CN208857360U - A kind of plasma surface treatment all-directional rotation workpiece target platform - Google Patents
A kind of plasma surface treatment all-directional rotation workpiece target platform Download PDFInfo
- Publication number
- CN208857360U CN208857360U CN201821339548.9U CN201821339548U CN208857360U CN 208857360 U CN208857360 U CN 208857360U CN 201821339548 U CN201821339548 U CN 201821339548U CN 208857360 U CN208857360 U CN 208857360U
- Authority
- CN
- China
- Prior art keywords
- target platform
- runing rest
- planetary gear
- grafting
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of plasma surface treatment all-directional rotation workpiece target platforms, rotary target platform including firm banking and setting on the fixed base, the circumferentially spaced arrangement of rotary target platform is equipped with grafting through-hole, runing rest is connected in each grafting through-hole, it is equipped in the firm banking and respectively drives rotary target platform, the driving mechanism of runing rest synchronous rotary, piece-holder to be processed is on each runing rest, when carrying out plasma surface treatment, rotary target platform rotates so that each runing rest is rotated around the axis of rotary target platform, it is formed " revolution ", simultaneously, each runing rest is rotated around own axes, it is formed " rotation ", pass through revolution and rotation combination, effectively uniform treatment can be carried out by the not ipsilateral to workpiece, without being repeated a number of times processing.
Description
Technical field
The utility model relates to plasma treatment technique field, in particular to a kind of plasma surface treatment is comprehensive
Rotational workpieces target platform.
Background technique
Plasma is the ionized gas as composed by ion, electronics and neutral particle, and whole is in electroneutral.Plasma
In various particles all there is certain energy, therefore when material is in plasma atmosphere, these active particles can be with material table
Face interaction generates surface reaction, makes surface that physicochemical change occur and realize that surface is modified.
Plasma surface treatment technology is widely used in the fields such as industrial part, cutter, medical instrument, however waits
Gas ions treatment process majority can encounter workpiece and handle non-uniform problem, and workpiece is caused to handle there are many non-uniform factors,
Different location plasma density is inhomogenous in such as cavity, shape of workpiece, plasma sheath factor influence whether table
The uniformity of finishing coat, plasma surface processor in the prior art are to solve the problems, such as workpiece process uniformity, usually
Rotatable target platform is set, enables 360 degree of target platform unidirectionally or reciprocating rotaries, comprehensive turn as disclosed in patent 97202493.X
It starts building part mounting and adjusting target platform, the target platform of this kind of structure type overcomes cavity by variation workpiece in the intracorporal position of processing chamber
Processing problem of non-uniform caused by middle different location plasma density difference.However, can not solve because of irregular shape institute
The processing difference of caused workpiece different sides, and because the factors such as plasma sheath, local plasma density difference are drawn
The processing problem of non-uniform risen.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of compact-sized, uniform plasma surfaces of processing
Handle all-directional rotation workpiece target platform.
A kind of used technical solution to solve above-mentioned technical problem: plasma surface treatment all-directional rotation workpiece
Target platform, the rotary target platform including firm banking and setting on the fixed base, the circumferentially spaced arrangement of rotary target platform
Equipped with grafting through-hole, it is connected with runing rest in each grafting through-hole, is equipped with and respectively drives in the firm banking
The driving mechanism of rotary target platform, runing rest synchronous rotary.
Preferably, the driving mechanism includes the driving motor of planetary gear mechanism and driving planetary gear mechanism, the planet
Wheel mechanism includes centre wheel, engages with centre wheel and the planetary gear of circumferentially spaced setting, and supports the row of each planetary gear
The gear ring engaged with each planetary gear, the planetary wheel carrier and the fixed company of rotary target platform is fixedly installed in star wheel frame, the firm banking
It connects, each runing rest passes through grafting through-hole and is fixedly connected with corresponding planetary gear, and the centre wheel passes through shaft and driving
Motor drive connection.
Preferably, each runing rest top, which is spaced apart, extends radially out to form multiple expansion auxiliary stands, each described
Expand auxiliary stand end detachable connection work piece holder.
Preferably, there is the grafting port with the cooperation grafting of each runing rest bottom end in the middle part of each planetary gear.
The utility model has the advantages that piece-holder to be processed is in each in this plasma surface treatment all-directional rotation workpiece target platform
On runing rest, carry out plasma surface treatment when, rotary target platform rotate so that each runing rest around rotary target platform axis
Rotation is formed " revolution ", meanwhile, each runing rest is rotated around own axes, is formed " rotation ", it is combined by revolution and rotation,
Different location plasma density difference in plasma chamber room can be overcome simultaneously, break treatment process plasma sheaths
It is formed, to effectively carry out uniform treatment to the not ipsilateral of workpiece.
Detailed description of the invention
The utility model is described further with reference to the accompanying drawings and examples；
Fig. 1 is the structural schematic diagram of the utility model embodiment；
Fig. 2 is the top view of rotary target platform in the utility model embodiment；
Fig. 3 is the simplified schematic diagram of planetary gear mechanism in the utility model embodiment；
Fig. 4 is the structure top view of runing rest in the utility model embodiment.
Specific embodiment
Referring to figs. 1 to Fig. 4, the utility model plasma surface treatment all-directional rotation workpiece target platform, including fixed bottom
Seat 10 and the rotary target platform 20 being arranged on firm banking 10, rotary target platform 20 can be rotated with relatively fixed pedestal 10, rotated
Circumferentially spaced arrangement is equipped with grafting through-hole 21 on target platform 20, and each 21 activity grafting of grafting through-hole can be revolved around own axes
The synchronous rotary movement of the runing rest 30 turned, rotary target platform 20 and runing rest 30 is driven by driving mechanism.
Specifically, driving mechanism includes the driving motor of planetary gear mechanism 40 and driving planetary gear mechanism 40, planet turbine
Structure 40 includes centre wheel 41 of the supporting and fixing in firm banking 10, engages with centre wheel 41 and circumferentially spaced setting
Planetary gear 42, and the planetary wheel carrier 43 of each planetary gear 42 of bearing, wherein rack gear 44, each planet is also fixedly mounted in firm banking
Wheel 42 makes each row by gear engaged transmission when centre wheel 41 is rotated with centre wheel 41,44 engaged transmission of gear ring respectively
Star-wheel 42 circumferentially rotates while around own axes, and planetary wheel carrier 43 is rotated around central axis.
By the way that planetary wheel carrier 43 to be set as being fixedly connected with rotary target platform 20, each runing rest 30 passes through grafting through-hole 21
It is fixedly connected with corresponding planetary gear 42, there is grafting port in the middle part of each planetary gear 42,30 bottom end of runing rest is logical across grafting
Hole 21 is flexibly connected with the grafting port on planetary gear 42, so that planetary gear 42 rotates, runing rest 30 is rotated synchronously, planetary gear
Frame 43 is rotated by driving, drives rotary target platform 20 to rotate around central axis, planetary gear 42 rotates simultaneously around own axes, also drives
Runing rest 30 is rotated around own axes, in this way, centre wheel 41 need to only be driven to rotate, can drive rotary target platform 20, rotation branch
30 synchronous rotary of frame.Rotary target platform 20 rotates so that each runing rest 30 is formed " revolution ", together around the axis rotation of rotary target platform
When, each runing rest 30 is rotated around own axes, is formed " rotation ", is combined by revolution and rotation, can be effectively to workpiece
Not ipsilateral carry out uniform treatment.Moreover, irregular face can be alternately exposed to when workpiece carries out rotation with runing rest 30
Near plasma source, it is ensured that different sides are effectively addressed.The driving motor that centre wheel 41 passes through shaft 45 and external setting
Transmission connection.
It extends radially out to form multiple expansion auxiliary stands 31 preferably, each 30 top of runing rest is spaced apart, respectively open up
31 end detachable connection work piece holder 32 of auxiliary stand is opened up, work piece holder 32 can be carried out according to the difference of workpiece to be processed
Replacement improves the applicability of rotational workpieces target platform.
The embodiments of the present invention is explained in detail above in conjunction with attached drawing, but the utility model is not limited to
State embodiment, within the scope of knowledge possessed by those of ordinary skill in the art, can also do not depart from it is practical
Various changes can be made under the premise of novel objective.
Claims (4)
1. a kind of plasma surface treatment all-directional rotation workpiece target platform, it is characterised in that: exist including firm banking and setting
Rotary target platform on firm banking, the circumferentially spaced arrangement of rotary target platform are equipped with grafting through-hole, and each grafting is logical
It is connected with runing rest in hole, is equipped in the firm banking and respectively drives rotary target platform, runing rest synchronous rotary
Driving mechanism.
2. plasma surface treatment all-directional rotation workpiece target platform according to claim 1, it is characterised in that: the drive
Motivation structure includes the driving motor of planetary gear mechanism and driving planetary gear mechanism, and the planetary gear mechanism includes centre wheel, in
The planetary gear of the engagement of heart wheel and circumferentially spaced setting, and the planetary wheel carrier of each planetary gear of bearing, the firm banking are solid
The gear ring engaged with each planetary gear is set calmly, and the planetary wheel carrier is fixedly connected with rotary target platform, and each runing rest passes through
Grafting through-hole is fixedly connected with corresponding planetary gear, and the centre wheel is sequentially connected by shaft and driving motor.
3. plasma surface treatment all-directional rotation workpiece target platform according to claim 1 or 2, it is characterised in that: each
The runing rest top, which is spaced apart, to be extended radially out to form multiple expansion auxiliary stands, and each expansion auxiliary stand end can
It is detachably connected with work piece holder.
4. plasma surface treatment all-directional rotation workpiece target platform according to claim 2, it is characterised in that: each described
There is the grafting port with the cooperation grafting of each runing rest bottom end in the middle part of planetary gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821339548.9U CN208857360U (en) | 2018-08-20 | 2018-08-20 | A kind of plasma surface treatment all-directional rotation workpiece target platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821339548.9U CN208857360U (en) | 2018-08-20 | 2018-08-20 | A kind of plasma surface treatment all-directional rotation workpiece target platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208857360U true CN208857360U (en) | 2019-05-14 |
Family
ID=66415145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821339548.9U Active CN208857360U (en) | 2018-08-20 | 2018-08-20 | A kind of plasma surface treatment all-directional rotation workpiece target platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208857360U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112931761A (en) * | 2021-04-20 | 2021-06-11 | 山东大学 | Tea pesticide residue degradation and disinfection device and method based on atmospheric pressure cold plasma |
-
2018
- 2018-08-20 CN CN201821339548.9U patent/CN208857360U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112931761A (en) * | 2021-04-20 | 2021-06-11 | 山东大学 | Tea pesticide residue degradation and disinfection device and method based on atmospheric pressure cold plasma |
| CN112931761B (en) * | 2021-04-20 | 2023-06-02 | 山东大学 | Tea pesticide residue degradation and disinfection device and method based on atmospheric pressure cold plasma |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4222345A (en) | Vacuum coating apparatus with rotary motion assembly | |
| CN208857360U (en) | A kind of plasma surface treatment all-directional rotation workpiece target platform | |
| CN204277730U (en) | Glass edge polishing machine burnishing device | |
| CN108789084A (en) | A kind of automobile bearing Internal and external cycle synchronization grinding apparatus | |
| CN208308946U (en) | A kind of wheel hub vacuum coater | |
| CN201587977U (en) | Film coating fixture for film coating machine | |
| CN104769151B (en) | Film deposition device | |
| TW201439348A (en) | Pvd processing device and pvd processing method | |
| CN103590005A (en) | Vacuum coating machine | |
| KR101646698B1 (en) | Zig System for Revolving and Rotating in PVD coating machine | |
| CN111809159B (en) | Rotating frame device | |
| JP2012067359A (en) | Support apparatus of film-deposition-objective article, and film depositing apparatus | |
| CN111530667A (en) | Roundabout spraying device and using method thereof | |
| TW201217561A (en) | Deposition device | |
| CN209178472U (en) | Vacuum coating equipment | |
| CN104694899A (en) | Columnar sample surface coating workpiece rack | |
| JPH11323550A (en) | Turn table for vacuum deposition apparatus | |
| JP2002172342A (en) | Large capacity vertical ball mill | |
| CN210529047U (en) | Sputtering coating device of movable target | |
| CN203613254U (en) | Vacuum film coating machine | |
| CN106574367B (en) | In order to works uniform deposition and generate the chucking appliance system of torsion angle | |
| CN211471641U (en) | Silicon electrode cleaning jig | |
| CN202482479U (en) | Planet rotation bracket of vacuum coater | |
| TW200951238A (en) | Cliping devise for multiple degree of freedon rotated by single power source | |
| CN202543311U (en) | Vacuum ion plating three-axis constant-speed continuous-rotation coating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |