CN209178472U - Vacuum coating equipment - Google Patents
Vacuum coating equipment Download PDFInfo
- Publication number
- CN209178472U CN209178472U CN201822016375.3U CN201822016375U CN209178472U CN 209178472 U CN209178472 U CN 209178472U CN 201822016375 U CN201822016375 U CN 201822016375U CN 209178472 U CN209178472 U CN 209178472U
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- traffic cycle
- gear
- mini
- roundabout
- coating equipment
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Abstract
It includes plated film cylinder, vacuum evacuation device and the material delivery system that Coating Materials is conveyed into plated film cylinder that the utility model, which discloses a kind of vacuum coating equipment,.Plated film cylinder crosses the accommodating cavity for holding workpiece to be plated, rotating turret for carrying and driving workpiece rotation to be plated is installed in accommodating cavity, rotating turret includes traffic cycle and the mini-roundabout positioned at traffic cycle outer rim, the outer ring surface of traffic cycle is equipped with the first teeth, mini-roundabout is installed on traffic cycle oblique upper by a fixing axle, and first gear is also actively arranged with outside fixing axle, fixing axle is outwardly convexly equipped with the first holding section, the inner ring surface of first gear is provided with the second holding section matched with the first holding section, mini-roundabout is meshed by the connection realization between first gear and the first teeth with traffic cycle.So that the vacuum coating equipment of the utility model traffic cycle and both mini-roundabouts motor pattern diversification and use more flexible.
Description
Technical field
The utility model relates to machinery field more particularly to a kind of vacuum coating equipments.
Background technique
Vacuum coating equipment refers mainly to a kind of machine for needing to carry out plated film under higher vacuum.Not according to plated film mode
It is evaporated with vacuum ionic can be divided into again, magnetron sputtering, MBE molecular beam epitaxy, PLD pulsed laser deposition etc..
It is well known that the rotating turret for clamping workpiece to be plated is fitted in vacuum coating equipment, existing rotating turret base
Originally being all includes rotation axis, traffic cycle and several mini-roundabouts.Wherein, rotation axis is set in the accommodating cavity of plated film cylinder
Between, the output end of rotation axis connect with traffic cycle and traffic cycle is driven to rotate, several mini-roundabouts are fixed on traffic cycle, therefore are worked as
When rotation axis drives traffic cycle rotation, several mini-roundabouts being fixed on traffic cycle can also be followed by traffic cycle and turn together
It is dynamic, it is Union Movement between traffic cycle and mini-roundabout, mini-roundabout cannot be rotated independently.And with the rapid development of society, work
Part shape also becomes increasingly complex, and coating type is also more and more diversified, such especially for some color interferometric films
Coating is very sensitive for thicknesses of layers, and existing traffic cycle together with the rotating turret that mini-roundabout rotates together be not able to satisfy then with
Upper process requirements.
Therefore, the vacuum coating equipment of a kind of traffic cycle and mini-roundabout motion mode multiplicity is needed to overcome above-mentioned defect.
Utility model content
The purpose of this utility model is to provide the vacuum coating equipments of a kind of traffic cycle and mini-roundabout motion mode multiplicity.
To achieve the goals above, the utility model provides a kind of vacuum coating equipment, including plated film cylinder, vacuum means
The material delivery system of Coating Materials is set and conveys into the plated film cylinder, the plated film cylinder crosses to be plated for holding
The accommodating cavity of workpiece is equipped with the rotating turret for carrying and driving workpiece rotation to be plated, the rotating turret in the accommodating cavity
Including traffic cycle and positioned at the mini-roundabout of traffic cycle outer rim, the outer ring surface of the traffic cycle is equipped with the first teeth, the mini-roundabout
It is installed on the traffic cycle oblique upper by a fixing axle, and is also actively arranged with first gear outside the fixing axle, it is described
Fixing axle is outwardly convexly equipped with the first holding section, and the inner ring surface of the first gear is provided with and first holding section
The second holding section matched, the mini-roundabout is realized by the connection between the first gear and first teeth and institute
Traffic cycle is stated to be meshed.
Preferably, the rotating middle shaft line of the traffic cycle and the rotating middle shaft line of the mini-roundabout are parallel to each other.
Preferably, the vacuum coating equipment further includes being set to below the first gear and supporting the first gear
Ball bearing and the first driving mechanism for driving the ball bearing to slide along the fixing axle.
Preferably, the vacuum coating equipment also packet telescoping mechanism, the output end of the telescoping mechanism are fixedly connected with second
Gear, the outer ring surface of the mini-roundabout are provided with the second teeth, and the telescoping mechanism drives the second gear along the accommodating
The up and down direction of chamber is mobile, and the second gear is selectively meshed or is detached from second teeth of the mini-roundabout
Connection
Preferably, the vacuum coating equipment further includes rotating mechanism, the output end of the telescoping mechanism passes through the rotation
Mechanism is fixedly connected with the second gear, and the second gear is installed on the output end of the rotating mechanism.
Preferably, the rotating turret further includes the second driving mechanism, the inner ring surface of the traffic cycle is provided with third teeth,
Second driving mechanism is meshed with the traffic cycle by the third teeth and the traffic cycle is driven to rotate.
Preferably, the bottom of the accommodating cavity is additionally provided with several idler wheels, the idler wheel be located at the traffic cycle just under
Traffic cycle described in side and support, the rotating middle shaft line of the idler wheel are mutually perpendicular to the rotating middle shaft line of the traffic cycle.
Preferably, the cross section of first holding section is in T font.
Preferably, the upper surface of the traffic cycle is provided with the groove of annular, it is equipped in the groove of the annular several
Ball, the top of the ball is protruding upward in the groove and to be connected to the bottom of the mini-roundabout.
Preferably, the bottom of the traffic cycle is downwardly convex to be equipped with the first locking part, the inner wall of the accommodating cavity is convexly equipped with
Two locking parts, one end of the fixing axle selectively connect with first locking part or connect with second locking part
It connects.
Compared with prior art, the first teeth are equipped with by the outer ring surface in traffic cycle due to the utility model, for solid
Determine actively to be arranged with first gear in the fixing axle of mini-roundabout；It is rotated when it is only necessary to traffic cycle rotations without mini-roundabout
When, first gear can be slid into along fixing axle and be disconnected with traffic cycle, traffic cycle is small when rotation at this time
Turntable not can rotate；When need traffic cycle rotation while mini-roundabout also using the central axes of oneself as rotation center rotation when
It waits, then can be intermeshed by being slid into along fixing axle first gear with the first teeth of traffic cycle, traffic cycle at this time
Rotation can drive first gear to rotate, and since first gear passes through being connected together for the first holding section and the second holding section at this time
And be fixedly connected with fixing axle, therefore first gear can also drive fixing axle to rotate in the rotation, to realize driving peace
Loaded on the mini-roundabout rotation in fixing axle, so that the movement of the traffic cycle and both mini-roundabouts of the vacuum coating equipment of the utility model
It mode diversification and uses more flexible.
Detailed description of the invention
Fig. 1 is the top view of the vacuum coating equipment of the utility model.
Fig. 2 is traffic cycle, mini-roundabout, telescoping mechanism, the rotating mechanism, the second driving of the vacuum coating equipment of the utility model
Mechanism and the structural schematic diagram of plated film cylinder connection.
Fig. 3 is the traffic cycle, mini-roundabout, telescoping mechanism, rotation of the vacuum coating equipment of the vacuum coating equipment of the utility model
Mechanism and the overlooking structure diagram of the second driving mechanism connection.
Fig. 4 is the top view of the fixing axle of the vacuum coating equipment of the utility model.
Specific embodiment
For technology contents, the construction feature, the effect realized that the utility model is described in detail, below in conjunction with embodiment
And attached drawing is cooperated to be explained in detail.
Please refer to Fig. 1 to Fig. 3, the vacuum coating equipment 100 of the utility model include plated film cylinder 10, vacuum evacuation device 20 with
And the material delivery system 30 of Coating Materials is conveyed into plated film cylinder 10.Plated film cylinder 10 is crossed for holding workpiece to be plated
Rotating turret 40 for carrying and driving workpiece rotation to be plated is installed, rotating turret 40 wraps in accommodating cavity 100a, accommodating cavity 100a
Include traffic cycle 41 and the mini-roundabout 42 positioned at 41 outer rim of traffic cycle；Specifically, the rotating middle shaft line of traffic cycle 41 and mini-roundabout 42
Rotating middle shaft line be parallel to each other, i other words traffic cycle 41 and mini-roundabout 42 be it is arranged in parallel, ensure that workpiece to be plated
It can smoothly be placed on traffic cycle 41 and mini-roundabout 42, but not limited to this.The outer ring surface of traffic cycle 41 is equipped with the first tooth
Tooth 411, mini-roundabout 42 are installed on 41 oblique upper of traffic cycle by a fixing axle 50, and the is also actively arranged with outside fixing axle 50
One gear 60, fixing axle 50 are outwardly convexly equipped with the first holding section 51, and the inner ring surface of first gear 60 is provided with and the
The second holding section 61 that one holding section 51 matches, mini-roundabout 42 are meshed by first gear 60 with traffic cycle 41.Specifically,
The cross section of first holding section 51 is in T font, and the second holding section 61, which is recessed inwardly, to be had with the first holding section 51 to matched shape,
Therefore first gear 60 can only be moved up along the vertical direction and is connected together with fixing axle 50, and when first gear 60 and be fixed
Axis 50 is connected together more stable, but not limited to this.It is preferably the first teeth of the first holding section 51 and traffic cycle 41
411 are located in same level, thus while first gear 60 and the first holding section 51 are connected together also with traffic cycle 41
It is meshed, but not limited to this.
Please continue to refer to Fig. 1 to Fig. 3, the vacuum coating equipment 100 of the utility model further includes being set to below gear and propping up
Support the ball bearing 70 of gear, the first driving mechanism 80 that driving ball bearing 70 is slided along fixing axle 50, telescoping mechanism 90, rotation
Rotation mechanism 110, the second driving mechanism 120, the first locking part 130 and the second locking part 140.It is driven by the first driving mechanism 80
Dynamic ball bearing 70 is slided along fixing axle 50 so that the first gear 60 being set on ball bearing 70 is also along fixing axle 50
Sliding, and then being connected together or be detached from and being connected together for first gear 60 and fixing axle 50 is realized, and ball bearing 70 is not
It can hinder the rotation of first gear 60；The output end of telescoping mechanism 90 is fixedly connected with rotating mechanism 110, rotating mechanism 110
Output end is fixedly connected with second gear 111, and the outer ring surface of mini-roundabout 42 is provided with the second teeth 421, therefore telescoping mechanism 90 can
To drive rotating mechanism 110 and second gear 111 vertically moving and second gear 111 is made to be meshed with mini-roundabout 42,
Then the rotation of second gear 111 is driven to drive the rotation of mini-roundabout 42 by rotating mechanism 110 again, therefore mini-roundabout 42 is in addition to can
It is realized outside rotation with being driven by traffic cycle 41, can also be driven by second gear 111 and realize rotation, so that mini-roundabout 42
Velocity of rotation diversification；When not needing to drive mini-roundabout 42 to rotate by second gear 111, it is only necessary to by flexible
Mechanism 90 drives second gear 111 and rotating mechanism 110 to move downward together and second gear 111 is not nibbled with mini-roundabout 42
Conjunction.The inner ring surface of traffic cycle 41 is provided with third teeth 412, and the second driving mechanism 120 is meshed and drives with traffic cycle 41
Dynamic traffic cycle 41 rotates, therefore avoids the rotation in the middle part of accommodating cavity 100a setting one for driving traffic cycle 41 to rotate
Axis, therefore can be in the middle part vacating space of accommodating cavity 100a for installing other devices, so that the vacuum coating of the utility model
The installation of each components of machine 100 is more reasonable and simple and compact for structure.If the bottom of accommodating cavity 100a is additionally provided with dry milling
Wheel 150, idler wheel 150 are located at the underface of traffic cycle 41 and support traffic cycle 41, the rotating middle shaft line and traffic cycle 41 of idler wheel 150
Rotating middle shaft line be mutually perpendicular to.Specifically, the upper surface of traffic cycle 41 is provided with the groove 41a, annular groove 41a of annular
Several balls 413 are inside installed, the top of ball 413 is protruding upward in groove 41a and to be connected to the bottom of mini-roundabout 42, therefore small
Except turntable 42 is supported in accommodating cavity 100a except through fixing axle 50, also by being provided with ball on traffic cycle 41
413 and support mini-roundabout 42 on traffic cycle 41, further ensuring that mini-roundabout 42 can more firmly be fixed in accommodating cavity
In 100a.The bottom of traffic cycle 41 is downwardly convex to be equipped with the first locking part 130, and the inner wall of accommodating cavity 100a is convexly equipped with the second locking part
140, it is preferably that mini-roundabout 42, fixing axle 50, first gear 60, ball bearing 70 and the first driving mechanism 80 are respectively mounted
In selectively connect with the first locking part 130 in a supporting support 200 and by one end of the supporting support 200 or with
The connection of second locking part 140, and then realize mini-roundabout 42 and follow that traffic cycle 41 rotates together or mini-roundabout 42 does not follow greatly
Turntable 41 rotates together.It is preferably that the first locking part 130 and second firmware are screw, and one end of fixing axle 50 can lead to
It crosses screw to be fixed on the inner sidewall of 41 bottom of traffic cycle or accommodating cavity 100a, therefore mini-roundabout 42 and traffic cycle 41 may be implemented
Rotation or mini-roundabout 42 is not as traffic cycle 41 rotates together when 41 rotation of traffic cycle together, so that the utility model
The motor pattern of traffic cycle 41 and mini-roundabout 42 is more diversified.
Below in conjunction with attached drawing, a variety of fortune of traffic cycle 41 and mini-roundabout 42 to the vacuum coating equipment 100 of the utility model
Dynamic model formula is further described:
When only need traffic cycle 41 from then mini-roundabout 42 be fixed on motionless in accommodating cavity 100a when, fixing axle 50
Bottom is fixed on the inner sidewall of accommodating cavity 100a by the second locking part 140, drives traffic cycle 41 by the second driving device
Rotation；When needing 41 rotation of traffic cycle, mini-roundabout 42 is in rotation with the rotating middle shaft line of 41 rotation of traffic cycle
When the heart rotates, the bottom of fixing axle 50 is fixed on the bottom of traffic cycle 41 by the first locking part 130, passes through the second driving device
Traffic cycle 41 is driven to rotate；The also rotation of mini-roundabout 42 while needing 41 rotation of traffic cycle passes through the first driving at this time
Mechanism 80 drives 413 bearing 70 of ball along 50 upward sliding of fixing axle, and then drives and be set to the of 413 bearing of ball, 70 top
One gear 60 is also connected together along 50 upward sliding of fixing axle and with fixing axle 50, at the same first gear 60 also with 41 phase of traffic cycle
Mutually engagement, only needed when needing to switch to mini-roundabout 42 under this state and not rotating by the first driving mechanism 80 to
Lower slider, first gear 60 and 413 bearing 70 of ball can make along 50 slide downward of fixing axle automatically under gravity
First gear 60 is not meshed with traffic cycle 41；When needing mini-roundabout 42 with different from the revolving speed rotation of traffic cycle 41,
First ensure that first gear 60 is not intermeshed with traffic cycle 41, rotating mechanism 110 and second is then driven by telescoping mechanism 90
Gear 111 is moved upwards to be meshed as mini-roundabout 42, then drives second gear 111 to rotate by rotating mechanism 110
42 rotation of mini-roundabout is driven by second gear 111, is only needed when needing to switch to mini-roundabout 42 under this state and not rotating
To drive rotating mechanism 110 and second gear 111 move downward by telescoping mechanism 90 so that second gear 111 not with small turn
Disk 42 is meshed.The above multi-motion modes, which can be combined with each other, realizes more kinds of different motor patterns, such as mini-roundabout
42 are also passed through oneself of traffic cycle 41 while being rotated using the rotating middle shaft line of traffic cycle 41 as rotation center then drive small turn
42 rotation of disk etc..
Compared with prior art, the first teeth 411 are equipped with by the outer ring surface in traffic cycle 41 due to the utility model, used
In being actively arranged with first gear 60 in the fixing axle 50 of fixed mini-roundabout 42；When it is only necessary to traffic cycle 41 rotation without
When wanting mini-roundabout 42 to rotate, first gear 60 can be slid into along fixing axle 50 and be disconnected with traffic cycle 41, at this time
The mini-roundabout 42 when rotation of traffic cycle 41 not can rotate；Mini-roundabout 42 is also with oneself while needing 41 rotation of traffic cycle
Central axes be rotation center rotation when, then can be by the way that first gear 60 be slid into and traffic cycle 41 along fixing axle 50
The intermeshing of the first teeth 411, the rotation of traffic cycle 41 at this time can drive first gear 60 to rotate, and due to first gear 60
It is fixedly connected at this time by the first holding section 51 and being connected together for the second holding section 61 with fixing axle 50, therefore first gear 60
Fixing axle 50 can be also driven to rotate in the rotation, to realize the mini-roundabout 42 for driving and being installed in fixing axle 50 certainly
Turn, so that the motor pattern of both the traffic cycle 41 of the vacuum coating equipment 100 of the utility model and mini-roundabout 42 is diversified and makes
It uses more flexible.
Above disclosed is only the preferred embodiments of the utility model, and effect is to facilitate those skilled in the art
Understand and implement accordingly, the interest field of the utility model cannot be limited with this certainly, therefore special according to the present utility model application
Equivalent variations made by sharp range still falls within the range that the utility model is covered.
Claims (10)
1. a kind of vacuum coating equipment, including plated film cylinder, vacuum evacuation device and Coating Materials is conveyed into the plated film cylinder
Material delivery system, the plated film cylinder crosses the accommodating cavity for holding workpiece to be plated, it is characterised in that: the accommodating cavity
Rotating turret for carrying and driving workpiece rotation to be plated is inside installed, the rotating turret includes traffic cycle and is located at outside traffic cycle
The mini-roundabout of edge, the outer ring surface of the traffic cycle are equipped with the first teeth, and the mini-roundabout is installed on described big by a fixing axle
Above turntable inclined, and it is also actively arranged with first gear outside the fixing axle, the fixing axle is outwardly convexly equipped with
First holding section, the inner ring surface of the first gear is provided with the second holding section matched with first holding section, described
Mini-roundabout is realized by the connection between the first gear and first teeth and is meshed with the traffic cycle.
2. vacuum coating equipment as described in claim 1, it is characterised in that: the rotating middle shaft line of the traffic cycle and described small turn
The rotating middle shaft line of disk is parallel to each other.
3. vacuum coating equipment as described in claim 1, it is characterised in that: further include being set to below the first gear and propping up
The first driving mechanism for supportting the ball bearing of the first gear and the ball bearing being driven to slide along the fixing axle.
4. vacuum coating equipment as described in claim 1, it is characterised in that: also packet telescoping mechanism, the output of the telescoping mechanism
End is fixedly connected with second gear, and the outer ring surface of the mini-roundabout is provided with the second teeth, the telescoping mechanism driving described the
Two gears are moved along the up and down direction of the accommodating cavity, the second gear selectively with second tooth of the mini-roundabout
Tooth is meshed or is disconnected.
5. vacuum coating equipment as claimed in claim 4, it is characterised in that: further include rotating mechanism, the telescoping mechanism it is defeated
Outlet is fixedly connected by the rotating mechanism with the second gear, and the second gear is installed on the defeated of the rotating mechanism
Outlet.
6. vacuum coating equipment as described in claim 1, it is characterised in that: the rotating turret further includes the second driving mechanism, institute
The inner ring surface for stating traffic cycle is provided with third teeth, and second driving mechanism passes through the third teeth and the traffic cycle phase
It engages and the traffic cycle is driven to rotate.
7. vacuum coating equipment as claimed in claim 6, it is characterised in that: if the bottom of the accommodating cavity is additionally provided with dry milling
Wheel, the idler wheel are located at the underface of the traffic cycle simultaneously traffic cycle described in support, the rotating middle shaft line of the idler wheel with it is described
The rotating middle shaft line of traffic cycle is mutually perpendicular to.
8. vacuum coating equipment as described in claim 1, it is characterised in that: the cross section of first holding section is in T font.
9. vacuum coating equipment as described in claim 1, it is characterised in that: the upper surface of the traffic cycle is provided with the recessed of annular
Slot, is equipped with several balls in the groove of the annular, and the top of the ball is protruding upward in the groove and to be connected to institute
State the bottom of mini-roundabout.
10. vacuum coating equipment as described in claim 1, it is characterised in that: the bottom of the traffic cycle is downwardly convex to be equipped with first
Locking part, the inner wall of the accommodating cavity are convexly equipped with the second locking part, and one end of the fixing axle is selectively locked with described first
Firmware is connected or is connect with second locking part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822016375.3U CN209178472U (en) | 2018-11-30 | 2018-11-30 | Vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822016375.3U CN209178472U (en) | 2018-11-30 | 2018-11-30 | Vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209178472U true CN209178472U (en) | 2019-07-30 |
Family
ID=67375443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822016375.3U Active CN209178472U (en) | 2018-11-30 | 2018-11-30 | Vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209178472U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896A (en) * | 2018-11-30 | 2019-01-29 | 深圳天成真空技术有限公司 | Vacuum coating equipment |
| CN111020519A (en) * | 2019-12-31 | 2020-04-17 | 绍兴市宇德塑料制品有限公司 | Plastic vacuum coating equipment with uniform coating thickness |
-
2018
- 2018-11-30 CN CN201822016375.3U patent/CN209178472U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896A (en) * | 2018-11-30 | 2019-01-29 | 深圳天成真空技术有限公司 | Vacuum coating equipment |
| CN109280896B (en) * | 2018-11-30 | 2023-08-18 | 深圳天成真空技术有限公司 | Vacuum coating machine |
| CN111020519A (en) * | 2019-12-31 | 2020-04-17 | 绍兴市宇德塑料制品有限公司 | Plastic vacuum coating equipment with uniform coating thickness |
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