CN210529047U - Sputtering coating device of movable target - Google Patents
Sputtering coating device of movable target Download PDFInfo
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- CN210529047U CN210529047U CN201921478736.4U CN201921478736U CN210529047U CN 210529047 U CN210529047 U CN 210529047U CN 201921478736 U CN201921478736 U CN 201921478736U CN 210529047 U CN210529047 U CN 210529047U
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Abstract
The utility model discloses a sputter coating device of portable target, including real empty room, install the revolving rack in the real empty room, a plurality of target mounting panel is installed at real empty room top, the target mounting panel includes first mounting panel and second mounting panel, first mounting panel is connected with real empty room top, oval through-hole has been seted up at first mounting panel middle part, the round hole has been seted up to first mounting panel both sides, the through-hole that is used for fixed target is seted up at second mounting panel middle part, the rectangular hole has been seted up to second mounting panel both sides, the second mounting panel passes through the screw setting on first mounting panel, the screw sets up on round hole and rectangular hole, the through-hole of second mounting panel overlaps with the oval through-hole of first mounting panel. The utility model discloses a target position is portable, through the position of removing the target for distance between target head and the work piece is appropriate, makes the utility model discloses can carry out the coating to not unidimensional work piece, practice thrift the cost, simple structure uses in a flexible way.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to a sputtering coating device of a movable target.
Background
The ion sputtering film plating machine is characterized in that gas molecules form positive ions and electrons after high-pressure ionization in an ion source, the positive ions are accelerated under the action of an electric field and bombard a target material with high kinetic energy, so that the energy of target material atoms is increased and separated from the surface to form a sputtering layer, and the sputtering layer is deposited on a workpiece to form a film. With the vigorous development of the coating industry, coating equipment and coating technology are changed day by day, most sputtering targets of the existing ion sputtering coating equipment are fixedly arranged in a vacuum chamber, the positions of the sputtering targets cannot be moved, the distance between the sputtering targets and workpieces to be coated is fixed, the positions of the sputtering targets cannot be adjusted according to the sizes of the workpieces to be coated, different equipment needs to be customized for processing the workpieces with different sizes, and the production cost is high.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to the problem that above-mentioned prior art exists, provide one kind can adjust the position of target, but the work piece of workable not unidimensional practices thrift the cost, simple structure's sputter coating device of portable target.
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes:
the utility model provides a sputter coating device of portable target, includes real empty room, install the revolving rack in the real empty room, a plurality of target mounting panel is installed at real empty room top, the target mounting panel includes first mounting panel and second mounting panel, first mounting panel with real empty room top is connected, oval through-hole has been seted up at first mounting panel middle part, the round hole has been seted up to first mounting panel both sides, the through-hole that is used for fixed target is seted up at second mounting panel middle part, the slot has been seted up to second mounting panel both sides, the second mounting panel passes through the screw setting and is in on the first mounting panel, the screw sets up on round hole and slot, and the through-hole of second mounting panel overlaps with the oval through-hole of first mounting panel.
As preferred mode, the annular has been seted up to first mounting panel, the annular encircles the setting and is in the periphery of oval through-hole, install the sealing washer on the annular.
Preferably, the through hole of the second mounting plate is a circular through hole, the target is a cylindrical target, and the target is fixedly mounted on the circular through hole.
Preferably, the first mounting plate and the second mounting plate are both metal plates, and the first mounting plate is welded to the top of the vacuum chamber.
The utility model has the advantages that:
compared with the prior art, through welding first mounting panel at real empty room top, oval through-hole has been seted up to first mounting panel, the round hole has been seted up respectively to first mounting panel both sides, install the second mounting panel on first mounting panel, the second mounting panel is provided with the circular through-hole that is used for fixed target, the slot has been seted up respectively to second mounting panel both sides, install the screw on round hole and slot, fix different positions in the slot through adjusting screw, make the different positions on first mounting panel are installed to the second mounting panel, make the different positions of target fixation in oval through-hole, thereby realized the portability of target position, position through removing the target, make the distance between target and the work piece appropriate, make the utility model discloses can carry out the coating to not unidimensional work piece, practice thrift the cost, simple structure, it is nimble to use.
Drawings
FIG. 1 is a schematic structural view of the sputtering coating device of the movable target of the present invention without a second mounting plate;
FIG. 2 is a schematic diagram of a second mounting plate installed in the sputter coating apparatus of FIG. 1;
FIG. 3 is a schematic view of a part of the sputtering coating apparatus of the movable target of FIG. 1;
FIG. 4 is a schematic view of the internal structure of the sputter coating apparatus according to the present invention;
FIG. 5 is a schematic diagram of a first mounting plate structure;
fig. 6 is a schematic diagram of a second mounting plate structure.
In the figure: 1-vacuum chamber, 2-rotating frame, 21-rotating frame top disc, 22-rotating frame bottom disc, 23-supporting rod, 24-hanging tool, 25-hanging rod, 3-target mounting plate, 31-first mounting plate, 311-oval through hole, 312-round hole, 313-ring groove, 32-second mounting plate, 321-round through hole, 322-rectangular hole, 4-screw, 5-target seat, 6-motor, 61-driving gear, 7-supporting wheel, 8-door and 9-workpiece.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-6, the sputtering coating device of the movable target provided by the present invention comprises a vacuum chamber 1, a rotating frame 2 is installed in the vacuum chamber 1, a plurality of target mounting plates 3 are installed on the top of the vacuum chamber 1, the target mounting plates 3 comprise a first mounting plate 31 and a second mounting plate 32, and the first mounting plate 31 and the second mounting plate 32 are metal plates. The first mounting plate 31 is welded to the top of the vacuum chamber 1. Oval through-hole 311 has been seted up to first mounting panel 31, round hole 312 has been seted up to first mounting panel 31 both sides, and circular through-hole 321 that is used for fixed target has been seted up to second mounting panel 32, and rectangular hole 322 has been seted up to second mounting panel 32 both sides, and second mounting panel 32 passes through screw 4 and sets up on first mounting panel 31, and screw 4 sets up on round hole 312 and rectangular hole 322. The circular through-holes of the second mounting plate overlap the elliptical through-holes of the first mounting plate. The annular groove 313 is opened to first mounting panel 31, annular groove 313 encircles the periphery that sets up at oval through-hole 311, install the sealing washer on the annular groove 313, through install the sealing washer on annular groove 313, can improve the leakproofness between first mounting panel 31 and the second mounting panel 32 to improve vacuum chamber 1's leakproofness, the circular through-hole 321 of second mounting panel 32 does, target 5 fixed mounting is on the circular through-hole 321 of second mounting panel, the oval through-hole of first mounting panel and the circular through-hole of second mounting panel are passed in proper order to the target promptly.
When the screw locking device is used, the second mounting plate 32 is placed on the first mounting plate 31, the round hole 312 is aligned with the rectangular hole 322, the screw 4 is mounted on the round hole 312 and the rectangular hole 322, the screw 4 is locked, and the first mounting plate 31 is fixedly connected with the second mounting plate 32; when the position of the target 5 needs to be adjusted, the screw 4 is loosened, the second mounting plate 32 is moved in the direction of the rectangular hole 322, meanwhile, the target 5 mounted on the circular through hole 321 of the second mounting plate 32 is moved in the elliptical through hole 311 of the first mounting plate 31, and after the position of the target 5 is properly adjusted from the workpiece 9, the screw 4 is locked, thereby fixing the second mounting plate 32 on the first mounting plate 31.
The first mounting plate 31 is provided with an oval through hole 311 by welding the first mounting plate 31 on the top of the vacuum chamber 1, the target 5 is fixedly mounted on the circular through hole 321 of the second mounting plate 32, and the target 5 is mounted at different positions in the oval through hole 311 by adjusting different positions at which the second mounting plate 32 is mounted on the first mounting plate 31 (as shown in fig. 2). When processing not unidimensional work piece, through the position of removing target 5 for the distance between target 5 and the work piece 9 is appropriate, makes the utility model discloses can process not unidimensional work piece 9, practice thrift the cost, use in a flexible way, simple structure.
Install motor 6 on the real empty room 1, the output shaft of motor 1 has drive gear 61, revolving rack 2 includes revolving rack head disc 21, revolving rack chassis 22, a plurality of spinal branch vaulting poles 23, hanger 24, revolving rack head disc 21 and revolving rack chassis 22 are connected with real empty room 1 through supporting wheel 7 respectively, a plurality of spinal branch vaulting poles 23 are the circumference and distribute, and the top and the revolving rack head disc 21 of every spinal branch vaulting pole 23 are connected, the bottom and the revolving rack chassis 22 of every spinal branch vaulting pole 23 are connected, revolving rack head disc 21 periphery is provided with the tooth, revolving rack head disc 21 passes through tooth and drive gear 61 meshing, hanger 24 and revolving rack head disc 21 and bracing piece 23 fixed connection, be provided with peg 25 on the hanger 24. In this embodiment, two target mounting plates 3 are mounted on the top of the vacuum chamber 1, wherein the two target mounting plates 3 are symmetrically arranged with each other, a target 5 is mounted on each target mounting plate 3, one target 5 is located at the inner ring of the rotating frame 2, the other target 5 is located at the outer ring of the rotating frame 2, and the two targets 5 are symmetrically arranged with each other.
When the film coating machine works, the door 8 is closed, the motor 6 is started, the motor 6 drives the gear 61 to rotate, the drive gear 61 is meshed with the rotating frame top disc 21 to drive the rotating frame top disc 21 to rotate, the hanging tool 24 fixedly connected to the rotating frame top disc 21 and the supporting rod 23 rotates along with the rotating frame top disc 21 and the rotating frame bottom disc 22, and when a workpiece 9 on the hanging tool 24 rotates to a position between two mutually symmetrical targets 5, the targets 5 coat the film on the workpiece 9.
In summary, by welding the first mounting plate 31 on the top of the vacuum chamber 1, the first mounting plate 31 has an oval through hole 311, the two sides of the first mounting plate 31 have round holes 312, the second mounting plate 32 is mounted on the first mounting plate 31, and the second mounting plate 32 has a round through hole 321. Rectangular hole 322 has been seted up respectively to second mounting panel 32 both sides, and mounting screw 4 on round hole 312 and rectangular hole 322, second mounting panel 32 pass through screw 4 to be fixed on first mounting panel 31, fixes different positions in rectangular hole 322 through adjusting screw 4 for the different positions on first mounting panel 31 are installed to second mounting panel 32, makes target 5 install the different positions in oval through-hole 311, thereby has realized the portable of target 5 position. Through the position of removal target 5 for the distance between target 5 and the work piece 9 is appropriate, makes the utility model discloses can carry out the coating to the work piece of unidimensional not, practice thrift the cost, simple structure uses in a flexible way.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments shown and described. To the utility model belongs to the technical field of ordinary technical personnel, do not deviate from the utility model discloses under the prerequisite of design, can also make a plurality of simple deductions or replacement, all should regard as belonging to the utility model discloses a protection scope.
Claims (8)
1. The utility model provides a sputter coating device of portable target, includes vacuum chamber (1), its characterized in that, install revolving rack (2) in vacuum chamber (1), a plurality of target mounting panel (3) are installed at vacuum chamber (1) top, target mounting panel (3) include first mounting panel (31) and second mounting panel (32), first mounting panel (31) with vacuum chamber (1) top is connected, oval through-hole (311) have been seted up in first mounting panel (31) middle part, round hole (312) have been seted up to first mounting panel (31) both sides, through-hole (321) that are used for fixed target have been seted up in second mounting panel (32) middle part, rectangular hole (322) have been seted up to second mounting panel (32) both sides, second mounting panel (32) pass through screw (4) and set up on first mounting panel (31), screw (4) set up on round hole (312) and rectangular hole (322), the through-holes of the second mounting plate overlap the oval through-holes of the first mounting plate.
2. The sputtering coating device of the movable target according to claim 1, wherein the first mounting plate (31) is provided with a ring groove (313), the ring groove (313) is arranged around the outer circumference of the oval through hole (311), and a sealing ring is mounted on the ring groove (313).
3. The sputter coating apparatus of a movable target according to claim 1, characterized in that the through hole (321) of the second mounting plate (32) is a circular through hole, the target (5) is a cylindrical target, and the target (5) is fixedly mounted on the circular through hole.
4. The sputter coating apparatus of a movable target according to claim 3, characterized in that said first mounting plate (31) and said second mounting plate (32) are both metal plates, said first mounting plate (31) being welded on top of said vacuum chamber (1).
5. The sputtering coating apparatus of the movable target according to claim 1, characterized in that a motor (6) is mounted on the vacuum chamber (1), and a driving gear (61) is connected to an output shaft of the motor (6).
6. The sputtering coating device of the movable target according to claim 5, wherein the rotating frame (2) comprises a rotating frame top plate (21), a rotating frame bottom plate (22), a plurality of support rods (23) and a hanger (24), the plurality of support rods (23) are distributed circumferentially, the top end of each support rod (23) is connected with the rotating frame top plate (21), the bottom end of each support rod (23) is connected with the rotating frame bottom plate (22), the periphery of the rotating frame top plate (21) is provided with teeth, the rotating frame top plate (21) is meshed with the driving gear (61) through the teeth, the hanger (24) is fixedly connected with the rotating frame top plate (21) and the support rods (23), the hanger (24) is provided with a hanging rod (25), and the hanger (24) is arranged on the hanging rod.
7. Sputter coating device of a movable target according to claim 6, characterized in that the turret top plate (21) and the turret bottom plate (22) are connected with the vacuum chamber (1) by means of bearing wheels (7), respectively.
8. The sputter coating apparatus of a movable target according to claim 6, characterized in that two target mounting plates (3) are mounted on the top of the vacuum chamber (1) symmetrically arranged with respect to each other, each target mounting plate (3) having the target (5) mounted thereon, wherein one target (5) is located at the inner circle of the turret (2) and the other target (5) is located at the outer circle of the turret (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921478736.4U CN210529047U (en) | 2019-09-06 | 2019-09-06 | Sputtering coating device of movable target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921478736.4U CN210529047U (en) | 2019-09-06 | 2019-09-06 | Sputtering coating device of movable target |
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| Publication Number | Publication Date |
|---|---|
| CN210529047U true CN210529047U (en) | 2020-05-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921478736.4U Active CN210529047U (en) | 2019-09-06 | 2019-09-06 | Sputtering coating device of movable target |
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| CN (1) | CN210529047U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113684451A (en) * | 2021-08-16 | 2021-11-23 | 上海济物光电技术有限公司 | Additive surface shape correcting device of silicon carbide optical lens |
-
2019
- 2019-09-06 CN CN201921478736.4U patent/CN210529047U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113684451A (en) * | 2021-08-16 | 2021-11-23 | 上海济物光电技术有限公司 | Additive surface shape correcting device of silicon carbide optical lens |
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Effective date of registration: 20220725 Address after: 516000 Building 5 and office building of Fenghuang Shengshi Industrial Park, zhuguangling Road (Village), Gaotian village, Zhenlong town (sub district office), Huiyang District, Huizhou City, Guangdong Province Patentee after: Huizhou changxingrong Technology Co.,Ltd. Address before: 518117 floors 1-3 of plant, No. 53, SHANGXIA Road, Henggang street, Longgang District, Shenzhen, Guangdong Province Patentee before: CHEUNG HING METAL FINISHING CO.,LTD. |