1325036 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種搬送裝置，尤其有關一種一邊夾持 被搬送物於一對的滾輪間一邊旋轉滾輪來搬送被搬送物之 搬送裝置。 【先前技術】 習知技術中，係有一邊夾持被搬送物於一對的滾輪間 一邊旋轉滾輪來搬送被搬送物之搬送裝置。例如在印刷基 板等的製造工程，上述的搬送裝置係裝設於用來去除附著 在基板表面的塵埃之洗淨裝置（參照如專利文獻丨）。該印刷 基板的洗淨裝置（以下簡稱為「基板洗淨裝置」）係具備上 下對向配置的一對具有黏著性之清潔滾輪與傳達動力 '至該 清潔滾輪之動力傳達手段，一邊夾持基板於一對的清潔滾 輪之間-邊旋轉清潔滚輪，#此而—邊搬送基板—邊讓^ 者在基板的塵埃吸著於清潔滾輪表面者。 專利文獻1:日本特開2〇〇〇_84514號公報 【發明内容】 (發明所欲解決之課題） 在上述的基板洗淨裝置係使用藉由驅動源而繞轴心旋 轉地做旋轉驅動之驅動齒輪與由連結至清潔滾輪之被驅動 側齒輪所構成之齒輪機構來做為用來將驅動源的旋轉力傳 機構。然而，習知伴隨有機械性接觸之齒 輪機構的傳達方法係因齒輪的磨耗、摩擦而產生塵埃，由 於該塵埃附著在基板、齒輪的潤滑油氣化等情事而有產生 319291修正版 5 1325036 污染基板等情形之虞，而可能發生_ ‘ ·裝置卻無法以清潔的狀態搬送基板的情事。“基板的 中此外，在上述的基板洗淨裳置，上下對向配置 :二等::清潔滾輪係為能夠跟隨著基板表面所安裝之： 子，牛專零件的凹凸而上下移動之構成。即，當將[Technical Field] The present invention relates to a conveying apparatus, and more particularly to a conveying apparatus that conveys a conveyed object by rotating a roller while holding a conveyed object between a pair of rollers. [Prior Art] In the prior art, a conveying device that conveys a conveyed object while holding a conveyed object between a pair of rollers is rotated. For example, in the manufacturing process of a printing substrate or the like, the above-described conveying device is installed in a cleaning device for removing dust adhering to the surface of the substrate (see, for example, Patent Document). The cleaning device for the printed circuit board (hereinafter simply referred to as "substrate cleaning device") is provided with a pair of adhesive cleaning rollers and a power transmitting means for transmitting the power to the cleaning roller. Between the pair of cleaning rollers - rotate the cleaning roller, and then - transfer the substrate - while the dust on the substrate is sucked on the surface of the cleaning roller. [Problem to be Solved by the Invention] In the above-described substrate cleaning apparatus, the substrate cleaning apparatus is rotationally driven around the axis by a drive source. The drive gear and the gear mechanism constituted by the driven side gear coupled to the cleaning roller serve as a rotational force transmitting mechanism for driving the drive source. However, it is known that the transmission method of the mechanical mechanism is accompanied by the wear and friction of the gear, and dust is generated due to the adhesion of the dust to the lubricant of the substrate or the gear, and the 319291 modified version 5 1325036 contaminated substrate is generated. In some cases, it may happen that the device cannot transport the substrate in a clean state. In addition, in the substrate, the substrate is washed and placed, and the upper and lower surfaces are arranged in a second direction: the cleaning roller is configured to be able to follow the surface of the substrate and to move up and down. That is, when
.好之兩滾輪間的間隔還大的基板 二J .=機=凸部而使上側的清潔滾輪被往上方Si 士=機械性接觸之齒輪機構係當上側清潔滾輪往 了讓連結於上側清潔滾輪之被驅動側輪的嚙人情形不 變，^另外的手段做處理，有機構變得複雜之岐“不 本發明係鑑於上述問題，以提供 傳 送裝置為目的。幻的磨耗、摩擦等而產生塵埃之搬 (解決課題的手段） 項之搬以目二有關本發明的申請專利範圍第1 、、奋於夕」 具備傳達旋轉動力至一對的 ’二 傳達手段，一邊夹持被搬送物於上述一對的、袞 广邊旋轉上述-對的滾輪來搬送被搬送物之搬送； 力傳達手段係具備:驅動側圓盤，係藉由二 ::::旋轉地做旋轉驅動；以及-對的被驅動側圓 門伴拉古連結於上述—對的滾輪，與上述驅動側圓盤之 狀的空隙，且各自配置成為其端面與上述驅動 =盤⑽面互相成對向；於上述驅動側圓盤及上述一對 、？艇動侧圓盤各自的端面，將永久磁鐵的N極、S極交互 319291修正版 6 丄 不同極性地㈣成放練來構成磁輪齒，且在使 •動側圓盤之中心配置於上述 、〒驅 • =Γ方的被驅動侧圓盤之中心配置於上述二 =此等相對向的磁輪齒之磁性的吸引力及排斥 =The better between the two rollers is the larger substrate 2 J. = machine = convex part so that the upper cleaning roller is moved upwards. Si = mechanical contact gear mechanism. When the upper cleaning roller is moved to the upper side, the cleaning is performed. The driving situation of the driven side wheel of the roller is unchanged, and the other means are processed, and the mechanism becomes complicated. "The present invention is for the purpose of providing a conveying device in view of the above problems. Magical wear, friction, etc. In the case of the dust, the object of the problem is solved. The above-mentioned pair of 衮 衮 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转 旋转The pair of driven side round doors are connected to the above-mentioned pair of rollers, and the gaps of the driving side discs are arranged such that their end faces are opposite to the driving=disc (10) plane; Side disc and Said pair? The respective end faces of the moving side discs are configured such that the N poles and the S poles of the permanent magnets are alternately 319291 modified 6 丄 in different polarities (4) to form magnetic teeth, and the center of the movable side disc is disposed above 〒 • Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ
動側圓盤傳達動力給上述一對的被驅動側圓盤。U 有關本發明的申請專利範圍第2項之搬 下特徵：在上述申請專利鈴图楚彳适 .^ r'有以 月專利靶圍弟1項，其中，相對於J個 側圓盤配置有2對的上述被驅動側圓盤。 有關本發明的申請專利範圍第3項之搬送裝置係有以 下特徵：在上述申請專利範圍第1項，其中，將上述—對 的滚輪上下配置於侧壁板，將下側的滾輪以可於上述側壁 板繞自己的軸心旋轉並且限制了於軸心上往垂直方向 動之狀態來配設，另一方面’將上側的滾輪配設為可於上 述側壁板繞自己的軸心旋轉並且軸心可上下方向地移動； 使連結至上述下側的滾輪之被驅動側圓盤之中心配置於上 述驅動侧圓盤中的磁輪齒之内側’並使連結至上述上側的 滚輪之被驅動側圓盤之中心配置於上述驅動侧圓盤 輪齒之外側。 (發明的效果） 依據本發明的搬送裝置，以藉由驅動源而做旋轉驅動 f驅動側圓盤及利用於滾輪所連結之被驅動側圓盤各自的 端面所著設之磁鐵的磁性的吸引力及排斥力而從驅動側圓 盤傳達動力給被驅動圓盤之構成，而能夠以非接觸狀態來 319291修正版 7 !325036 將動力從驅動側傳達給被驅動側，無習知技術般由於齒輪 .·的機械性嗜合而產生塵埃等污染之情事，能夠以將清潔的 ·.狀態保持住之狀態來搬送被搬送物基板。 料，依據本發明的搬送裝置，以於驅動_盤㈣ •驅動側圓盤各自的端面，將磁鐵交互不同極性地排列，以 將彼此的端面成對向之狀態來配置之構成，不管被驅動側 圓盤相對於驅動側圓盤往上移動或者往下移動，被驅動側 圓盤與驅動側圓盤之間的空隙係保持不變，故傳達至被驅 動盤的轉矩無極端地變小之情事。因此，不論夹持於一對 的滚輪間之被搬送物的凹凸有否，皆能夠維持期望的 轉矩’確保穩定的搬送功能。 【實施方式】 〜以了參照附圖詳細說明有關本發明之搬送裝置的較佳 貫施形態。還有，本發明並非限定於本實施形離。 =圖係概略性顯示具備本發明的實施形態的搬送裝 之=板洗衫置的-部分之斜視圖。還有，本實施形態 $被搬运對象「基板」係表示已安裝電子零件等零件於表 子零件安裝前的印刷基板、液晶基板、 -電漿顯不基板等基板者。 橡二裝置3°係具備由彻等具黏著性的彈性 清潔滾輪J f广一對的清潔滾輪31、32與由㈣性比該 :’二 丨強的材料所構成之黏著膠布滾輪3 3、3 4 j相力至-對的清㈣輪31、32之動力傳達手㈣。 噌’貝際的基板洗淨裝置30係為並列設置複數組上述各 8 319291修正版 1325036 » · 滾輪之構成’在第1圖係為了方便說明，省略其他滾輪的圖 ..示’僅顯示一對的滾輪。 •. 一對的清潔滾輪31、32係隔開有預定的間隔做上下對 .向配置，藉旋轉軸25、26可旋轉般地支撐於侧壁板（未圖示 ’於第1圖）。如第1圖所示，各旋轉軸25、26的一邊的端部係 各自連結至待後述之動力傳達手段1 〇的被驅動側圓盤2 1、 22。以下，稱清潔滾輪31為「上側清潔滾輪31」，稱清潔滾 輪32為「下侧清潔滾輪32」。此外，黏著膠布滾輪犯、 係以接觸上側/下側清潔滾輪31、32之狀態各自配置於清潔 滾輪31、32的外侧，藉旋轉軸可旋轉般地支撐於侧壁板。 具有上述構成之基板洗淨裝置3 〇係如第丨圖所示，一邊 夹持基板50於清潔滾輪31、32之間，一邊以待後述之動力 1手段旋轉清潔滾輪31、32來水平方向地搬送基板5〇，同 吁’讓附著在基板5〇的塵埃吸著於清潔滾輪31、犯的表面， 從基的表面去除塵埃。還有，附著在清潔滾輪31、％ 的塵埃係在與，月潔滾輪31、32接觸下，被轉黏至做旋轉之 黏著膠布滾輪33、34。 此外，本實施形態中，將下側清潔滾輪32及黏著膠布 ‘滾輪34以可於基板洗淨裳謂本體的侧壁板繞自己的轴心 •:轉並且限制了於軸心上往垂直方向的移動之狀態來配 °又另方面，如第2圖所示，將上側清潔滾輪31及黏著膠 布滾輪33配設成為可於側壁板繞自己的轴心旋轉並且輛: 係可上下方向地滑動。以下做更詳細的說明’如第2圖所示， 上側清潔滾輪31的旋轉軸25及黏著膠布滾輪犯的旋轉轴％ θ 319291修正版 2自猎歸部41支撐於㈣錢。該軸承部41以位部分 ，、可上下移動般地嵌入於側壁板4〇所設之長孔“，同時固 ^車由承部41於側㈣4G之複數個螺栓42係可上下移動般地 敢入於螺㈣長孔45，如此，而能夠以支撐著各滾㈣、33 ，'做上下方向地滑動。此外’於黏著膠布滾輪33的軸承 利係，有由未圖示之“所產生之預定的錢，此係做為 =使黏者膠布滾輪33經常密著於清潔滾輪31之構成。由於上 述之構成，在搬送例如安裝有電子零件之基板般表面形成有 凹凸之被搬送物時’便能夠跟隨被搬送物的凹凸而使上側清 潔滾輪31及黏著谬布滚輪33上下移動。 接著，針對將旋轉傳達至上側/下侧清潔滾輪3]、32 之動力傳達手段10做說明。第3-丨圖係從正面看第1圖的上 側/下側清潔滾輪31、32及動力傳達手段ι〇之圖。第3_2圖 係從側面（清潔滾輪側）看第3 — 2圖之圖。還有，第3_丨圖係 省略被搬送物基板50。此外，第4圖係動力傳達手段1〇的概 念圖，左圖為動力傳達手段10的正面圖，右圖為顯示動力 傳達手段10的磁性嚙合之概念圖。 如第3-1圖所示，動力傳達手段1〇係具備藉由驅動源 (馬達）1而繞軸心旋轉地做旋轉驅動之驅動侧圓盤丨丨與藉 旋轉軸25、26連結於上側/下側清潔滾輪31、32之一對的被 驅動側圓盤21、22。該一對的被驅動側圓盤21、22係與驅 動側圓盤11之間保持有預定的空隙，且配置為其端面與驅 動側圓盤11的端面成互相對向。此處’驅動側圓盤11的端 面係表示驅動圓盤11的單面部分（平面部分）16，被驅動侧 10 319291修正版 1325036 圓盤2卜22的端面係表示被驅動圓㈣卜22的單面部分（平 面部分）28、29。本實施形態係如第3_2圖及苐4圖所示，於 1個驅動側圓盤U配置有2對的被驅動側圓盤（即，2對的清 潔滚輪3卜32)。還有，以下的說明係為了方便說明與說明 的適當’改稱驅動側圓盤n為驅動側磁齒糾，各別改稱 被驅動侧圓盤2卜22為上側磁齒㈣、下側磁齒輪. 驅動側磁齒輪⑴系由以下所構成：磁性盤12，係由磁 性體（例如軟鐵材料）所構成之圓盤形狀；旋轉軸13;係連 :該磁性盤12與馬達1 ;以及磁輪齒丨5，係以接著劑等的適 當手段將永久磁鐵等間隔地著設於磁性盤12的端面16而形 成另方面，被驅動側的上側/下側磁齒輪21、22係與驅 動齒輪11有相同的構成，係由以下各構件所構成：磁性盤 23 24，係由具有比驅動側磁齒輪丨1還小的直徑之圓盤形 狀的磁性體所構成；旋轉軸25、26 ’係連結該磁性盤23、 24 =上側/下側清潔滾輪Μ、;以及磁輪齒μ，係以接著 劑等的適當手段將永久磁鐵等間隔地著設於磁性盤㈡、Μ 的端面28、29而形成。 如第4圖的右圖所示，由永久磁鐵所構成之磁輪齒15、 2 7與其相鄰之磁輪齒的極性係n極與^極交互配置。第$圖所 不之驅動側磁齒輪11的磁齒輪15的外形線係以下述操作而 得。以曲線將圓盤的圓周上的丨點與圓心連結，設輪齒數為 η ’每360 /n的角度旋轉上述曲線來畫出n條曲線。該n條曲 線的集合係能夠畫出如第4圖所示的放射狀曲線（例如漸開 線）。上側/下側磁齒輪21、22的磁輪齒27亦與上述相同。 319291修正版 11 1325036 因將磁輪齒15、27形成為上述形狀，旋轉的傳達便能夠滑 ..順地進行，同時由於以更大的面積獲得磁性嚙合，故磁性 ,—嚙合嫒強。逛有，係以例如具有4〇MG〇e的高磁能積之稀土 類材料做為構成磁輪齒15、27之永久磁鐵。 如第4圖的右圖所示，本實施形態中，下側磁齒輪22 的中心（旋轉軸部分）係配置為在驅動側磁齒輪11的磁輪齒 15的内側（以下稱此狀態為「内接嚙合」）。另一方面，上 側磁齒輪21的中心（旋轉軸部分）係配置為在驅動側磁齒輪 11的磁輪齒15的外側（以下稱此狀態為「外接嚙合」）。 具有上述構成之動力傳達手段10係利用驅動側磁齒輪 11的磁輪齒15(永久磁鐵）與被驅動侧磁齒輪21、22的磁輪 齒27(永久磁鐵）的磁性嚙合，即利用相對向之磁鐵的N極與 s極之間的吸引力、N極與N極及s極與s極之間的排斥力來以 非接觸狀態將旋轉轉矩從驅動側磁齒輪川專達給被驅動側 磁w輪21 22。例如，將驅動側磁齒輪丨丨如第4圖的右圖所 不向忠時針方向旋轉，由於在驅動侧磁齒輪^與被驅動側 磁回輪21 22之間作用之磁鐵的吸引力及排斥力，被驅動 側磁齒輪2卜22便跟著驅動侧磁齒輪i i的旋轉而轉動。即， ，驅動側磁嵩輪11逆時針方向旋轉，配置為與驅動側磁齒輪 -Π内接0i合之下側磁齒輪22便如第4圖所示逆時針方向旋 轉’而配置成為與驅動側磁齒輪1}外接喷合之上側磁齒輪 21便如第4圖所示般順時針方向旋轉，上側/下側磁齒輪 21、22的旋轉方向係為相反。 還有上述的動力傳達手段1〇係以適當地設定磁輪齒 319291修正版 12 1325036 15、25的輪齒數來獲得所期望的轉速比。第4圖所示之例係 設定驅動側磁齒輪11的輪齒數為48,上側/下側磁齒輪21 = 22的輪齒數各自為16。所以，當旋轉從驅動側磁齒輪“傳 達至上側/下側磁齒輪21、22時，上側/下側磁齒輪21、22 的角速度與驅動側磁齒輪11相比係增加為3倍。 上述之連結於上侧磁齒輪21之上側清潔滾輪31與連結 於下侧磁齒輪22之下側清潔滾輪32係如第3圖所示旋轉= 向係為相反。如此，被搬送物基板5〇便一邊被夾持於上側/ 下側清潔滾輪31、32之間，一邊水平方向地被搬送。 此外’第5圖係顯示上側清潔滾輪31按照被搬送物表面 的凹凸上下移動的狀態之概要圖。第6圖係顯示上側磁齒輪 21往上方移動時相對於驅動側磁齒輪u之位置之圖。如第$ 圖所不，因具有厚度比預先設定好的上侧/下侧清潔滾輪 31、32之間的間隔還大之凸部而使上側清潔滾輪31被往上 方推而卩您著清潔滾輪31被往上方推，連結於上側清潔滾 輪31之上側磁齒輪21亦被往上方推。如第6圖所示，雖然上 側磁齒輪21從平常位置往上方移動，上側磁齒輪21與驅動 側磁齒輪11的嚙合面積便變得比在平常位置時小，但如第6 圖的下圖所示，上側磁齒輪2丨與驅動側磁齒輪11之間的空 隙（ai r gap ’空軋隙）係保持不變。故，即使上側磁齒輪21 方和動傳達至上側清潔滾輪31之旋轉轉矩無極端地 變小之情事。 如上述所說明，依據本實施形態的基板洗淨裝置， 以利用著設於驅動側圓盤u及被驅動側圓盤21、22之磁鐵 31929】修正版 13 丄 的磁f生的吸引力及排斥力而從驅動側圓盤U傳達動力給被 .•驅動圓盤2卜22之構成，而能夠以非接觸狀態將動力從驅 .·=侧傳達給被驅動側’無習知技術般由於齒輪的機械性响 •合而產生塵埃等污染之情事，能夠以將清潔的狀態保持住 之狀態搬送被搬送物基板5〇。 。此外，依據本實施形態的基板洗淨裴置3〇，以於驅動 側圓盤11與被驅動側圓盤2卜22各自的端面16、28、29， 將水久磁鐵（磁輪齒15、27)交互不同極性地排歹卜以將彼 =的端面成對向之狀態來配置之構成’即使清潔滾輪则 :板的凸部51而被往上推而被驅動側圓盤21同時跟著往上 2動，驅動侧圓盤21與驅動側圓盤u之間的空隙亦保持不 變，故從驅動侧圓盤_達至被驅動盤21的旋轉轉矩的大 小無極端地變小之情事，不論夾持於清潔滾輪間之被搬送 物的凹凸有否，皆能夠維持期望的旋轉轉矩，能夠傳達穩 定的旋轉轉矩至滾輪。 心 。並且，依據本實施形態的基板洗淨裝置30,於1個驅動 側圓盤11配置有2對的被驅動側圓盤21、22，所以能夠縮小 動力傳達手段10的配置空間，謀求基板洗淨裝置全體 -型化。 -還有，上述實施形態中’雖然只有將上側清潔滾輪以 。冓成為可上下地移動，但將上侧/下側清潔滾輪兩者構成為 可上下地移動亦可獲得與上述實施形態相同的效果。 此外，上述實施形態中，雖然磁輪齒15、27係各自等 間隔地著設於端面16、28、29’但亦可施行使變為與上述 319291修正版 14The moving side disk transmits power to the pair of driven side disks. U. The following is a feature of the second aspect of the patent application scope of the present invention: in the above-mentioned patent application, there is a patented target of a monthly patent target, wherein the J side discs are arranged with respect to the J side discs. Two pairs of the above driven side discs. The conveying apparatus according to the third aspect of the present invention is characterized in that, in the first aspect of the above-mentioned patent application, the roller of the above-mentioned pair is disposed on the side wall plate, and the lower roller is provided. The side wall plate is rotated around its own axis and is limited to the state in which the axis is moved in the vertical direction. On the other hand, the upper roller is configured to be rotatable about the axis of the side wall and the shaft The heart can be moved up and down; the center of the driven side disk connected to the lower roller is disposed inside the magnetic teeth of the driving side disk and the driven side of the roller connected to the upper side is connected The center of the disk is disposed on the outer side of the drive side disk gear teeth. (Effect of the Invention) According to the transport apparatus of the present invention, the magnetic attraction of the magnets that are driven by the drive source and that are driven by the end faces of the driven side disks to which the rollers are connected are driven by the drive source. The force and the repulsive force are transmitted from the driving side disc to the driven disc, and the 319291 revision 7 !325036 can be transmitted from the driving side to the driven side in a non-contact state, without the conventional technique. In the case where the gear is in a state of being cleaned, it is possible to convey the substrate to be transported in a state of being cleaned. According to the conveying apparatus of the present invention, the respective end faces of the driving-disc (four) and the driving-side discs are arranged such that the magnets are alternately arranged in different polarities so as to be aligned with each other, regardless of being driven. The side disc moves upward or downward relative to the driving side disc, and the gap between the driven side disc and the driving side disc remains unchanged, so that the torque transmitted to the driven disc is not extremely small. The situation. Therefore, regardless of whether or not the unevenness of the object to be conveyed between the pair of rollers is maintained, the desired torque can be maintained, and a stable transport function can be secured. [Embodiment] A preferred embodiment of the conveying apparatus according to the present invention will be described in detail with reference to the accompanying drawings. Further, the present invention is not limited to the embodiment. Fig. 7 is a perspective view schematically showing a portion of a transporting device in accordance with an embodiment of the present invention. In addition, in the embodiment, the "substrate" to be transported indicates that a component such as an electronic component is mounted on a substrate such as a printed circuit board, a liquid crystal substrate, or a plasma display substrate before the surface component is mounted. The rubber 2 device has a pair of cleaning rollers 31 and 32 which are made of a pair of elastic elastic cleaning rollers J f, and an adhesive tape roller 3 3 which is composed of a material which is more than a strong material. 3 4 j phase force to - the clear (four) wheel 31, 32 power transmission hand (four).噌 'Bei's substrate cleaning device 30 is a parallel array of the above-mentioned 8 319291 modified version 1325036 » · The structure of the wheel 'In the first figure for convenience of description, omitting other scroll wheel diagrams. Right roller. • The pair of cleaning rollers 31 and 32 are vertically spaced apart at predetermined intervals. The arrangement is supported by the side plates (not shown) by the rotating shafts 25 and 26 (not shown). As shown in Fig. 1, the end portions of one side of each of the rotating shafts 25 and 26 are connected to the driven side discs 2 1 and 22 to be described later. Hereinafter, the cleaning roller 31 is referred to as "upper cleaning roller 31", and the cleaning roller 32 is referred to as "lower cleaning roller 32". Further, the adhesive tape roller is disposed on the outer side of the cleaning rollers 31, 32 in contact with the upper/lower side cleaning rollers 31, 32, and is rotatably supported by the side wall plate by the rotating shaft. In the substrate cleaning apparatus 3 having the above-described configuration, as shown in the drawing, while the substrate 50 is sandwiched between the cleaning rollers 31 and 32, the cleaning rollers 31 and 32 are rotated in a horizontal direction by a power 1 to be described later. When the substrate 5 is conveyed, the dust adhering to the substrate 5 is sucked on the surface of the cleaning roller 31 and the dust is removed from the surface of the substrate. Further, the dust adhering to the cleaning roller 31, % is brought into contact with the cleaning rollers 31, 32, and is transferred to the adhesive tape rollers 33, 34 which are rotated. In addition, in the present embodiment, the lower cleaning roller 32 and the adhesive tape 'roller 34 are wound around the axis of the body of the body to be cleaned on the substrate and are restricted to the vertical direction of the axis. The moving state is matched with another aspect. As shown in Fig. 2, the upper cleaning roller 31 and the adhesive tape roller 33 are disposed so as to be rotatable around the axis of the side wall plate and the vehicle can be slid up and down. . As will be described in more detail below, as shown in Fig. 2, the rotation shaft 25 of the upper cleaning roller 31 and the rotation axis % θ 319291 of the adhesive tape roller are modified from the hunting portion 41 to (4) money. The bearing portion 41 is embedded in the long hole "" of the side wall plate 4" in a positional portion, and can be moved up and down by the support portion 41 on the side (four) 4G. Into the screw (4) long hole 45, in this way, it is possible to support the rolls (four), 33, 'slide in the up and down direction. In addition, the bearing of the adhesive tape roller 33 is advantageously produced by the unillustrated The predetermined amount of money is used as the structure in which the adhesive tape roller 33 is often adhered to the cleaning roller 31. In the above-described configuration, when the object to be conveyed is formed on the surface of the substrate on which the electronic component is mounted, for example, the upper side cleaning roller 31 and the adhesive cloth roller 33 can be moved up and down in accordance with the unevenness of the object to be conveyed. Next, the power transmission means 10 that transmits the rotation to the upper/lower side cleaning rollers 3], 32 will be described. Fig. 3 is a view of the upper/lower side cleaning rollers 31 and 32 and the power transmission means ι of Fig. 1 as seen from the front. Figure 3-2 shows the figure from Figure 3 to Figure 2 from the side (cleaning roller side). Further, in the third diagram, the object substrate 50 is omitted. Further, Fig. 4 is a conceptual diagram of the power transmission means 1A, the left diagram is a front view of the power transmission means 10, and the right diagram is a conceptual diagram showing the magnetic engagement of the power transmission means 10. As shown in Fig. 3-1, the power transmission means 1 is provided with a drive side disk cymbal that is rotationally driven about a shaft by a drive source (motor) 1, and is coupled to the upper side by a rotary shaft 25, 26. / The lower side cleans the driven side discs 21, 22 of one of the pair of rollers 31, 32. A predetermined gap is maintained between the pair of driven side discs 21, 22 and the driving side disk 11, and the end faces thereof are disposed to face the end faces of the driving side disk 11 so as to face each other. Here, the end face of the drive side disk 11 indicates a one-sided portion (planar portion) 16 of the drive disk 11, and the driven side 10 319291 revision plate 1325036. The end face of the disk 2 is indicated by the driven circle (four) Single-sided portions (planar portions) 28, 29. In the present embodiment, as shown in Figs. 3-2 and 4, two pairs of driven side disks (i.e., two pairs of cleaning rollers 3b) are disposed on one driving side disk U. In addition, the following description is for the sake of convenience of explanation and description. The drive side disk n is a drive side magnetic tooth correction, and the drive side disk 2 is referred to as an upper magnetic disk (four) and a lower magnetic side. Gear. The drive side magnetic gear (1) is composed of a magnetic disk 12 formed of a magnetic body (for example, a soft iron material); a rotating shaft 13; a coupling: the magnetic disk 12 and the motor 1; The magnetic gear ring 5 is formed by an appropriate means such as an adhesive, and the permanent magnets are equally spaced on the end surface 16 of the magnetic disk 12 to form another side, and the upper/lower side magnetic gears 21 and 22 on the driven side are driven and driven. The gear 11 has the same configuration and is composed of the following members: the magnetic disk 23 24 is composed of a disk-shaped magnetic body having a smaller diameter than the drive-side magnetic gear 丨1; the rotating shafts 25, 26' The magnetic disks 23 and 24 are connected to the upper/lower cleaning roller ; and the magnetic teeth μ, and the permanent magnets are equally spaced on the end faces 28 of the magnetic disk (2) and the cymbal by an appropriate means such as an adhesive. Formed by 29. As shown in the right diagram of Fig. 4, the magnetic teeth 15 and 27 composed of permanent magnets are alternately arranged with the polarity of the magnetic teeth of the adjacent magnetic teeth. The outline of the magnetic gear 15 of the drive side magnetic gear 11 of Fig. $ is obtained by the following operation. The curve is connected to the center of the circle on the circumference of the disk, and the number of teeth is η ′. The above curve is rotated every 360 / n to draw n curves. The collection of n curves can draw a radial curve (e.g., an involute) as shown in Fig. 4. The magnetic teeth 27 of the upper/lower side magnetic gears 21, 22 are also the same as described above. 319291 Rev. 11 1325036 Since the magnetic teeth 15, 27 are formed into the above-described shape, the transmission of the rotation can be performed smoothly. At the same time, since the magnetic engagement is obtained with a larger area, the magnetic engagement is weak. For example, a rare earth material having a high magnetic energy product of 4 〇 MG 〇 e is used as a permanent magnet constituting the magnetic teeth 15, 27. As shown in the right diagram of Fig. 4, in the present embodiment, the center (rotation shaft portion) of the lower magnetic gear 22 is disposed inside the magnetic teeth 15 of the drive side magnetic gear 11 (hereinafter referred to as "the state" is " Internal engagement"). On the other hand, the center (rotational shaft portion) of the upper magnetic gear 21 is disposed outside the magnetic teeth 15 of the drive side magnetic gear 11 (hereinafter referred to as "external engagement"). The power transmission means 10 having the above-described configuration is magnetically meshed with the magnetic teeth (permanent magnets) of the driven side magnetic gears 11 and the magnetic teeth 27 (permanent magnets) of the driven side magnetic gears 21 and 22, that is, by the relative direction. The attraction force between the N pole and the s pole of the magnet, the repulsive force between the N pole and the N pole, and the s pole and the s pole to drive the rotational torque from the drive side magnetic gear to the driven state in a non-contact state Side magnetic w wheel 21 22 . For example, the drive side magnetic gear is rotated in the clockwise direction as shown in the right diagram of Fig. 4, due to the attraction and repulsive force of the magnet acting between the drive side magnetic gear and the driven side magnetic return wheel 21 22 . The force, the driven side magnetic gear 2 is rotated by the rotation of the drive side magnetic gear ii. In other words, the drive side magnetic yoke 11 rotates counterclockwise, and is disposed so as to be rotated in the counterclockwise direction as shown in FIG. 4 when the drive side magnetic gear Π is connected to the 0 0 0. The side magnetic gear 1} externally sprays the upper side magnetic gear 21 to rotate clockwise as shown in Fig. 4, and the upper/lower side magnetic gears 21, 22 rotate in opposite directions. Further, the power transmission means 1 described above is configured to appropriately set the number of teeth of the magnetic teeth 319291 correction plates 12 1325036 15 and 25 to obtain a desired rotation ratio. In the example shown in Fig. 4, the number of teeth of the drive side magnetic gear 11 is set to 48, and the number of teeth of the upper/lower side magnetic gear 21 = 22 is 16 each. Therefore, when the rotation is transmitted from the driving side magnetic gear "to the upper/lower side magnetic gears 21, 22, the angular velocity of the upper/lower side magnetic gears 21, 22 is increased by three times as compared with the driving side magnetic gear 11. The cleaning roller 31 connected to the upper side of the upper magnetic gear 21 and the cleaning roller 32 connected to the lower side of the lower magnetic gear 22 are rotated as shown in Fig. 3, and the opposite direction is reversed. Thus, the substrate 5 to be transported is squatted. It is sandwiched between the upper/lower side cleaning rollers 31 and 32 and is conveyed in the horizontal direction. The fifth drawing shows a schematic view of a state in which the upper cleaning roller 31 moves up and down in accordance with the unevenness of the surface of the object to be conveyed. 6 is a view showing the position of the upper side magnetic gear 21 with respect to the position of the drive side magnetic gear u when moving upward. As shown in Fig. 1, there is a thickness of the upper/lower side cleaning rollers 31, 32 which are set in advance. The upper interval of the upper cleaning roller 31 is pushed upward, and the cleaning roller 31 is pushed upward, and the magnetic gear 21 connected to the upper side of the upper cleaning roller 31 is pushed upward. As shown in the figure, although the upper magnetic gear 21 is flat When the normal position moves upward, the meshing area of the upper magnetic gear 21 and the driving side magnetic gear 11 becomes smaller than that in the normal position, but as shown in the lower diagram of FIG. 6, the upper magnetic gear 2 丨 and the driving side magnetic gear The gap between the 11 (ai r gap 'empty nip) remains unchanged. Therefore, even if the rotational torque of the upper magnetic gear 21 and the moving cleaning roller 31 is not extremely small, as described above. According to the substrate cleaning apparatus of the present embodiment, the magnetic attraction force and the repulsive force of the magnetic flux 31929 of the modified side disk u and the driven side disks 21 and 22 are corrected. The drive side disk U transmits power to the drive disk 2, and the power can be transmitted from the drive side to the driven side in a non-contact state. In the case where contamination such as dust is generated, the object to be transported can be transported in a state of being cleaned. The substrate cleaning device according to the present embodiment is provided for driving on the side of the substrate. Disc 11 and driven side disc 2 The end faces 16, 28, 29 are arranged such that the water-long magnets (magnetic teeth 15, 27) are alternately arranged in different polarities to align the end faces of the other faces. Even if the rollers are cleaned: the plate The convex portion 51 is pushed upward and the driven side disk 21 is simultaneously moved upward 2, and the gap between the driving side disk 21 and the driving side disk u remains unchanged, so that the driving side disk_ The magnitude of the rotational torque to the driven disk 21 is not extremely reduced, and the desired rotational torque can be maintained regardless of the unevenness of the object to be transported between the cleaning rollers, and a stable rotational rotation can be transmitted. In the substrate cleaning device 30 of the present embodiment, since the pair of driven side disks 21 and 22 are disposed in one driving side disk 11, the arrangement of the power transmission means 10 can be reduced. In the space, the entire substrate cleaning device is designed to be formed. - Also, in the above embodiment, only the upper cleaning roller is used. The crucible is movable up and down, but the upper side/lower side cleaning roller is configured to be movable up and down, and the same effects as those of the above embodiment can be obtained. Further, in the above-described embodiment, the magnetic teeth 15 and 27 are disposed at equal intervals on the end faces 16, 28, and 29', but may be applied to the above-mentioned 319291 revision 14
丄 JZJL/JO 相同的形態之磁化操作於環圈形態圓形的磁鐵。並且，雖 .·然各磁輪齒15、27的粗度係相同，但亦可改變磁輪齒15的 、粗度與磁輪齒27的粗度。此外’雖然磁輪齒15、27的形狀 .係為放射狀，但亦可為直線狀等其他形狀。 [產業上的利用可能性] 如上所述，錢本發明之搬送裝置係㉟夠有效地使用 2上述實施形態所示之基板洗淨褒置等—邊按照被夹持於 7對的滾輪間之被搬送物的凹凸來上下移動滾輪一邊旋轉 滚輪來搬送被搬送物之搬送裝置。 【圖式簡單說明】 班第1圖'概略性顯示具備本發明的實施形態的搬送裝 且之基板洗淨裝置的一部分之斜視圖。 第2圖係顯示基板洗淨裝置的清潔滾輪及黏著膠布滾 輪的支撐構造之圖。 第3-1圖係從正面看第1圖的清潔滾輪及動力傳達手段 之圖。 第3-2圖係從側面看第3 —丨圖之圖。 —第4圖係基板洗淨裝置的動力傳達手段的正面圖及顯 .示動力傳達手段的磁性嚙合之概念圖。 . 第5圖係顯示清潔滾輪按照被搬送物表面的凹凸而上 下移動的狀態之概要圖。 第6圖係顯示被驅動側磁齒輪相對於驅動側磁齒輪之 位置之圖。 【主要元件符號說明】 319291修正版 15 1325036 I 馬達（驅動源） 10 動力傳達手段 II 驅動側磁齒輪（驅動側圓盤） 12、 23、24 磁性盤 13、 25、26、35 旋轉軸 15、27 磁輪齒（永久磁鐵） 16 (驅動側磁齒輪的）端面 21 上側磁齒輪（被驅動側圓盤） 22 下侧磁齒輪（被驅動側圓盤） 28 (上側磁齒輪的）端面 29 (下側磁齒輪的）端面 30 基板洗淨裝置 31 上側清潔滾輪（滾輪） 32 下側清潔滾輪（滾輪） 33 上側黏著膠布滾輪 34 下側黏著膠布滾輪 40 側壁板 41 軸承部 42 螺栓 43 定位部分 44 長孑L 45 螺栓用長孔 50 基板（被搬送物） 51 基板的凸部丄 JZJL/JO The magnetization of the same shape operates on a circular magnet in the shape of a ring. Further, although the thickness of each of the magnetic teeth 15 and 27 is the same, the thickness of the magnetic teeth 15 and the thickness of the magnetic teeth 27 can be changed. Further, the shape of the magnetic teeth 15 and 27 is radial, but may be other shapes such as a linear shape. [Industrial Applicability] As described above, the transport apparatus 35 of the present invention can effectively use the substrate cleaning apparatus shown in the above-described embodiment, and is held between the rollers of the seven pairs. The conveyance device that conveys the conveyed object by rotating the roller while moving the roller up and down by the unevenness of the conveyed object. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view schematically showing a part of a substrate cleaning apparatus including a transport apparatus according to an embodiment of the present invention. Fig. 2 is a view showing a supporting structure of a cleaning roller and an adhesive tape roller of the substrate cleaning device. Figure 3-1 is a view of the cleaning roller and the power transmission means of Fig. 1 as seen from the front. Figure 3-2 is a diagram of the 3rd - 丨 diagram from the side. - Figure 4 is a front view of the power transmission means of the substrate cleaning device and a conceptual diagram showing the magnetic engagement of the power transmission means. Fig. 5 is a schematic view showing a state in which the cleaning roller moves up and down in accordance with the unevenness of the surface of the object to be conveyed. Fig. 6 is a view showing the position of the driven side magnetic gear with respect to the drive side magnetic gear. [Main component symbol description] 319291 Rev. 15 1325036 I Motor (drive source) 10 Power transmission means II Drive side magnetic gear (drive side disc) 12, 23, 24 Magnetic disc 13, 25, 26, 35 Rotary shaft 15, 27 magnetic gear (permanent magnet) 16 (drive side magnetic gear) end face 21 upper side magnetic gear (driven side disc) 22 lower side magnetic gear (driven side disc) 28 (upper magnetic gear) end face 29 ( End face 30 of lower magnetic gear Substrate cleaning device 31 Upper cleaning roller (roller) 32 Lower cleaning roller (roller) 33 Upper adhesive tape roller 34 Lower adhesive tape roller 40 Side wall plate 41 Bearing portion 42 Bolt 43 Positioning portion 44 Long 孑L 45 bolt long hole 50 substrate (transported object) 51 substrate convex part