CN212388106U - Workpiece frame rotating system and vacuum coating equipment - Google Patents
Workpiece frame rotating system and vacuum coating equipment Download PDFInfo
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- CN212388106U CN212388106U CN202021541253.7U CN202021541253U CN212388106U CN 212388106 U CN212388106 U CN 212388106U CN 202021541253 U CN202021541253 U CN 202021541253U CN 212388106 U CN212388106 U CN 212388106U
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Abstract
The utility model discloses a work rest rotating system and vacuum coating equipment, work rest rotating system includes mount pad, runner assembly and actuating system, runner assembly locates the mount pad, runner assembly includes the rotation dish that is used for the fixed coating film work piece of treating, the rotation dish can be along the rotatable setting of its axis of rotation, just the rotation dish still can rotate the setting round a revolution axis, the actuating system drive connect in runner assembly, the actuating system drive the rotation dish round the axis of rotation and/or the revolution axis rotates, so that the rotation dish has alone around its axis of rotation pivoted rotation stroke, alone around revolution axis pivoted revolution stroke and can rotate and revolution axis pivoted combination rotation stroke simultaneously around the axis of rotation. The utility model provides a technical scheme can realize carrying out rotation, revolution and rotation and the revolution combination rotation form of going on simultaneously to the work piece to can carry out the coating film to a plurality of surfaces of work piece, with the defect of solving prior art.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating processing technique and specifically relates to a work rest rotating system and vacuum coating equipment.
Background
In the existing PVD (Physical Vapor Deposition) coating (generally referred to as vacuum coating), a workpiece needs to be placed in a vacuum chamber for coating, the workpiece needs to be rotated due to the fixation of a target, and the rotation of the existing workpiece adopts a single rotation mode, so that each surface of the workpiece cannot be coated during one coating, and thus, the prior art is troublesome in coating multiple surfaces of the workpiece by coating for multiple times.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a work rest rotating system and vacuum coating equipment, aim at can realizing carrying out rotation, revolution and rotation and the revolution combination rotation form of going on simultaneously to the work piece to can carry out the coating film to a plurality of surfaces of work piece, in order to solve prior art's defect.
In order to achieve the above object, the present invention provides a work rest rotating system for use in vacuum coating equipment, which is characterized in that the work rest rotating system comprises:
a mounting seat;
the rotating assembly is arranged on the mounting seat and comprises a self-rotating disc used for fixing a workpiece to be coated, the self-rotating disc can be rotatably arranged along a self-rotating shaft of the self-rotating disc, and the self-rotating disc can also be rotatably arranged around a revolution shaft; and the number of the first and second groups,
and the driving system is in driving connection with the rotating assembly and drives the rotation disc to rotate around the rotation shaft and/or the revolution shaft, so that the rotation disc has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke capable of rotating around the rotation shaft and rotating around the revolution shaft simultaneously.
Optionally, the rotating assembly further includes a revolution plate, the revolution plate is rotatably disposed, and a rotating shaft of the revolution plate is the revolution shaft;
the revolution plate is rotatably arranged on the revolution plate along a self-rotation shaft and can revolve along with the revolution plate;
the driving system is connected with the revolution plate and the rotation plate in a driving mode and can selectively drive the rotation plate to rotate and/or the revolution plate to revolve.
Optionally, the drive system comprises:
a drive device; and the number of the first and second groups,
and the transmission mechanism is in transmission connection with the driving device and between the revolution plate and the rotation plate so as to convert the driving of the driving device into revolution of the revolution plate and/or rotation of the rotation plate.
Optionally, the drive means comprises a common drive means;
the transmission mechanism comprises a revolution transmission mechanism and a rotation transmission mechanism, wherein the revolution transmission mechanism is in transmission connection between the common driving device and the revolution plate, and the rotation transmission mechanism is in transmission connection between the common driving device and the rotation plate;
the revolution transmission mechanism and the rotation transmission mechanism are both set to be clutchable transmission mechanisms, so that the common driving device can selectively drive the rotation of the rotation disc and/or the revolution of the revolution disc.
Optionally, the driving device comprises a revolution driving device and a rotation driving device;
the transmission mechanism comprises a revolution transmission mechanism and a rotation transmission mechanism, wherein the revolution transmission mechanism is in transmission connection between the revolution driving device and the revolution plate, and the rotation transmission mechanism is in transmission connection between the rotation driving device and the rotation plate.
Optionally, the revolution driving device and the rotation driving device are both fixedly mounted on the mounting seat;
the rotation transmission mechanism is a transmission mechanism which can be in clutch transmission arrangement, so that when the revolution driving device drives the revolution plate through the revolution transmission mechanism, the rotation plate is separated from the revolution driving device in driving connection.
Optionally, the revolution transmission mechanism includes a revolution rotating part fixedly sleeved on the revolution shaft to be connected with the revolution plate through the revolution shaft, and the revolution rotating part is in transmission connection with the revolution driving device to be driven to rotate by the revolution driving device;
the rotation transmission mechanism comprises:
the rotating shaft is sleeved outside the revolution shaft and can rotate relatively between the revolution shaft and the rotating shaft;
the self-rotation transmission part is fixedly sleeved on the rotating shaft and is in transmission connection with the self-rotation driving device so as to be driven by the self-rotation driving device to rotate;
the bull gear is fixedly sleeved on the rotating shaft and driven by the rotating shaft to rotate; and the number of the first and second groups,
the small gear is meshed with the large gear and can be connected with the autorotation disc through the autorotation shaft;
the small gear and the large gear are arranged in a separable mode, or the self-rotating shaft and the small gear are arranged in a clutchable mode, so that the self-rotating transmission mechanism is arranged in a transmission mechanism in a clutchable transmission mode.
Optionally, the pinion is sleeved on the rotation shaft and fixed to the rotation shaft in the circumferential direction to transmit rotation, and the pinion is adjustably arranged in the axial direction of the rotation shaft so that the pinion can be separated from and meshed with the gearwheel.
Optionally, a disengaged position on the rotation shaft corresponding to the pinion in a disengaged state, and an engaged position corresponding to the pinion in an engaged state;
one of the separated positions of the pinion and the rotating shaft is provided with a positioning part, and the other separated position of the pinion and the rotating shaft is provided with a matching part, so that the pinion is positioned at the separated position of the rotating shaft through positioning matching of the positioning part and the matching part.
Optionally, the positioning portion is a clamping groove, and the matching portion is an elastic clamping protrusion.
Optionally, a reset member is provided between the pinion and the rotation shaft, and the reset member is configured to reset the pinion to the meshing position when the positioning portion and the engagement portion are disengaged.
Optionally, the mounting seat is further provided with an adjusting device capable of driving the pinion to move between a separation position and a meshing position on the rotation shaft.
Optionally, the adjusting means comprises:
the disengaging device is provided with an abutting piece capable of driving the telescopic device, and the abutting piece is used for abutting the pinion to move from the meshing position of the rotating shaft to the separating position; and the number of the first and second groups,
the resetting device is provided with an adsorption piece capable of driving the telescopic device, and the adsorption piece is used for adsorbing the pinion so as to apply acting force to the pinion at the separation position, so that the positioning part and the matching part are disengaged.
Optionally, a first magnetic part is arranged on the adsorption piece;
the pinion is provided with a second magnetic suction part which is attracted by the first magnetic suction part.
Optionally, the mounting seat includes a fixing plate, the fixing plate is disposed opposite to the revolution plate, a supporting component is disposed on the fixing plate, one end of the supporting component is fixedly connected to the fixing plate, and a rolling member in rolling contact with the revolution plate is disposed at the other end of the supporting component.
The utility model also provides a vacuum coating equipment, including work rest rotating system, work rest rotating system includes:
a mounting seat;
the rotating assembly is arranged on the mounting seat and comprises a self-rotating disc used for fixing a workpiece to be coated, the self-rotating disc can be rotatably arranged along a self-rotating shaft of the self-rotating disc, and the self-rotating disc can also be rotatably arranged around a revolution shaft; and the number of the first and second groups,
and the driving system is in driving connection with the rotating assembly and drives the rotation disc to rotate around the rotation shaft and/or the revolution shaft, so that the rotation disc has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke capable of rotating around the rotation shaft and rotating around the revolution shaft simultaneously.
The technical scheme of the utility model among, be used for the fixed autorotation dish of treating the coating film work piece to have alone around its axis of rotation pivoted rotation stroke, alone around axis of rotation pivoted revolution stroke and can rotate and the pivot pivoted combination rotation stroke around the axis of rotation simultaneously, in order to carry out the coating film to a plurality of surfaces of work piece, in order to solve prior art's defect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic perspective view of an embodiment of a workpiece holder rotation system according to the present invention;
FIG. 2 is a perspective view of the principal structure of the drive train of the workpiece holder rotation system of FIG. 1;
FIG. 3 is a schematic cross-sectional view of FIG. 2;
FIG. 4 is a schematic view of the combination of the spinning disk, pinion and spinning shaft of FIG. 1;
FIG. 5 is a schematic cross-sectional view of FIG. 4;
FIG. 6 is a schematic perspective view of the separation device of FIG. 1;
fig. 7 is a perspective view of the resetting device of fig. 1;
fig. 8 is a perspective view of the support assembly of fig. 1.
The utility model provides an embodiment reference numeral explains:
| reference numerals | Name (R) | Reference numerals | Name (R) | |
| 100 | Workpiece |
322 | Rotating shaft | |
| 1 | |
323 | Self-rotation transmission part | |
| 11 | |
324 | |
|
| 2 | |
325 | |
|
| 21 | Self-rotating |
326 | |
|
| 21a | Self-rotating shaft | A | |
|
| 22 | Revolution plate | B | |
|
| 22a | Revolution axis | | Reset piece | |
| 3 | |
4 | |
|
| 31 | |
41 | |
|
| 31a | |
5 | Resetting |
|
| 31b | Self- |
51 | |
|
| 32 | |
52 | |
|
| 32a | |
6 | |
|
| 321 | |
61 | Rolling |
|
| 32b | Self-rotation transmission mechanism |
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout includes three juxtapositions, exemplified by "A and/or B" including either A or B or both A and B. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
In the existing PVD coating, a workpiece needs to be placed in a vacuum chamber for coating, and the target is fixed, so that the workpiece needs to be rotated, and the surface of the workpiece is coated.
In the practical production and experiment process, according to the process requirements, sometimes two or more workpieces of different types and materials need to be coated in a vacuum chamber, some workpieces need to rotate, some do not need to revolve, some do not need to rotate, or after revolving and coating for a period of time, only rotate to coat, so that the workpiece frame system capable of realizing the following three motion modes is needed.
In view of this, the present invention provides a workpiece holder rotation system and a vacuum coating apparatus having the workpiece holder rotation system, so as to overcome the above-mentioned defects, and fig. 1 to 6 illustrate an embodiment of the workpiece holder rotation system provided by the present invention, and the following describes the workpiece holder rotation system provided by the embodiment of the present invention with reference to the accompanying drawings.
The utility model provides a work rest rotating system 100's basic idea is: the rotation disc 21 for fixing the workpiece to be coated has a rotation stroke rotating around the rotation shaft 21a alone, a revolution stroke rotating around the revolution shaft 22a alone, and a combined rotation stroke rotating around the rotation shaft 21a and the revolution shaft 22a simultaneously, so as to meet different process requirements.
Referring to fig. 1 to 3, the workpiece holder rotating system 100 includes a mounting base 1, a rotating assembly 2 and a driving system 3.
The mounting base 1 serves as a mounting carrier for the rotating assembly 2 and the driving system 3, and the specific form and structure thereof are not limited, and may be a fixing plate 11, a fixing frame, or other forms.
The movable assembly is disposed on the mounting base 1, the rotating assembly 2 includes a rotation disc 21 for fixing a workpiece to be coated, the rotation disc 21 is specifically disposed in a circular shape in this embodiment, it is obvious that the design is not limited thereto, the rotation disc 21 may also be non-circular, square, or the like, the rotation disc 21 may be rotatably disposed along a rotation axis 21a thereof, and the rotation disc 21 may also be rotatably disposed around a rotation axis 22 a.
The driving system 3 is connected to the rotating assembly 2 in a driving manner, and the driving system 3 drives the rotation disc 21 to rotate around the rotation shaft 21a and/or the revolution shaft 22a, so that the rotation disc 21 has a rotation stroke rotating around the rotation shaft 21a alone, a revolution stroke rotating around the revolution shaft 22a alone, and a combined rotation stroke capable of rotating around the rotation shaft 21a and the revolution shaft 22a simultaneously.
The technical scheme of the utility model among, be used for the fixed rotation dish 21 of treating the coating film work piece to have alone around its axis of rotation 21a pivoted rotation stroke, alone around axis of rotation 22a pivoted revolution stroke and can rotate and the pivoted combination rotation stroke of axis of rotation 22a around axis of rotation 21a simultaneously, in order to carry out the coating film to a plurality of surfaces of work piece, in order to solve prior art's defect.
The specific structure for realizing the rotation and revolution of the rotation plate 21 and the combined rotation (i.e. the simultaneous rotation and revolution) is not limited, and the realization forms are various, and the following description is exemplary combined with the embodiments of the present invention.
In the embodiment of the present invention, the rotating assembly 2 further includes a revolution plate 22, the revolution plate 22 is rotatable, the rotation shaft of the revolution plate 22 is the revolution shaft 22a, the revolution plate 21 is rotatably disposed on the revolution plate 22 along the rotation shaft 322 thereof, and can follow the revolution plate 22 revolves together, the driving system 3 is drivingly connected to the revolution plate 22 and the revolution plate 21, and can selectively drive the revolution plate 21 rotates and/or the revolution plate 22 revolves. Obviously, the design may also be provided without the revolution plate 22, and a rotating frame may be provided, the rotating frame may rotate along the revolution shaft 22a, the rotation plate 21 may be rotatably provided on the rotating frame, and then the rotating frame may be driven to revolve and/or the rotation plate 22 may be driven to rotate through the driving system 3. That is, the specific structure of the present design to realize the revolution of the rotating disk 21 is not limited.
Since the revolution plate 21 is provided on the revolution plate 22, the revolution plate 21 can rotate with the revolution plate 22, and the revolution plate 21 is rotatably attached to the revolution plate 22 along the rotation axis 21a thereof, the revolution plate 21 can also rotate, and for this reason, the drive system 3 can drive the revolution plate 21 to rotate alone, can drive the revolution plate 22 to revolve while driving the revolution plate 21 to rotate, and can drive the revolution plate 22 to revolve to realize combined rotation, or can drive the revolution plate 22 to revolve alone, and can revolve to make the revolution plate 21 revolve.
The driving system 3 includes a driving device 31 and a transmission mechanism 32, and the transmission mechanism 32 is in transmission connection between the driving device 31 and the revolution plate 22 and the revolution plate 21, so as to convert the driving of the driving device 31 into revolution of the revolution plate 22 and/or rotation of the revolution plate 21, obviously, the driving device 31 may be a motor, a rotating cylinder, and the like as a power source of the driving system 3, and is not limited herein, and of course, may be a non-rotating device, and the transmission mechanism 32 needs to be adapted for different power movement modes, and the adapted settings belong to basic skills in the mechanical field, and therefore, it is not necessary to list one of them here.
Specifically, in an embodiment of the present invention, the driving device 31 includes a common driving device 31, the transmission mechanism 32 includes a revolution transmission mechanism 32a which is in transmission connection between the common driving device 31 and the revolution plate 22, and a rotation transmission mechanism 32b which is in transmission connection between the common driving device 31 and the revolution plate 21, wherein the revolution transmission mechanism 32a and the rotation transmission mechanism 32b are both provided as a transmission mechanism 32 which can be clutched, so that the common driving device 31 can selectively drive the revolution plate 21 to rotate and/or the revolution plate 22 to revolve, for this purpose, when the rotation plate 21 performs a rotation stroke, the revolution transmission mechanism 32a is controlled to be in a separated state, and at this time, the power of the common driving device 31 is transmitted from the rotation transmission mechanism 32b to the rotation plate 21, so as to perform rotation, and when the revolution transmission mechanism 32a is cut off, when the rotation plate 21 needs to perform rotation and revolution, that is, when the rotation plate 21 is rotated in combination, the common driving device 31 can simultaneously transmit power to the revolution plate 22 and the rotation plate 21 through the revolution transmission mechanism 32a and the rotation transmission mechanism 32b so that the rotation plate 21 can perform revolution and rotation, and when the rotation plate 21 performs a revolution stroke, the rotation transmission mechanism 32b is controlled to be in a separated state, and at this time, the power of the common driving device 31 is transmitted from the revolution transmission mechanism 32a to the revolution plate 22, and the rotation plate 21 is rotated by the revolution plate 22, and a transmission path of the rotation transmission mechanism 32b is cut off.
It should be noted that the "clutchable transmission mechanism 32" is a transmission line capable of transmitting power and can be opened and closed, for example, a common clutch can realize clutching, and can also be engaged and disengaged by gears, etc., or other forms, and the design is not limited herein.
The foregoing description is directed to the case where only one driving device 31 is provided, and obviously, the present design is not limited thereto, and in the embodiment of the present invention, the driving device 31 includes a revolution driving device 31a and a rotation driving device 31b, and the transmission mechanism 32 includes a revolution transmission mechanism 32a drivingly connected between the revolution driving device 31a and the revolution plate 22, and a rotation transmission mechanism 32b drivingly connected between the rotation driving device 31 and the rotation plate 21. Since the revolution plate 21 and the revolution plate 22 each have an independent drive device 31 and transmission system, they can easily perform independent revolution and rotation.
Specifically, in the embodiment of the present invention, the revolution driving device 31a and the rotation driving device 31b are both fixedly installed on the mounting base 1, and the rotation transmission mechanism 32b is set as a transmission mechanism 32 capable of being clutch-driven, so that the revolution driving device 31 is driven by the revolution transmission mechanism 32a to drive the revolution plate 22, and the rotation plate 21 is disengaged from the revolution driving device 31a for driving connection. Since both the revolution driving device 31a and the rotation driving device 31b are fixedly mounted on the mount 1, when the revolution plate 21 has a single revolution stroke, that is, when the revolution plate 22 revolves, the rotation driving device 31b needs to be disconnected from the previous transmission connection of the revolution plate 21 to prevent the rotation transmission mechanism 32b from affecting the revolution of the revolution plate 21, and therefore, the rotation transmission mechanism 32b is provided as a transmission mechanism 32 that can be clutch-transmission-set.
Obviously, the present design is not limited to this, when the rotation driving device 31b is fixed to the revolution plate 22, it is not necessary to set the rotation transmission mechanism 32b as the clutchable transmission mechanism 32, and at this time, the power supply to the rotation driving device 31b is tested, a circular ring-shaped slide rail may be provided, a power supply layer is provided in the circular ring-shaped slide rail, the rotation driving device 31b is connected to the circular ring-shaped slide rail in a sliding manner, and a conductive part in contact with the power supply layer is provided on the rotation driving device 31b to supply power to the rotation driving device 31b, and of course, the rotation driving device 31b may be provided with a battery.
The specific form and structure of the revolution transmission mechanism 32a and the rotation transmission mechanism 32b are not limited, and specifically, in the embodiment of the present invention, the revolution transmission mechanism 32a includes a revolution rotating part 321 fixedly sleeved on the revolution shaft 22a to connect with the revolution plate 22 through the revolution shaft 22a, and the revolution rotating part 321 is in transmission connection with the revolution driving device 31a to be driven and rotated by the revolution driving device 31 a.
The rotation transmission mechanism 32b includes a rotation shaft 322, a rotation transmission part 323, a large gear 324, and a small gear 325, the rotation shaft 322 is externally sleeved on the revolution shaft 22a and can rotate relatively therebetween, and specifically, the rotation shaft and the large gear are rotatably mounted through a bearing 326. The self-rotation transmission part 323 is fixedly sleeved on the rotation shaft 322 and is in transmission connection with the self-rotation driving device 31 so as to be driven by the self-rotation driving device 31b to rotate, the self-rotation transmission part 323 is not limited in specific form and can be a gear, a belt wheel or other structures, the large gear 324 is fixedly sleeved on the rotation shaft 322 so as to be driven by the rotation shaft 322 to rotate, the small gear 325 is meshed with the large gear 324, and the self-rotation shaft 21a is connected with the self-rotation disc 21 through the passing. Wherein the small gear 325 and the large gear 324 are detachably provided, or the self-rotating shaft 322 and the small gear 325 are detachably provided, so that the self-rotation transmission mechanism 32b is provided as the transmission mechanism 32 which is detachably transmission-provided.
When the rotation of the rotation plate 21 is required to be performed independently, the rotation driving device 31b is directly controlled to drive the rotation plate 21 to rotate through the rotation transmission mechanism 32b, when the rotation plate 21 is required to be performed independently, the pinion 325 and the gearwheel 324 need to be separated, or the rotation shaft 322 and the pinion 325 need to be separated, so as to cut off the connection between the rotation driving device 31b and the rotation plate 21, at this time, the revolution driving device 31a is controlled to drive the rotation plate 22 to rotate to drive the rotation plate 21 to revolve, when the rotation of the rotation plate 21 and the rotation are required to be performed simultaneously, the rotation driving device 31b is controlled to drive the rotation plate 21 to rotate through the rotation transmission mechanism 32b, so as to rotate the rotation plate 21, and at the same time, the revolution driving device 31a is controlled to drive the rotation plate 22 to rotate, to drive the rotation disc 21 to revolve.
The specific form of implementing "the rotation transmission mechanism 32b is set as the transmission mechanism 32 of the clutchable transmission setting" is not limited, specifically, in the embodiment of the present invention, the pinion 325 is sleeved on the rotation shaft 21a, and the two are fixed to each other in the circumferential direction to transmit rotation, the pinion 325 is in the axial adjustable setting of the rotation shaft 21a, so that the pinion 325 can be separated from and meshed with the large gear 324.
In the embodiment of the present invention, the rotation axis 21a has a disengaged position corresponding to the pinion 325 in the disengaged state and an engaged position corresponding to the pinion 325 in the engaged state; one of the separated positions of the pinion 325 and the rotation shaft 21a is provided with a positioning portion, and the other is provided with an engaging portion, so that the pinion 325 is positioned at the separated position of the rotation shaft 21a by the positioning engagement of the positioning portion and the engaging portion. Specifically, in the embodiment of the utility model provides an in, location portion is draw-in groove A, cooperation portion is the protruding B of elasticity card, and obviously, location portion with cooperation portion can also be magnetism and inhale structure etc..
Further, referring to fig. 1, 4 and 5, a reset element C is disposed between the pinion 325 and the rotation shaft 21a, and the reset element C is configured to reset the pinion 325 to the meshing position when the positioning portion and the matching portion are disengaged, specifically, the reset element C is a reset spring, the reset spring is sleeved on the rotation shaft 21a, one end of the reset spring is limited by the rotation shaft 21a, and the other end of the reset spring abuts against an end surface of the pinion 325, so that when the pinion 325 moves from the meshing position to the separation position, the reset spring is compressed.
Optionally, in an embodiment of the present invention, the mounting base 1 is further provided with an adjusting device capable of driving the pinion 325 to move between a disengaged position and an engaged position on the rotation shaft 21 a. The specific configuration of the adjusting device is not limited, and for example, the adjusting device may be a magnetic attraction driving device 31, for example, an electromagnet is disposed on the rotation shaft 21a, and a magnetic attraction portion is disposed on the pinion 325, so as to control the magnitude and direction of the acting force of the electromagnet on the pinion 325 by the electrification and the deenergization of the electromagnet and the direction of the current.
Specifically, in this embodiment, referring to fig. 1 and fig. 6, the adjusting device includes a disengaging device 4 and the resetting device 5, the disengaging device 4 has a propping member 41 capable of driving to extend and retract, the propping member 41 is used for propping the pinion 325 to move from the meshing position of the rotation shaft 21a to the disengaging position, the propping member 41 is specifically driven to extend and retract by an air cylinder, and obviously, may also be an oil cylinder or a linear motor, and is not limited herein.
Referring to fig. 1 and 7, the reset device 5 has an absorbing member 51 capable of driving a telescopic device, the absorbing member 51 is configured to absorb the pinion 325 to apply a force to the pinion 325 at the separation position, so as to disengage the positioning portion and the engaging portion, the absorbing member 51 is specifically driven by an air cylinder to extend and retract, and obviously, the absorbing member may also be an oil cylinder or a linear motor, and the present invention is not limited thereto. The adsorption mode of the adsorption member 51 may be a suction cup or a magnetic suction, in this embodiment, the adsorption member 51 is provided with a first magnetic suction portion, specifically, the adsorption member 51 has a pull block 52 made of a magnetic material, the pinion 325 is provided with a second magnetic suction portion adsorbed by the first magnetic suction portion, specifically, the pinion 325 is made of a steel material.
In the embodiment of the present invention, please refer to fig. 1 and 8, the mounting base 1 includes a fixing plate 11, the fixing plate 11 is disposed opposite to the revolution plate 22, a supporting component 6 is disposed on the fixing plate 11, one end of the supporting component 6 is fixedly connected to the fixing plate 11, and the other end of the supporting component is disposed with a rolling member 61 in rolling contact with the revolution plate 22, so as to improve the rotation stability of the revolution plate 22.
The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.
Claims (16)
1. A workpiece holder rotation system for use on a vacuum coating apparatus, the workpiece holder rotation system comprising:
a mounting seat;
the rotating assembly is arranged on the mounting seat and comprises a self-rotating disc used for fixing a workpiece to be coated, the self-rotating disc can be rotatably arranged along a self-rotating shaft of the self-rotating disc, and the self-rotating disc can also be rotatably arranged around a revolution shaft; and the number of the first and second groups,
and the driving system is in driving connection with the rotating assembly and drives the rotation disc to rotate around the rotation shaft and/or the revolution shaft, so that the rotation disc has a rotation stroke rotating around the rotation shaft independently, a revolution stroke rotating around the revolution shaft independently and a combined rotation stroke capable of rotating around the rotation shaft and rotating around the revolution shaft simultaneously.
2. The workpiece holder rotation system of claim 1, wherein the rotation assembly further comprises a revolution plate, the revolution plate being rotatably disposed, a rotation axis of the revolution plate being the revolution axis;
the revolution plate is rotatably arranged on the revolution plate along a self-rotation shaft and can revolve along with the revolution plate;
the driving system is connected with the revolution plate and the rotation plate in a driving mode and can selectively drive the rotation plate to rotate and/or the revolution plate to revolve.
3. The workpiece holder rotation system of claim 2, wherein the drive system comprises:
a drive device; and the number of the first and second groups,
and the transmission mechanism is in transmission connection with the driving device and between the revolution plate and the rotation plate so as to convert the driving of the driving device into revolution of the revolution plate and/or rotation of the rotation plate.
4. The workpiece holder rotation system of claim 3, wherein the drive means comprises a common drive means;
the transmission mechanism comprises a revolution transmission mechanism and a rotation transmission mechanism, wherein the revolution transmission mechanism is in transmission connection between the common driving device and the revolution plate, and the rotation transmission mechanism is in transmission connection between the common driving device and the rotation plate;
the revolution transmission mechanism and the rotation transmission mechanism are both set to be clutchable transmission mechanisms, so that the common driving device can selectively drive the rotation of the rotation disc and/or the revolution of the revolution disc.
5. The workpiece holder rotation system of claim 3, wherein the drive means comprises a revolution drive means and a rotation drive means;
the transmission mechanism comprises a revolution transmission mechanism and a rotation transmission mechanism, wherein the revolution transmission mechanism is in transmission connection between the revolution driving device and the revolution plate, and the rotation transmission mechanism is in transmission connection between the rotation driving device and the rotation plate.
6. The workpiece holder rotation system of claim 5, wherein the orbital drive and the rotational drive are each fixedly mounted to the mount;
the rotation transmission mechanism is a transmission mechanism which can be in clutch transmission arrangement, so that when the revolution driving device drives the revolution plate through the revolution transmission mechanism, the rotation plate is separated from the revolution driving device in driving connection.
7. The workpiece holder rotation system of claim 6, wherein the revolution transmission mechanism comprises a revolution rotating part fixedly attached to the revolution shaft to be connected to the revolution plate through the revolution shaft, the revolution rotating part being drivingly connected to the revolution driving device to be driven to rotate by the revolution driving device;
the rotation transmission mechanism comprises:
the rotating shaft is sleeved outside the revolution shaft and can rotate relatively between the revolution shaft and the rotating shaft;
the self-rotation transmission part is fixedly sleeved on the rotating shaft and is in transmission connection with the self-rotation driving device so as to be driven by the self-rotation driving device to rotate;
the bull gear is fixedly sleeved on the rotating shaft and driven by the rotating shaft to rotate; and the number of the first and second groups,
the small gear is meshed with the large gear and can be connected with the autorotation disc through the autorotation shaft;
the small gear and the large gear are arranged in a separable mode, or the self-rotating shaft and the small gear are arranged in a clutchable mode, so that the self-rotating transmission mechanism is arranged in a transmission mechanism in a clutchable transmission mode.
8. The workpiece holder rotation system of claim 7, wherein the pinion gear is sleeved on the rotation shaft and fixed to each other in a circumferential direction to transmit rotation therebetween, and the pinion gear is adjustably disposed in an axial direction of the rotation shaft so that the pinion gear can be disengaged and engaged with the bull gear.
9. The workpiece holder rotation system of claim 8, wherein the spinning shaft has a disengaged position corresponding to the pinion gear in a disengaged state and an engaged position corresponding to the pinion gear in an engaged state;
one of the separated positions of the pinion and the rotating shaft is provided with a positioning part, and the other separated position of the pinion and the rotating shaft is provided with a matching part, so that the pinion is positioned at the separated position of the rotating shaft through positioning matching of the positioning part and the matching part.
10. The workpiece holder rotation system of claim 9, wherein the positioning portion is a snap groove and the engagement portion is an elastic snap projection.
11. The workpiece holder rotation system according to claim 9, wherein a reset member is provided between the pinion gear and the rotation shaft, the reset member being configured to reset the pinion gear to the meshing position when the positioning portion and the engagement portion are disengaged.
12. The workpiece holder rotation system of claim 9, wherein the mount is further provided with adjustment means for moving the pinion between disengaged and engaged positions on the spin axis.
13. The workpiece holder rotation system of claim 12, wherein the adjustment device comprises:
the disengaging device is provided with an abutting piece capable of driving the telescopic device, and the abutting piece is used for abutting the pinion to move from the meshing position of the rotating shaft to the separating position; and the number of the first and second groups,
the resetting device is provided with an adsorption piece capable of driving the telescopic device, and the adsorption piece is used for adsorbing the pinion so as to apply acting force to the pinion at the separation position, so that the positioning part and the matching part are disengaged.
14. The workpiece holder rotation system of claim 13, wherein the attraction member is provided with a first magnetic attraction portion;
the pinion is provided with a second magnetic suction part which is attracted by the first magnetic suction part.
15. The workpiece holder rotation system of claim 2, wherein the mounting base comprises a fixed plate disposed opposite the revolution plate, and a support assembly is disposed on the fixed plate, one end of the support assembly being fixedly connected to the fixed plate, and the other end of the support assembly being provided with a rolling member in rolling contact with the revolution plate.
16. A vacuum coating apparatus comprising the work holder rotating system according to any one of claims 1 to 15.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021541253.7U CN212388106U (en) | 2020-07-29 | 2020-07-29 | Workpiece frame rotating system and vacuum coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021541253.7U CN212388106U (en) | 2020-07-29 | 2020-07-29 | Workpiece frame rotating system and vacuum coating equipment |
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| CN212388106U true CN212388106U (en) | 2021-01-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023221572A1 (en) * | 2022-05-20 | 2023-11-23 | 成都中科卓尔智能科技集团有限公司 | Coating system |
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2020
- 2020-07-29 CN CN202021541253.7U patent/CN212388106U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023221572A1 (en) * | 2022-05-20 | 2023-11-23 | 成都中科卓尔智能科技集团有限公司 | Coating system |
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Address after: Room 305, Building 4, Shandong Surveying, Mapping and Geographical Information Industry Base, No. 8999, Taoyuan Street, High-tech Zone, Weifang City, Shandong Province, 261061 Patentee after: Beige (Weifang) Intelligent Technology Co.,Ltd. Address before: Room 1006-02, high tech building, north of Yuqing East Street, Yuqing community, Xincheng street, Weifang High tech Zone, Weifang City, Shandong Province, 261000 Patentee before: Beihang gol (Weifang) intelligent robot Co.,Ltd. |