CN214032679U - Workpiece frame rotating system and vacuum coating equipment - Google Patents
Workpiece frame rotating system and vacuum coating equipment Download PDFInfo
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- CN214032679U CN214032679U CN202022734930.3U CN202022734930U CN214032679U CN 214032679 U CN214032679 U CN 214032679U CN 202022734930 U CN202022734930 U CN 202022734930U CN 214032679 U CN214032679 U CN 214032679U
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Abstract
The utility model discloses a work rest rotating system and vacuum coating equipment, work rest rotating system includes mount pad, revolution dish, rotation dish, transmission structure, braking structure and drive structure, the rotation dish is equipped with the rotation axle and round the rotation axle rotates install in on the revolution dish, in order to follow the revolution dish rotates, and transmission structure includes transmission shaft and gear drive, the transmission shaft with the revolution axle cup joints each other and rotates the setting, gear drive includes gear wheel and pinion, braking structure can selectively restrict the transmission shaft or the revolution axle rotates, drive structure can selectively drive the transmission shaft and/or the revolution axle, so that the rotation dish has alone around its rotation axle pivoted rotation stroke, alone around revolution axle pivoted revolution stroke, a, And can rotate and revolution axis pivoted combination rotation stroke around the axis of rotation at the same time to solve the defect of prior art.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating processing technique and specifically relates to a work rest rotating system and vacuum coating equipment.
Background
In the existing PVD (Physical Vapor Deposition) coating (generally referred to as vacuum coating), a workpiece needs to be placed in a vacuum chamber for coating, the workpiece needs to be rotated due to the fixation of a target, and the rotation of the existing workpiece adopts a single rotation mode, so that each surface of the workpiece cannot be coated during one coating, and thus, the prior art is troublesome in coating multiple surfaces of the workpiece by coating for multiple times.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a work rest rotating system and vacuum coating equipment, aim at can realizing carrying out rotation, revolution and rotation and the revolution combination rotation form of going on simultaneously to the work piece to can carry out the coating film to a plurality of surfaces of work piece, in order to solve prior art's defect.
In order to achieve the above object, the present invention provides a workpiece holder rotating system for use in a vacuum coating apparatus, the workpiece holder rotating system comprising
A mounting seat;
the revolution plate is provided with a revolution shaft and is rotatably arranged on the mounting seat around the revolution shaft;
the autorotation disc is used for fixing a workpiece to be coated and is provided with an autorotation shaft, and the autorotation disc is rotatably arranged on the revolution disc around the autorotation shaft so as to rotate along with the revolution disc;
the transmission structure comprises a transmission shaft and a gear transmission mechanism, the transmission shaft and the revolution shaft are mutually sleeved and rotatably arranged, and the gear transmission mechanism comprises a large gear arranged on the transmission shaft and a small gear arranged on the rotation shaft and meshed with the large gear; and the number of the first and second groups,
the rotation plate comprises a driving structure and a braking structure, wherein the driving structure can selectively limit the rotation of the rotating shaft or the revolution shaft, and the driving structure can selectively drive the rotating shaft and/or the revolution shaft, so that the rotation plate has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke rotating around the rotation shaft and the revolution shaft simultaneously.
Optionally, the transmission shaft is sleeved on the periphery of the revolution shaft.
Optionally, the transmission shaft and the revolution shaft are respectively provided with a driven gear;
the driving structure comprises a driving shaft arranged in parallel with the transmission shaft and two driving gears arranged on the driving shaft;
the two driven gears or the two driving gears can be movably adjusted in the direction of the driving shaft, so that the two driving gears can be selectively meshed with the two driven gears.
Optionally, the braking structure has a movably arranged braking member, and the braking member can selectively stop against a concave part of one of the driven gears on the movable stroke of the braking member.
Optionally, the two driving gears are rotatably locked to the driving shaft and movably arranged along the axial direction of the driving shaft;
the workpiece frame rotating system further comprises a pushing mechanism, and the pushing mechanism is used for pushing the two driving gears to move along the driving shaft.
Optionally, the pushing mechanism includes a shifting fork mechanism, the shifting fork mechanism includes a shifting fork driving portion and a shifting fork member, the shifting fork member is movably disposed along the axial direction of the driving shaft to shift the two driving gears to move, and the shifting fork driving portion drives the shifting fork member to move.
Optionally, the braking structure comprises a braking member connected to the fork for movement with the fork in the axial direction of the drive shaft.
Optionally, the two driving gears are arranged in a duplicate gear structure;
the shifting fork piece is arranged between the two driving gears;
the braking pieces are arranged at one side of the two driving gears, back to back, and are respectively connected with the shifting fork piece.
Optionally, the mounting seat includes a fixing plate, the fixing plate is disposed opposite to the revolution plate, a supporting component is disposed on the fixing plate, one end of the supporting component is fixedly connected to the fixing plate, and a rolling member in rolling contact with the revolution plate is disposed at the other end of the supporting component.
The utility model also provides a vacuum coating equipment, including work rest rotating system, work rest rotating system includes:
a mounting seat;
the revolution plate is provided with a revolution shaft and is rotatably arranged on the mounting seat around the revolution shaft;
the autorotation disc is used for fixing a workpiece to be coated and is provided with an autorotation shaft, and the autorotation disc is rotatably arranged on the revolution disc around the autorotation shaft so as to rotate along with the revolution disc;
the transmission structure comprises a transmission shaft and a gear transmission mechanism, the transmission shaft and the revolution shaft are mutually sleeved and rotatably arranged, and the gear transmission mechanism comprises a large gear arranged on the transmission shaft and a small gear arranged on the rotation shaft and meshed with the large gear; and the number of the first and second groups,
the rotation plate comprises a driving structure and a braking structure, wherein the driving structure can selectively limit the rotation of the rotating shaft or the revolution shaft, and the driving structure can selectively drive the rotating shaft and/or the revolution shaft, so that the rotation plate has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke rotating around the rotation shaft and the revolution shaft simultaneously.
The technical scheme of the utility model among, be used for the fixed autorotation dish of treating the coating film work piece to have alone around its axis of rotation pivoted rotation stroke, alone around axis of rotation pivoted revolution stroke and can rotate and the pivot pivoted combination rotation stroke around the axis of rotation simultaneously, in order to carry out the coating film to a plurality of surfaces of work piece, in order to solve prior art's defect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic perspective view of an embodiment of a workpiece holder rotation system according to the present invention;
FIG. 2 is a perspective view of the principal structure of the drive structure of the workpiece holder rotation system of FIG. 1;
FIG. 3 is a schematic cross-sectional view of FIG. 2;
FIG. 4 is a schematic view of the combination of the spinning disk, pinion and spinning shaft of FIG. 1;
FIG. 5 is a schematic cross-sectional view of FIG. 4;
FIG. 6 is a schematic perspective view of the braking and driving arrangements of FIG. 1;
FIG. 7 is a schematic view of a portion of the structure of FIG. 6;
fig. 8 is a perspective view of the support assembly of fig. 1.
The utility model provides an embodiment reference numeral explains:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 100 | Workpiece |
51 | Braking |
| 1 | |
61 | |
| 11 | |
62 | |
| 2 | |
63 | |
| 21 | |
7 | |
| 3 | Self-rotating |
71 | Shifting |
| 31 | Self-rotating |
72 | |
| 41 | |
8 | |
| 42 | |
9 | |
| 43 | |
91 | Rolling member |
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout includes three juxtapositions, exemplified by "A and/or B" including either A or B or both A and B. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
In the existing PVD coating, a workpiece needs to be placed in a vacuum chamber for coating, and the target is fixed, so that the workpiece needs to be rotated, and the surface of the workpiece is coated.
In the practical production and experiment process, according to the process requirements, sometimes two or more workpieces of different types and materials need to be coated in a vacuum chamber, some workpieces need to rotate, some do not need to revolve, some do not need to rotate, or after revolving and coating for a period of time, only rotate to coat, so that the workpiece frame system capable of realizing the following three motion modes is needed.
In view of this, the present invention provides a workpiece holder rotation system and a vacuum coating apparatus having the workpiece holder rotation system, so as to overcome the above-mentioned defects, and fig. 1 to 8 illustrate an embodiment of the workpiece holder rotation system provided by the present invention, and the following describes the workpiece holder rotation system provided by the embodiment of the present invention with reference to the accompanying drawings.
The utility model provides a work rest rotating system's basic concept is: the rotation disc for fixing the workpiece to be coated has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke rotating around the rotation shaft and the revolution shaft simultaneously, so as to meet different process requirements.
Referring to fig. 1 to 5, the workpiece holder rotating system 100 includes a mounting base 1, a revolution plate 2, a rotation plate 3, a transmission structure, a braking structure and a driving structure. The revolution plate 2 is provided with a revolution shaft 21 and is rotatably mounted on the mounting seat 1 around the revolution shaft 21, the revolution plate 3 is used for fixing a workpiece to be coated, the revolution plate 3 is provided with a revolution shaft 31 and is rotatably mounted on the revolution plate 2 around the revolution shaft 31 so as to rotate along with the revolution plate 2, the transmission structure comprises a transmission shaft 41 and a gear transmission mechanism, the transmission shaft 41 and the revolution shaft 21 are mutually sleeved and rotatably arranged, the gear transmission mechanism comprises a large gear 42 arranged on the transmission shaft 41 and a small gear 43 arranged on the revolution shaft 31 and meshed with the large gear 42, the brake structure can selectively limit the transmission shaft 41 or the revolution shaft 21 to rotate, the drive structure can selectively drive the transmission shaft 41 and/or the revolution shaft 21 so as to enable the revolution plate 3 to have a rotation stroke and a rotation stroke independently rotating around the revolution shaft 31 thereof, A revolution stroke rotating around the revolution shaft 21 alone, and a combined rotation stroke capable of rotating around the rotation shaft 31 and the revolution shaft 21 at the same time.
When the driving structure selects to drive the transmission shaft 41 and the revolution shaft 21 simultaneously, and the rotating speeds of the transmission shaft 41 and the revolution shaft 21 are set to be consistent, at this time, the large gear 42 and the revolution plate 2 both rotate, the revolution plate 3 rotates along with the revolution plate 2, at this time, the small gear 43 does not rotate, and the corresponding revolution plate 3 does not rotate, so that the effect of independent revolution of the revolution plate 3 is achieved.
When the driving structure drives the revolution shaft 21 to rotate and the braking structure limits the rotation of the transmission shaft 41, at this time, the revolution plate 2 rotates, the large gear 42 does not rotate, and the small gear 43 rotates, at this time, the rotation plate 3 rotates on one hand and revolves along with the revolution plate 2 on the other hand, namely, a combined rotation stroke is realized;
when the driving structure drives the transmission shaft 41 to rotate and the braking structure limits the revolution shaft 21 to rotate, the large gear 42 rotates, accordingly, the small gear 43 rotates, the revolution plate 2 does not rotate, and at the moment, the rotation plate 3 rotates.
Therefore, the technical scheme of the utility model in, be used for fixed carousel 3 of treating the coating film work piece to have alone around its rotation axis 31 pivoted rotation stroke, alone around rotation axis 21 pivoted revolution stroke and can rotate and the rotatory combination rotation stroke of revolution axis 21 around rotation axis 31 simultaneously to can carry out the coating film to a plurality of surfaces of work piece, with the defect of solving prior art.
The transmission shaft 41 and the revolution axis 21 are mutually sleeved and rotatably arranged, so, the transmission shaft 41 is sleeved on the periphery of the revolution axis 21, and also can be, the revolution axis 21 is sleeved on the periphery of the transmission shaft 41, in this embodiment, the transmission shaft 41 is sleeved on the periphery of the revolution axis 21.
The specific manner in which the driving structure can selectively drive the transmission shaft 41 and/or the revolution shaft 21 is not limited, and the driving structure may be provided with clutches respectively between the transmission shaft 41 and the revolution shaft 21 to control the driving structure to selectively drive the transmission shaft 41 and/or the revolution shaft 21, or the driving structure may be provided with two independently controlled driving devices, and the two independently controlled driving devices are correspondingly in driving connection with the transmission shaft 41 and the revolution shaft 21.
Specifically, referring to fig. 6 to 7, in this embodiment, a driven gear 61 is respectively disposed on the transmission shaft 41 and the revolution shaft 21, the driving structure includes a driving shaft 62 disposed in parallel with the transmission shaft 41 and two driving gears 63 disposed on the driving shaft 62, specifically, the driving structure includes a motor and a pulley mechanism, and the driving shaft 62 is disposed to be connected with a driven gear of the pulley mechanism. The two driven gears 61 or the two driving gears 63 are movably arranged in the direction of the driving shaft 62, so that the two driving gears 63 can be selectively meshed with the two driven gears 61, the driving shaft 62 can be selectively in driving connection with the transmission shaft 41 and/or the revolution shaft 21, and the selective driving with the transmission shaft 41 and/or the revolution shaft 21 can be realized through one driving device, and the structure is simple.
As can be seen from the foregoing, in order to realize the three modes (i.e., rotation, revolution and combined rotation) of the rotation disc 3, the braking structure is used to selectively limit the rotation of the transmission shaft 41 or the revolution shaft 21, and the specific structure of the braking structure is not limited, and the braking structure may be a brake piece that is in frictional contact with the end surfaces of the transmission shaft 41 and the revolution shaft 21, or an abutting piece that abuts against the side portions of the transmission shaft 41 and the revolution shaft 21 to limit the rotation thereof, specifically, in this embodiment, the braking structure has a movably arranged braking piece 51, and the braking piece 51 can selectively abut against the concave portion of one of the driven gears 61 on the movable stroke thereof.
Further, in this embodiment, the two driving gears 63 are rotatably mounted on the driving shaft 62 and movably disposed along the axial direction of the driving shaft 62, specifically, the two driving gears 63 are connected with the driving shaft 62 through splines, and the work rest rotating system 100 further includes a pushing mechanism for pushing the two driving gears 63 to move along the driving shaft 62, so that the two driving gears 63 can move on the driving shaft 62 to switch between different positions, so as to selectively engage with the two driven gears 61.
In this embodiment, the pushing mechanism includes the fork pulling mechanism 7, the fork pulling mechanism 7 includes the fork pulling driving portion 71 and the fork pulling member 72, the fork pulling member 72 is along the movable setting of axial of the driving shaft 62, so as to pull the activity of the two driving gears 63, the fork pulling driving portion 71 drives the activity of the fork pulling member 72, specifically, the mounting base 1 is further provided with the guide post 8 which is matched with the guide of the fork pulling member 72, the guide post 8 is arranged side by side with the driving shaft 62, the fork pulling driving portion 71 can be limited to be an air cylinder, so that the two driving gears 63 can be pulled through the fork pulling mechanism 7.
In this embodiment, the braking member 51 of the braking structure is connected to the pulling fork 72 to move along the axial direction of the driving shaft 62 along with the pulling fork 72.
Further, in this embodiment, the two driving gears 63 are configured as a dual gear structure, the shifting fork 72 is disposed between the two driving gears 63, and the two braking members 51 are disposed on opposite sides of the two driving gears 63, and are respectively connected to the shifting fork 72, so that the two driving gears 63 and the two braking members 51 can be driven to move by one shifting fork 72, so as to switch the self-rotation plate 3 between three modes.
In the embodiment of the present invention, please refer to fig. 1 and 8, the mounting base 1 includes a fixing plate 11, the fixing plate 11 is disposed opposite to the revolution plate 2, a supporting component 9 is disposed on the fixing plate 11, one end of the supporting component 9 is fixedly connected to the fixing plate 11, and the other end of the supporting component is disposed with a rolling element 91 in rolling contact with the revolution plate 2, so as to improve the rotation stability of the revolution plate 2.
The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.
Claims (10)
1. A workpiece holder rotation system for use on a vacuum coating apparatus, the workpiece holder rotation system comprising:
a mounting seat;
the revolution plate is provided with a revolution shaft and is rotatably arranged on the mounting seat around the revolution shaft;
the autorotation disc is used for fixing a workpiece to be coated and is provided with an autorotation shaft, and the autorotation disc is rotatably arranged on the revolution disc around the autorotation shaft so as to rotate along with the revolution disc;
the transmission structure comprises a transmission shaft and a gear transmission mechanism, the transmission shaft and the revolution shaft are mutually sleeved and rotatably arranged, and the gear transmission mechanism comprises a large gear arranged on the transmission shaft and a small gear arranged on the rotation shaft and meshed with the large gear; and the number of the first and second groups,
the rotation plate comprises a driving structure and a braking structure, wherein the driving structure can selectively limit the rotation of the rotating shaft or the revolution shaft, and the driving structure can selectively drive the rotating shaft and/or the revolution shaft, so that the rotation plate has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke rotating around the rotation shaft and the revolution shaft simultaneously.
2. The workpiece holder rotation system of claim 1, wherein the drive shaft is disposed about the periphery of the revolution axis.
3. The workpiece holder rotation system of claim 1, wherein a driven gear is provided on each of the drive shaft and the revolution shaft;
the driving structure comprises a driving shaft arranged in parallel with the transmission shaft and two driving gears arranged on the driving shaft;
the two driven gears or the two driving gears can be movably adjusted in the direction of the driving shaft, so that the two driving gears can be selectively meshed with the two driven gears.
4. The workpiece holder rotation system of claim 3, wherein the detent structure has a movably disposed detent that is selectively engageable with a recess of one of the driven gears on its movable travel.
5. The workpiece holder rotation system of claim 3, wherein the two drive gears are rotatably fixed to the drive shaft and movably disposed along an axial direction of the drive shaft;
the workpiece frame rotating system further comprises a pushing mechanism, and the pushing mechanism is used for pushing the two driving gears to move along the driving shaft.
6. The workpiece holder rotation system according to claim 5, wherein the pushing mechanism comprises a fork pulling mechanism, the fork pulling mechanism comprises a fork pulling driving part and a fork pulling part, the fork pulling part is movably arranged along the axial direction of the driving shaft to pull the two driving gears to move, and the fork pulling driving part drives the fork pulling part to move.
7. The workpiece holder rotation system of claim 6, wherein the braking structure comprises a braking member coupled to the fork member for movement therewith along the axial direction of the drive shaft.
8. The workpiece holder rotation system of claim 7, wherein the two drive gears are arranged in a dual gear configuration;
the shifting fork piece is arranged between the two driving gears;
the braking pieces are arranged at one side of the two driving gears, back to back, and are respectively connected with the shifting fork piece.
9. The workpiece holder rotation system of claim 1, wherein the mounting base comprises a fixed plate disposed opposite the revolution plate, and a support assembly is disposed on the fixed plate, one end of the support assembly being fixedly connected to the fixed plate, and the other end of the support assembly being provided with a rolling member in rolling contact with the revolution plate.
10. A vacuum coating apparatus comprising the work holder rotating system according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022734930.3U CN214032679U (en) | 2020-11-23 | 2020-11-23 | Workpiece frame rotating system and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022734930.3U CN214032679U (en) | 2020-11-23 | 2020-11-23 | Workpiece frame rotating system and vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214032679U true CN214032679U (en) | 2021-08-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022734930.3U Active CN214032679U (en) | 2020-11-23 | 2020-11-23 | Workpiece frame rotating system and vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214032679U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896A (en) * | 2018-11-30 | 2019-01-29 | 深圳天成真空技术有限公司 | Vacuum coating equipment |
| CN115821195A (en) * | 2022-11-04 | 2023-03-21 | 湖北超卓航空科技股份有限公司 | High-speed feeding system |
| WO2023221572A1 (en) * | 2022-05-20 | 2023-11-23 | 成都中科卓尔智能科技集团有限公司 | Coating system |
-
2020
- 2020-11-23 CN CN202022734930.3U patent/CN214032679U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896A (en) * | 2018-11-30 | 2019-01-29 | 深圳天成真空技术有限公司 | Vacuum coating equipment |
| CN109280896B (en) * | 2018-11-30 | 2023-08-18 | 深圳天成真空技术有限公司 | Vacuum coating machine |
| WO2023221572A1 (en) * | 2022-05-20 | 2023-11-23 | 成都中科卓尔智能科技集团有限公司 | Coating system |
| CN115821195A (en) * | 2022-11-04 | 2023-03-21 | 湖北超卓航空科技股份有限公司 | High-speed feeding system |
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Address after: Room 305, Building 4, Shandong Surveying, Mapping and Geographical Information Industry Base, No. 8999, Taoyuan Street, High-tech Zone, Weifang City, Shandong Province, 261061 Patentee after: Beige (Weifang) Intelligent Technology Co.,Ltd. Address before: Room 1006-02, high tech building, north of Yuqing East Street, Yuqing community, Xincheng street, Weifang High tech Zone, Weifang City, Shandong Province, 261000 Patentee before: Beihang gol (Weifang) intelligent robot Co.,Ltd. |