connected by rotation transfer chain chain (12), it is characterized in that: on rotary table (1-5), be provided with workpiece rotation and Workpiece Rotating mechanism, be rotationally connected dish (1-4) and rotating gear dish (2-2) of rotary table is connected, and is provided with autorotation disk fixed supporting seat (2-1) on rotating gear dish (2-2);
Described workpiece free-wheeling system is that described rotating gear dish (2-2) is meshed with rotating gear (2-3), rotating gear (2-3) is meshed with middle wheel (2-5), middle wheel (2-5) is connected with rotation tubular shaft (2-4), and is connected with workpiece rotation rotary connector (8) and workpiece bar (4);
Described Workpiece Rotating mechanism is that described rotating gear dish (2-2) is meshed with swing pinion (3-1), be provided with the dish (3-3) that is rotatably connected between swing pinion (3-1) and the rotary middle spindle (3-2), the dish (3-3) that is rotatably connected is connected with swing pinion (3-1), rotary middle spindle (3-2); Be provided with conical gear (5-1) on rotary middle spindle (3-2), with the conical gear (5-2) and Workpiece Rotating axle (11) Joint of its engagement, Workpiece Rotating axle (11) is located on the workpiece rotation rotary connector (8).
2. three-dimensional revolving gear of workpieces of vacuum film coating equipment as claimed in claim 1, it is characterized in that: also include and be provided with locking spindle nose (6-1) on described rotary table (1-5), locking spindle nose (6-1) produces plate (6-2) by rotation and is connected with rotary middle spindle (3-2).
3. three-dimensional revolving gear of workpieces of vacuum film coating equipment as claimed in claim 1 or 2 is characterized in that: described rotary table (1-5) is connected with bearing support (7), is provided with bearing (17) between bearing support (7) and the rotation tubular shaft (2-4); Be provided with bearing (16) between rotation tubular shaft (2-4) and the rotary middle spindle (3-2).
4. three-dimensional revolving gear of workpieces of vacuum film coating equipment as claimed in claim 1, it is characterized in that: also include described workpiece rotation rotary connector (8) and be connected mutually with rotation constraint gag lever post (9), rotation constraint gag lever post (9) is fixed on the rotary table (1-5).
5. three-dimensional revolving gear of workpieces of vacuum film coating equipment as claimed in claim 1 is characterized in that: be provided with rotation connecting joint (10) between described workpiece bar (4) and workpiece rotation rotary connector (8).
CN2008100177805A 2008-03-12 2008-03-12 Three-dimensional revolving gear of workpieces of vacuum film coating equipment Active CN101311297B (en)

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CN102219398B (en) * 2011-03-15 2013-06-19 中国科学院半导体研究所 Clamp used for uniformly evaporating anti-reflection film on side surface of optical fiber
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