200846569 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種搬送裝置，尤其有關一種一邊夾持 被搬送物於一對的滾輪間一邊旋轉滾輪來搬送被搬送物之 搬送裝置。 【先前技術】 高ϋ技術中’係有一邊夾持被搬送物於—河即珉稱间 一邊旋轉滾輪來搬送被搬送物之搬送裝置。例如在印刷基 板等的製造工程，上述的搬送裝置係裝設於用來去除附著 在基板表面的塵埃之洗淨裝置（參照如專利文獻丨）。該印刷 基板的洗淨裝置（以下簡稱為「基板洗淨裝置」）係具備上 下對向配置的_對具有黏著性之清潔滾輪與傳達動力至該 輪之動力傳達手段，夾持基板於―對的清潔滾輪之 轉：潔滾輪來一邊搬送基板-邊讓附著在基板的 塵矢及者於清潔滾輪表面者。 r專利文獻1:曰本特開2000-84514號公報 【發明内容】 (發明所欲解決之課題） 在上述的基板洗淨農置係使用藉 轉地做旋轉驅動之驅動齒輪 動源而、-軸心， 側齒輪所構成之齒輪機構來做至爾輪之被驅動 達給清潔滾輪的機構。然而，習=:動源的旋轉力傳 :機構的傳達方法係因歯輪的磨耗、：Γ=接觸之齒 於該塵埃附著在基板、齿 手私而產生塵埃’由 “的潤滑油氣化等情事而有產生 319291 200846569 污染基板等情形之虞， 裝置卻無法以、、主、，/ σ犯叙生雖然是用來洗淨基板的 ^ :法以^的狀態搬送基板的情事。 ‘滾輪中，上基板洗淨裝置，上下對向配置之清潔 之電子零件等零衰輪係為能夠跟隨著基板表面所安裳 度比預先設定而上下移動之構成。即，當將厚 於兩滾輪間時間的間隔還大的基板的凸部夹持 推。習知仲古部而使上側的清潔滾輪被往上方 嚙合情形不變了故以其、、°於上側清潔滾輪之被驅動侧輪的 之問題。 另外的手段做處理，有機構變得複雜 * $ι吞發月係氣於上述問題’以提供一種不因齒輪（傳達動 傳達手段)的磨耗―= (%決課題的手段） 項之二目的“有關本發明的申請專利範圍第1 滾輪之動力傳達手二下具備傳達旋轉動力至-對的 、 又，一以夾持被搬送物於上述一對的滾 詈·、、旋轉上述一對的滾輪來搬送被搬送物之搬送裝 ’上途動力傳達手段係具備：驅動側圓盤，係藉由驅動 般、而，軸心旋轉地做旋轉驅動；以及—對的被驅動侧圓 T各自連蛣於上述一對的滾輪，與上述驅動側圓盤之 般呆t有預疋的空隙’且配置成為其端面與上述驅動側圓 0而面互相成對向；於上述驅動側圓盤及被驅動側圓盤 319291 6 200846569 各自的端面，將永久磁鐵的1^極、8極交互不同極性地排列 ▲成放射狀，而利用上述永久磁鐵的磁性的吸引力及排斥力， •從上述驅動侧圓盤傳達動力給上述一對的被驅動侧圓盤。 有關本發明的申請專利範圍第2項之搬送裝置係有以 下特徵：在上述申請專利範圍第1項，其中，相對於1個驅 動側圓盤配置有2對的上述被驅動侧圓盤。 有關本發明的申請專利範圍第3項之搬送裝置係有以 鲁下特徵：在上述申請專利範圍第1項，其中，將上述一對 的滾輪上下配置於側壁板，將下侧的滾輪以可於上述侧壁 板繞自己的轴心旋轉並且限制了於轴心上往垂直方向的移 動之狀怨來配設，另一方面，將上側的滾輪配設為可於上 述側壁板繞自己的軸心旋轉並且軸心係可上下方向地移 動；將上述連結至下侧的滾輪之被驅動圓盤内接於上述驅 動侧圓盤，將上述連結至上侧的滚輪之被驅動圓盤外接於 上述驅動側圓盤。 _ (發明的效果） 依據本發明的搬送裝置，以藉由驅動源而做旋轉驅動 之驅動侧圓盤及利用於滾輪所連結之被驅動側圓盤各自的 端面所著設之磁鐵的磁性的吸引力及排斥力而從驅動侧圓 盤傳達動力給被驅動圓盤之構成，而能夠以非接觸狀態來 將動力從驅動侧傳達給被驅動側，無習知技術般由於齒輪 的機械性嚙合而產生塵埃等污染之情事，能夠以將清潔的 狀態保持住之狀態來搬送被搬送物基板。 此外’依據本發明的搬送裝置，以於驅動側圓盤與被 319291 7 200846569 •驅動侧圓盤各自的端面，將磁鐵交互不同極性地排列，以 將彼此的端面成對向之狀態來配置之構成，不管被驅動側 .圓盤相對於驅動側圓盤往上移動或者往下移動，被驅動侧 圓盤與驅動側圓盤之間的空隙係保持不變，故傳達至被驅 動盤的轉矩無極端地變小之情事。因此，不論夾持於一對 的滾輪間之被搬送物的凹凸有否，皆能夠維持期望的旋轉 轉矩’確保穩定的搬送功能。 【實施方式】 以下苓照附圖詳細說明有關本發明之搬送裝置的較佳 實施形態。還有，本發明並非限定於本實施形態。 第1圖係概略性顯示具備本發明的實施形態的搬送裝 置之基板洗淨裝置的一部分之斜視圖。還有，本實施形態 的被搬送對象「基板」係表示已安裝電子零件等零件於表 面之印刷基板、電子零件安裝前的印刷基板、液晶基板、 電漿顯示基板等基板者。 • 該基板洗淨裝置30係具備由矽橡膠等具黏著性的彈性 橡膠材料所構成之一對的清潔滾輪31、32與由黏著性比該 清潔滾輪31、32更強的材料所構成之黏著膠布滾輪33、34 與傳達動力至一對的清潔滾輪31、32之動力傳達手段1〇。 還有’實際的基板洗淨裝置3 0係為並列設置複數組上述各 滾輪之構成，在第1圖係為了方便說明，省略其他滾輪的圖 示’僅顯示一對的滾輪。 一對的清潔滚輪31、32係隔開有預定的間隔做上不對 向配置，藉旋轉軸25、26可旋轉般地支撐於側壁板（未圖示 319291 200846569 於第1圖）。如第1圖所示，各旋轉軸25、26的一邊的端部係 各自連結至待後述之動力傳達手段10的被驅動側圓盤21、 22。以下，稱清潔滾輪31為「上側清潔滾輪31」，稱清潔 滾輪32為「下側清潔滾輪32」。此外，黏著膠布滾輪33: 34係以接觸上側/下側清潔滾輪31、32之狀態各自配置於清 潔滾輪31、32的外側，藉旋轉轴可旋轉般地支撐於側壁板。 具有上述構成之基板洗淨裝置30係如第丨圖所示，—邊 夾持基板50於清潔滚輪31、32之間，一邊以待後述之動力 傳手段旋轉清潔滾輪31、32來水平方向地搬送基板5〇，同 時，讓附著在基板50的塵埃吸著於清潔滾輪31、犯的表面， 從基板50的表面去除塵埃。還有，附著在清潔滾輪3丨、犯 的塵埃係在與巧〉糸滾輪31、32接觸下，被轉黏至做旋轉之 黏著膠布滾輪33、34。 此外，本實施形態係，將下側清潔滾輪32及黏著膠布 滾輪34以可於基板洗淨裝置3〇本體的側壁板繞自己的軸心 疑轉亚且限制了於軸心上往垂直方向的移動之狀態來配 另方向，如第2圖所示，將上側清潔滾輪31及黏著膠 布滾輪33配設成為可於側壁板繞自己的軸心旋轉並且軸心 係可上下方向地滑動。以下做更詳細的說明，如第2圖所 不，上側清潔滾輪31的旋轉轴25及黏著膠布滾輪犯的旋轉 軸35係各自藉軸承部41支撐於側壁板4〇。該軸承部4丨其定 位部分43係可上下移動般地嵌入於側壁板4〇所設之長孔 44，同時固定軸承部41於側壁板4〇之複數的螺栓42係可上 下移動般地嵌人於螺栓用長孔45，如此，而能夠以支#著 319291 9 200846569 各滾輪m之狀態做上下方向地滑動。此外，於黏著膠 .布滚輪33的軸承部41係受有由未圖示之氣缸所產生之預定 的氣壓，此係做為一使黏著膠布滾輪33經 •輪31之構成。由於上述之構成，在搬送例如安裝有= 件之基板般表面形成有凹凸之被搬送物時，便能夠跟隨被 搬送物的凹凸而使上側清潔滾輪31及黏著膠布滾輪％上下 移動。 φ 接著，針對將旋轉傳達至上側/下側清潔滾輪31、32 之動力傳達手段1〇做說明。第34圖係從正面看第1圖的上 側/下側清潔滾輪31、32及動力傳達手段1〇之圖。第3-2圖 係從侧面（清潔滚輪側）看第3-；!圖之圖。還有，第3d圖係 省略被搬达物基板50。此外，第4圖係動力傳達手段丨〇的概 心圖，左圖為動力傳達手段丨〇的正面圖，右圖為顯示動力 傳達手段10的磁性喃合之概念圖。 -如第3-1圖所示，動力傳達手段1〇係具備藉由驅動源 ⑩（馬達）1而繞軸心旋轉地做旋轉驅動之驅動側圓盤1 1與藉 旋轉軸25、26連結於上側/下侧清潔滾輪31、32之一對的被 驅動側圓盤21、22。該一對的被驅動側圓盤21、22係與驅 動侧圓盤Π之間保持有預定的空隙，且配置為其端面與驅 動側圓盤11的端面成互相對向。此處，驅動側圓盤〗丨的端 面係表不驅動圓盤Π的單面部分（平面部分）丨6，被驅動侧 圓盤21、22的端面係表示被驅動圓盤21、22的單面部分（平 面部分）28、29。本實施形態係如第3-2圖及第4圖所示，於 1個驅動側圓盤11配置有2對的被驅動侧圓盤（即，2對的清 10 319291 200846569 潔滾=31、32)。還有，以下的說明係、為了方便說明與說明 的適當，改稱驅動側圓盤丨丨為驅動側磁齒輪丨丨，各別改稱 被驅動側圓盤21、22為上側磁齒輪21、下侧磁齒輪22。 驅動側磁齒輪11係由以下所構成：磁性盤12，係由磁 性體（例如軟鐵材料）所構成之圓盤形狀；旋轉車由13;係連 、=該磁性盤12與馬達1;以及磁輪齒15，係以接著劑等的適 田手^又將永久磁鐵等間隔地著設於磁性盤12的端面16而形 成。另一方面，被驅動側的上侧/下側磁齒輪21、22係與驅 動齒‘11有相同的構成，係由以下各構件所構成：磁性盤 23^ 24> 狀的磁性體所構成；旋熟25、26，係連結該磁性盤23、 ϋ上側/下m袞輪3卜32;以及磁輪齒27,係以接著 劑等的適當手段將永久磁鐵等間隔地著設於磁性盤23、24 的端面28、29而形成。 如第4圖的右圖所示，由永久磁鐵所構成之磁輪齒15、 輪齒的極性係N極與S極交互配置。第:圖所 丁 11回輪11的磁齒輪15的外形線係以下述摔作而 付：線Λ1?的圓周上的1點與圓心連結，設輪齒數為 角度旋轉上述曲線來畫出n條曲線。該η停曲 ，的木a係能夠畫出如第4圖所示的放射狀曲線（例如漸開 線)。上側/下側磁齒輪2卜22的磁輪齒27亦盘 因將磁輪齒15、27形成為上述形狀，旋轉的傳 二 順地進行，同時由於以更大的面積獲得磁㈣人，故磁: 嗜合變強。還有，係以例如具有·咖的高磁能積之稀土 319291 11 200846569 類材料做為構成磁輪齒15、27之永久磁鐵。 .的中形態係，下侧磁_ 、的_以下稱此狀;==:=== 磁齒輪21的中心(旋轉轴部分)係配置為在驅動側：』 11的磁輪齒η的々k也丨, ^^ ^ fm 的外側（以下稱此狀態為「外㈣合」）。 11的减^ ί f構成之動力傳達手段10係利用驅動侧磁齒輪 永久麵）純㈣麻齒㈣、22的磁輪 二=鐵)的磁性鳴合，即利用相對向之磁鐵眺與 111 N極與N極及S極與S極之間的排斥力來以 ==:%轉轉矩從驅動侧磁凿輪11傳達給被驅動側 一 =1:例如’將驅動側磁齒輪11如第4圖的右圖所 =:1、22之間作用之磁鐵的吸引力及排斥 側磁齒輪21、22便跟荃酿#^日,w 1 w z便跟者驅動側磁齒輪丨〗的旋轉而轉動。 驅動側磁齒輪11逆時斜方6 ά 逆才針方向疑轉，配置為與驅動側磁齒輪 ㈣㈣合之下側磁齒輪22便如第4圖所示逆時針方向旋 轉’而配置成為與驅動側磁齒輪"外接喷合之上側磁吿輪 2:便如第4圖所示般順時針方向旋轉，上側/下 ‘ 21、22的旋轉方向係為相反。 還有’上述的動力傳達手段1〇係以適當地設定磁輪齒 15、25的輪齒數來獲得所期望的轉速比。第4圖所示之例係 設定驅動側磁齒輪U的輪齒數為48，上側/下側磁齒輪L 22的輪齒數各自為16。所以，當旋轉從驅動側磁齒輪川專 319291 12 200846569 達至上側/下側磁齒輪21、22時，上侧/下側磁齒輪21、22 的角速度與驅動側磁齒輪11相比係增加為3倍。 ★ 上述之連結於上側磁齒輪21之上側清潔滾輪31與連結 於下側磁齒輪22之下側清潔滾輪32係如第3圖所示旋轉^ 向係為相反。如此，被搬送物基板5〇便一邊被夾持於上侧/ 下側清潔滾輪31、32之間，一邊水平方向地被搬送。 此外，第5圖係顯示上側清潔滾輪31按照被搬送物表面 鲁的凹凸上下移動的狀態之概要圖。第6圖係顯示上側磁齒輪 21往上方移動時相對於驅動側磁齒輪11之位置之圖。如第5 圖所示，因具有厚度比預先設定好的上側/下侧清潔滾輪 31、32之間的間隔還大之凸部而使上側清潔滾輪31被往上 方推，而隨著清潔滾輪31被往上方推，連結於上側清潔滾 輪31之上側磁齒輪21亦被往上方推。如第6圖所示，雖然上 侧磁齒輪21從平常位置往上方移動，上侧磁齒輪21與驅動 側磁齒輪11的嚙合面積便變得比在平常位置時小，但如第6 _圖的下圖所示，上側磁齒輪21與驅動側磁齒輪1〗之間的空 隙（air gap，空氣隙）係保持不變。故，即使上側磁齒輪21 往上方移動，傳達至上侧清潔滾輪31之旋轉轉矩無極端地 變小之情事。 如上述所說明’依據本實施形態的基板洗淨裝置3 〇， 以利用著設於驅動侧圓盤11及被驅動側圓盤2〗、Μ之磁鐵 的磁性的吸引力及排斥力而從驅動側圓盤11傳達動力給被 驅動圓盤21、22之構成，而能夠以非接觸狀態將動力從驅 動侧傳達給被驅動側，無習知技術般由於齒輪的機械性嚙 319291 13 200846569 •合而產生塵埃等污染之情事’能夠以將清潔的狀態保持住 之狀態搬送被搬送物基板5〇。 此外’依據本實施形態的基板洗淨裝置30，以於驅動 侧圓盤11與被驅動側圓盤21、22各自的端面16、28、29， 將永久磁鐵（磁輪齒15、27)交互不同極性地排列，以將彼 此的端面成對向之狀態來配置之構成，即使清潔滾輪31因 基板的凸部51而被往上推而被驅動側圓盤21同時跟著往上 •移動，驅動侧圓盤21與驅動侧圓盤η之間的空隙亦保持不 變’故從驅動側圓盤11傳達至被驅動盤2丨的旋轉轉矩的大 小無極端地變小之情事，不論夾持於清潔滾輪間之被搬送 物的凹凸有否，皆能夠維持期望的旋轉轉矩，能夠傳達穩 定的旋轉轉矩至滚輪。 並且’依據本貫施形態的基板洗淨裝置3 0，於1個驅動 側圓盤11配置有2對的被驅動侧圓盤21、22，所以能夠縮小 動力傳達手段10的配置空間，謀求基板洗淨裝置全體的小 _型化。 還有，上述實施形態係只有將上侧清潔滾輪31構成為 可上下地移動，但將上側/下侧清潔滾輪兩者構成為可上下 地移動亦可獲得與上述實施形態相同的效果。 此外，上述實施形態係，雖然磁輪齒丨5、27係各自等 間隔地著設於端面16、28、29，但亦可施行使變為與上述 相同的形態之磁化操作於環圈形態圓形的磁鐵。並且，雖 然各磁輪齒15、27的粗度係相同，但亦可改變磁輪齒丨5的 粗度與磁輪齒27的粗度。此外，雖然磁輪齒15、27的形狀 14 319291 200846569 係為放射狀，但亦可為直線狀等其他形狀。 [產業上的利用可能性] 如上所述，有關本發明之搬送裝置係能夠有效地使用 於上述貫施形態所不之基板洗板洗淨裝置等一邊按照被夾 持於一對的滾輪間之被搬送物的凹凸來上下移動滾輪一邊 旋轉滾輪來搬送被搬送物之搬送裝置。 【圖式簡單說明】 第1圖係概略性顯不具備本發明的實施形態的搬送裝 且之基板洗淨裝置的一部分之斜視圖。 第2圖係顯示基板洗淨裝置的清潔滾輪及黏著膠布滾 輪的支#構造之圖。 第3-1圖係從正面看第請的清潔滾輪及動力傳達手段 第3-2圖係從側面看第3 —丨圖之圖。 示動係絲洗㈣置㈣力料手段的正面圖及顯 '、 專達手^又的磁性嚙合之概念圖。 示清潔滾輪按照被搬送物表面的凹凸而上 下移動的狀態之概要圖。 上 位置=圖係顯示被驅動側磁齒輪相對於驅動側磁齒輪之 【主要元件符號說明】 馬達（驅動源） 動力傳達手段 ，’、、°動側磁齒輪（驅動側圓盤） 319291 15 11 200846569 i[Technical Field] The present invention relates to a conveying apparatus, and more particularly to a conveying apparatus that conveys a conveyed object by rotating a roller while holding a conveyed object between a pair of rollers. [Prior Art] In the sorghum technology, there is a conveying device that conveys the conveyed object while holding the conveyed object while rotating the roller between the river and the nickname. For example, in the manufacturing process of a printing substrate or the like, the above-described conveying device is installed in a cleaning device for removing dust adhering to the surface of the substrate (see, for example, Patent Document). The cleaning device for the printed circuit board (hereinafter simply referred to as "substrate cleaning device") is provided with a cleaning roller that is disposed in an up-and-down direction and a power transmission means for transmitting power to the wheel, and the substrate is clamped in the pair. The cleaning roller is rotated: the roller is cleaned to transport the substrate while the dust is attached to the substrate and the surface of the roller is cleaned. [Patent Document 1] JP-A-2000-84514 SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) In the above-described substrate cleaning and agricultural system, a driving gear source that is rotationally driven by borrowing is used, and The shaft mechanism, the gear mechanism formed by the side gears, is used as a mechanism for driving the cleaning roller to the wheel. However, the rotation of the source: the transmission of the mechanism: the transmission method of the mechanism is due to the wear of the wheel, Γ = the contact tooth is attached to the substrate, the dust is generated by the tooth, and the dust is vaporized. In the case of 319291 200846569 contamination of the substrate, the device could not be used as a device to clean the substrate, but it was used to transport the substrate. The upper substrate cleaning device, the zero-reduction wheel such as the cleaned electronic parts arranged in the up-and-down direction, is configured to be able to move up and down following the preset surface of the substrate surface, that is, when it is thicker than the time between the two rollers The convex portion of the substrate having a large interval is sandwiched and pushed. The conventional cleaning portion of the upper side of the cleaning roller is kept unchanged, so that the upper side of the driven roller is driven by the upper side. Another means to deal with, the mechanism becomes complicated * $ 吞 发 月 系 于 于 上述 上述 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以"Related to the present invention In the second aspect of the invention, the power transmission hand of the first roller is configured to convey the rotational power to the pair, and to hold the pair of rollers in the pair, and to rotate the pair of rollers to transport the The transporting means of the transporting means includes: the driving side disc is driven by rotation, and the shaft is rotated to rotate; and the pair of driven side circles T are connected to each other The pair of rollers have a pre-pitched gap with the driving side disk and are disposed such that their end faces are opposite to each other with respect to the driving side circle 0; and the driving side disk and the driven side disk 319291 6 200846569 The end faces of the permanent magnets are arranged such that the poles and the eight poles of the permanent magnet are arranged in different polarities ▲ in a radial direction, and the magnetic attraction force and repulsive force of the permanent magnet are used, and the power is transmitted from the driving side disk. The pair of driven side disks are given. The conveying apparatus according to the second aspect of the present invention is characterized in that, in the first aspect of the invention, the pair of driven side disks are disposed with respect to one driving side disk. A transfer device according to the third aspect of the present invention is characterized in that: the roller of the pair of the upper and lower sides is disposed on the side wall plate, and the lower roller is The above-mentioned side wall plate is rotated around its own axis and is limited to the movement of the axis in the vertical direction. On the other hand, the upper roller is arranged to be able to wrap around the axis of the side wall plate. The core rotates and the shaft center moves up and down; the driven disc connected to the lower roller is inscribed in the driving side disc, and the driven disc connected to the upper roller is externally connected to the driving Side disc. (Effect of the Invention) According to the transport apparatus of the present invention, the driving side disk that is rotationally driven by the driving source and the magnet of the magnet that is provided by the end faces of the driven side disks to which the roller is connected are magnetically The attraction and repulsive force transmit the power to the driven disc from the driving side disc, and the power can be transmitted from the driving side to the driven side in a non-contact state, without the mechanical coupling of the gear due to the conventional technique. In the case of contamination such as dust, the substrate to be transported can be transported while being kept in a clean state. Further, the conveying device according to the present invention is configured such that the driving side disc and the end faces of the driving side discs are arranged such that the magnets are alternately arranged with different polarities to face the end faces of each other. In the configuration, regardless of the driven side disc moving upward or downward relative to the driving side disc, the gap between the driven side disc and the driving side disc remains unchanged, so that the transmission to the driven disc is performed. The moment does not become extremely small. Therefore, regardless of whether or not the unevenness of the object to be conveyed between the pair of rollers is maintained, the desired rotational torque can be maintained, and a stable transport function can be secured. [Embodiment] Hereinafter, preferred embodiments of the transport apparatus according to the present invention will be described in detail with reference to the accompanying drawings. Further, the present invention is not limited to the embodiment. Fig. 1 is a perspective view schematically showing a part of a substrate cleaning apparatus including a conveying apparatus according to an embodiment of the present invention. In addition, the substrate to be transported in the present embodiment is a printed circuit board on which a component such as an electronic component is mounted, a printed circuit board before mounting of the electronic component, a substrate such as a liquid crystal substrate or a plasma display substrate. • The substrate cleaning device 30 is provided with a pair of cleaning rollers 31 and 32 which are made of an adhesive elastic rubber material such as ruthenium rubber and a material which is stronger than the cleaning rollers 31 and 32. The tape rollers 33, 34 and the power transmission means 1 that transmit power to the pair of cleaning rollers 31, 32. Further, the actual substrate cleaning device 30 is configured such that the above-described respective rollers are arranged in parallel. In the first drawing, for convenience of description, the illustration of the other rollers is omitted. Only a pair of rollers are displayed. The pair of cleaning rollers 31, 32 are arranged in a misaligned manner with a predetermined interval therebetween, and are rotatably supported by the side wall plates by the rotating shafts 25, 26 (not shown in Fig. 319291 200846569 in Fig. 1). As shown in Fig. 1, the end portions of one side of each of the rotating shafts 25 and 26 are connected to the driven side disks 21 and 22 of the power transmission means 10 to be described later. Hereinafter, the cleaning roller 31 is referred to as "upper cleaning roller 31", and the cleaning roller 32 is referred to as "lower cleaning roller 32". Further, the adhesive tape rollers 33: 34 are disposed outside the cleaning rollers 31 and 32 in a state in which the upper/lower cleaning rollers 31 and 32 are in contact with each other, and are rotatably supported by the side wall plates by the rotating shaft. The substrate cleaning device 30 having the above-described configuration is as shown in the first drawing, and while the substrate 50 is sandwiched between the cleaning rollers 31 and 32, the cleaning rollers 31 and 32 are rotated in a horizontal direction by a power transmission means to be described later. At the same time, the substrate 5 is transported, and the dust adhering to the substrate 50 is sucked on the surface of the cleaning roller 31 and the dust is removed from the surface of the substrate 50. Further, the dust adhering to the cleaning roller 3 is in contact with the roller 31, 32, and is transferred to the adhesive tape rollers 33, 34 which are rotated. In addition, in the present embodiment, the lower cleaning roller 32 and the adhesive tape roller 34 are disposed on the side wall of the main body of the substrate cleaning device 3 around the axis of the substrate, and are limited to the vertical direction of the axis. As shown in Fig. 2, the upper cleaning roller 31 and the adhesive tape roller 33 are disposed so as to be rotatable about the axis of the side wall and the axis can be slid up and down. As will be described in more detail below, as shown in Fig. 2, the rotating shaft 25 of the upper cleaning roller 31 and the rotating shaft 35 of the adhesive tape roller are each supported by the side wall plate 4 by the bearing portion 41. The bearing portion 4 has its positioning portion 43 which is fitted into the long hole 44 of the side wall plate 4A so as to be movable up and down, and the plurality of bolts 42 for fixing the bearing portion 41 to the side wall plate 4 are vertically movable. In the case of the long hole 45 for the bolt, the person can slide in the up and down direction in the state of the roller 319291 9 200846569. Further, the bearing portion 41 of the adhesive roller 34 is subjected to a predetermined air pressure generated by a cylinder (not shown), and this is a configuration in which the adhesive roller 33 is passed through the wheel 31. In the above-described configuration, when the conveyed object having irregularities is formed on the surface on which the substrate is mounted, for example, the upper cleaning roller 31 and the adhesive roller roller % can be moved up and down in accordance with the unevenness of the conveyed object. φ Next, the power transmission means 1 for transmitting the rotation to the upper/lower side cleaning rollers 31, 32 will be described. Fig. 34 is a view of the upper/lower side cleaning rollers 31, 32 and the power transmission means 1A of Fig. 1 as seen from the front. Figure 3-2 shows the figure of the 3-;! diagram from the side (cleaning roller side). Further, in the third embodiment, the object substrate 50 is omitted. Further, Fig. 4 is a schematic diagram of the power transmission means, the left side is a front view of the power transmission means, and the right figure is a conceptual diagram showing the magnetic communication means of the power transmission means 10. - As shown in Fig. 3-1, the power transmission means 1 is provided with a drive side disk 1 1 that is rotationally driven about the axis by the drive source 10 (motor) 1, and is connected to the rotary shafts 25, 26 The driven side discs 21, 22 of one of the pair of cleaning rollers 31, 32 are cleaned on the upper/lower side. The pair of driven side discs 21, 22 are held with a predetermined gap between the driven side discs, and are arranged such that their end faces face the end faces of the driving side discs 11. Here, the end face of the drive side disk 不 does not drive the one-sided portion (planar portion) 丨6 of the disk Π, and the end faces of the driven side disks 21, 22 represent the single of the driven disks 21, 22. Face portions (planar portions) 28, 29. In the present embodiment, as shown in FIGS. 3-2 and 4, two pairs of driven side disks are disposed on one driving side disk 11 (that is, two pairs of clear 10 319291 200846569 cleaning rolls = 31, 32). In the following description, for the sake of convenience of explanation and description, the drive side disk 改 is referred to as a drive side magnetic gear 丨丨, and the driven side disks 21 and 22 are respectively referred to as an upper magnetic gear 21, The lower side magnetic gear 22 is provided. The drive side magnetic gear 11 is composed of a magnetic disk 12 in the shape of a disk made of a magnetic body (for example, a soft iron material); a rotary car 13; a tie, a magnetic disk 12 and a motor 1; The magnetic teeth 15 are formed by an appropriate hand such as an adhesive, and a permanent magnet is placed on the end surface 16 of the magnetic disk 12 at equal intervals. On the other hand, the upper/lower side magnetic gears 21 and 22 on the driven side have the same configuration as the driving teeth '11, and are composed of the following members: a magnetic disk 23? 24> The magnetic disk 23 and the upper/lower m wheel 3 32 are coupled to each other, and the magnetic teeth 27 are provided on the magnetic disk 23 at equal intervals by an appropriate means such as an adhesive. , 24 end faces 28, 29 are formed. As shown in the right diagram of Fig. 4, the magnetic teeth 15 composed of permanent magnets and the polar N poles of the teeth are alternately arranged with the S pole. The outline of the magnetic gear 15 of the 11th wheel 11 is given by the following fall: 1 point on the circumference of the line Λ1? is connected with the center of the circle, and the number of teeth is rotated by the angle to draw n pieces curve. The wood a system can draw a radial curve (e.g., an involute) as shown in Fig. 4. The magnetic teeth 27 of the upper/lower side magnetic gear 2 22 are also formed into the above-described shape by the magnetic teeth 15, 27, and the rotation is performed smoothly, and since the magnetic (four) person is obtained in a larger area, Magnetic: Heterosis becomes stronger. Further, a rare earth 319291 11 200846569 type material having a high magnetic energy product such as café is used as the permanent magnet constituting the magnetic teeth 15, 27. In the middle form, the lower magnetic _, _ is hereinafter referred to as this; ==:=== The center of the magnetic gear 21 (rotating shaft portion) is arranged on the driving side: 11 11 magnetic teeth η k is also the outer side of ^^ ^ fm (hereinafter referred to as "outer (four)"). The power transmission means 10 of the reduction of ί f is the magnetic resonance of the pure (four) hemp (four), 22 magnetic wheel two = iron) of the driving side magnetic gear, that is, the relative magnet 眺 and 111 N The repulsive force between the pole and the N pole and the S pole and the S pole is transmitted from the drive side magnetic chisel wheel 11 to the driven side by a ==:% torque; =1: For example, the drive side magnetic gear 11 is 4 on the right side of the figure =: 1, the attraction between the magnets acting on the 22 and the repulsive side magnetic gears 21, 22 followed by the brewing #^日, w 1 wz followed by the drive side of the magnetic gear 丨Turn. The driving side magnetic gear 11 reverses the oblique direction 6 疑 the reverse direction of the needle is reversed, and is arranged to be combined with the driving side magnetic gear (4) (four) and the lower side magnetic gear 22 is rotated counterclockwise as shown in FIG. 4 The side magnetic gear " externally coupled upper side magnetic wheel 2: rotates clockwise as shown in Fig. 4, and the upper/lower '21, 22 directions of rotation are opposite. Further, the above-described power transmission means 1 is configured to appropriately set the number of teeth of the magnetic teeth 15, 25 to obtain a desired rotational speed ratio. In the example shown in Fig. 4, the number of teeth of the drive side magnetic gear U is set to 48, and the number of teeth of the upper/lower side magnetic gear L 22 is 16 each. Therefore, when the rotation proceeds from the drive side magnetic gear 319291 12 200846569 to the upper/lower side magnetic gears 21, 22, the angular velocities of the upper/lower side magnetic gears 21, 22 are increased as compared with the drive side magnetic gear 11 3 times. ★ The above-described cleaning roller 31 connected to the upper side of the upper magnetic gear 21 and the cleaning roller 32 connected to the lower side of the lower magnetic gear 22 are opposite to each other as shown in Fig. 3. In this way, the object to be transported substrate 5 is transported horizontally while being sandwiched between the upper/lower side cleaning rollers 31 and 32. In addition, Fig. 5 is a schematic view showing a state in which the upper cleaning roller 31 moves up and down in accordance with the unevenness of the surface of the object to be conveyed. Fig. 6 is a view showing the position of the upper magnetic gear 21 with respect to the position of the drive side magnetic gear 11 when moving upward. As shown in Fig. 5, the upper cleaning roller 31 is pushed upward by the convex portion having a thickness larger than the interval between the upper/lower side cleaning rollers 31, 32 which are set in advance, and the cleaning roller 31 is pushed up. Pushed upward, the magnetic gear 21 coupled to the upper side of the upper cleaning roller 31 is also pushed upward. As shown in Fig. 6, although the upper magnetic gear 21 is moved upward from the normal position, the meshing area of the upper magnetic gear 21 and the driving side magnetic gear 11 becomes smaller than that in the normal position, but as shown in Fig. 6 As shown in the lower figure, the gap (air gap) between the upper magnetic gear 21 and the driving side magnetic gear 1 remains unchanged. Therefore, even if the upper magnetic gear 21 moves upward, the rotational torque transmitted to the upper cleaning roller 31 is not extremely small. As described above, the substrate cleaning apparatus 3 according to the present embodiment is driven by the magnetic attraction force and repulsive force of the magnets provided on the driving side disk 11 and the driven side disk 2 and the disk. The side disc 11 transmits power to the driven discs 21, 22, and the power can be transmitted from the driving side to the driven side in a non-contact state, which is mechanically entangled by the gears without the conventional technique. 319291 13 200846569 In the case of contamination such as dust, it is possible to convey the substrate 5 to be transported in a state of being kept in a clean state. Further, the substrate cleaning apparatus 30 according to the present embodiment interacts the permanent magnets (magnetic teeth 15, 27) with the end faces 16, 28, 29 of the driving side disk 11 and the driven side disks 21, 22, respectively. Arranged in different polarities, and arranged such that the end faces thereof are opposed to each other, even if the cleaning roller 31 is pushed up by the convex portion 51 of the substrate, the driven side disk 21 is simultaneously moved up and moved, and driven. The gap between the side disk 21 and the driving side disk η remains unchanged. Therefore, the magnitude of the rotational torque transmitted from the driving side disk 11 to the driven disk 2丨 is not extremely small, regardless of the clamping. Whether or not the unevenness of the object to be conveyed between the cleaning rollers is maintained can maintain a desired rotational torque, and can transmit a stable rotational torque to the roller. In addition, since the two pairs of driven side disks 21 and 22 are disposed in one driving side disk 11 in the substrate cleaning device 30 of the present embodiment, the arrangement space of the power transmission means 10 can be reduced, and the substrate can be reduced. The entire cleaning device is small. Further, in the above embodiment, only the upper cleaning roller 31 is configured to be movable up and down. However, both the upper/lower cleaning rollers are configured to be movable up and down, and the same effects as those of the above embodiment can be obtained. Further, in the above-described embodiment, the magnetic gear teeth 5 and 27 are disposed at equal intervals on the end faces 16, 28, and 29, but the magnetization operation in the same manner as described above may be performed on the ring shape circle. Shaped magnet. Further, although the thickness of each of the magnetic teeth 15 and 27 is the same, the thickness of the magnetic rim 5 and the thickness of the magnetic teeth 27 can be changed. Further, although the shape of the magnetic teeth 15, 27 is 14 319291 200846569, it may be a radial shape, but may be other shapes such as a straight line. [Industrial Applicability] As described above, the transport apparatus according to the present invention can be effectively used between the pair of rollers while being used in the substrate washing and cleaning apparatus or the like which is not in the above-described embodiment. The conveyance device that conveys the conveyed object by rotating the roller while moving the roller up and down by the unevenness of the conveyed object. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a part of a substrate cleaning apparatus which does not have a transport apparatus according to an embodiment of the present invention. Fig. 2 is a view showing the structure of the cleaning roller of the substrate cleaning device and the support roller of the adhesive tape roller. Figure 3-1 shows the cleaning roller and power transmission means of the first part from the front. Figure 3-2 shows the figure of the third to the right side. The front view of the display system silk washing (four) set (four) force material means and the concept of magnetic engagement of the ', the hand and the hand ^. A schematic view showing a state in which the cleaning roller moves up and down in accordance with the unevenness of the surface of the object to be conveyed. Upper position=Graphic display shows the main component symbol of the driven side magnetic gear relative to the drive side magnetic gear. Motor (drive source) Power transmission means, ',, ° moving side magnetic gear (drive side disc) 319291 15 11 200846569 i
12、 23、24 磁性盤 13、 25、26、35 旋轉轴 15、27 磁輪齒（永久磁鐵） 16 (驅動側磁齒輪的）端面 ) ) 21 上側磁齒輪（被驅動側圓盤 22 下側磁齒輪（被驅動侧圓盤 28 (上側磁齒輪的）端面 29 (下侧磁齒輪的）端面 30 基板洗淨裝置 31 上側清潔滾輪（滾輪） 32 下侧清潔滾輪（滾輪） 33 上側黏著膠布滾輪 34 下側黏著膠布滾輪 40 侧壁板 41 轴承部 42 螺栓 43 定位部分 44 長孔 45 螺栓用長孔 50 基板（被搬送物） 51 基板的凸部 16 31929112, 23, 24 Magnetic disk 13, 25, 26, 35 Rotary shaft 15, 27 Magnetic tooth (permanent magnet) 16 (end face of drive side magnetic gear)) 21 Upper magnetic gear (lower side of driven side disc 22) End face 30 of the magnetic gear (the side surface 29 of the driven side disk 28 (the upper magnetic gear)) (the lower side magnetic gear) The substrate cleaning device 31 The upper side cleaning roller (roller) 32 The lower side cleaning roller (roller) 33 The upper side adhesive tape roller 34 Lower adhesive tape roller 40 Side wall plate 41 Bearing portion 42 Bolt 43 Positioning portion 44 Long hole 45 Long hole for bolt 50 Substrate (object to be conveyed) 51 Projection of the substrate 16 319291