CN203613254U - Vacuum film coating machine - Google Patents
Vacuum film coating machine Download PDFInfo
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- CN203613254U CN203613254U CN201320725611.3U CN201320725611U CN203613254U CN 203613254 U CN203613254 U CN 203613254U CN 201320725611 U CN201320725611 U CN 201320725611U CN 203613254 U CN203613254 U CN 203613254U
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Abstract
The utility model provides a vacuum film coating machine, belongs to the technical field of machines and aims to solve the problem of low productivity of the conventional vacuum film coating machines. The vacuum film coating machine comprises a vacuum housing and a vacuum system used for keeping a vacuum state inside the vacuum housing, wherein an umbrella stand and an evaporating source are arranged in the vacuum housing; the umbrella stand comprises a rotary table capable of rotating in a circumferential direction and a plurality of workpiece frames; each workpiece frame is connected with the rotary table through a respective rotating shaft I; the workpiece frames are distributed in an umbrella shape in the circumferential direction of the rotary table; the vacuum film coating machine further comprises a driving mechanism capable of enabling each workpiece frame to rotate in the circumferential direction of the rotary table and simultaneously rotate along the center line of each rotating shaft I. According to the vacuum film coating machine, the umbrella stand adopts a structure that the workpiece frames are distributed in an umbrella shaped in the circumferential direction of the rotary table; therefore, the occupied space of the umbrella stand is reduced, and the receptor area of the workpiece frames to an evaporation material is increased; as workpieces to be coated can be loaded onto the front sides and the back sides of the workpiece frames, the loading amount of the workpiece frames is increased; the production of the vacuum film coating machine is greater; the economic benefit is better.
Description
Technical field
The utility model belongs to field of mechanical technique, relates to a kind of vacuum plating unit.
Background technology
Along with scientific and technical development, the display screen performance of electronics constantly promotes, and has occurred utilizing the touch-screen of the direct touch control of staff.In actual use procedure, display screen becomes easily infected by the dirts such as extraneous dust, and touch-screen more easily leaves fingerprint or produces cut after touch.For improving the wear-resisting of display screen and the performance that bears dirty, conventionally adopt the mode of vacuum plating to plate the coating of the anti-fingerprint of attached one deck high abrasion in display screen surface.
Vacuum plating is the atom of vacuum indoor material to be emanated out from heating source get to the surface of plated object, thereby forms the technology of thin film.Existing vacuum evaporation coating film device comprises vacuum (-tight) housing and vacuum extractor, has an evaporation source for structural evaporation coating film material in vacuum (-tight) housing, and substrate to be coated is positioned at the front of evaporation source.In coating process, vacuum (-tight) housing is pumped down to high vacuum, the material evaporation in evaporation source, and the atom of evaporated material or molecule are deposited on substrate surface with condensing mode and form thin film.In the process of plated film, can adopt the mode of multiple evaporation sources or rotary substrate to guarantee the homogeneity of thicknesses of layers.
In order to improve plated film production efficiency, someone has proposed the plated film form that work rest rotation is revolved round the sun with respect to evaporation source simultaneously.For example, Chinese patent [application number 200820028638.6; Granted publication CN 201195744Y] three-dimensional rotating bracket for workpiece of disclosed a kind of vacuum plating unit, include power input shaft, rotary table supporting seat, revolution rolling bearing, rotary table is rotationally connected dish, rotary table, on rotary table, be provided with Work piece rotary disc support bar, Work piece rotary disc support bar top is provided with upper bracket, workpiece bar is connected with upper bracket by rotational support seat, on workpiece bar, be provided with workpiece turning axle, be characterized in being provided with workpiece rotation and workpiece rotating mechanism on rotary table, rotary table is rotationally connected dish and is connected with rotating gear dish.
The three-dimensional rotating bracket for workpiece of above-mentioned vacuum plating unit has been realized revolution, the rotation of workpiece, the action of rotation, has improved the production efficiency of plated film.But the problem that the three-dimensional rotating bracket for workpiece of this structure for vacuum coating equipment exists is: also have larger space not to be fully utilized when 1, swinging mounting revolves round the sun, the production capacity of workpiece plated film can also further improve; 2, multiple workpiece of swinging mounting rotation axis direction and the distance of evaporation source are different, block the workpiece away from evaporation source near the workpiece of evaporation source, need evaporation source that more Coating Materials is provided; 3, no matter be revolution, rotation, rotation, positioning workpieces in rotating shaft, causes rotating shaft in rotation process, to there will be rocking in various degree, and then the film degree of uniformity that plates workpiece surface is declined.
Summary of the invention
The purpose of this utility model is to have the problems referred to above for existing technology, has proposed a kind of vacuum plating unit, and the technical problem that the utility model solves is to improve the production capacity of coating equipment.
The purpose of this utility model can realize by following technical proposal: a kind of vacuum plating unit, comprise vacuum (-tight) housing and for making the inner vacuum system that keeps vacuum state of vacuum (-tight) housing, in described vacuum (-tight) housing, be provided with umbrella stand and evaporation source, it is characterized in that, described umbrella stand comprises rotating disk and several work rests that can circumferentially rotate, described work rest is connected by each axis of rotation one with rotating disk respectively, described work rest is circumferentially umbrella along rotating disk and distributes, this vacuum plating unit also comprises the driving mechanism that when can making work rest circumferentially rotate along with rotating disk, one medullary ray rotates around the shaft.
The principle of work of this vacuum plating unit is: plated film first being processed, first workpiece to be coated is positioned on work rest, and vacuum system vacuumizes vacuum (-tight) housing inside, and makes it keep vacuum state.After plated film processing starts, when driving mechanism drives work rest circumferentially to rotate with rotating disk, one medullary ray rotates around the shaft, evaporation source is by Coating Materials heating evaporation, on Coating Materials evaporation is backward, be diffused into work rest place, be attached on the workpiece to be coated that temperature is lower, form the uniform film of thickness.Distribute because work rest is circumferentially umbrella along rotating disk, reduced the space that umbrella stand takies, increased the receptor area of work rest to evaporating materials; And one medullary ray rotates around the shaft when work rest can circumferentially rotate along with rotating disk, the tow sides on work rest all can load workpiece to be coated, have increased the shipped quantity of work rest.Therefore, the output of this vacuum plating unit is higher, and economic benefit is better.
In above-mentioned vacuum plating unit, described driving mechanism comprises cone tooth fluted disc and drive-motor, described cone tooth fluted disc is fixedly connected with vacuum (-tight) housing, and described drive-motor is connected with rotating disk by transmission pair, and described rotating shaft one end portion is respectively arranged with the cone gear coordinating with above-mentioned cone tooth fluted disc.By the transmission of cone gear, can get at rotating shaft one after making work rest along with dial rotation and turn over exactly corresponding angle.
As another kind of scheme, in above-mentioned vacuum plating unit, described driving mechanism comprises friction track and drive-motor, described friction track is circumferentially distributed in vacuum (-tight) housing inwall, described drive-motor is connected with rotating disk by transmission pair, the described work rest the other end is provided with the rotating shaft two being located along the same line with rotating shaft one medullary ray, and the end of above-mentioned rotating shaft two is fixed with friction wheel, above-mentioned friction wheel can in described friction track, roll make substrate around the shaft one and rotating shaft two medullary rays rotate.In the process of work rest with dial rotation, rotating shaft two is along friction track circumferential movement, and be fixed on friction wheel in rotating shaft two and under the effect of frictional force, drive rotating shaft two to rotate around self centerline direction, thus drive work rest around the shaft one and the centerline direction of rotating shaft two rotate; Work rest is simple by the locating structure of rotating shaft one and rotating shaft two, easy accessibility.
As another kind of scheme, in above-mentioned vacuum plating unit, described driving mechanism comprises spinning motor and revoluting motor, and described revoluting motor is connected with rotating disk by transmission pair, and described spinning motor is connected with rotating shaft one by transmission pair respectively.Spinning motor and revoluting motor drive respectively work rest rotation and revolution, can realize the accurate control of work rest rotation and revolution by automatic control equipment.
In above-mentioned vacuum plating unit, described vacuum (-tight) housing is also provided with support, above-mentioned support and vacuum (-tight) housing are axially and radial location can be around described center of turntable line rotation, releasable connection is on described support respectively in the bottom of described work rest, and the position that described support is corresponding with work rest has the opening of stepping down.Make the rotation of work rest and revolve round the sun more stable by support is set, in the bottom releasable connection and support of work rest, while facilitating workpiece feeding or blanking, work rest is pulled down from support, in coating process, Coating Materials after evaporation is diffused into work rest place by the opening of stepping down, and reduces support and stops the loss that causes Coating Materials.
In above-mentioned vacuum plating unit, described evaporation source comprises evaporation boat and power supply, the boat body two ends of described evaporation boat have respectively electrode, above-mentioned electrode is connected with the positive and negative electrode of power supply respectively, on described boat body, also there is auxiliary heating sheet, above-mentioned auxiliary heating sheet and boat body are formed for placing the spatial accommodation of evaporation raw material, described auxiliary heating sheet base section or be all connected with described boat body, and described boat body and auxiliary heating sheet all adopt electro-conductive material to make.The heat of boat body bottom by thermal conduction to Coating Materials, the heat on auxiliary heating sheet surface by thermal radiation to Coating Materials, improve the situation of being heated of Coating Materials in evaporation boat, make Coating Materials rapidly evaporation and diffusion to the internal space of vacuum plating unit, improved the working (machining) efficiency of coating equipment.
In above-mentioned vacuum plating unit, described work rest with respect to the angle of inclination of rotating disk for being less than 90 °.Under this range of tilt angles, work rest is accepted the area maximum of Coating Materials, and the space taking is relatively little.
In above-mentioned vacuum plating unit, the surface of described work rest is fan-shaped.Adopt fan-shaped work rest structure, can further utilize the space in vacuum (-tight) housing, increase the load amount of work rest.
As another kind of scheme, in above-mentioned vacuum plating unit, the surface of described work rest is rectangular.Work rest simple in structure, easy for installation, is not easy to produce interference.
In above-mentioned vacuum plating unit, the surface of described work rest has low viscous Pe diaphragm.Workpiece to be coated directly sticks on work rest by Pe diaphragm, and load is convenient, has saved the cost of load fixture; And, on workpiece to be coated, need on the surface of plated film, without any additional zero parts, to make the coating quality of workpiece to be coated better.
As preferably, in above-mentioned vacuum plating unit, described work rest is polyhedral structure, has multiple for loading the material containing face of raw material on described work rest.Make all can accept Coating Materials on multiple on work rest by the rotation of work rest, in a plated film course of processing, can complete the plated film processing of the workpiece to be coated on multiple material containing faces, further increased the load amount of work rest.
In above-mentioned vacuum plating unit, described vacuum (-tight) housing bottom is also provided with plasma generator.Before plated film processing, the plasma first producing by plasma generator is treated film-coating workpiece surface and is cleaned, and has improved the adhesive ability of Coating Materials.
Compared with prior art, the advantage of this vacuum plating unit is:
1, this vacuum plating unit umbrella stand adopts work rest to be circumferentially along rotating disk the structure that umbrella distributes, and has reduced the space that umbrella stand takies, and has increased the receptor area of work rest to evaporating materials.When work rest can circumferentially rotate along with rotating disk, one medullary ray rotates around the shaft, and the tow sides on work rest all can load workpiece to be coated, have increased the shipped quantity of work rest.The output of this vacuum plating unit is higher, and economic benefit is better.
2, the evaporation boat of this vacuum plating unit has auxiliary heating sheet, the heat of boat body bottom by thermal conduction to Coating Materials, the heat on auxiliary heating sheet surface by thermal radiation to Coating Materials, improve the situation of being heated of Coating Materials in evaporation boat, make Coating Materials rapidly evaporation and diffusion to the internal space of vacuum plating unit, improved the working (machining) efficiency of coating equipment.
3, the work rest of the evaporation boat of this vacuum plating unit is polyhedral structure, make all can accept on multiple on work rest Coating Materials by the rotation of work rest, in a plated film course of processing, can complete the plated film processing of the workpiece to be coated on multiple material containing faces, further increase the load amount of work rest.
Accompanying drawing explanation
Fig. 1 is the internal structure schematic diagram of this vacuum plating unit in embodiment mono-.
Fig. 2 is the work rest mounting structure schematic diagram of this vacuum plating unit in embodiment mono-.
Fig. 3 is the structural representation of the evaporation boat of this vacuum plating unit in embodiment mono-.
Fig. 4 is the internal structure schematic diagram of this vacuum plating unit in embodiment bis-.
In figure, 1, vacuum (-tight) housing; 2, umbrella stand; 21, rotating disk; 22, work rest; 221, material containing face; 3, evaporation source; 31, evaporation boat; 311, electrode; 312, auxiliary heating sheet; 313, spatial accommodation; 4, rotating shaft one; 5, cone tooth fluted disc; 6, drive-motor; 7, cone gear; 8, friction track; 9, rotating shaft two; 10, friction wheel; 11, support; 111, the opening of stepping down; 12, plasma generator; 13, workpiece to be coated.
Embodiment
Be below specific embodiment of the utility model by reference to the accompanying drawings, the technical solution of the utility model is further described, but the utility model be not limited to these embodiment.
Embodiment mono-:
This vacuum plating unit comprises vacuum (-tight) housing 1, vacuum system, umbrella stand 2, evaporation source 3 and driving mechanism.
Specifically, as shown in Figure 1, umbrella stand 2 comprises rotating disk 21 and work rest 22, and rotating disk 21 is connected with vacuum (-tight) housing 1 by transmission shaft, and transmission shaft can drive rotating shaft circumferentially to rotate.As depicted in figs. 1 and 2, work rest 22 is circumferentially umbrella along rotating disk 21 and distributes, work rest 22 with respect to the angle of inclination of rotating disk 21 for being less than 90 °.Work rest 22 upper ends are fixed with respectively rotating shaft 1, have the open holes passing for rotating shaft 1 on rotating disk 21, and rotating shaft 1 is respectively charged in corresponding open holes.
When driving mechanism is used for making work rest 22 circumferentially to rotate along with rotating disk 21, one 4 medullary ray rotates around the shaft, in the present embodiment, driving mechanism comprises cone tooth fluted disc 5 and drive-motor 6, bore tooth fluted disc 5 with the coaxial setting of rotating disk 21 and be fixedly connected with vacuum (-tight) housing 1, drive-motor 6 is connected with transmission shaft by gear driving pair or belt wheel transmission pair.Each open holes outer end place is all corresponding arranges the cone gear 7 coordinating with cone tooth fluted disc 5, the end of rotating shaft 1 pass after open holes can with the circumferential releasable connection of cone gear 7.In actual production and manufacturing processed, rotating shaft 1 can be connected with cone gear 7 by spline or steady brace.By the transmission of cone gear 7, make work rest 22 turn over exactly corresponding angle along with rotating disk 21 can get at rotating shaft 1 after rotating.
Vacuum (-tight) housing 1 is also provided with support 11, and support 11 is axial and radial location the dish 21 medullary rays rotations that can rotate with vacuum (-tight) housing 1, and releasable connection is on support 11 respectively in the bottom of work rest 22, and the position that support 11 is corresponding with work rest 22 has the opening of stepping down 111.In actual production and manufacturing processed, work rest 22 is by steady brace or buckle and support 11 releasable connections.Make the rotation of work rest 22 and revolve round the sun more stable by support 11 is set, in the bottom releasable connection and support 11 of work rest 22, while facilitating workpiece feeding or blanking, work rest 22 is pulled down from support 11, in coating process, Coating Materials after evaporation is diffused into work rest 22 places by the opening 111 of stepping down, and reduces support 11 and stops the loss that causes Coating Materials.
As preferred version, as shown in Figure 3, evaporation source 3 comprises evaporation boat 31 and power supply, the boat body two ends of evaporation boat 31 have respectively electrode 311, electrode 311 is connected with the positive and negative electrode of power supply respectively, also has auxiliary heating sheet 312 on boat body, and auxiliary heating sheet 312 is formed for placing with boat body the spatial accommodation 313 that evaporates raw material, auxiliary heating sheet 312 base sections or be all connected with boat body, boat body and auxiliary heating sheet 312 all adopt electro-conductive material to make.In actual production and manufacturing processed, evaporation boat 31 and auxiliary heating sheet 312 can adopt integral structure, the both ends of evaporation boat 31 1 sides or dual-side material are cut off respectively and bent inwards to form auxiliary heating sheet 312.The heat of boat body bottom by thermal conduction to Coating Materials, the heat on auxiliary heating sheet 312 surfaces by thermal radiation to Coating Materials, improve the situation of being heated of evaporation boat 31 interior Coating Materials, make Coating Materials rapidly evaporation and diffusion to the internal space of vacuum plating unit, improved the working (machining) efficiency of coating equipment.
In the present embodiment, the surface of work rest 22 is fan-shaped.Adopt fan-shaped work rest 22 structures, can further utilize the space in vacuum (-tight) housing 1, increase the load amount of work rest 22.The surface of work rest 22 has low viscous Pe diaphragm.Workpiece 13 to be coated directly sticks on work rest 22 by Pe diaphragm, and load is convenient, has saved the cost of load fixture; And, on workpiece 13 to be coated, need on the surface of plated film, without any additional zero parts, to make the coating quality of workpiece 13 to be coated better.As preferred version, vacuum (-tight) housing 1 bottom is also provided with plasma generator 12.
The principle of work of this vacuum plating unit is: plated film first being processed, first workpiece 13 to be coated is positioned on work rest 22, and vacuum system vacuumizes vacuum (-tight) housing 1 inside, and makes it keep vacuum state.After plated film processing starts, when drive-motor 6 drives work rest 22 circumferentially to rotate with rotating disk 21, one 4 medullary ray rotates around the shaft, the plasma first producing by plasma generator 12 is treated film-coating workpiece 13 surfaces and is cleaned, and has improved the adhesive ability of Coating Materials.Evaporation source 3, by Coating Materials heating evaporation, is diffused into work rest 22 places on Coating Materials evaporation is backward, is attached on the workpiece to be coated 13 that temperature is lower, forms the uniform film of thickness, has realized the plated film processing for the treatment of film-coating workpiece 13.
Embodiment bis-:
Technical scheme in technical scheme in the present embodiment and embodiment mono-is basic identical, difference is, as shown in Figure 4, in the present embodiment, driving mechanism comprises friction track 8 and drive-motor 6, friction track 8 is circumferentially distributed in vacuum (-tight) housing 1 inwall, drive-motor 6 is connected with rotating disk 21 by transmission pair, work rest 22 the other ends are provided with the rotating shaft 29 being located along the same line with rotating shaft one 4 medullary rays, the end of rotating shaft 29 is fixed with friction wheel 10, friction wheel 10 can the interior rolling of friction track 8 make substrate around the shaft 1 and rotating shaft 29 medullary rays rotate.In the process that work rest 22 rotates with rotating disk 21, rotating shaft 29 is along friction track 8 circumferential movement, and be fixed on friction wheel 10 in rotating shaft 29 and under the effect of frictional force, drive rotating shaft 29 to rotate around self centerline direction, thus drive work rest 22 around the shaft 1 and the centerline direction of rotating shaft 29 rotate; Work rest 22 is simple by the locating structure of rotating shaft 1 and rotating shaft 29, easy accessibility.
Embodiment tri-:
Technical scheme in technical scheme in the present embodiment and embodiment mono-is basic identical, difference is, in the present embodiment, driving mechanism comprises spinning motor and revoluting motor, revoluting motor is connected with rotating disk 21 by transmission pair, and spinning motor is connected with rotating shaft 1 by transmission pair respectively.Spinning motor and revoluting motor drive respectively work rest 22 rotations and revolution, can realize the accurate control of work rest 22 rotations and revolution by automatic control equipment.
Embodiment tetra-:
Technical scheme in technical scheme in the present embodiment and embodiment mono-, embodiment bis-or embodiment tri-is basic identical, and difference is, in the present embodiment, the surface of work rest 22 is rectangular.Work rest 22 simple in structure, easy for installation, is not easy to produce interference.
Embodiment five:
Technical scheme in technical scheme in the present embodiment and embodiment mono-to embodiment tetra-is basic identical, and difference is, in the present embodiment, to have multiple for loading the material containing face 221 of raw material on work rest 22.Make all can accept Coating Materials on multiple on work rest 22 by the rotation of work rest 22, in a plated film course of processing, can complete the plated film processing of the workpiece to be coated 13 on multiple material containing faces 221, further increased the load amount of work rest 22.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various modifications or supplements or adopt similar mode to substitute described specific embodiment, but can't depart from spirit of the present utility model or surmount the defined scope of appended claims.
Although more used the terms such as vacuum (-tight) housing 1, umbrella stand 2, rotating disk 21, work rest 22, material containing face 221, evaporation source 3, evaporation boat 31, electrode 311, auxiliary heating sheet 312, rotating shaft 1, cone tooth fluted disc 5, drive-motor 6, cone gear 7, friction track 8, rotating shaft 29, friction wheel 10, support 11, the opening 111 of stepping down, plasma generator 12, workpiece to be coated 13 herein, do not got rid of the possibility that uses other term.Use these terms to be only used to describe more easily and explain essence of the present utility model; They are construed to any additional restriction is all contrary with the utility model spirit.
Claims (10)
1. a vacuum plating unit, comprise vacuum (-tight) housing (1) and for making the inner vacuum system that keeps vacuum state of vacuum (-tight) housing (1), in described vacuum (-tight) housing (1), be provided with umbrella stand (2) and evaporation source (3), it is characterized in that, described umbrella stand (2) comprises rotating disk (21) and several work rests (22) that can circumferentially rotate, described work rest (22) is connected by each axis of rotation one (4) with rotating disk (21) respectively, described work rest (22) is circumferentially umbrella along rotating disk (21) and distributes, this vacuum plating unit also comprises the driving mechanism that when can making work rest (22) circumferentially rotate along with rotating disk (21), one (4) medullary ray rotates around the shaft.
2. vacuum plating unit according to claim 1, it is characterized in that, described driving mechanism comprises cone tooth fluted disc (5) and drive-motor (6), described cone tooth fluted disc (5) is fixedly connected with vacuum (-tight) housing (1), described drive-motor (6) is connected with rotating disk (21) by transmission pair, and described rotating shaft one (4) end is respectively arranged with the cone gear (7) coordinating with above-mentioned cone tooth fluted disc (5).
3. vacuum plating unit according to claim 1, it is characterized in that, described driving mechanism comprises friction track (8) and drive-motor (6), described friction track (8) is circumferentially distributed in vacuum (-tight) housing (1) inwall, described drive-motor (6) is connected with rotating disk (21) by transmission pair, described work rest (22) the other end is provided with the rotating shaft two (9) being located along the same line with rotating shaft one (4) medullary ray, the end of above-mentioned rotating shaft two (9) is fixed with friction wheel (10), above-mentioned friction wheel (10) can in described friction track (8), roll make substrate around the shaft one (4) and rotating shaft two (9) medullary rays rotate.
4. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, described vacuum (-tight) housing (1) is also provided with support (11), above-mentioned support (11) and vacuum (-tight) housing (1) axially and radial location also can rotate around described rotating disk (21) medullary ray, the bottom of described work rest (22) respectively releasable connection is upper in described support (11), and the position that described support (11) is corresponding with work rest (22) has the opening of stepping down (111).
5. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, described evaporation source (3) comprises evaporation boat (31) and power supply, the boat body two ends of described evaporation boat (31) have respectively electrode (311), above-mentioned electrode (311) is connected with the positive and negative electrode of power supply respectively, on described boat body, also there is auxiliary heating sheet (312), above-mentioned auxiliary heating sheet (312) is formed for placing with boat body the spatial accommodation (313) that evaporates raw material, described auxiliary heating sheet (312) base section or be all connected with described boat body, described boat body and auxiliary heating sheet (312) all adopt electro-conductive material to make.
6. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, described work rest (22) with respect to the angle of inclination of rotating disk (21) for being less than 90 °.
7. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, the surface of described work rest (22) is fan-shaped.
8. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, the surface of described work rest (22) is rectangular.
9. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, the surface of described work rest (22) has low viscous Pe diaphragm.
10. according to the vacuum plating unit described in claim 1 or 2 or 3, it is characterized in that, described work rest (22) is polyhedral structure, has multiple for loading the material containing face (221) of raw material on described work rest (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320725611.3U CN203613254U (en) | 2013-11-15 | 2013-11-15 | Vacuum film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320725611.3U CN203613254U (en) | 2013-11-15 | 2013-11-15 | Vacuum film coating machine |
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| CN203613254U true CN203613254U (en) | 2014-05-28 |
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| CN201320725611.3U Expired - Fee Related CN203613254U (en) | 2013-11-15 | 2013-11-15 | Vacuum film coating machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103590005A (en) * | 2013-11-15 | 2014-02-19 | 浙江星星瑞金科技股份有限公司 | Vacuum coating machine |
| CN112438727A (en) * | 2020-12-08 | 2021-03-05 | 北京海洋海泰科技有限公司 | Vacuum metal coating fingerprint display system |
| CN115216738A (en) * | 2022-07-20 | 2022-10-21 | 聚灿光电科技（宿迁）有限公司 | Rotatable plating ring plate pot mechanism and evaporator |
-
2013
- 2013-11-15 CN CN201320725611.3U patent/CN203613254U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103590005A (en) * | 2013-11-15 | 2014-02-19 | 浙江星星瑞金科技股份有限公司 | Vacuum coating machine |
| CN103590005B (en) * | 2013-11-15 | 2016-03-02 | 浙江星星瑞金科技股份有限公司 | A kind of vacuum plating unit |
| CN112438727A (en) * | 2020-12-08 | 2021-03-05 | 北京海洋海泰科技有限公司 | Vacuum metal coating fingerprint display system |
| CN112438727B (en) * | 2020-12-08 | 2024-05-17 | 北京海洋海泰科技有限公司 | Vacuum metal coating fingerprint display system |
| CN115216738A (en) * | 2022-07-20 | 2022-10-21 | 聚灿光电科技（宿迁）有限公司 | Rotatable plating ring plate pot mechanism and evaporator |
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Address after: 318015 Jiaojiang City, Taizhou Province Hong home Star electronics industry base, building No. 4, building No. Patentee after: ZHEJIANG XINGXING TECHNOLOGY CO., LTD. Address before: 318015 Jiaojiang City, Taizhou Province Hong home Star electronics industry base, building No. 4, building No. Patentee before: Zhejiang Firstar Panel Technology Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140528 Termination date: 20201115 |
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| CF01 | Termination of patent right due to non-payment of annual fee |