CN110724924A - Steel ball plasma coating clamp - Google Patents
Steel ball plasma coating clamp Download PDFInfo
- Publication number
- CN110724924A CN110724924A CN201911189778.0A CN201911189778A CN110724924A CN 110724924 A CN110724924 A CN 110724924A CN 201911189778 A CN201911189778 A CN 201911189778A CN 110724924 A CN110724924 A CN 110724924A
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- China
- Prior art keywords
- shaft
- unit
- sleeve shaft
- steel ball
- sleeve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 36
- 238000000576 coating method Methods 0.000 title claims abstract description 36
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 35
- 239000010959 steel Substances 0.000 title claims abstract description 35
- 230000000712 assembly Effects 0.000 claims abstract description 16
- 238000000429 assembly Methods 0.000 claims abstract description 16
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 210000001503 joint Anatomy 0.000 claims 4
- 239000000758 substrate Substances 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- -1 argon ions Chemical class 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Coating Apparatus (AREA)
Abstract
A steel ball plasma coating clamp comprises a revolution plate unit and a plurality of clamp assemblies arranged on the revolution plate unit; a revolution shaft is arranged in the middle of the bottom of the revolution plate unit in a protruding mode; the fixture assemblies are arranged at equal intervals along the circumferential direction of the top surface of the revolution plate unit, each fixture assembly comprises a sleeve shaft unit and a fixed shaft which are vertically connected to the top surface of the revolution plate unit at intervals, a roller unit which is rotatably connected between the sleeve shaft unit and the fixed shaft, and a rotation unit which is used for driving the roller unit to rotate. Therefore, the uniform plasma coating can be carried out on the circumferential surface of the steel ball, and the coating work efficiency is high.
Description
Technical Field
The invention relates to the technical field of plasma coating, in particular to a steel ball plasma coating clamp.
Background
The sputtering method for preparing the nano material comprises the following steps: magnetron sputtering, bias sputtering, reactive sputtering, and the like. The principle of magnetron sputtering is as follows: the electrons collide with argon atoms in the process of accelerating to fly to the substrate under the action of the electric field, a large amount of argon ions and electrons are ionized, and the electrons fly to the substrate. The argon ions accelerate to bombard the target under the action of the electric field, so as to sputter a large amount of target atoms, and the neutral target atoms are deposited on the substrate to form a film. The secondary electrons are influenced by the magnetic force of the magnetic field Loran in the process of accelerating to fly to the substrate and are restrained in a plasma area close to the target surface, the plasma density in the area is high, and the secondary electrons do circular motion around the target surface under the action of the magnetic field.
The nano material prepared by magnetron sputtering can be used for coating a workpiece placed on a fixture, the fixture is arranged on a turntable, the workpiece, the fixture and the turntable are placed in a vacuum chamber together, and the turntable drives the fixture and the workpiece to slowly rotate together during coating.
However, when some steel balls are subjected to plasma coating by using the existing equipment, the steel balls are difficult to clamp because the diameter of the steel balls is smaller, generally smaller than 10mm, and even if the steel balls are clamped, a part of areas on the surfaces of the steel balls cannot be coated with films. In addition, the working efficiency of the existing coating equipment for coating the steel ball is low, and the thickness of the coating on the surface of the steel ball is easily uneven.
Disclosure of Invention
In view of the above, the present invention provides a steel ball plasma coating fixture capable of performing uniform plasma coating on the circumferential surface of a steel ball, and having high coating efficiency, so as to solve the above problems.
A steel ball plasma coating clamp comprises a revolution plate unit and a plurality of clamp assemblies arranged on the revolution plate unit; a revolution shaft is arranged in the middle of the bottom of the revolution plate unit in a protruding mode; the fixture assemblies are arranged at equal intervals along the circumferential direction of the top surface of the revolution plate unit, each fixture assembly comprises a sleeve shaft unit and a fixed shaft which are vertically connected to the top surface of the revolution plate unit at intervals, a roller unit which is rotatably connected between the sleeve shaft unit and the fixed shaft, and a rotation unit which is used for driving the roller unit to rotate.
Further, the number of the clamp assemblies is four.
Furthermore, the sleeve shaft unit comprises a first connecting piece fixedly connected with the revolution plate unit, a sleeve shaft fixedly connected with the first connecting piece, and a bearing frame connected with one end of the sleeve shaft far away from the first connecting piece; a sleeve shaft of the sleeve shaft unit is provided with a first shaft hole along the axial direction; the rotation unit comprises a rotation shaft penetrating through the first shaft hole, a driven gear connected with the bottom end of the rotation shaft, a driving gear meshed with the driven gear, a rotation driving unit used for driving the driving gear to rotate, and a driving bevel gear fixedly sleeved in the middle of the rotation shaft and protruding out of the sleeve shaft.
Furthermore, the roller unit comprises a central rotating shaft, a driven bevel gear connected with one end of the central rotating shaft, and a roller sleeved on the central rotating shaft; the driven bevel gear is meshed with the driving bevel gear; one end of the central rotating shaft, which is far away from the driven bevel gear, is rotatably connected with the fixed shaft, and one end of the central rotating shaft, which is close to the driven bevel gear, is supported by the bearing frame.
Furthermore, an opening is formed in the end of the roller, and a movable door is rotatably connected to the opening.
Furthermore, the middle part of the end face, away from the driven bevel gear, of the central rotating shaft is provided with a butting groove, the bottom of the fixed shaft is fixedly connected with the revolution plate unit through a second connecting piece, the middle part of the fixed shaft is vertically connected with at least one butting column, and the tail end of the butting column is located in the butting groove of the central rotating shaft.
Furthermore, the top end of the rotation shaft is rotatably connected with a first top connecting piece, the top end of the fixed shaft is rotatably connected with a second top connecting piece, and a connecting rod is connected between the first top connecting piece and the second top connecting piece.
Furthermore, two roller units are arranged between the sleeve shaft unit and the fixed shaft of each clamp assembly, and the two roller units are arranged at intervals up and down.
Furthermore, the sleeve shaft unit comprises a first connecting piece fixedly connected with the revolution plate unit, a first sleeve shaft fixedly connected with the first connecting piece, a first bearing frame connected with the top end of the first sleeve shaft, a second sleeve shaft connected with the top end of the first bearing frame, a second bearing frame connected with the top end of the second sleeve shaft and a third sleeve shaft connected with the top end of the first bearing frame; the first sleeve shaft, the second sleeve shaft and the third sleeve shaft are all provided with first shaft holes along the axial direction; the rotation shaft passes through the first sleeve shaft, the second sleeve shaft and the first shaft hole of the third sleeve shaft.
Furthermore, the first bearing frame and the second bearing frame are U-shaped, shaft holes are formed in the middle parts of the first bearing frame and the second bearing frame, and roller bearings are arranged in the shaft holes.
Compared with the prior art, the steel ball plasma coating clamp comprises a revolution plate unit and a plurality of clamp assemblies arranged on the revolution plate unit; a revolution shaft is arranged in the middle of the bottom of the revolution plate unit in a protruding mode; the fixture assemblies are arranged at equal intervals along the circumferential direction of the top surface of the revolution plate unit, each fixture assembly comprises a sleeve shaft unit and a fixed shaft which are vertically connected to the top surface of the revolution plate unit at intervals, a roller unit which is rotatably connected between the sleeve shaft unit and the fixed shaft, and a rotation unit which is used for driving the roller unit to rotate. Therefore, the uniform plasma coating can be carried out on the circumferential surface of the steel ball, and the coating work efficiency is high.
Drawings
Embodiments of the invention are described below with reference to the accompanying drawings, in which:
FIG. 1 is a partial schematic view of a steel ball plasma coating fixture provided by the invention.
Fig. 2 is a schematic view of the sleeve shaft unit and the rotation unit in fig. 1.
Fig. 3 is a schematic view of the drum unit of fig. 1.
FIG. 4 is a schematic top view of the steel ball plasma coating fixture provided by the present invention.
Detailed Description
Specific embodiments of the present invention will be described in further detail below based on the drawings. It should be understood that the description herein of embodiments of the invention is not intended to limit the scope of the invention.
Referring to fig. 1 and 4, the steel ball plasma coating fixture provided by the present invention includes a revolution plate unit 10 and a plurality of fixture assemblies disposed on the revolution plate unit 10.
The revolution axis 11 is protruded from the middle of the bottom of the revolution disc unit 10, and the revolution axis 11 is connected with a revolution driving unit.
A plurality of jig assemblies are arranged at equal intervals in the circumferential direction of the top surface of the revolution plate unit 10.
Each of the jig assemblies includes a sleeve shaft unit 20 and a fixed shaft 40 vertically coupled to the top surface of the revolution plate unit 10 at intervals, a drum unit 50 rotatably coupled between the sleeve shaft unit 20 and the fixed shaft 40, and a rotation unit 30 for driving the drum unit 50 to rotate.
In the present embodiment, the number of the jig assemblies is four.
Referring to fig. 2, in the present embodiment, the sleeve shaft unit 20 includes a first connecting member 21 fixedly connected to the male turning plate unit 10, a sleeve shaft fixedly connected to the first connecting member 21, and a bearing bracket connected to an end of the sleeve shaft away from the first connecting member 21.
The sleeve shaft of the sleeve shaft unit 20 is axially provided with a first shaft hole.
The rotation unit 30 includes a rotation shaft 31 passing through the first shaft hole, a driven gear 32 connected to a bottom end of the rotation shaft 31, a driving gear 33 engaged with the driven gear 32, a rotation driving unit for driving the driving gear 33 to rotate, and a driving bevel gear fixedly sleeved on a middle portion of the rotation shaft 31 and protruding out of the sleeve shaft.
Referring to fig. 3, the roller unit 50 includes a central rotating shaft 51, a driven bevel gear 52 connected to one end of the central rotating shaft 51, and a roller 53 sleeved on the central rotating shaft 51, wherein a circumferential sidewall of the roller 53 is a mesh enclosure, and a plurality of through holes are formed in the mesh enclosure. An opening is formed in the end of the roller 53, a movable door is rotatably connected to the opening, and the movable door can movably open or close the opening. A locking structure is provided between the shutter and the drum 53 for maintaining the shutter in a state of closing the opening. The driven bevel gear 52 meshes with the driving bevel gear. A plurality of steel balls 100 are placed in the drum 53. An end of the central rotating shaft 51 remote from the driven bevel gear 52 is rotatably connected to the fixed shaft 40, and an end of the central rotating shaft 51 near the driven bevel gear 52 is supported by a bearing bracket.
The central part of the end surface of the central rotating shaft 51 far away from the driven bevel gear 52 is provided with a butting groove 511, and the bottom of the fixed shaft 40 is fixedly connected with the revolution plate unit 10 through a second connecting piece. At least one abutment post 42 is vertically connected to the middle of the fixed shaft 40, and the end of the abutment post 42 is located in the abutment groove 511 of the central rotating shaft 51. The bearing bracket and the abutment post 42 thus rotatably support the central rotating shaft 51 from both sides, respectively.
The top end of the rotation shaft 31 is rotatably connected to a first top connection member 36, the top end of the fixed shaft 40 is rotatably connected to a second top connection member 44, and a connection rod 60 is connected between the first top connection member 36 and the second top connection member 44.
In the present embodiment, two roller units 50 are disposed between the sleeve shaft unit 20 and the fixed shaft 40 of each clamp assembly, and the two roller units 50 are spaced up and down. Referring to fig. 2 again, the sleeve shaft unit 20 includes a first connecting member 21 fixedly connected to the revolution plate unit 10, a first sleeve shaft 22 fixedly connected to the first connecting member 21, a first bearing frame 23 connected to an end (i.e., a top end) of the first sleeve shaft 22 far from the first connecting member 21, a second sleeve shaft 24 connected to a top end of the first bearing frame 23, a second bearing frame 25 connected to a top end of the second sleeve shaft 24, and a third sleeve shaft 26 connected to a top end of the first bearing frame 23.
The first sleeve shaft 22, the second sleeve shaft 24 and the third sleeve shaft 26 are all provided with a first shaft hole along the axial direction.
The rotation shaft 31 passes through the first shaft holes of the first sleeve shaft 22, the second sleeve shaft 24 and the third sleeve shaft 26.
The first and second bearing frames 23 and 25 are U-shaped, and the first and second bearing frames 23 and 25 have shaft holes in the middle thereof, and roller bearings 231 are disposed in the shaft holes.
Referring to fig. 4, the revolution plate unit 10 drives the fixture assembly to revolve, the rotation unit 30 drives the roller unit 50 to rotate, the plasma emitted from the plasma emission source 200 enters the roller 53, and the roller 53 drives the steel ball 100 to continuously change the angle, so as to coat the surface of the steel ball 100 on the roller 53.
Compared with the prior art, the steel ball plasma coating clamp comprises a revolution plate unit 10 and a plurality of clamp assemblies arranged on the revolution plate unit 10; a revolution shaft 11 is arranged in the middle of the bottom of the revolution plate unit 10 in a protruding mode; a plurality of jig assemblies are arranged at equal intervals in a circumferential direction of the top surface of the revolution plate unit 10, each of the jig assemblies including a sleeve shaft unit 20 and a fixed shaft 40 vertically connected to the top surface of the revolution plate unit 10 at intervals, a drum unit 50 rotatably connected between the sleeve shaft unit 20 and the fixed shaft 40, and a rotation unit 30 for driving the drum unit 50 to rotate. Therefore, the uniform plasma coating can be carried out on the circumferential surface of the steel ball, and the coating work efficiency is high.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, and any modifications, equivalents or improvements that are within the spirit of the present invention are intended to be covered by the following claims.
Claims (10)
1. The utility model provides a steel ball plasma coating anchor clamps which characterized in that: the fixture comprises a revolution plate unit and a plurality of fixture components arranged on the revolution plate unit; a revolution shaft is arranged in the middle of the bottom of the revolution plate unit in a protruding mode; the fixture assemblies are arranged at equal intervals along the circumferential direction of the top surface of the revolution plate unit, each fixture assembly comprises a sleeve shaft unit and a fixed shaft which are vertically connected to the top surface of the revolution plate unit at intervals, a roller unit which is rotatably connected between the sleeve shaft unit and the fixed shaft, and a rotation unit which is used for driving the roller unit to rotate.
2. The steel ball plasma coating clamp of claim 1, wherein: the number of the clamp assemblies is four.
3. The steel ball plasma coating clamp of claim 1, wherein: the sleeve shaft unit comprises a first connecting piece fixedly connected with the revolution plate unit, a sleeve shaft fixedly connected with the first connecting piece, and a bearing frame connected with one end of the sleeve shaft far away from the first connecting piece; a sleeve shaft of the sleeve shaft unit is provided with a first shaft hole along the axial direction; the rotation unit comprises a rotation shaft penetrating through the first shaft hole, a driven gear connected with the bottom end of the rotation shaft, a driving gear meshed with the driven gear, a rotation driving unit used for driving the driving gear to rotate, and a driving bevel gear fixedly sleeved in the middle of the rotation shaft and protruding out of the sleeve shaft.
4. The steel ball plasma coating clamp of claim 3, wherein: the roller unit comprises a central rotating shaft, a driven bevel gear connected with one end of the central rotating shaft and a roller sleeved on the central rotating shaft; the driven bevel gear is meshed with the driving bevel gear; one end of the central rotating shaft, which is far away from the driven bevel gear, is rotatably connected with the fixed shaft, and one end of the central rotating shaft, which is close to the driven bevel gear, is supported by the bearing frame.
5. The steel ball plasma coating clamp of claim 4, wherein: the end of the roller is provided with an opening, and the opening is rotatably connected with a movable door.
6. The steel ball plasma coating clamp of claim 4, wherein: the middle part of the end face, far away from the driven bevel gear, of the central rotating shaft is provided with a butt joint groove, the bottom of the fixed shaft is fixedly connected with the revolution plate unit through a second connecting piece, the middle part of the fixed shaft is vertically connected with at least one butt joint column, and the tail end of the butt joint column is located in the butt joint groove of the central rotating shaft.
7. The steel ball plasma coating clamp of claim 3, wherein: the top end of the rotation shaft is rotatably connected with a first top connecting piece, the top end of the fixed shaft is rotatably connected with a second top connecting piece, and a connecting rod is connected between the first top connecting piece and the second top connecting piece.
8. The steel ball plasma coating clamp of claim 3, wherein: two roller units are arranged between the sleeve shaft unit and the fixed shaft of each clamp assembly, and the two roller units are arranged at intervals up and down.
9. The steel ball plasma coating fixture of claim 8, wherein: the sleeve shaft unit comprises a first connecting piece fixedly connected with the revolution plate unit, a first sleeve shaft fixedly connected with the first connecting piece, a first bearing frame connected with the top end of the first sleeve shaft, a second sleeve shaft connected with the top end of the first bearing frame, a second bearing frame connected with the top end of the second sleeve shaft and a third sleeve shaft connected with the top end of the first bearing frame; the first sleeve shaft, the second sleeve shaft and the third sleeve shaft are all provided with first shaft holes along the axial direction; the rotation shaft passes through the first sleeve shaft, the second sleeve shaft and the first shaft hole of the third sleeve shaft.
10. The steel ball plasma coating fixture of claim 9, wherein: the first bearing frame and the second bearing frame are U-shaped, shaft holes are formed in the middle of the first bearing frame and the middle of the second bearing frame, and roller bearings are arranged in the shaft holes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201911189778.0A CN110724924A (en) | 2019-11-28 | 2019-11-28 | Steel ball plasma coating clamp |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201911189778.0A CN110724924A (en) | 2019-11-28 | 2019-11-28 | Steel ball plasma coating clamp |
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CN110724924A true CN110724924A (en) | 2020-01-24 |
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CN201911189778.0A Pending CN110724924A (en) | 2019-11-28 | 2019-11-28 | Steel ball plasma coating clamp |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111850502A (en) * | 2020-07-22 | 2020-10-30 | 昆山欧思克精密工具有限公司 | A spheroid part coating film anchor clamps for physical vapor deposition |
CN116791036A (en) * | 2023-07-07 | 2023-09-22 | 河北中泊防爆工具集团股份有限公司 | PVD coating equipment and method with floating coating collecting function |
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2019
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CN111850502A (en) * | 2020-07-22 | 2020-10-30 | 昆山欧思克精密工具有限公司 | A spheroid part coating film anchor clamps for physical vapor deposition |
CN116791036A (en) * | 2023-07-07 | 2023-09-22 | 河北中泊防爆工具集团股份有限公司 | PVD coating equipment and method with floating coating collecting function |
CN116791036B (en) * | 2023-07-07 | 2024-04-12 | 河北中泊防爆工具集团股份有限公司 | PVD coating equipment and method with floating coating collecting function |
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