CN220812606U - Turnover mechanism of vacuum coating machine - Google Patents
Turnover mechanism of vacuum coating machine Download PDFInfo
- Publication number
- CN220812606U CN220812606U CN202322690259.0U CN202322690259U CN220812606U CN 220812606 U CN220812606 U CN 220812606U CN 202322690259 U CN202322690259 U CN 202322690259U CN 220812606 U CN220812606 U CN 220812606U
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- fixedly connected
- vacuum coating
- bottom plate
- coating machine
- turnover mechanism
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- 230000007306 turnover Effects 0.000 title claims abstract description 27
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 26
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009504 vacuum film coating Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to the technical field of vacuum coating machines, in particular to a turnover mechanism of a vacuum coating machine, which comprises a machine body, a bottom plate and a turnover device, wherein the machine body comprises a machine case, one side of the machine case is fixedly connected with a box door through a hinge, the bottom of an inner cavity of the machine case is fixedly connected with a connecting plate, the top of the connecting plate is provided with an annular storage limit groove, the bottom plate is positioned at the top of the connecting plate, the top of the bottom plate is fixedly connected with a vertical rod in the middle, the turnover device comprises a rotating rod, the rotating rod is positioned at one side of the vertical rod, and a bracket is fixedly connected on the rotating rod; the turnover device is convenient for driving the object on the support to rotate, so that the object can be turned in the case, and the machine body can uniformly coat the object.
Description
Technical Field
The utility model relates to the technical field of vacuum coating machines, in particular to a turnover mechanism of a vacuum coating machine.
Background
The vacuum coating machine mainly refers to a type of coating film which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like. The main idea is to divide into two types, evaporation and sputtering. The material to be coated is called a target. The substrate and the target are in the vacuum cavity. The evaporation coating is generally performed by heating the target material to evaporate the surface components in the form of radicals or ions. And is settled on the surface of the substrate, and a film is formed through a film forming process. For sputtering type coating films, the method can be simply understood as that electrons or high-energy laser are used for bombarding a target material, surface components are sputtered in an atomic group or ion form and finally deposited on the surface of a substrate, and the film is finally formed through a film forming process.
In the working cavity of the existing vacuum coating machine, a rotating mechanism for an object to be coated is arranged, and only the object can be driven to transversely rotate in the working cavity of the vacuum coating machine, so that the object is not convenient to uniformly coat by the vacuum coating machine, and the working quality of the vacuum coating machine is reduced.
Disclosure of utility model
Aiming at the problems in the prior art, a turnover mechanism of a vacuum coating machine is provided.
The specific technical scheme is as follows:
The utility model provides a tilting mechanism of vacuum coating machine, includes organism, bottom plate and turning device, the organism includes the organic case, hinge fixedly connected with chamber door is passed through to one side of machine case, the inner chamber bottom fixedly connected with link plate of machine case, annular storage spacing groove has been seted up at the top of link plate, the bottom plate is located the top of link plate, fixedly connected with pole setting placed in the middle of the top of bottom plate, turning device is including the dwang, the dwang is located one side of pole setting, fixedly connected with support on the dwang.
Preferably, the bottom of the chassis is fixedly connected with a first motor, and the output end of the first motor is fixedly connected to the bottom of the bottom plate through a rotating shaft.
Preferably, the bottom of bottom plate fixedly connected with stopper, stopper evenly distributed is in the bottom of bottom plate, the stopper is in the spacing groove is last to be moved.
Preferably, a positioning block is fixedly connected to one side of the vertical rod, the positioning blocks are uniformly distributed on the outer side of the vertical rod, and one end, away from the vertical rod, of the positioning block is provided with the rotating rod.
Preferably, a second motor is arranged at one end of the positioning block, which is far away from the rotating rod, and the second motor is fixedly connected in the inner cavity of the vertical rod.
Preferably, the output end of the second motor is fixedly connected to the output end of the rotating rod through a rotating shaft.
Preferably, the brackets are uniformly distributed on the outer side of the rotating rod.
The technical scheme has the following advantages or beneficial effects:
1. The device is connected with a power supply, an object to be coated is limited on the bracket through a fastener, a door of the case is closed immediately, and the machine body operates to coat the object in the case; the turnover device drives the object to turn over in the chassis, the first motor drives the bottom plate to rotate on the connecting plate through the rotating shaft, and the vertical rod rotates along with the bottom plate, so that the vertical rod drives the rotating rod to rotate, the limiting block at the bottom of the bottom plate rotates on the limiting groove at the top of the connecting plate, the second motor drives the rotating rod to rotate through the rotating shaft, the rotating rod drives the support to rotate, and then the object on the support is driven to rotate, so that the object turns over in the chassis, uniform film coating of the object by the machine body is facilitated, and the working quality of the vacuum film coating machine is improved.
2. The bottom of the bottom plate is fixedly connected with limiting blocks, the limiting blocks are uniformly distributed at the bottom of the bottom plate, and the limiting blocks move on the limiting grooves; the limiting block rotates on the limiting plate along with the bottom plate, so that the limiting block rotates in the limiting groove, and the limiting block and the limiting groove are arranged to facilitate limiting of the operation of the bottom plate.
Drawings
Embodiments of the present utility model will now be described more fully with reference to the accompanying drawings. The drawings, however, are for illustration and description only and are not intended as a definition of the limits of the utility model.
FIG. 1 is a schematic diagram of a turnover mechanism of a vacuum coating machine according to the present utility model;
FIG. 2 is a cross-sectional view of a turnover mechanism of a vacuum coating machine according to the present utility model;
FIG. 3 is a schematic diagram of a turnover mechanism of a vacuum coating machine according to the present utility model, wherein the turnover mechanism includes a limiting groove;
Fig. 4 is a schematic structural view of a positioning block in a turnover mechanism of a vacuum coating machine according to the present utility model.
The above reference numerals denote: 1. a body; 11. a chassis; 12. a door; 13. a turnover device; 2. a bottom plate; 21. a first motor; 22. a vertical rod; 23. a splice plate; 24. a limiting block; 25. a limit groove; 3. a rotating lever; 31. a bracket; 32. a second motor; 33. and (5) positioning blocks.
Description of the embodiments
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.
The utility model is further described below with reference to the drawings and specific examples, which are not intended to be limiting.
Referring to fig. 1-4, a turnover mechanism of a vacuum coating machine comprises a machine body 1, a bottom plate 2 and a turnover device 13, wherein the machine body 1 comprises a machine case 11, one side of the machine case 11 is fixedly connected with a box door 12 through a hinge, the bottom of an inner cavity of the machine case 11 is fixedly connected with a connecting plate 23, the top of the connecting plate 23 is provided with an annular storage limit groove 25, the bottom plate 2 is positioned at the top of the connecting plate 23, the top of the bottom plate 2 is fixedly connected with a vertical rod 22 in the middle, the turnover device 13 comprises a rotating rod 3, the rotating rod 3 is positioned at one side of the vertical rod 22, and a bracket 31 is fixedly connected on the rotating rod 3; the machine body 1 is a vacuum coating machine device.
Further, the bottom of the case 11 is fixedly connected with a first motor 21, and the output end of the first motor 21 is fixedly connected to the bottom of the bottom plate 2 through a rotating shaft; the first motor 21 drives the bottom plate 2 to rotate on the connecting plate 23 through the rotating shaft, and the upright 22 rotates along with the bottom plate 2, so that the upright 22 drives the rotating rod 3 to rotate, and the limiting block 24 at the bottom of the bottom plate 2 rotates on the limiting groove 25 at the top of the connecting plate 23; the upright 22 is provided to facilitate the rotation of the rotating rod 3.
Further, the bottom of the bottom plate 2 is fixedly connected with a limiting block 24, the limiting block 24 is uniformly distributed at the bottom of the bottom plate 2, and the limiting block 24 moves on a limiting groove 25; the limiting block 24 rotates on the limiting plate 223 along with the bottom plate 2, so that the limiting block rotates in the limiting groove 25, and the limiting block 24 and the limiting groove 25 are arranged to limit the operation of the bottom plate 2 conveniently.
Further, a positioning block 33 is fixedly connected to one side of the upright 22, the positioning block 33 is uniformly distributed on the outer side of the upright 22, and a rotating rod 3 is arranged at one end, far away from the upright 22, of the positioning block 33; a rotating rod 3 is provided to facilitate the rotation of the support 31.
Further, a second motor 32 is arranged at one end of the positioning block 33, which is far away from the rotating rod 3, and the second motor 32 is fixedly connected in the inner cavity of the upright rod 22.
Further, the output end of the second motor 32 is fixedly connected to the output end of the rotating rod 3 through a rotating shaft; the second motor 32 drives the rotating rod 3 to rotate through the rotating shaft, and the rotating rod 3 drives the bracket 31 to rotate, so that the object on the bracket 31 is driven to rotate.
Further, the brackets 31 are uniformly distributed on the outer side of the rotating rod 3; the provision of the bracket 31 facilitates the positioning of the object to be coated in the bracket 31 and thus in the cabinet 11 by means of fasteners.
Working principle: when the device is used, the device is connected with a power supply, an object to be coated is limited on the bracket 31 through a fastener, the box door 12 of the machine box 11 is closed immediately, and the machine body 1 operates to coat the object in the machine box 11; the turnover device 13 immediately drives the object to turn over in the case 11, the first motor 21 drives the bottom plate 2 to rotate on the connecting plate 23 through the rotating shaft, meanwhile, the upright 22 rotates along with the bottom plate 2, so that the upright 22 drives the rotating rod 3 to rotate, the limiting block 24 at the bottom of the bottom plate 2 rotates on the limiting groove 25 at the top of the connecting plate 23, the second motor 32 immediately drives the rotating rod 3 to rotate through the rotating shaft, the rotating rod 3 drives the bracket 31 to rotate, and then the object on the bracket 31 is driven to rotate, and accordingly the object turns over in the case 11, and uniform coating of the object by the machine body 1 is facilitated.
The foregoing is merely illustrative of the preferred embodiments of the present utility model and is not intended to limit the embodiments and scope of the present utility model, and it should be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included in the scope of the present utility model.
Claims (7)
1. A tilting mechanism of vacuum coating machine, its characterized in that: including organism (1), bottom plate (2) and turning device (13), organism (1) is including organic case (11), hinge fixedly connected with chamber door (12) are passed through to one side of case (11), inner chamber bottom fixedly connected with linking plate (23) of case (11), annular storage limit groove (25) have been seted up at the top of linking plate (23), bottom plate (2) are located the top of linking plate (23), fixedly connected with pole setting (22) placed in the middle of the top of bottom plate (2), turning device (13) are including dwang (3), dwang (3) are located one side of pole setting (22), fixedly connected with support (31) on dwang (3).
2. The turnover mechanism of a vacuum coating machine according to claim 1, wherein: the bottom of the case (11) is fixedly connected with a first motor (21), and the output end of the first motor (21) is fixedly connected to the bottom of the bottom plate (2) through a rotating shaft.
3. The turnover mechanism of a vacuum coating machine according to claim 1, wherein: the bottom of the bottom plate (2) is fixedly connected with a limiting block (24), the limiting blocks (24) are uniformly distributed at the bottom of the bottom plate (2), and the limiting blocks (24) move on the limiting grooves (25).
4. The turnover mechanism of a vacuum coating machine according to claim 1, wherein: one side of pole setting (22) fixedly connected with locating piece (33), locating piece (33) evenly distributed is in the outside of pole setting (22), locating piece (33) are kept away from the one end of pole setting (22) is equipped with dwang (3).
5. The turnover mechanism of vacuum coating machine of claim 4, wherein: one end of the positioning block (33) far away from the rotating rod (3) is provided with a second motor (32), and the second motor (32) is fixedly connected in the inner cavity of the vertical rod (22).
6. The turnover mechanism of a vacuum coating machine according to claim 5, wherein: the output end of the second motor (32) is fixedly connected to the output end of the rotating rod (3) through a rotating shaft.
7. The turnover mechanism of a vacuum coating machine according to claim 1, wherein: the brackets (31) are uniformly distributed on the outer side of the rotating rod (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322690259.0U CN220812606U (en) | 2023-10-08 | 2023-10-08 | Turnover mechanism of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322690259.0U CN220812606U (en) | 2023-10-08 | 2023-10-08 | Turnover mechanism of vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220812606U true CN220812606U (en) | 2024-04-19 |
Family
ID=90676401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322690259.0U Active CN220812606U (en) | 2023-10-08 | 2023-10-08 | Turnover mechanism of vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220812606U (en) |
-
2023
- 2023-10-08 CN CN202322690259.0U patent/CN220812606U/en active Active
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