JP2012067359A - Support apparatus of film-deposition-objective article, and film depositing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a support apparatus of a film deposition-objective-article that can easily and surely perform setting of a kicker, can suppress the occurrence of kicking error of a driven wheel by the kicker and can increase throughput of film-deposition-objective articles.SOLUTION: The support apparatus 2 includes: a table 30 which is rotationally driven; a plurality of outer pipes 102 which are erected on the table 30 and are moved circularly around the rotational central line of the table 30 accompanying the rotation of the table 30; small tables 103 which are arranged in a plurality of steps along each outer pipe 102 and are rotated around the outer pipes 102 accompanying the rotation of the table 30; a plurality of holders 104 which are tilted and erected on each small table 103 and are moved circularly around the outer pipes 102 accompanying the rotation of the small tables 103; and a kicker which is provided on an inner pipe 105 that is not rotated even when the outer pipes 102 are rotated and is brought into contact with a gear rotating accompanied by the holder 104 so as to rotate a holder 104.

Description

  The present invention relates to a film forming target article supporting apparatus and a film forming apparatus that are installed and used in a film forming chamber of a film forming apparatus.

  Various apparatuses for forming a film on an object to be formed are known. Today, film forming apparatuses using various physical vapor deposition methods (PVD methods) (vacuum arc vapor deposition method, sputtering vapor deposition method, etc.) and film forming devices using chemical vapor deposition methods (plasma CVD method, thermal CVD method, etc.) Further, a film forming apparatus using a method combining these film forming methods is widely used.

  In a film forming apparatus using such a PVD method, a CVD method, or the like, particles such as ions that contribute to film formation are generated, the particles are directed to the film formation target article, and a film is formed on the article.

  In such a film forming apparatus, in order to improve productivity, a plurality of film forming objects are arranged in a film forming chamber and a film is formed on these articles. In order to form a film, film formation is performed while the article is moved or rotated, and a film formation target article support apparatus for that purpose has also been proposed.

  As one of them, a main base that is rotationally driven, a plurality of pillars that are erected on the main base and circularly move around the rotation center line of the main base as the main base rotates, and the respective pillars Are arranged in a plurality of stages along with the sub-base that rotates around the support in conjunction with the rotation of the main stand, and is erected on each of the sub-supports. Corresponding to each of a holder for a plurality of moving film forming articles, a driven wheel provided for each holder and rotating in conjunction with the holder, and a plurality of sub-stages arranged along each column. The driven wheel that rotates in conjunction with the holder erected on the sub table moves circularly around the support column to contact the driven wheel and rotate the driven wheel and the holder. Mention may be made of a film-forming target article support device including a kicker.

  7 to 9 show an example of this support device. As shown in FIGS. 7 to 9, the support device 200 includes a motor 201, a central column 208 connected to the motor main shaft 202 and the rotating shaft 203, and a table corresponding to the main table provided at the lower end of the central column 208. 207 and a top plate 209 provided at the upper end of the central column 208. Around the rotation center of the table 207, six table columns 210 are erected in a rotatable manner, and a small table 213 corresponding to the sub table is provided on each table column. The small table 213 is provided, for example, in four upper and lower stages (only two stages, the uppermost stage and the lowermost stage are shown in FIG. 7). A fixed gear 204 is provided below the table 207. The fixed gear 204 is fixed to the rotating shaft 203 and meshes with a gear 205 provided on a table column 210 on which a small table 213 is fixed. On the small table 213, eight holders 211 are provided in the same direction as the direction in which the table column 210 extends, that is, in the vertical direction.

  Each holder 211 is provided with a gear 212 corresponding to a driven wheel. As the small table 213 rotates, the gear 212 approaches the kicker 215 provided in the outer peripheral direction of the table 207 and is repelled when it comes into contact with the kicker 215. By rotating, the holder 211 is rotated. The kicker 215 is attached to the column by a kicker fixing jig 216 provided on the kicker fixing column 217 so that the position of the column can be adjusted (the vertical position and the position around the axis can be adjusted). In addition, a receiving tray 214 is provided below the small table 213 in preparation for when dust falls due to contact between the kicker 215 and the gear 212 or the like.

  Japanese Patent Application Laid-Open No. 11-323550 (Patent Document 1) discloses a rotational power energy by adopting a structure in which the driving force for rotating the holder is minimized and the holder can be rotated in a non-contact manner. A rotary table for a vacuum film forming apparatus is described which can reduce the film thickness and make the film uniform.

  The rotary table for a vacuum film forming apparatus is a rotary table for a vacuum film forming apparatus on which components to be formed are mounted. The rotary table is provided so as to be rotatable around the central axis of the rotary table, and on the periphery of the large table. A plurality of small tables that are arranged so as to be able to rotate around their own axes along a circle concentric with the center thereof, and each of the small tables can be rotated around its own axis along a circle concentric with the center of each small table. A plurality of work holders for holding the components to be deposited, a plurality of rotary shafts arranged adjacent to each small table and rotatably on a large table, and equally divided on each rotary shaft Provided with a plurality of active-side magnet bodies composed of a plurality of magnet pieces to be attached, a motor and a rotational power transmission mechanism, the large table rotates, the plurality of small tables and a plurality of rotating shafts revolve and rotate. Driving for The magnetic repulsion generated between the opposing magnet pieces of the active-side magnet body is composed of a plurality of magnet pieces mounted on the non-holding-side lower portion of each work holder in the equal division in close proximity to the active-side magnet body. And a passive-side magnet body that imparts rotational motion to the work holder by force and magnetic attraction force.

JP-A-11-323550

  However, in the conventional support device 200 described in FIGS. 7 to 9, the positioning of the kicker 215 is troublesome (it is necessary to adjust both the position around the axis and the vertical position by the kicker fixing jig 216). There is a problem that the kicker fixing column 217 obstructs the film formation. Further, when a falling object tray is provided, it is separately provided below the small table 213. Moreover, the rotary table for a vacuum film forming apparatus described in Patent Document 1 requires a magnet.

  Further, since the holder 211 and the film formation target article installed in the holder 211 extend in the vertical direction, the height of the holder 211 provided on each small table is between the plurality of small tables connected to the table column. In addition to this, it is necessary to provide an interval in consideration of the height of the film formation target article installed in the holder 211. Therefore, in such a vacuum film forming apparatus, in order to mount as many film forming target articles as possible, even if it is attempted to reduce the distance between the small tables provided on the table column in order to increase the number of small tables, the holder In addition, there is a problem that the size of the article to be formed is limited.

  Therefore, the present invention can stably set the kicker at a predetermined position and suppress the occurrence of kick mistakes in the driven wheel due to the kicker, as compared with the conventional support device of the same type, and accordingly to each film formation target article. It is an object of the present invention to provide a film forming object support device and a film forming apparatus that can form a film stably and uniformly, can form a film more smoothly, and can process many film forming objects.

In order to solve the above-mentioned problems, the present invention provides the following film forming target article supporting apparatus.
A film forming target article supporting device that generates particles that contribute to film formation, directs the particles toward the film forming target article, and is installed in a film forming chamber of a film forming apparatus that forms a film on the article. A main stand to be driven, a plurality of struts standing on the main stand and circularly moving around a rotation center line of the main stand as the main stand rotates, and a plurality of steps along the respective struts A plurality of film formations arranged and rotated around the support in association with the rotation of the main table, and a plurality of films standing on each of the auxiliary tables and circularly moving around the support as the sub table rotates. Provided in correspondence with each of the holder of the target article, the driven wheel that is provided for each holder, and rotates in conjunction with the holder, and the sub-bases that are arranged in a plurality of stages along each column, The driven wheel that rotates in conjunction with the holder erected on the sub table moves circularly around the column. A film forming object supporting device including a kicker that rotates the driven wheel and the holder in contact with the driven wheel, wherein the support column does not rotate with respect to the main base. Standing on the main stand, and equipped with an interlocking mechanism that rotates the sub-base arranged in a plurality of stages in the vertical direction along the respective pillars around the pillars in conjunction with the rotation of the main stand. The kicker is fixed to the column corresponding to each of the sub-bases arranged in the vertical direction along each column, and the holder and the film formation target article are in the direction in which the column extends. It is provided so that it may incline, and it is a film formation object article support apparatus characterized by the above-mentioned.

Here, “particles that contribute to film formation” are particles such as ions that contribute to film formation.
According to this film formation target article support device, when the main table rotates, a plurality of support columns erected on the main table move circularly around the rotation center line of the main table. This support column is provided with a plurality of sub-supports, and the sub-supports rotate around the support in conjunction with the rotation of the main support. A holder for holding a plurality of articles to be film-formed is provided on the sub table, and driven wheels that rotate in conjunction with the holders are provided. The holder rotates in contact.

  In this way, since the holder and, in turn, the film formation target article supported by the holder can be rotated, uniform film formation can be realized. Furthermore, when rotating in this way, the kicker is fixed to each column that does not rotate with respect to the main table, corresponding to each of the sub-tables arranged in the vertical direction. It is placed in a state where it cannot turn around or move up and down. For this reason, it is possible to stably set the kicker at a predetermined position to suppress the occurrence of kick mistakes in the driven wheel due to the kicker, and accordingly, a film can be stably and uniformly formed on each film formation target article.

  In addition, since there is no conventional kicker and a kicker fixing column supporting the kicker on the outer peripheral side of the sub table, it is prevented that the particles contributing to the film formation of ions and the like are prevented from flying to the film formation target article. In addition, uniform and smooth film formation can be realized. In addition, there is no need for a kicker installation space on the outer peripheral side of the sub table, and there is an advantage that the physique of the support device can be reduced, and a dust receiver or the like can be installed in the conventional kicker installation space.

  Further, the distance between the small tables connected to the arrangement table column can be reduced by inclining the film formation target article and its holder, so the number of small tables can be increased to increase the throughput of the film formation target article. Can be increased.

  As an example of the preferable thing of the said support | pillar, the inner support | pillar in the double structure support | pillar standingly arranged by the said main stand can be mentioned. In this case, the inner column is erected so as not to rotate with respect to the main table. Further, the sub table can be fixed to an outer column of a hollow cylinder provided outside the inner column of the double structure column. The interlocking mechanism for rotating the sub table in conjunction with the rotation of the main table may be a mechanism for rotating the sub table by rotating the outer column of the hollow cylinder in conjunction with the rotation of the main table. it can.

  In this way, without rotating the inner column with respect to the main table, only the outer column of the hollow cylinder is rotated, and the auxiliary table fixed to the outer column is rotated in conjunction with the rotation of the main table. Can do.

  More preferably, the inner column includes a column divided in the vertical direction and a boss provided with a positioning mechanism for connecting the divided columns, and the kicker may be fixed to the boss.

  In this way, for example, by simply stacking the divided struts sandwiching the boss with the kicker fixed in advance or the boss before the kicker fixed, the divided struts can be easily connected to each other and the setting of the kicker can be made easily and reliably. A kick mistake of the driven wheel due to the kicker hardly occurs, the kick driving of the driven wheel is stabilized, and a uniform film formation can be realized.

  Preferably, the sub table has a dish-like shape having a rising peripheral edge, and may also serve as a falling object receiver that receives falling objects from above. Unlike the prior art, since no kicker holding mechanism is required on the outer peripheral side of the sub table, it is not necessary to provide a falling object receiver for receiving dust generated by the kick in a size exceeding the diameter of the sub table. For this reason, this sub-table itself can be used also as a fallen object receptacle.

  In order to solve the above-mentioned problems, the present invention is also a film forming apparatus for generating particles that contribute to film formation, directing the particles toward the film formation target article, and forming a film on the article. Provided is a film forming apparatus employing the film forming target article supporting apparatus according to the present invention as a film forming target article supporting apparatus that is installed and used.

  The film forming apparatus according to the present invention employs the film forming target article supporting apparatus according to the present invention as the film forming target article supporting apparatus, so that the kicker in the film forming target article supporting apparatus is stably set at a predetermined position. Thus, the occurrence of kick mistakes in the driven wheels due to the kicker can be suppressed, and the film can be stably and uniformly formed on each film forming object, and the film can be formed more smoothly.

  Further, the distance between the small tables connected to the arrangement table column can be reduced by inclining the film formation target article and its holder, so the number of small tables can be increased to increase the throughput of the film formation target article. Can be increased.

  Although not limited thereto, as an example of the film forming apparatus according to the present invention, an apparatus for forming a film by a vacuum arc deposition method can be cited. This film forming apparatus can realize uniform film formation.

  The film forming object support device and the film forming apparatus of the present invention can stably set the kicker at a predetermined position to suppress the occurrence of kick mistakes in the driven wheel by the kicker, and are stable to each film forming object. Thus, a uniform film can be formed, and a film can be formed more smoothly, and many articles to be formed can be processed.

It is the schematic of the vacuum arc vapor deposition apparatus which concerns on embodiment of this invention. It is the schematic which looked at the support apparatus of the vacuum arc vapor deposition apparatus of FIG. 1 from the side surface. It is the schematic which looked at the support apparatus of the vacuum arc vapor deposition apparatus of FIG. 1 from the upper surface. FIG. 3 is a partially enlarged view of FIG. 2. FIG. 5 is a partially exploded view of FIG. 4. It is the figure which looked at the holder of the support apparatus of FIG. 2 from the top. It is the schematic which looked at the support apparatus of the conventional vacuum arc vapor deposition apparatus from the side surface. It is the schematic which looked at the support apparatus of the vacuum arc vapor deposition apparatus of FIG. 7 from the upper surface. It is the figure which looked at the holder of the support apparatus of FIG. 7 from the top.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same parts are denoted by the same reference numerals. Their functions and names are also the same. Therefore, detailed description thereof will not be repeated.

<Schematic configuration of film forming apparatus>
FIG. 1 is a schematic view of a configuration of a vacuum arc deposition apparatus A which is an example of a film forming apparatus according to an embodiment of the present invention, and FIG. 2 is a side view of an article support target apparatus for film formation in the vacuum arc deposition apparatus A. FIG. 3 is a schematic sectional view, and FIG. 3 is a schematic view of the film forming target article supporting device in the vacuum arc deposition apparatus A as viewed from above.

  The vacuum arc vapor deposition apparatus A in FIG. 1 is an article to be processed W by a vacuum arc vapor deposition method (arc ion plating method) (the article to be treated W is a rod-shaped article in this example, and is hereinafter referred to as an article W). This is an apparatus for forming a film. The vacuum arc deposition apparatus A includes a support device 2 that supports an article W that is a film formation target article. The film forming method of the present invention is not limited to the vacuum arc vapor deposition method, and may be a film forming device by sputtering or a plasma CVD device.

  As shown in FIGS. 1 to 3, the vacuum arc deposition apparatus A includes a vacuum vessel 1, a support device 2 for supporting the article W, a DC bias power source 3 for applying a negative bias voltage to the article W, An exhaust device 4 for depressurizing the inside of the vacuum vessel 1, a vacuum arc vapor deposition unit 5 which is an example of a film forming unit, and the like are included.

  The support device 2 is generally a vertically long cylindrical shape, and a central column 80 is provided on the central axis of the cylindrical shape. As shown in FIG. 2, the column 80 is provided in the vertical direction. A disk-shaped top plate 115 is provided at the upper end of the support column 80, and a table 30 (an example of a main table) having the same diameter as the top plate 115 is provided at the lower end.

  As shown in FIG. 3, the support device 2 is provided with six sets of small tables 103 (an example of a sub table) along the circumference of the table 30 in the outer diameter direction. Eight holders 104 are provided in a direction inclined with respect to the extending direction. Each set of small tables 103 has, for example, a four-stage structure (only the uppermost and lowermost stages are shown in FIG. 2).

  In this support device 2, as shown in FIG. 3, the table 30 is rotated in the direction indicated by the arrow X (which may be reversed). The rotation of the table 30 in the direction indicated by the arrow X is referred to as revolution. Further, the small table 103 is rotated in the arrow Y direction (which may be reversed). The rotation of the small table 103 in the arrow Y direction is referred to as first rotation. Further, the holder 104 is rotated in the arrow Z direction (which may be reversed). The rotation of the holder 104 in the direction indicated by the arrow Z is referred to as second rotation.

  The DC bias power source 3 applies a negative bias voltage to the article W supported by the holder 104 via the rotating shaft 22 of the table 30 or the like.

  The exhaust device 4 is configured by a pump or the like for exhausting gas from the inside of the vacuum vessel 1 or evacuating to decompress the inside of the vacuum vessel 1.

  The vacuum arc vapor deposition unit 5 is provided on the side wall of the vacuum vessel 1 so as to face the support device 2. The vacuum arc deposition unit 5 includes an evaporation source 51. The number of the evaporation sources 51 may be one, but here, the support device 2 is long in the vertical direction and the articles W are attached in four levels in the vertical direction.

  The evaporation source 51 is known per se, and the detailed description thereof will not be repeated here, but basically, the cathode 50 containing the components of the film to be formed on the article W that is the article to be treated is vacuumed. The film is formed by evaporating and ionizing by arc discharge and flying the ionized cathode material onto the article W. At this time, a bias (here, a negative bias) is applied to the article W by the DC bias power source 3 so that the ionized cathode material smoothly moves toward the article W.

According to this vacuum arc deposition apparatus A, a desired film can be formed on the article W. At this time, it is necessary to form a uniform film on the article W. For this purpose, the support device 2 needs to support the article W so that the cathode material flying from the vacuum arc vapor deposition section 5 reaches the article W uniformly. To achieve this, the support device 2 revolves the table 30 in the arrow X direction, causes the small table 103 to rotate first in the arrow Y direction, and moves the holder 104 in the arrow Z direction, as shown in FIG. To the second rotation.
Hereinafter, details of the support device 2 will be described with reference to FIGS. 4 to 6 which are enlarged views of FIG. 2 in addition to FIG. 2.

<Detailed Configuration of Support Device in Film Forming Apparatus>
As described above, the support device 2 has a cylindrical shape with the central column 80 as the central axis, and includes the top plate 115 and the table 30.

  The column 80 is connected to the rotary shaft 22 below, and the rotary shaft 22 is rotatably supported by a column bearing 60 provided on the bottom wall S of the vacuum vessel 1, and the rotary shaft 22 is supported by the column bearing 60. And is connected to the motor main shaft 21 of the motor 20. In addition, the bearing 60 is provided in the center part of the fixed sun gear 40 mentioned later, and the gear 40 is supported by the bottom wall S of the container 1 so that rotation is impossible.

  The column 80 is fixed to the table 30 supported on the gear 40 by a table support bearing 70 such as a thrust bearing in the vicinity of the connection surface with the rotary shaft 22. The table 30 is revolved in the direction indicated by the arrow X in FIG.

  A fixed gear 40 is provided below the table 30 via a column bearing 60 that supports the rotating shaft 22 (more specifically, fixed to the housing of the column bearing 60). Even when the table 30 is rotated by the motor 20, the fixed gear 40 does not revolve due to the action of the support bearing 60.

  The fixed gear 40 is provided so as to mesh with the gear 55 that rotates the small table 103 in the first rotation. The first rotation of the small table 103 is characterized in that the outer pipe 102 fixed to the small table 103 rotates and the inner pipe 105 inside does not rotate. Note that the rotation center of the outer pipe 102 and the central axis of the inner pipe 105 coincide.

  That is, as shown in FIG. 4, the gear 55 is connected to the small table support housing 101, and the small table support housing 101 is attached to the table 30 by the outer pipe support bearing 111 attached to the table 30 with the bolt 112. It is rotatably supported. The small table support housing 101 is connected to the outer pipe support member 124 by a bolt 125. The outer pipe support member 124 fits and holds the outer pipe 102.

  A small table 103 is fitted and held on the outer pipe 102. For this reason, when the table 30 revolves, the gear 55 is rotated by the fixed gear 40, and the gear 55 rotates, whereby the small table connected to the housing 101 via the small table support housing 101 and the outer pipe support member 124. 103 rotates first.

  On the other hand, the inner pipe 105 is connected to the inner pipe support member 122 by an inner pipe connecting member 123. At this time, the inner pipe connecting member 123 engages the inner pipe 105A on the upper side and the inner pipe support member 122 on the lower side, so that the inner pipe 105A and the inner pipe support member 122 are integrated. It is composed.

  An inner pipe support bearing 121 is provided between the inner pipe support member 122 and the small table support housing 101 connected to the outer pipe 102 and the gear 55. For this reason, even when the gear 55 rotates and the outer pipe 102 and the small table 103 rotate through the small table support housing 101 in the first rotation, the inner pipe 105 does not rotate in the first rotation due to the action of the inner pipe support bearing 121. That is, in such a state, the inner pipe 105 is connected to the top plate 115 so as to be prevented from rotating as described later, so that the inner pipe 105 is erected on the table 30 so as not to rotate even if the table 30 rotates. Will be.

  The configuration of the inner pipe 105 and the configuration of the outer pipe 102 are realized by assembling a plurality of parts from the lower stage to the upper stage.

  As shown in FIGS. 4 and 5, the middle portion of the inner pipe 105 is a hollow circular pipe, and its upper end portion 105 UE has a slightly small diameter so as to obtain a stepped portion that fits and stops on a kicker fixing boss 106 described later. The end portion 105UE has a pin engaging portion 105C. Further, the lower end portion 105LE of the intermediate portion of the inner pipe 105 is formed to have a slightly small diameter so as to obtain a stepped portion that fits and stops on the kicker fixing boss 106, and has a pin engaging portion 105D at the end portion 105LE. ing.

  The intermediate inner pipe 105 is connected by a kicker fixing boss 106. The kicker fixing boss 106 is engaged with the pin engaging portion 105C to determine a relative position around the center axis of the pipe and the boss, and is engaged with the pin engaging portion 105D for the same positioning. Pin 108B is provided.

  While the pin 108A of the kicker fixing boss 106 is engaged with the pin engaging portion 105C of the lower inner pipe 105, the pipe upper end portion 105UE is fitted to the boss 106, and the kicker is fixed to the pin engaging portion 105D of the upper inner pipe 105. By fitting the pipe lower end 105LE to the boss 106 while engaging the pin 108B of the boss 106, the lower inner pipe 105 in the middle and the inner pipe 105 one stage higher than that are connected.

  As shown in FIG. 4, the inner pipe 105A at the lowermost stage has the same diameter as the inner pipe 105 in the middle part, but here the length is different (the length may be the same). However, it has a lower end portion for obtaining the same stepped portion as described above and a pin engaging portion formed thereon, and the pin 122P provided on the inner pipe support member 122 engages with the pin engaging portion. .

Furthermore, as shown in FIG. 4, the uppermost inner pipe 105 </ b> B has the same diameter as the inner pipe 105 in the middle part, but here the length is different (the length may be the same). However, it has an upper end portion for obtaining the same stepped portion as described above and a pin engagement portion 105C formed there, and the pin engagement portion is provided on the top plate 115 and is connected to the upper end portion of the pipe. The pin 108C of the fixed boss 109 to be engaged is engaged. In this way, the top plate 115 and the uppermost inner pipe 105B are connected.
Even if the table 30 rotates due to the engagement between the pin 108C and the pin engaging portion 105C at the upper end portion of the pipe and the action of the inner pipe support bearing 121 in this way, the inner pipe 105 is indicated by the arrow Y Do not rotate in the direction.

  As shown in FIG. 4, the middle part of the outer pipe 102 is a hollow circular pipe having an inner diameter larger than the outer diameter of the inner pipe 105, and its upper end is fitted and connected to the center hole of the small table 103, The lower end of the small table top plate 131 is fitted and connected to the center hole. An inclined portion for inclining and supporting the holder 104 is provided at the peripheral edge portions of the small table 103 and the small table top plate 131. The small table 103 has a smaller diameter than the small table top plate 131. The small table 103 and the small table top plate 131 are connected by a small table support 130. The lower small table top plate 131 and the upper small table 103 are connected by the outer pipe 102, and a small table column 130 is provided between the small table 103 and the small table top plate 131 (the portion where the outer pipe 102 does not exist). Since they are connected, the outer pipe 102 has a structure connected in the vertical direction.

  Furthermore, as shown in FIG. 4, the lowermost outer pipe 102A has the same inner diameter and outer diameter as the intermediate outer pipe 102, but not only the length is different (the length may be the same), The lower end is not engaged with the center hole of the small table top plate 131 but is fitted to the outer pipe support member 124. As a result, the outer pipe 102 </ b> A is connected to the outer pipe support member 124.

  Further, as shown in FIG. 4, the outermost pipe 102B at the uppermost stage has the same inner diameter and outer diameter as the outer pipe 102 in the middle part, but not only the length is different (the length may be the same), The upper end is not engaged with the center hole of the small table 103 but is fitted to a fitting portion 115 </ b> A provided on the outer periphery of the top plate 115. Thereby, the outer pipe 102B is connected to the top plate 115.

  As shown in FIG. 4, the inner pipe 102 and the outer pipe 105 do not interfere with each other, and the outer diameter of the inner pipe connecting member 123 and the inner diameter of the lowermost outer pipe 102A do not interfere with each other. ,It is configured.

<Detailed configuration of holder>
With reference to FIGS. 4-6, the structure which implement | achieves the 2nd rotation of the holder 104 is demonstrated. As shown in FIG. 4, the holder 104 has a structure in which three hollow cylinders having different diameters (thick at the center) are stacked in three upper and lower stages. The article W is held in the hollow portion of the upper two-stage hollow cylinder, and the outer peripheral portion of the uppermost hollow cylinder is fitted in the hole of the small table top plate 131. Since the outer periphery of the hollow cylinder at the center stage is larger than the diameter of the hole of the small table top plate 131 (there is a step), the holder 104 is prevented from coming off by this step. The lowermost hollow cylinder is slidably in contact with the bottom surface of a holder fitting hole formed at the peripheral edge of the small table 103 at its lower end surface. In the hollow portion of the lowermost hollow cylinder, a shaft 140 provided obliquely upward from below the inclined portion provided on the peripheral portion of the small table 103 is fitted, and the holder 104 is centered on the shaft 140. Are supported rotatably in the Z direction (or in the reverse Z direction).

  As shown in FIGS. 4 and 6, the gear 110 is positioned at the outer peripheral portion of the lowermost hollow cylinder, which is higher than the height of the peripheral portion of the small table 103 and faces the kicker 107. And are provided integrally. A kicker 107 having a height position and a length that can come into contact with the gear 110 is fixed to the kicker fixing boss 106 by a kicker fixing bolt 107A. At this time, the extending direction of the kicker 107 may be provided to be perpendicular to the extending direction of the holder 104.

  As described above, in the first rotation of the small table 103, the outer pipe 102 fitted to the small table 103 rotates, and the inner pipe 105 inside does not rotate. The kicker fixing boss 106 is provided integrally with the inner pipe 105 and does not rotate even if the small table 103 rotates in the first direction. As shown in FIG. 6, since the kicker 107 does not move relative to the small table 103 with respect to the first rotation indicated by the arrow Y, the holder 104 rotates on the small table 103 by the first rotation. Thus, the gear 110 of the holder 104 comes into contact with the kicker 107.

  That is, the holder 104 approaches and comes into contact with the kicker 107 by the first rotation. If the kicker 107 is a flat plate member such as spring steel, when the gear 110 comes into contact with the kicker 107, the gear 110 is repelled by the kicker 107 and the gear 110 rotates. When the gear 110 rotates, the holder 104 rotates around the shaft 140 in the second rotation. This second rotation is the rotation in the direction indicated by the arrow Z in FIG.

  The kicker 107 is provided on the kicker fixing boss 106. The kicker fixing boss 106 is provided with a pin 108 that prevents the inner pipe 105 from rotating. As described above, the rotation center of the outer pipe 102 coincides with the central axis of the inner pipe 105. Therefore, by fitting the inner pipe 105 to the boss 106 and engaging the boss upper pin 108 to the pin engaging portion of the inner pipe 105, the inner pipe 105 in the vertical direction of the inner pipe 105 and in the direction around the pipe center axis. 105, the center axis of the inner pipe 105 coincides with the center of rotation of the outer pipe 102, the center of rotation of the holder 104 standing on the small table 103 supported by the outer pipe 102, and the kicker fixing boss. The horizontal distance from the kicker 107 provided at 106 is uniquely determined.

  Further, the height positions of the outer pipe 102 and the kicker fixing boss 106 are determined using the upper surface of the small table support housing 101 as a reference height, and the inner pipe 105, The height positions of the small table 103, the holder 104, and the gear 110 are determined. If it does in this way, the position of the height direction of the gear 110 and the kicker 107 provided in the kicker fixed boss | hub 106 can be arrange | equalized.

  This means that the kicker fixing boss 106 for fixing the kicker 107 is positioned simply by stacking the inner pipe 105 using the boss 106, and the kicker positioning (horizontal direction and height direction) with respect to the gear 110 is facilitated. Indicates what will be done. As shown in FIG. 6, two pins 108 are provided for one kicker fixing boss 106. In FIG. 6, the pins 108 are provided at intervals of 180 degrees.

<Operation of film forming apparatus>
Operation | movement of the vacuum arc vapor deposition apparatus A which has the above structures is demonstrated. When a film is formed on the article W by the vacuum arc vapor deposition apparatus A, the article W is first mounted on and supported by the holder 104 of the support apparatus 2. Then, the vacuum vessel 1 is evacuated by the exhaust device 4, the inside of the vacuum vessel 1 is depressurized, and a film is formed on the article W while maintaining the inside of the vacuum vessel 1 at a film forming pressure.

  Film formation is performed as follows. Each evaporation source 51 in the vacuum arc evaporation section 5 generates an arc discharge to evaporate and ionize the cathode 50, while negative DC is applied from the bias power source 3 to the support device 2, and hence to each article W on the support device 2. A film is formed by applying a bias and causing the ionized cathode material to fly to each article W. In this film formation, the support device 2 is rotated.

  The motor 20 is energized to rotate the motor main shaft 21 and the rotating shaft 22 to rotate the column 80. Since the column 80 is erected on the table 30 supported by the table support bearing 70, the table 30 revolves in the arrow X direction by the rotation of the motor 20.

  Since the support bearing 60 is provided between the rotating shaft 22 and the fixed gear 40, the fixed gear 40 does not rotate even if the rotating shaft 22 rotates. Since the table 30 revolves without the fixed gear 40 rotating, the gear 55 connected to the outer pipe 102 erected on the table 30 via the outer pipe support bearing 111 rotates. The outer pipe 102 is rotated by the rotation of the gear 55, and the small table 103 fixed to the outer pipe 102 rotates first in the arrow Y direction.

  An inner pipe support bearing 121 is provided between the outer pipe 102 and the inner pipe 105, and the upper end of the inner pipe 105 is stopped by a fixed boss 109 provided on the top plate 115. Even if is rotated, the inner pipe 105 does not rotate. The small table 103 rotates first without rotating the inner pipe 105. By the first rotation, the kicker 107 fixed to the inner pipe 105 repels the gear 110 fixed to the holder 104, and the gear 110 rotates. When the gear 110 rotates, the holder 104 rotates about the shaft 140 in the arrow Z direction in the second direction.

  Thus, by rotating the motor 20, the table 30 revolves in the arrow X direction, the small table 103 rotates first in the arrow Y direction, and the holder 104 rotates second in the arrow Z direction.

  Note that the revolution speed, the first rotation speed, and the second rotation speed are designed to have desired rotation speeds by appropriately setting the rotation speed of the motor 20 and the gear ratio of the gears. Yes.

  Furthermore, as described above, there is no kicker fixing member in the outer peripheral direction of the small table 103 as in the prior art. For this reason, the film can be smoothly formed without being obstructed by such a member.

  In addition, it is also possible to form a dust-free tray with the outer diameter of the small table 103 of the support device 2 according to the above-described embodiment. That is, the small table 103 is configured as a dish having a rising peripheral edge so that it can receive falling objects from above. At this time, if dust or the like is generated due to contact between the kicker 107 and the gear 110, it is necessary to provide a saucer. However, the kicker moves away from the circumference of the small table as in the prior art (away from the central axis of the small table). (In the direction approaching the central axis of the small table) rather than in the direction), it is not necessary to increase the diameter of the tray. The kicker 107 is not a flat plate as described above, and may be a gear that meshes with the gear 110.

As described above, according to the vacuum arc deposition apparatus according to the present embodiment,
(1) Since the kicker fixing boss 106 for fixing the kicker is positioned simply by stacking the inner pipes 105, the kicker can be easily positioned and the kick mistake is not easily caused, and uniform film formation can be realized.
(2) Since the kicker is provided on the rotating shaft side of the small table, there is no conventional kicker on the outer peripheral side of the small table, and the film forming material from the vacuum arc evaporation section 5 provided on the outer peripheral side of the small table. Without hindering the flight of
(3) There is no need for a kicker installation space on the outer side of the small table, and it is possible to reduce the size of the support device or to install a garbage receiver in the kicker installation space.
(4) Since the film forming target article and its holder can be tilted to reduce the distance between the small tables connected to the arrangement table support column, the number of small tables is increased to process the film forming target article. The amount can be increased.

  The embodiment disclosed this time is merely an example, and the present invention is not limited to the embodiment described above. The scope of the present invention is indicated by each claim in the claims after taking into account the description of the detailed description of the invention, and all modifications within the meaning and scope equivalent to the wording described therein are intended. Including.

A Vacuum arc deposition apparatus W Article 1 Vacuum container 2 Support apparatus 3 DC bias power supply 4 Exhaust apparatus 5 Vacuum arc deposition section 20 Motor 21 Motor spindle 22 Rotating shaft 30 Table 40 Fixed gear 55 Gear 60 Strut bearing 70 Table support bearing 80 Column 101 Small table column housing 102 Outer pipe 103 Small table 104 Holder 105 Inner pipe 106 Kicker fixing boss
107 kicker 108 pin 109 fixed boss 110 gear 111 outer pipe support bearing 112 bolt 115 top plate 121 inner pipe support bearing 122 inner pipe support member 123 inner pipe connecting member 124 outer pipe support member 125 bolt 130 small table column 131 small table top plate 140 axes

Claims (6)

A film forming target article supporting device that generates particles contributing to film formation, directs the particles to the film forming target article, and is installed in a film forming chamber of a film forming apparatus that forms a film on the article.
A main base that is driven to rotate, a plurality of pillars that are erected on the main base and that circularly move around the rotation center line of the main base as the main base rotates. And a plurality of membranes that are erected on each of the sub-bases and that move in a circular motion around the post along with the rotation of the sub-bases. It is provided corresponding to each of the holder of the article to be formed, the driven wheel that is provided for each holder and rotates in conjunction with the holder, and the sub-base arranged in multiple stages along each column. The kicker that rotates the driven wheel and the holder by contacting the driven wheel by the circular movement of the driven wheel that rotates in conjunction with the holder that is erected on the sub-base moves around the column. A film-forming object support device comprising:
The column is erected on the main stand so as not to rotate with respect to the main stand,
It is equipped with an interlocking mechanism that rotates the sub-bases arranged in a plurality of stages in the vertical direction along the respective pillars around the pillars in conjunction with the rotation of the main base,
The kicker is fixed to the column corresponding to each of the sub-bases arranged in the vertical direction along each column,
The film forming target article supporting apparatus, wherein the holder and the film forming target article are provided so as to be inclined with respect to a direction in which the support column extends. The strut is an inner strut in a double structure strut erected on the main stand, and the inner strut is erected so as not to rotate with respect to the main stand.
The sub table is fixed to an outer column of a hollow cylinder provided outside the inner column of the double structure column,
The interlocking mechanism for rotating the sub table in conjunction with the rotation of the main table is a mechanism for rotating the sub table by rotating the outer column of the hollow cylinder in conjunction with the rotation of the main table. Item 1. The article support device for film formation according to Item 1. The inner strut includes a strut divided in the vertical direction and a boss having a positioning mechanism for connecting the divided struts,
The film forming target article supporting device according to claim 2, wherein the kicker is fixed to the boss.   The film forming target article support device according to any one of claims 1 to 3, wherein the sub table has a dish-like shape having a rising peripheral edge and serves also as a falling object receiver from above.   A film forming apparatus that generates particles that contribute to film formation, directs the particles toward the film formation target article, and forms a film on the article. The film formation apparatus provided with the film formation object article support apparatus in any one of Claims 1-4.   The film forming apparatus according to claim 5, wherein the film is formed by a vacuum arc deposition method.

Images