KR100987763B1 - Circuit board process equipment - Google Patents

Abstract

The substrate processing apparatus of the present invention includes a drive device, a drive shaft connected to the drive device, a plurality of rotary shafts on which a plurality of transfer rollers are mounted, a rotating magnet coupled to one end of the rotary shaft, and connected to the drive shaft. It comprises a drive magnet that is rotated while maintaining a fine spacing with a magnet, the rotating magnet and the drive magnet is formed in a cylindrical shape, the N pole and the S pole is formed alternately along the circumference, the feed shaft and the drive shaft It is formed to be inclined with respect to the N and S poles are rotated while being continuously engaged with each other, the rotating magnet and the driving magnet is characterized in that the surface is coated with a chemical-resistant synthetic resin.

According to the present invention, it is possible to prevent the generation or vibration of foreign matters due to friction that can reduce the quality of the product in transmitting the driving force to the feed rotation shaft, and the rotating magnet and the driving magnet from various chemicals used in the substrate process Can protect the

Drive, Rotation, Polypropylene, Polyethylene, Polyvinylchloride, Polyvinylidenefluoride

Description

Substrate Process Equipment {CIRCUIT BOARD PROCESS EQUIPMENT}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate processing apparatus, which can move a substrate without vibration, abrasion, and noise by using magnetic driving, and safely protects the magnetic driving unit from various chemicals used in developing, washing, peeling, etching, and pickling processes. It is related with the substrate processing apparatus which can be performed.

Various processes such as peeling, developing, etching, cleaning, pickling and drying are performed in the manufacturing process of the PCB and the LCD substrate, and in these processes, a transfer apparatus for transferring the substrate is used. In the conventional substrate transfer apparatus, a plurality of feed rotation shafts are installed in parallel, and a feed roller is mounted on the feed rotation shaft, so that the substrate on the feed roller moves by rotating the feed shaft.

However, the method of receiving the rotational force from the driving device is a method of receiving the rotational force by connecting the drive shaft and the rotating shaft by connecting the belt, and the method of receiving using the rotary gear (mainly, helical gear or bevel gear) as shown in FIG. Was used.

However, these methods cause vibrations to be transmitted to the conveyed product, which impedes uniform operation.Also, foreign substances are generated and transferred to the product due to friction between the gears and the gears or the belt and the belt, which is a major cause of product defects. There is a problem that the dust generated during the work is sandwiched between the teeth of the gear, causing failure or severe vibration.

In the meantime, some methods using magnetic driving have been disclosed in response to the above-mentioned problems, but there are no specific methods for efficiently transmitting the rotational force of the driving apparatus. In particular, various chemicals are used in the substrate process. In the case of the magnets used, there is a problem that these chemicals are easily corroded, so there is a limit to the application to the actual substrate process.

In order to solve the above problems, the present invention provides an efficient magnetic driving method without vibration or friction in transmitting driving force to the feed shaft of the substrate processing apparatus, and in particular, the magnetic gears from various chemicals used in the substrate processing. It is an object to provide a substrate processing apparatus that can be protected.

Substrate processing apparatus of the present invention for achieving the above object, a drive device, a drive shaft connected to the drive device, a plurality of rotary shafts equipped with a plurality of transfer rollers, and a rotating magnet coupled to one end of the rotary shaft, It is made to include a drive magnet connected to the drive shaft and rotated while maintaining a predetermined interval with the rotating magnet,

The rotating magnet and the driving magnet is formed in a cylindrical shape, the N pole and the S pole are alternately formed along the circumference and are formed to be inclined with respect to the rotation axis and the drive shaft so that the N and S poles continue to interlock with each other during driving. , The rotating magnet and the driving magnet is characterized in that the surface is coated with a chemical resistant synthetic resin.

According to the present invention, it is possible to prevent the generation or vibration of foreign matters due to friction that can reduce the quality of the product in transmitting the driving force to the feed rotation shaft, and the rotating magnet and the driving magnet from various chemicals used in the substrate process Can protect the

In this case, the chemical resistance synthetic resin is preferably at least one of polypropylene, polyethylene, polyvinyl chloride, polyvinylidene fluoride, the outer of the rotor magnet and the driving magnet The coating thickness of the chemical resistant synthetic resin coated on the surface is preferably 0.1mm ~ 1mm.

In addition, the substrate processing apparatus includes a roll bracket for supporting the rotating shaft, wherein the roll bracket, a rolling bearing surrounding the rotating shaft is formed, wherein the rolling bearing of the feed rotating shaft It is preferably formed on both sides of the inlet and outlet. As a result, frictional resistance and vibration of the rotating shaft can be reduced.

The substrate processing apparatus of the present invention can prevent the generation or vibration of foreign matters due to friction that can reduce the quality of the product in transmitting the driving force to the feed rotation shaft, and the rotating magnet and The driving magnet can be protected.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Like reference numerals in the drawings denote components that perform the same function.

2 is a view showing an embodiment of a substrate processing apparatus of the present invention.

As shown in FIG. 2, the substrate processing apparatus of the present invention includes a driving shaft 120 connected to a driving device (not shown), a plurality of rotating shafts 220 mounted with a plurality of feed rollers, and one end of the rotating shaft 220. It comprises a rotating magnet 240 is coupled to the drive shaft 120, the driving magnet 240 is connected to the rotating magnet 220 and maintained at a predetermined constant interval with the rotating magnet 220.

In the substrate processing apparatus of the present invention, unlike a belt transmission method or a gear transmission method, power is transmitted by using a magnetic drive method without mutual friction.

3 is a view showing an embodiment of a power transmission method of the substrate processing apparatus of the present invention.

As shown in FIG. 3, one end of the rotating shaft 220 on which the conveying roller is mounted is coupled with a rotating magnet 240 in which an N pole and an S pole are alternately connected, and are connected to the driving shaft 120 and are connected to the N pole and the S pole. The alternating drive magnets 140 rotate while maintaining a minute interval with the rotating magnets 240. At this time, the rotating magnet 240 and the driving magnet 140 should be positioned so that the opposite polarity formed on each other, and the rotating magnet 240 is rotated by the attraction force between the opposite polarity of the driving magnet 140 Done.

In FIG. 3, the rotating shaft 220 of the rotating magnet 240 and the driving shaft 120 of the driving magnet 140 cross each other at right angles. When the rotating shaft 220 and the driving shaft 120 are orthogonal to each other so that the rotating magnet 240 and the driving magnet 140 are orthogonal, the N and S poles alternately formed between the rotating magnet 240 and the driving magnet 140 may be formed. Interlocking with each other to keep rotating is not an easy problem.

In order to solve this problem, as shown in FIG. 3, the rotating magnet 240 and the driving magnet 140 are formed in a cylindrical shape, and the S pole and the N pole are respectively inclined and rotated like the helical gear to be engaged with each other. It is supposed to be. That is, as shown in FIG. 3, when the rotating magnet 240 and the driving magnet 140 rotate perpendicularly to each other, the N pole (or S pole) of the rotating magnet 240 and the S of the driving magnet 140 are rotated. In order for the poles (or N poles) to rotate while being engaged with each other, the N poles and the S poles of each magnet are formed at regular intervals along the circumference, and are inclined with respect to the rotation shaft and the driving shaft in the form of a helical gear, thereby rotating the magnet ( As the N pole (or S pole) of 240 and the S pole (or N pole) of the driving magnet 140 are continuously engaged with each other, rotational force may be transmitted.

In FIG. 3, the rotating shaft and the driving shaft are perpendicular to each other. However, when the rotating shaft and the driving shaft are parallel to each other, the rotating magnet and the driving magnet may be in parallel with each other. In addition, the rotating shaft and the driving shaft may be formed at various angles, and accordingly, the shape in which the rotating magnet and the driving magnet are in contact with each other may appear in various ways.

In the substrate processing apparatus of the present invention, the driving force is transmitted to the rotating shaft by the repulsive force due to the magnetic force without mutual contact or friction, so that no friction or vibration occurs during driving. Therefore, the foreign matter is not generated by the friction can contribute to the improvement of the product quality.

By the way, the substrate processing apparatus of the present invention is mainly used in the peeling, developing, etching, cleaning, pickling, drying process of the PCB or LCD substrate, etc. Various kinds of chemicals are used in the above processes, and these chemicals are processed It may be scattered and may corrode a driving magnet or a rotating magnet.

In the present invention, in order to prevent corrosion of the driving magnet or the rotating magnet, the surfaces of the magnets are coated with a material having a high pass rate of magnetic lines while having corrosion resistance to chemicals.

Referring to the requirements of the coating material in detail as follows.

1) It must have high chemical resistance against chemicals (Na ₂ CO ₃ , CuCl ₂ , FeCl ₂ , NaOH, KOH, etc.) used in peeling, developing, etching, cleaning, pickling processes, etc. It must have high resistance to it.

2) Since the magnetic force of the driving magnet and the rotating magnet should be maintained even after the coating coating, the passage rate of the magnetic force line should be high.

3) In order to protect the magnet from various mechanical damages from outside, it must have high coating strength, high surface wear resistance, high resistance to stress cracking, and good torsional flexibility.

4) Because of ease of processing and high numerical accuracy, it should be easy to process with high melting power, low thermal expansion coefficient, low shrinkage after extrusion, good volume stability, low thermal expansion coefficient, low shrinkage after extrusion, and good volume stability.

As a result of experimentally confirming the material satisfying the above requirements, polypropylene (PP, Polypropylene), polyethylene (PE, Polyethylene), polyvinyl chloride (PVC, Polyvinylchloride), polyvinylidene fluoride (PVDF, Polyvinylidenefluoride) in various processes It has been found that the chemical resistance (particularly corrosion resistance), magnetic field line penetration and other mechanical properties of the aforementioned acidic or alkaline chemicals or other organic solvents used are good.

Therefore, at least one of polypropylene (PP), polyethylene (PE), polyvinyl chloride (PVC), and polyvinylidene fluoride (PVDF) may be used in the present invention.

In more detail, polypropylene (PP), polyethylene (PE), and polyvinyl chloride (PVC) of the synthetic resin can be used in all processes except the drying stage (PP, PE, which is weak in heat in a drying stage dried by hot air). , PVC coating is difficult to use), and polyvinylidene fluoride (PVDF) can be used in all processes, including drying stages.

4 is a cross-sectional view of the driving magnet (Fig. 4 (a)) and the rotating magnet (Fig. 4 (b)) showing a coating structure. As shown in FIG. 4, a cylindrical magnet surface (both outer surface and inner surface) is used by coating with at least one of the above-described chemical resistant synthetic resins. At this time, the coating thickness (t ₁ ) of the outer surface of the magnet is preferably maintained as thin as possible within the limit that the corrosion resistance or surface resistance is maintained so that the magnetic force line can pass through, the coating thickness (t ₂₎ of the inner surface of the magnet ) Is preferably coated relatively thick compared to the coating thickness (t ₁ ) of the outer surface for mechanical stability.

Tables 1 to 4 show the experimental results for the magnetic flux, corrosion resistance and coating stability according to the outer surface coating thickness (t ₁ ).

Polyfluoropropylene coating 0.08 0.1 0.3 0.5 0.7 0.9 1.0 1.1 1.3 Magnetic pass rate (%) 97.4 96.1 94.3 91.2 86.4 78.3 67.4 51.7 14.2 Corrosion resistance Occur beauty
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Polyethylene coating 0.08 0.1 0.3 0.5 0.7 0.9 1.0 1.1 1.3 Magnetic pass rate (%) 98 96.7 94.9 91.5 86 78.5 68.6 53.6 17 Corrosion resistance Occur beauty
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Polyvinyl chloride coating 0.08 0.1 0.3 0.5 0.7 0.9 1.0 1.1 1.3 Magnetic pass rate (%) 97.1 96.1 93.8 90.2 84 76.2 64.1 48.8 12.1 Corrosion resistance Occur beauty
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Polyvinylidene fluoride coating 0.08 0.1 0.3 0.5 0.7 0.9 1.0 1.1 1.3 Magnetic pass rate (%) 96.8 96 93.2 89.6 84.1 75.1 60.2 43.4 8.9 Corrosion resistance beauty
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In Tables 1 to 4, the unit of the coating thickness is mm, and the magnetic permeability is the result of measuring the ratio of the magnetic force in the uncoated state and the coated state (magnetic force is measured at a point 2 mm away from the coated surface). Corrosion resistance is Na ₂ CO ₃ among the chemicals actually used in the process for extrusion coating resin of each thickness. And NaOH was dropped by 0.1mg each to measure the occurrence of perforation in the coating resin, coating stability is the result of measuring the numerical stability and surface resistance during extrusion to the thickness.

Looking at the results shown in Tables 1 to 4, it can be seen that the magnetic flux is rapidly reduced to 50% or less when the coating thickness is more than 1 mm in all four coating materials. Appeared to fall.

As a result of this experiment, the coating thickness t ₁ of the outer surface is most preferably in the range of 0.1 mm to 1 mm. If the coating thickness (t ₁ ) of the outer surface is 1mm or more, the magnetic force passing through it is reduced to 50% or less, so that it is impossible to use the driving magnet or the rotating magnet as the driving gear.

In addition, the coating thickness t ₂ of the inner surface is preferably thicker within the numerical tolerance.

5 is a view showing a roll bracket (550 of FIG. 5) for supporting the feed roller shaft in the substrate processing apparatus according to an embodiment of the present invention. (A) is a front view, (b) is a side view, (c) is a figure which shows the cross section of the feed roller shaft support part in which the roll bearing was mounted among the roll brackets.

The roll bracket of the conventional substrate processing apparatus was simply a structure for supporting the feed roller shaft by punching a hole in the bracket (see FIG. 1), but the friction with the roll bracket during rotation of the feed roller shaft was a major cause of vibration.

In order to solve this problem, the roll bracket 550 of the present invention is equipped with a rolling bearing surrounding the feed shaft (rotation bearing), it is possible to reduce the vibration by reducing the friction while the rolling bearing rotates when the feed roller shaft is rotated .

At this time, as shown in Figure 5, the rolling bearing 556 is formed on both sides of the inlet / outlet of the feed shaft to form a space having an outer diameter larger than the diameter of the rotation hole of the conventional feed roller shaft, it is more preferably mounted in this space . Because, in the roll bracket, the most severe friction with the feed roller shaft is on both sides of the inlet / outlet of the feed shaft, and by installing a rolling bearing surrounding the feed shaft, the friction can be efficiently reduced.

As described above, the optimum embodiment has been disclosed in the drawings and the specification. Although specific terms have been used herein, they are used only for the purpose of describing the present invention and are not used to limit the scope of the present invention as defined in the meaning or claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1 is a view showing a conventional substrate processing apparatus.

2 is a view showing a substrate processing apparatus according to an embodiment of the present invention.

3 is a view showing a power transmission method of a substrate processing apparatus according to one embodiment of the present invention.

4 is a cross-sectional view of a magnetic gear in the substrate processing apparatus according to the embodiment of the present invention.

5 is a view showing a roll bracket for supporting a feed roller shaft in a substrate processing apparatus according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

120: drive shaft 140: drive magnet

220: rotating shaft 240: rotating magnet

550: Roll Bracket

Claims (5)

Drive unit, A drive shaft connected to the drive device; A plurality of rotary shafts equipped with a plurality of feed rollers, A rotating magnet coupled to one end of the rotating shaft; A driving magnet connected to the driving shaft and rotating while maintaining a predetermined distance from the rotating magnet; It is made, including The rotating magnet and the driving magnet is formed in a cylindrical shape, the N pole and the S pole are alternately formed along the circumference and are formed to be inclined with respect to the rotation axis and the drive shaft so that the N and S poles continue to interlock with each other during driving. , The rotating magnet and the driving magnet is a substrate processing apparatus, characterized in that the surface of the coating with a chemical-resistant synthetic resin. The method according to claim 1, The chemical resistant synthetic resin is at least one of polypropylene, polyethylene, polyvinyl chloride, polyvinylidene fluoride (Polyvinylidene fluoride) substrate processing equipment. The method according to claim 1, Substrate processing apparatus, characterized in that the coating thickness of the chemical-resistant synthetic resin coated on the outer surface of the rotating magnet and the driving magnet is 0.1mm ~ 1mm. The method according to claim 1, The substrate processing apparatus, It includes a roll bracket for supporting the rotating shaft, The roll bracket, substrate processing apparatus, characterized in that the rolling bearing (rolling bearing) surrounding the rotating shaft is formed. The method according to claim 4, The rolling bearing is substrate processing apparatus, characterized in that formed on both sides of the inlet / outlet of the feed shaft.

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