KR20080102925A - Transfer aparatus - Google Patents

Abstract

A transfer system is provided to delivery power from the driving disk to the driven disk by using attracting and repulsive power, so there is no dust generation. In a transfer system, a power transmission unit(10) is rotated around the axis by the driving source, is connected to a driving disk(11) and a pair of rollers(31), and includes a pairs of driven disks(21,22) is arranged to face the end surface of the driving disk while predetermined air gap is maintained between the driving disk. The permanent magnet(15) is arranged to be a radial shape at each end of the driven disk and driving disk alternately.

Description

Carrier {TRANSFER APARATUS}

1 is a perspective view schematically showing a part of a substrate cleaning device having a conveying device according to an embodiment of the present invention;

2 is a view showing a supporting structure of a cleaning roller and an adhesive tape roller in a substrate cleaning apparatus;

Figure 3a is a front view of the cleaning roller and the power transmission means in FIG.

3b is a side view of FIG. 3a,

4 is a conceptual view showing a front view of the power transmission means and the magnetic engagement of the power transmission means in the substrate cleaning apparatus;

5 is a diagram schematically showing a state in which the cleaning roller moves up and down in accordance with the unevenness of the surface of the object to be transported;

Fig. 6 is a diagram showing the position of the driven-side magnetic gear relative to the driving-side magnetic gear.

※ Explanation of code for main part of drawing

1: motor (drive source) 10: power transmission means

11: Drive side magnetic gear (drive side disc) 12: Magnetic disc

13: rotating shaft 15: magnetic tooth (permanent magnet)

16: End surface (of driving magnetic gear)

21: Upper magnetic gear (driven disk)

22: Lower magnetic gear (driven disk) 23, 24: Magnetic disk

25, 26: rotation axis 27: magnetic teeth (permanent magnet)

28: End face (upper magnetic gear) 29: End face (lower magnetic gear)

30 substrate cleaning apparatus 31 upper cleaning roller (roller)

32: lower cleaning roller (roller) 50: substrate (conveyed material)

The present invention relates to an apparatus for conveying a conveyed object by rotating a pair of rollers while sandwiching the conveyed object between the pair of rollers.

Background Art Conventionally, an apparatus for conveying a conveyed object by rotating a pair of rollers while holding the conveyed object between the pair of rollers is known. Such a conveying apparatus is provided in the washing | cleaning apparatus for removing the dust which affixed on the surface of a board | substrate in manufacturing processes, such as a printed circuit board (for example, refer patent document 1). This cleaning substrate or the like (hereinafter, referred to as "substrate cleaning device") is provided with a pair of sticky cleaning rollers arranged to face up and down, and a power transmission means for transmitting power to the cleaning rollers. By rotating a pair of cleaning rollers while holding a board | substrate between a pair of cleaning rollers, the dust adhered to a board | substrate is made to adsorb | suck to the cleaning roller surface, conveying a board | substrate.

[Patent Document 1]

Japanese Patent Application Laid-Open No. 2000-84514

In the substrate cleaning apparatus as described above, as a mechanism for transmitting the rotational force of the drive source to the cleaning roller, a gear mechanism comprising a drive side gear that is driven to rotate around the shaft center by the drive source and a driven side gear connected to the cleaning roller is used. . However, in the transmission method of the gear mechanism following the conventional mechanical contact, dust may be generated by the wear and friction of the gear, and the dust may adhere to the substrate, or the substrate may be contaminated due to vaporization of the lubricating oil of the gear. There is a possibility that the substrate cannot be conveyed in a clean state despite being an apparatus for cleaning the substrate.

In the substrate cleaning apparatus described above, the upper cleaning roller of the cleaning rollers arranged up and down is configured to move up and down in accordance with the unevenness of the electric parts and the like mounted on the substrate surface. That is, when holding the convex part of the board | substrate with a thickness larger than the space | interval between both rollers preset, between both rollers, an upper cleaning roller is pushed up by this convex part. In the case of the gear mechanism following the conventional mechanical contact, when the upper cleaning roller moves upward, the gear mechanism is complicated by other means so that the engagement state of the driven side gear connected to the upper cleaning roller does not change.

In view of the above, an object of the present invention is to provide a conveying apparatus in which dust due to abrasion, friction, or the like of a gear which is a power transmission means to a roller is not generated.

In order to achieve the above object, the conveying apparatus according to claim 1 of the present invention comprises a power transmission means for transmitting rotation to a pair of rollers, and the pair of rollers are held while sandwiching the object to be conveyed between the pair of rollers. In the conveying apparatus for conveying the object to be conveyed by rotating, the power transmission means is connected to the driving side disk which is rotationally driven around the shaft center by a driving source, and is connected to the pair of rollers respectively to maintain a predetermined gap between the driving side disk. And a pair of driven side discs arranged so as to face the end face with the drive side disc, and each end face of the drive side disc and the driven side disc alternates with the N pole and the S pole. The two-pole arrangement is arranged radially, and the pair of driven parts are driven from the drive side disk by using the attraction force and the repulsive force of the permanent magnet. It is characterized by transmitting power to the side disk.

A conveying apparatus according to claim 2 of the present invention is characterized by arranging two pairs of the driven side disks with respect to one driving side disk according to the first aspect.

In the conveying apparatus of Claim 3 of this invention, the said 1st roller is arrange | positioned up and down in the side wall board in Claim 1, and the lower roller can be rotated about the axial center of the magnet with respect to the said side wall board, and orthogonal to an axial center The upper side of the driven roller is installed so that the upper roller is rotatable about its own shaft center with respect to the side wall plate and the shaft center is movable up and down, and connected to the lower roller. A disc is inscribed to the drive side disc, and the driven side disc connected to the upper roller is circumscribed to the drive side disc.

EMBODIMENT OF THE INVENTION Below, preferred embodiment of the conveying apparatus which concerns on this invention is described in detail with reference to an accompanying drawing. In addition, this invention is not limited by this embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing a part of a substrate cleaning apparatus to which a conveying apparatus according to an embodiment of the present invention is applied. In addition, the "substrate" which becomes an object in this embodiment shows the printed circuit board with which electrical components etc. were mounted on the surface, the printed circuit board before mounting electrical components, a liquid crystal substrate, a plasma display substrate, etc.

The substrate cleaning apparatus 30 includes a pair of cleaning rollers 31 and 32 made of an adhesive elastic rubber material such as silicone rubber, and an adhesive tape roller made of a material that is stronger than the cleaning rollers 31 and 32. 33 and 34 and a power transmission means 10 for transmitting power to the pair of cleaning rollers 31 and 32. In addition, although the actual board | substrate cleaning apparatus 30 has the structure which provided multiple sets of each said roller together, in FIG. 1, only one pair is shown for convenience of description, and the illustration of another roller is abbreviate | omitted.

The pair of cleaning rollers 31 and 32 are arranged to face up and down with a predetermined interval open, and are rotatably supported by side wall plates (not shown in FIG. 1) via the rotation shafts 25 and 26. As shown in Fig. 1, one end of each of the rotary shafts 25 and 26 is connected to the driven side disks 21 and 22 of the power transmission means 10 described later, respectively. Hereinafter, the cleaning roller 31 is called "upper cleaning roller 31", and the cleaning roller 32 is called "lower cleaning roller 32." In addition, the adhesive tape rollers 33 and 34 are disposed on the outside of the cleaning rollers 31 and 32 in contact with the upper and lower cleaning rollers 31 and 32, respectively, and are rotatably supported by the side wall plate via the rotating shaft. have.

In the board | substrate cleaning apparatus 30 which has the said structure, as shown in FIG. 1, while holding the board | substrate 50 between the cleaning rollers 31 and 32, the cleaning roller (with the power transmission means 10 demonstrated later) ( By rotating the 31 and 32, the substrate 50 is conveyed in the horizontal direction, and at the same time, the dust adhering to the substrate 50 is adsorbed onto the surfaces of the cleaning rollers 31 and 32 to remove the dust from the surface of the substrate 50. Remove it. In addition, dust adhering to the cleaning rollers 31 and 32 is transferred to the adhesive tape rollers 33 and 34 which rotate while being in contact with the cleaning rollers 31 and 32.

Moreover, in this embodiment, the lower cleaning roller 32 and the adhesive tape roller 34 can be rotated about the axial center of the main body with respect to the side wall plate of the main body of the board | substrate cleaning apparatus 30, and the movement to the direction orthogonal to an axial center is regulated. While installing in one state, the upper cleaning roller 31 and the adhesive tape roller 33 can be rotated about the axial center of the magnetic body with respect to the side wall plate as shown in FIG. 2, and the shaft can be slidable in the vertical direction. It is installed if possible. More specifically, as shown in FIG. 2, the rotating shaft 25 of the upper cleaning roller 31 and the rotating shaft 35 of the adhesive tape roller 33 are supported by the side wall plate 40 via the bearing portion 41, respectively. It is. The bearing portion 41 is a plurality of bosses 43 are inserted into the long hole 44 provided in the side wall plate 40 so as to be movable up and down, and the bearing portion 41 is fixed to the side wall plate 40. The bolt 42 is inserted in the bolt long hole 45 so as to be movable up and down, thereby allowing the bolt 42 to slide in the vertical direction while supporting the rollers 31 and 33. In addition, the bearing portion 41 of the adhesive tape roller 33 has a predetermined air pressure by an air cylinder (not shown), and the adhesive tape roller 33 is always in close contact with the cleaning roller 31. With the above configuration, for example, when conveying the object to be conveyed with irregularities on the surface, such as a substrate on which an electric component is mounted, the upper cleaning roller 31 and the adhesive tape roller 33 are moved up and down in accordance with the irregularities of the object to be conveyed. It is possible to move.

Next, the power transmission means 10 which transmits rotation to the upper / lower cleaning rollers 31 and 32 will be described. FIG. 3A is a front view of the upper / lower cleaning rollers 31 and 32 and the power transmission means 10 in FIG. 1, and FIG. 3B is a view of FIG. 3A seen from the side (the cleaning roller side). 3A, the board | substrate 50 which is a to-be-carried object is abbreviate | omitted and shown. 4 is a view schematically showing the power transmission means 10, the left side is a front view of the power transmission means 10, the right side is a conceptual diagram showing the magnetic engagement of the power transmission means (10).

As shown in FIG. 3A, the power transmission means 10 includes an upper / lower cleaning roller via a drive side disk 11 driven to rotate around an axis by a drive source (motor) 1, and rotation shafts 25 and 26. A pair of driven side disks 21 and 22 connected to (31, 32) are provided. The pair of driven side discs 21 and 22 are arranged to hold a predetermined gap between the drive side disc 11 and to face the drive side disc 11 and the end faces. Here, the end surface of the drive side disk 11 represents one surface portion (planar portion) 16 of the drive side disk 11, and the end surfaces of the driven side disks 21 and 22 are the driven side disks 21, 22, one side part (plane part) 28 and 29 are shown. In this embodiment, as shown in Figs. 3B and 4, two pairs of driven side discs 21 and 22 (i.e., two pairs of cleaning rollers 31 and 32) are arranged with respect to one driving side disc 11. have. In the following description, for convenience of explanation, the drive side disc 11 is appropriately referred to as the drive side magnetic gear 11, and the driven side discs 21 and 22 are respectively referred to as the upper magnetic gear 21 and the lower magnetic gear 22. Let's call it.

The drive side magnetic gear 11 is a disc-shaped magnetic plate 12 made of a magnetic material (for example, soft iron material), a rotating shaft 13 and a magnetic plate 12 connecting the magnetic plate 12 and the motor 1. It consists of a magnetic tooth (15) formed by providing a permanent magnet on the end surface (16) at equal intervals by an appropriate means such as adhesive. On the other hand, the upper and lower magnetic gears 21 and 22 on the driven side have the same configuration as the driving side magnetic gear 11, and are made of a magnetic disk made of a disc-shaped magnetic body having a diameter smaller than that of the driving side magnetic gear 11 ( 23, 24, the rotary shafts 25, 26 connecting the magnetic disks 23, 24 and the upper / lower cleaning rollers 31, 32 and the end faces 28, 29 of the magnetic disks 23, 24. It consists of the magnetic tooth 27 formed by providing a permanent magnet at equal intervals.

As shown in the right side of FIG. 4, the magnetic teeth 15 and 27 which consist of permanent magnets are arrange | positioned so that the polarity of an adjacent magnetic tooth may alternate with an N pole and an S pole. The outline of the magnetic teeth 15 of the drive-side magnetic gear 11 shown in FIG. 4 is obtained as follows, for example. One point on the circumference of the disk and the center of the circle are connected by a curve, and the number of teeth is n, and the n curves are drawn by rotating the curve by 360 ° / n. The set of n curves can be, for example, a radial curve (for example, an involute curve) as shown in FIG. 4. The same applies to the magnetic teeth 27 of the upper and lower magnetic gears 21 and 22. The magnetic teeth 15 and 27 have the above-described shape, so that the rotation is smoothly transmitted, and the magnetic engagement is obtained in a larger area, so that the magnetic engagement becomes stronger. As the permanent magnet constituting the magnetic teeth 15, 27, for example, a rare earth material having a high energy content of 40 MGOe is used.

As shown in the right figure of FIG. 4, in this embodiment, the center (rotation shaft part) of the lower magnetic gear 22 is arrange | positioned so that it may become inside the magnetic tooth 15 of the drive side magnetic gear 11 (Hereafter, The state is called "internal engagement"). On the other hand, the center (rotation shaft part) of the upper magnetic gear 21 is arrange | positioned so that it may come out of the magnetic tooth 15 of the drive side magnetic gear 11 (henceforth this state is called "external engagement").

In the power transmission means 10 having the above-described configuration, the magnetic teeth 15 (permanent magnet) of the drive side magnetic gear 11 and the magnetic teeth 27 (permanent magnet) of the driven side magnetic gears 21 and 22 are formed. The magnetic engagement, that is, the suction force between the N pole and the S pole of the opposing magnet, and the repulsive force between the N pole, the N pole, and the S pole and the S pole causes the driven side magnetic gear ( Rotational torque is transmitted to the non-contacting 21, 22). For example, when the drive side magnetic gear 11 is rotated counterclockwise as shown in the right side of Fig. 4, the driven side magnetism is caused by the attraction force and the repulsion force of the magnet acting between the driven side magnetic gears 21 and 22. The gears 21 and 22 follow the rotation of the drive-side magnetic gear 11 and move. That is, when the drive side magnetic gear 11 rotates counterclockwise, the lower side magnetic gear 22 arrange | positioned so that it may internally engage with the drive side magnetic gear 11 may rotate counterclockwise as shown in FIG. On the other hand, the upper magnetic gear 21 disposed so as to be in external engagement with the driving side magnetic gear 11 is rotated clockwise as shown in Fig. 4, so that the rotation directions of the upper and lower magnetic gears 21, 22 are reversed. Becomes

In the power transmission means 10, the desired rotation ratio is obtained by appropriately setting the number of teeth of the magnetic teeth 15, 27. In the example shown in FIG. 4, the number of teeth of the drive-side magnetic gear 11 is set to 48, and the number of teeth of the upper / lower magnetic gears 21 and 22 is set to 16, respectively. Therefore, when the rotation is transmitted from the driving side magnetic gear 11 to the upper / lower magnetic gears 21 and 22, the angular velocity of the upper and lower magnetic gears 21 and 22 is three times higher than that of the driving side magnetic gear 11. do.

As shown in FIG. 3B, the upper cleaning roller 31 connected to the upper magnetic gear 21 and the lower cleaning roller 32 connected to the lower magnetic gear 22 become opposite directions. Thereby, the board | substrate 50 which is a to-be-carried object is conveyed in the horizontal direction, holding | maintaining between the upper / lower cleaning rollers 31 and 32. FIG.

5 is a diagram schematically showing a state in which the upper cleaning roller 31 moves up and down in accordance with the irregularities of the surface of the substrate 50, and FIG. 6 is a driving in the case where the upper magnetic gear 21 is moved upward. It shows the position with respect to the side magnetic gear (11). As shown in FIG. 5, when the upper cleaning roller 31 is pushed upward by the convex part 51 which has a thickness larger than the space | interval of the upper and lower cleaning rollers 31 and 32 which were preset, the upper cleaning roller will follow accordingly. The upper magnetic gear 21 connected to the 31 is also pushed upward. As shown in the top view of FIG. 6, when the upper magnetic gear 21 moves upward from the normal position, the engagement area with the driving side magnetic gear 11 is smaller than that in the normal position, but is shown in the lower view. As described above, the gap (air gap) between the drive side magnetic gear 11 is kept constant. For this reason, even if the upper magnetic gear 21 moves upward, the rotational torque transmitted to the upper cleaning roller 31 will not become small at the extreme.

As described above, according to the substrate cleaning apparatus 30 of the present embodiment, the magnetism and the repulsive force of the magnets provided on the driving side disc 11 and the driven side discs 21 and 22 are used from the driving side disc 11. It is designed to transmit power to the driven side discs 21 and 22, and it is possible to transfer power from the driving side to the driven side in a non-contact manner, so that dust or the like due to mechanical engagement of the gear is generated as in the prior art. It can be conveyed in the state which maintained the board | substrate 50 which is a to-be-carried object in the clean state.

In addition, according to the substrate cleaning apparatus 30 of the present embodiment, permanent magnets (magnetic teeth 15, 27) are formed on the end faces 16, 28, 29 of the driving side disk 11 and the driven side disks 21, 22, respectively. ) Are arranged so that the ends thereof face each other so that the cleaning roller 31 is pushed up by the convex portion 51 of the substrate. Even if) moves upward, the space | gap between the drive side disk 11 is kept constant. Thus, the torque transmitted from the drive side disc 11 to the driven side disc 21 does not become extremely small, and the desired rotational torque can be maintained regardless of the unevenness of the conveyed object held between the cleaning rollers. Therefore, it becomes possible to transmit stable rotational torque to the roller.

In addition, according to the substrate cleaning device 30 of the present embodiment, since the pair of driven side discs 21 and 22 are arranged in one drive side disc 11, the power transmission means 10 It is possible to reduce the arrangement space and to reduce the size of the entire substrate cleaning apparatus.

Further, in the above embodiment, only the upper cleaning roller 31 is configured to be movable up and down, but the same effect as the above embodiment can be obtained even when both the upper and lower cleaning rollers are configured to be movable up and down.

In the above embodiment, the magnetic teeth 15, 27 are provided on the end faces 16, 28, 29 at equal intervals, respectively, but magnetization may be performed to have the same shape as the ring-shaped circular magnet. In addition, although the thickness of each magnetic tooth 15 and 27 is the same, the thickness of the magnetic tooth 15 and the thickness of the magnetic tooth 27 may be changed. In addition, although the shape of the magnetic teeth 15 and 27 is radial, other shapes, such as a linear shape, may be sufficient.

As mentioned above, the conveying apparatus which concerns on this invention conveys a conveyed object by rotating a roller, moving a roller up and down according to the unevenness | corrugation of the conveyed object clamped between a pair of rollers including the board | substrate washing | cleaning apparatus shown in the said embodiment. It can be used effectively.

According to the conveying apparatus according to the present invention, the power is transmitted from the driving disk to the driven disk using magnetic attraction and repulsive force of magnets respectively installed on the driving disk and the driven disk connected to the roller. With this configuration, it is possible to transmit power from the driving side to the driven side in a non-contact manner, and as in the transmission method in the conventional gear mechanism, dust and the like are not generated by the mechanical engagement of the gears. It can convey in the state maintained in the clean state.

Moreover, according to the conveying apparatus which concerns on this invention, it was set as the structure which arrange | positioned the magnet in the form which alternately arranged two poles alternately on each end surface of a drive side disk and a driven side disk, and opposes the end surfaces of each other, and a drive side Even if the driven disk is moved upward or downward with respect to the disk, the gap with the driving disk is kept constant, so that the torque transmitted to the driven disk is not extremely small. As a result, the desired rotational torque can be maintained regardless of the unevenness of the conveyed object held between the pair of rollers, thereby ensuring a stable conveying function.

Claims (3)

A power transmission means for transmitting rotation to a pair of rollers, In the conveying apparatus which conveys a conveyed object by rotating the said pair of rollers, hold | maintaining the conveyed object between the said pair of rollers, The power transmission means, A drive side disk which is driven to rotate around the shaft center by a drive source, A pair of driven side discs connected to the pair of rollers, respectively, and arranged to maintain a predetermined gap between the drive side discs and to face the drive side discs and the end faces thereof; Peripheral magnets are alternately arranged in the opposite polarity with the N pole and the S pole on the end faces of the drive side disc and the driven side disc, and the pair of driven side discs are driven from the drive side disc by the magnetic force of the permanent magnet. Carrying device, characterized in that for transmitting power. The method of claim 1, The said drive side disc is arrange | positioned two pairs with respect to one drive side disc, The conveying apparatus characterized by the above-mentioned. The method of claim 1, The pair of rollers are arranged up and down on the side wall plate, and the lower roller is rotatable about its axis center with respect to the side wall plate and provided in a state in which movement in a direction perpendicular to the axis center is restricted, while the upper roller It is installed so as to be able to rotate about its axis center with respect to the side wall plate, and to allow the axis center to move in the vertical direction. A driven side disc connected to the lower roller is inscribed to the drive side disc, and a driven side disc coupled to the upper roller is circumscribed to the drive side disc.

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